mag.x system 125 High Resolution Wide Field Micro-Inspection System

Transcription

1 mag.x system 125 High Resolution Wide Field Micro-Inspection System

2 High Resolution Micro-Inspection System Modular System 02 High resolution inspection is being used in many applications. Each application has its own requirements and constraints. In order to cater for all these diverse needs the mag.x system 125 is as modular as possible. Integration of customized elements is easy and enables a system that integrates seamlessly into the surrounding equipment. Base units Heart of the system is always the base unit which is available in different variations. All other components are attached to these base units. Mounting of the system to the surrounding equipment is also provided by the base unit. Objective lenses The optical performance of the system is mainly defined by the objective lenses. These are the components that make the mag.x system 125 really unique. All of Qioptiq s highest end technology is being used in manufacturing and testing of these lenses. Illumination For coaxial bright field illumination Koehler illumination optics are included that can be interfaced to light sources via optical fibers or directly to LED sources. Darkfield illumination can be added easily with an optional adapter. Accessories No system is complete without an array of accessories. The wide selection ranges from camera and fiber adapters to mounting accessories and also includes more advanced components for focusing and special contrasting methods. The optional Piezo Unit enables fine focusing with a range of 400µm. It can be combined with the AF base unit to build a true through-the-lens AF system. The new DIC module for the 5x lens enables differential interference contrast microscopy over a large field-of-view. Tube lenses System magnification and maximum sensor size are the result of the combination of tube lens and objective lens. The current selection of tube lenses DIC module without piezo allows the use of sensors with a diagonal of up to 57. All tube lenses are also telecentric on image side. Detail of machined aluminum image with DIC module

3 Applications Numerous applications benefit from the versatility and the high optical performance of the mag.x system 125. The large field-of-view increases throughput of inspection installations as more object space is imaged at once and the number of images that need to be acquired to image an object in its entirety is reduced drastically in the best case only one image is necessary by maintaining sub-µ resolution. at once or with only few images with an area scan camera. The 1.73x tube lens is specifically designed for the popular 35 format cameras that achieve up to 50MPixel resolution. Typical applications here are Semiconductor inspection Biochip reading Fluorescence microscopy Digital pathology/histology High precision non-contact measurement machines Cleanliness of optical components 03 Color CCD sensor with 5.5µm pixel size Typical applications include the inspection of large objects like Display panels Printed circuit boards Glass panels Color TFT display The optional DIC module expands the applications even more to transparent objects and enables visualization of changes in refractive index or thickness in materials that would not be possible to inspect otherwise. Bovine Pulmonary Artery fluorescence sample These objects are usually inspected with line scan cameras to achieve maximum resolution and throughput. Smaller objects can often be imaged Micro lens array in DIC mode

4 High Resolution Micro-Inspection System Camera adapters for tube 2.25x G G Camera adapters for tube 1.73x G G Camera adapters for tube 1x Light source Fiber guide G Tube lenses R G Illumination tube Fiber adapters G G G G G G Direct adapter Base units Filters G G G G G G G Objective lenses DIC modules G G Darkfield illumination adapter Piezo unit G

5 Order no. G Tube lenses Tube lens 1x G Tube lens 1.73x G Tube lens 2.25x Order no. G G G G G G Base units Compact base unit Compact base unit w/ filter Base unit AF Base unit AF w/filter Direct adapter Illumination tube 5x to be used with G192-08x-000 Order no. Objective lenses G LD-Plan Apo 2x/0.08 G LD-Plan Apo 5x/ LD-Plan Apo 8x/0.32 Order no. Accessories Filters for base unit G /3-000 G Duy filter slider G Filter slider incl. polarizing filter Darkfield illumination adapter G Darkfield adapter 66 diameter Piezo unit for AF Piezo unit to be used with G or G DIC modules for 5x lens DIC module incl. Prism for use w/o piezo DIC module incl. Prism for use w/ piezo Order no. Accessories Camera adapters G M72 Dalsa 6.56 for G G M72 Dalsa 12 for G G M95 e2v for G F-mount for G M58 SVS-Vistek for G M58 ISVI IC-29 for G G Finger lakes PC 65 AC for G G M72 Dalsa 6.56 for G G M72 SVS-Vistek for G F-mount for G G M42 SVS-Vistek for G C-mount for G F-mount for G Light source R G G G X-Cite 110LED w/ 5 fiber Liquid light guide 1m length; 5 active diameter; Volpi connector Fiber adapters Fiber adapter for 9 fiber diameter Fiber adapter for 7 fiber diameter; to be used for G Mounting accessories G X95 carrier Mount for direct adapter 05 A closer look Find additional information and download datasheets from: en/precision-optics/micro-imaging/mag-xsystem-125/

6 High Resolution Micro-Inspection System Designed for Large Sensors Optical Performance 06 The mag.x system 125 is the first microscope system that is specifically designed for the use with large sensors to achieve true wide field imaging with high resolution. With a supported sensor diameter of 57 popular line scan sensors like 8k TDI sensors as well as modern super high-resolution array sensors can be used. These sensors fully utilize the high optical bandwidth of the mag.x system 125 that supports up to 50MPixel sensor resolution. Mag.x system 125 stands out from conventional microscope systems by numerical aperture (NA) values considerably higher than those of other systems. High optical quality is not only ensured on the optical axis, but also is maintained over the entire sensor format. The MTF chart below shows the polychromatic MTF versus field height. Values for object y and image heights y are given under the horizontal axis. Note that the high contrast values close to the diffraction limit are maintained over the entire field! Polychromatic MTF vs. field height LD Plan Apo 5x/0.2 + TL2.25x; 2y=5, 2y =56.3 The complete system is chromatically corrected in the spectral range of nm. High contrast is maintained over the entire spectrum and no refocusing is required if the illumination wavelength is changed. Multispectral imaging becomes possible without any additional focus needs. mag.x system 125 To enable even the most demanding measurement tasks the mag.x system 125 features precise object space telecentricity to prevent flawed measurements of objects with varying height.

7 Configuration Made Easy: MachVis Software The MachVis software from Qioptiq makes it easy to find the right lens for a given task and facilitates configuration of a mag.x system 125 setup considerably. Furthermore all technical data is available right away. 07 MachVis download Specifications Download for free today: δ Tube Lens System Objective Plan Apochromat 1x 1.73x 2.25x f' tub = 250 f' tub = f' tub = 563 2y' = 25 2y' = y' = 57 2y R' 0 2y R' 0 2y R' 0 Magn. / NA WD f' obj obj µm R 0 lp/ M NA' lp/ M NA' lp/ M NA' lp/ 2x / ± x / ± x / ± NA Numerical aperture in the object space = n sin (σ) WD Working distance f' obj Focal length of the objective f' tub Focal length of the tube lens δ obj Depth of field at 546 nm δ obj = ±n λ/(2 NA 2 ) R' 0 Cut off frequency in image space at 546 nm R 0 Cut off frequency in object space at 546 nm R 0 = (2 NA) / λ 2y' Image field size (maximum detector diagonal) 2y Object field size M Magnification of the overall system; M = M obj M tub

8 Discover the Q! Discover the capabilities, knowledge, equipment and technology of Qioptiq Photonics for Innovation Sales contact: Qioptiq phone: +49 (0) Visit our shop at magx-02-XXEN Technical data are subject to change without notice.