Sample study by 3D optical profiler Contour Elite K for KTH university.

Transcription

1 Sample study by 3D optical profiler Contour Elite K for KTH university Samuel.lesko@bruker.com

2 Objectives

3 Objectives Main goals for the visit consist of evaluating 3D optical profiler: Confirm capability of measurement over large range of samples Paint coatings Teeth Protein film Polymer Semi conductor materials Confirm suitability of operation in multi-user environment 3

4 Experimental conditions

5 Experimental setup Motorized Contour Elite K has been shown : Color high resolution CCD 0.55x zoom lens 5x, 20x and 50x objectives Single VSI/VXI mode was able to measure all samples and to allow sub-nm vertical resolution irrespectively from selected objective Multiple samples were measured in afternoon Paint coatings Teeth Protein film Polymer Semi conductor materials 5

6 3D Optical Profiler Introduction

7 Contour K 3D optical profiler Efficient & Easy Seamless & easy to use: same as Focusing an optical microscope Fast measurement: 10 s to 1 minute per image including analysis Ability to measure nanometer roughness (Ra~1 nm) on large mm² area Wide range of samples from 0.05% till 100% reflectivity, flat to rough and slopped Free & complete analysis package 7

8 Contour K profilomètre 3D optique Principle Scan over 10µm step Interference Moiré Vertical motorized scan 3D result display Bruker uses interferences from white light to accurately locate focus plan while vertical scan in order to re-build Z stack into 3D topography. 8

9 Contour K 3D optical profiler Vertical resolution independent from objective Bruker technology has sub-nano scale for all Magnifications 9

10 Contour K 3D optical profiler Best repeatability We can measure accurately in both high magnification and low magnification with High Performance in Repeatability 5X Mag Std Dev = 0.003um 50X Mag Std Dev = 0.002um 10

11 Contour K 3D optical profiler Advanced processing - Included Vision64 software has many advanced features. Here, automatic shape recognition is illustrated: pin before/after wear test is automatically translated/rotated in order to work out volume of wear. Pin before test Pin after test, not yet aligned Pin after test, compensated in translation & rotation Result after subtraction

12 Contour K 3D optical profiler Quick Measurement Wizard Ease of Use Wizard Step 1: Set Top User can visualize sample and move focus point to top of sample User then clicks on Set-Top button Once clicked the Set top changes to Set bottom and Top position is populated Step 2: Set Bottom User can visualize sample and move Z focus point to bottom of sample User then presses Set Bottom button Button now changes to Measure button and bottom position location is also populated and the scan length is automatically calculated and populated Step 3: Measure The software automatically adds some backscan length It also automatically adds some extra length on the bottom position of the scan to ensure a good scan User clicks the Measure button 12

13 Specificity from Contour Elite Twice more information Topography Side way illumination with LEds Side illumination combined with dedicated algorithms allow simultaneous recording of 3D topography information together with all way focused intensity/color image. Greater information on reflectivity and color from surface via side illumination. Correlation 13

14 Contour K 3D optical profiler Sum up 3D optical profiler Contour K is suitable for wide range of sample On a multi-user environment, Contour K provides: Ease of use: single algorithm selection of scan length by focusing Easy focusing via side LED illumination Metrology data High vertical resolution independent from objective selection Efficiency with short time to result: powerful on-fly analysis 14

15 Results on KTH samples

16 Paint coatings

17 Standard coating Single image with 5x objective Top view topography New roughness parameters S 17

18 Clean coating Single image with 5x objective Top view topography New roughness parameters S

19 Clean coating Peak detection Vision64, Bruker proprietary software and license free, enables advance calculation such as peak counts. Each peak is detected by threshold then system automatically works out mean diameter (A Diam.) as well as height (Rp%). Tab can be exported in CSV format to create distribution hitogram through Excel for instance (see next slide). On average Diameter (23±14)µm Heigth (5±3) µm

20 Clean coating Distribution plot from Excel Mean Diameter Previous tab is exported in CSV file and directly read via Excel. Standard Excel functions allow then plot of those histograms More 90 Height of peaks More 20

21 Clean coating Stitch of 4 images Top view topography New roughness parameters S section User defines width and height of area then software automatically records single images then stitches them into single image

22 Coating comparison Clean coating Sa (µm) Sdq ( ) # peaks standard clean variation 300% 142% NA * # peaks > 7µm Standard Same area & scale 22

23 Paint coating Conclusion Contour system easily measures and discriminates coatings Clean coating has higher density of peaks Clean coating is rougher Side illumination was instrumental to: Easily focus on surface Visualize surface Latest generation Contour dramatically improves usability over this sample 23

24 Grating

25 6µm grating 20x objective Top view image Histogram of height Section Mean Depth: 1.065µm

