CCD Line Scanner 3D WL Interferometer. Made in Germany

Transcription

1 of CCD Line Scanner 3D WL Interferometer

2 Optical Measuring Machine smartprofiler K700

3 Desktop Optical Quick Inspection Qscan50 0 Line scanner AOI Qcheck5 0 CCD Inspector Table size: subject to be finalized Accuracy : +/- 10 um Table size: subject to be finalized Accuracy : +/- 3.5 um

4 V900 Auto-zoom Color CCD Optical System S900 Line Scan Camera for fast scanning application VS900 CCD Optical System + Line Scanning application VS900L Custom made model for large dimension of PCB, eg:50 x 32 inches panel size An unique & innovative design thanks for German advance technologies for high performance in speed and accuracy. A robust mechanic based on a special selected bridge type granite base in constructed with precise and powerful AC servo motor driven linear guide-way in X,Y&Z axes. It gives the guaranty to stability and precision of measurement.

5 Pneumatic Top Glass User friendly design & easy placing of workpieces Remote Joystick Allow to work closer to the object

6 Vacuum Table No drilled air-holes Porosity metal surface with countless micro air-holes Multi-vacuum chambers design No distortion due to sucking action on thin laminated panel measure the true form of the objects

7 CAD in DXF format Excellon (Dill file) format Film File in Gerber, ODB++, OPFX format by 2012 Automatic Program creation smartcam Define Coordinate Tolerance setting Further program editing

8 Top/Under Light Measurement Hole diameter & position Length & width of Slot hole Slot hole center Slot hole center to edge distance Slot hole center to hole center distance Slot hole center to PAD distance... and etc.

9 PCB Outline Contour Hole diameter & position Line space/width Edge to edge distance Hole to edge distance Hole to hole distance Pad to hole distance Pad to edge distance Arc center to edge distance Arc center to hole distance Arc center to slot center dis. Gold finger width & space Gold finger to edge distance and etc.

10 V-Cut scoring V-Cut depth V-Cut center line to edge distance V-Cut center line to hole distance V-Cut center line to Pad distance V-Cut center line to slot hole center distance V-Cut center line to arc center distance V-Cut center line to arc high point distance and etc.

11 Ultra zoom Optical System Magnification range : 80x 650x Resolution : x - 650x Accuracy within F.O.V.(X/Y) : +/ x Measurable smallest diameter: Ø 20 um Application: Fine measurement : fine holes fine trace (Top/bottom width, height and etc)

12 smartvision V900 High resolution Optical system Technical Data High resolution auto-zoom Matrix Color CCD Powerful auto zoom 20x - 190x Measuring range : (optional size possible) X mm (36.5 ) Y mm (32.6 ) Z - 80 mm ( 3 ) Z - 15 mm (0.6") (space under glass lid) Position accuracy : +/- 2.5 um (0.098mil) E1=+/- (2.5+L/500) um, L=length in mm Resolution : um Smallest Possible hole size Ø40um (1.6 mil )

13 smartvision S900 Muti-scan system Top-light multi-scan 3 threshold setting for contour measurement Top-lighting Under Lighting Through holes, slot holes,outline measurement Under-lighting

14 Unique Benefits The only way for 100% geometry and dimensional inspection within a minute via dual scanning Quad-scan is possible in 3 times top-scanning plus one time bottom scanning for panels with vary material reflection. Possible to measure approx panels (26 x25 ) in 1 hour Automatic measuring program creation and no complicated preparation work time cost is saved Combined top/bottom scanning result. All data evaluation are traceable in one single report Abundant of measuring elements can be easily evaluated by scanning Free placing of same type multi-pieces are possible without home positioning or fixture alignment for each piece Default alert setting is possible for clogged drill hole inspection in percentage % of through and clogged ratio

15 Holes & Slot holes Features Quick & Easy scanning inspection to a drilled panel with thousands of drill & slot holes, eg. diameter, position, hole counting, missing & clogged,slot hole length/width, slot center line..and etc.

16 Contour & Outline Measurement Quick & Easy scanning inspection to outline contour. eg. Line space / width, Pad, arc, center line position of golden finger. and etc. Dual scanning images are combined in one result.

17 Multi-pieces Free placing measurement Quick & easy set up for same type multi-panel scanning. No fixture and sub-coordinate measuring programs are required before measurement.

18 Technical Data smartvision S900 High speed line scan system ~ 1 min s job Sensor : High speed line scan camera Meausring range: X mm (36.5") Y mm (28") Z - 15 mm (0.6") (panel thickness) Pos. Accuracy: +/- 5 um ( mil) Smallest possible hole : Ø 80 um(ø 3.15 mil) Scan speed: 180 mm/s (7.09"/sec) Scan time: approx. 60 sec /panel/ panel size(660x635 mm or 26 x25 )

19 3D Topography Automatic Measuring Machine smartprofiler K700 3D WL Interferometer + CNC programmable automatic measurement

20 High Speed 3D Topography Measurement Auto Blind Vias measurement at 28 positions take approx.1min 40 sec Applications : Blind Laser vias Dimples Solder mask /Bumps/ pillars Fine trace width/height Gold finger / Cu-plated surface roughness BGA matrix

21 Technical Data CNC control and programmable measurement Measuring range : X -770 mm (30 ) Y mm (25 ) Traveling speed : 500mm/s 3D WL sensor: F.O.V.: 2.9x2.8 mm (exchangeable with optional lens) Z-axis : 40mm ( 80mm optional) Longitudinal accuracy : +/- 1 um (depend on surface reflection) Latitudinal accuracy : depends on selected F.O.V. Repeatability :<1 um (std. gauge testing) Other size of optic Lens for different F.O.V. is available on request

22 3D smartcheck Software 3D smart check is an innovative selfdevelopment 3D software for quick and easy 3D topography data evaluation. Custom made features evaluation are possible on request Elements: Diameters Step height /depth /thickness Flatness roughness Matrix BGA points count / alert Pre-set tolerance /auto alert Free measurement/ 3D data evaluation

23 Matrix BGA module interface

24 3D Dimples evaluation

25 Solder Mask / Bumps 3D evaluation

26 3D Trace Depth/Width

27 Step Height Evaluation MinZ MaxZ Distance(mm) Z-Diff

28 3D Surface Roughness Evaluation ISO Height Parameters Sz um Sa um ISO 4287 Amplitude Parameters- Rz um Ra um

29 Report Sample

30 Unique Benefits CNC Programmable measurement Fast traveling speed in 500mm/s Accurate positioning to measuring target High throughput 3D sensor due to fast focus capability High accuracy for micro-surface measurement Insensitive to various surface material/ color 3D topography obtains the most possible of 3D information for evaluation Non-destructive measurement