COMPACT PRECISION LINEAR MOTORIZED ACTUATORS LSMA Series LSMA-173

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1 COMPACT PRECISION LINEAR MOTORIZED ACTUATORS LSMA Series Narrow Width ized Translation Stages Compact (30 mm) design Precision bearing system Resolution 0.1 microns Standard stroke 20 and 50 mm Optional stroke 5, 6, 8, 10, 25 mm XYZ configuration Stroke 20 mm LSMA-173 Stroke 50 mm Vacuum compatible10-6 Tor Designed for space-limited applications and compact multi-axis assemblies, LSMA-173 Series Linear stages provide very high resolution, singleaxis translation in a low-cost, motorized package. Typical applications for this stage are fiber optic alignment, laser diode research, bio-medical applications and inspection systems. XYZ-LSMA Assembly SPECIFICATIONS LSMA LSMA Travel mm Ball screw pitch mm 0.25 Resolution (full step) µm 1.25 Resolution (1/8 step) µm Max speed mm/sec 3.5 Horizontal Kg 3 Vertical Kg 2 Weight Kg XY assembly XY-LSMA XY-LSMA Z Z-LSMA Z-LSMA

2 Medium Width ized Translation Stages Narrow (50 mm) design Precision bearing system Resolution 0.31 microns Standard stroke 50, 100, 150, 200 mm Optional stroke 5, 6, 8, 10, 25 mm XYZ configuration LSMA-175 Vacuum compatible10-6 Tor SPECIFICATIONS LSMA-175 XYZ Assemblies Travel mm 50, 100, 150, 200 Ball screw pitch mm 0.5 Resolution (full step) µm 2.5 Resolution (1/8 step) µm 0.31 Max speed mm/sec 4 (standard) 10 (optional) Horizontal Kg 8 Vertical Kg 3 Weight Kg 0.9 (50 mm stroke) 1.4 (100 mm stroke) 1.5 (150 mm stroke) 1.6 (200 mm stroke) XYZ assembly available

3 300 mm ized Translation Stages Travel 300 mm Steel bearing system Stability and rigidity assured Resolution 0.31 microns LSMA SPECIFICATIONS LSMA LSM linear stage feature all-steel construction with preloaded linear ball bearing slides. Steel has an almost 3-times greater stiffness than aluminum, and provides this stage high stiffness in a much more compact and significantly lower profile package. In addition, because the bearings, the body, the carriage and the lead screw are all made of steel, this stage has a completely homogenized design minimizing thermal stress or thermal bending effects. The result is more consistent performance than other aluminum stage designs. Travel mm 300 Ball screw pitch mm 0.5 DC servo Resolution (full step) µm 2.5 Resolution (1/8 step) µm 0.31 Max speed mm/sec 4 (standard) 10 (optional) Horizontal Kg 8 Vertical Kg 3 Weight Kg 1

4 Wide ized Translation Stages LSMA Precision and rigid bearing system Resolution 0.1 microns Standard stroke 25 mm XYZ and XR configurations LSMA stages address multi-axis, high precision positioning requirements in fiber optics, bio-medical, semiconductor, and test and measurement applications. Features including its ultra-compact size and high reliability make these stages appropriate for device testing, micro-assembly, micro-machining, and manipulation of small, lightweight parts such as fiber optical devices, micro-optics, MEMS, cell probes, or semiconductor devices. Based on a high precision low-friction ball screw and re-circulating ball bearings, the LSMA stages deliver highly reliable positioning performance at a maximum speed up to 25 mm/s. Compared to alternative direct-drive technologies, the ball screw drive provides greater thrust for higher load capacity, higher efficiency resulting in less heat induced position drift and minimum tuning efforts. The modular LSMA stages enable the assembly of compact multi-axes positioning systems for microscope stages. Rotary stage RTHM-180 and LSMA XYZ LSMA SPECIFICATIONS LSMA LSMA BS1 LSMA LS Travel mm 25 Ball screw pitch mm Resolution (full step) µm Resolution (1/8 step) µm Repeatability µm Max speed mm/sec Horizontal Kg Vertical Kg Weight Kg 8 XYZ assembly available

5 Wide ized Translation Stages LSMA Precision and rigid bearing system Resolution up to 26 nm Standard stroke 100 mm XYZ and XR configurations LSMA stage with DC motor XYZ assembly SPECIFICATIONS LSMA LSMA DCE Travel mm 100 Ball screw pitch mm 0.5 DC servo with encoder Resolution (full step) µm 1 Min. incremental motion µm 0.1 (1/8 step) Repeatability µm 2 1 Max speed mm/sec 5 Horizontal Kg 7 Vertical Kg 3 Weight Kg 1.5 XYZ assembly available

6 Stackable Goniometric Stages 8MG Rotates object without obscuring the optical path Superb stability 1 or 2 axes (stackable) Smooth ball bearings Compact square body 8MG MG MG MG99-55 MG Series goniometric cradles rotate on a transverse axis above the platform. Compared to full 360 rotation stages, they offer maximum free access to the rotating part and allow construction of very compact multi-axis rotation assemblies. MG cradles are designed so that orthogonal mounting of two adjacent-size cradles provides two perpendicular axes of rotation at about the same point in space. Mounting a rotation stage under the assembly adds a third orthogonal rotation axis through the same point. The mechanism rolls smoothly on the ball bearings. The position is read within one revolution on the scale engraved on the dial knob attached to the motor. Goniometric stages have two limit switches. The switches may also be used to a zero reference. The stage is driven by a two phase stepping motor. A dial knob on its axle allows manual operation. 8MG MG99-80 SPECIFICATIONS 8MG MG MG MG99-80 Travel range deg ± 0.5 ± 2.5 Resolution arc-sec Height of the center of rotation mm Kg 2 Weight Kg 1.2

7 Vertical ized Translation Stage MVT-188 Pantograph design Ball bearings (16) Precision lead screw Stepper motor drive Vertical lift 100 mm Compact square body ized Vertical Translation Stage MVT designed around pantograph concept. Being very compact, it provides smooth and stable adjustment of height. It has large travel range, and supports large loads. While moving, the platform remain parallel to the base. and speed depends on the motor size. The lead screw operates at a varying angle, so the resolution of the stage varies with the position. SPECIFICATIONS MVT Travel range mm 100 Parallelism mm 1 Height mm 84 Min Max 184 Kg 8

8 Manual (Joy-stick like) Controls for ized Stages One axis Three axes Features: type Current Power supply 2-phase stepper motor 0.5 to 1.5 Amp/phase VDC Number of axes 1, 2, 3 One-step mode Multi-step mode Speed Forward/back Forward/back Adjustable 300 to 600 steps/sec Micro-stepping resolution 1/2, 1/4 1/8 dip switch programmable Speed adjustment with potentiometer (range ~ 2 X) Limit switches stops movement at the end LED status of the limit switch