26 6µm grating 20x objective Auto-covariance image. It states the direction, mean periodicity and regularity of grating Loss of regularity Average periodicity Mean periodicity: 5.96 µm 26

27 2µm grating 20x objective Digital zoom over the grating of interest Periodicity: 1890nm Depth: 667 nm Results are in agreement with expected values

28 1µm grating Acuity algorithm Top view of topography with digital zoom over are of interest Acuity algorithm calculates correlation from 10 images in order to define center position of each individual pixel. It leads to twice more pixels together with twice higher lateral resolution Mean periodicity: 778 nm Depth: 119nm 115x objective is required to cover this application 28

29 Grating Conclusion Contour system easily located the area of interest Low magnification with optical view emphasized the location Motorized turret ensured to find same location while switching to higher magnifications (20x & 50x objectives) Contour uniquely reaches adequate lateral resolution Acuity algorithm breaks optical diffraction limit 115x objective resolves 150nm spaced lines Contour provides all the necessary analysis to extract final results: Histogram, auto-covariance, cross-hatch Vision64 is site license free so can be distributed to collaborators 29

30 LiNBO film

31 LiNBO film Roughness with 5x objective Contour is ideal technic here as user can observe large area without compromise on vertical resolution and capable to reach nanometer Mean roughness Sa: 3.4 nm Over 2.2mm² New roughness parameters S <7nm peak detected 31

32 LiNBO film Step with 5x objective film substrate Automatic step analysis Partial delamination Mean depth: (1.2±0.2) µm 1. Average: mean height deduced from histogram 2. Maximum: height of the delaminated film edge 3. Rms: fluctuation of step height around mean, equivalent of 1 sigma dispersion

33 LiNBO film Roughness with 50x objective Topography was obtained by simply switching to VXI mode and clicking measure. Vertical scan is performed along 20µm as usual however vertical resolution reaches sub-nm. This is unique capability also applies on all other magnifications. New roughness parameters S Mean roughness Sa: 1.0 nm 0.1nm bump 33

34 NbN film Roughness with 50x objective Top view topography Mean roughness Sa: 0.7 nm New roughness parameters S In single scan, VXI mode combines ease of use together with ultimate sub-nm vertical resolution.

35 Films Conclusion Contour system uniquely addresses film application Sub-Nanometer vertical resolution on mm² for best capture of roughness Same sub-nm vertical resolution across all objectives Ease of use with simple scan in VXI mode Contour can further expand with thin film algorithm: measure thickness homogeneity 35

36 Protein film

37 Protein film reference Step with 5x objective Top view topography Thickness of deposited film: 13 nm New roughness parameters S 37

38 Protein film SC9 Step with 5x objective Thickness of deposited film: 23nm 38

39 Protein film DW2 Step with 5x objective Top view topography Thickness of deposited film: 386 nm (from histogram) New roughness parameters S 39

40 Protein film DW5 Step with 5x objective Histogram of height Top view topography Thickness of deposited film: 916nm 40

41 Protein film Conclusion Contour system easily measured this sample Large area with nm resolution to encompass the full step Full analysis suite to determine mean thickness 41

42 Teeth & teeth brush wear

43 Teeth Single image with 5x objective Waviness top view (topography filtered with Gaussian low-pass and cut-off at 25µm) Note: challenging sample combining low reflectivity and steady slope studied with low magnification Contour system allows measurement on rough steady slope with single vertical scan (up to 10mm) 2mm curvature

44 Wear scratches by Teeth brush Scratch characterization by 5x objective Contour automatically detects and measures key parameters from each scratch: 1. Deepest point (Rv%) 2. Volume of wear Length & width can be also added. All tab can be exported in Excel CSV files for further plot/processing. 44

45 Wear scratches by Teeth brush Scratch details with 50x objective Automatic analysis Top view of topography 170x130 µm², 5µm vertical scale Further details can be observed inside the scratch by mean of higher magnification. 45

46 Teeth & Teeth brush wear Conclusion Contour system showed Capability to measure rough & low reflective surface with low magnification Ability to extract direct information for scratches 46

47 PDMS

48 PDMS surface Stitching of 16 images with 50x objective Contour system ensures: 1. Easy focus with Elite option 2. Operation on rough & low reflective surface 3. Quick & fine alignment of images to map larger regions 48

49 Conclusion

50 Conclusion 3D optical profiler Contour Elite K has demonstrated: Fast & accurate roughness measurement on mm² area Operation on wide range of samples Paint coatings Teeth Protein film Polymer Semi conductor materials Productivity/Short Time to Result: all samples were measured in 3 hours including explanation Ease of use: straight forward focusing & navigation on sample 3D optical profiler Contour K is the perfect characterization technique to support KTH on their research projects 50

51 Questions? Copyright Bruker Corporation. All rights reserved.