Length Measurement. Measuring lengths up to 30 m

Transcription

1 Length Measurement Sealed Linear Encoders Sealed linear encoders from HEIDENHAIN are protected from dust, chips and splash fluids and are ideal for operation on machine tools. Accuracy grades as fine as ± 2 µm Measuring steps as fine as µm Measuring lengths up to 30 m Fast and simple installation Large mounting tolerances High acceleration loading Protection against contamination Exposed linear encoders Exposed linear encoders from HEIDENHAIN operate with no mechanical contact between the scanning head and the scale or scale tape. Typical areas of application for these encoders include measuring machines, comparators and other precision devices in linear metrology, as well as production and measuring equipment, for example in the semiconductor industry. Accuracy grades of ± 0.5 µm and better Measuring steps to µm (1 nm) Measuring lengths up to 30 m No friction between scanning head and scale Small dimensions and low weight High traversing speed Sealed linear encoders are available with Full-size scale housing For high vibration loading Up to 30 m measuring length Slimline scale housing For limited installation space Up to 1240 mm measuring length, up to 2040 mm with mounting spar or tensioning elements The aluminum housing of a HEIDENHAIN sealed linear encoder protects the scale, scanning carriage, and its guideway from chips, dust, and fluids. Downward-oriented elastic lips seal the housing. The scanning carriage travels along the scale on a low-friction guide. It is connected to the external mounting block by a coupling that compensates unavoidable misalignment between the scale and the machine guideways. Scanning carriage DIADUR scale Light source Sealing lips Mounting block Photovoltaic cells 6

2 Length gauges Length gauges from HEIDENHAIN feature integral guideways for the plunger. They are used to monitor measuring equipment, in industrial metrology, and as position encoders. Accuracy grades as fine as ± 0.1 µm Measuring steps to µm (5 nm) Measuring lengths up to 100 mm High measuring accuracy Available with automated plunger drive Simple mounting With incremental linear encoders, the current position is determined by starting at a datum and counting measuring steps, or by subdividing and counting signal periods. encoders from HEIDENHAIN feature reference marks, which must be scanned after switch-on to reestablish the reference point. This process is especially simple and fast with distance-coded reference marks. Absolute linear encoders from HEIDENHAIN require no previous traverse to provide the current position value. The encoder transmits the absolute value through the EnDat interface or another serial interface. The recommended measuring steps listed in the table refer primarily to position measurements. Smaller measuring steps are useful in particular for applications in rotational speed control, e.g. on direct drives. The sinusoidal output signals make it possible to attain higher interpolation factors. Under the designation functional safety, HEIDENHAIN offers encoders with purely serial data transmission as single-encoder systems for safety-related machines and systems. The two measured values are already formed independently of each other in the encoder, and are transmitted to the safe control via the EnDat interface. Sealed Linear Encoders Series Page With Full-Size Scale Housing Absolute position measurement Absolute position measurement and large measuring length position measurement Very high repeatability Typically for manual machines Large measuring lengths LC 100 LC 200 LS 100 LF 100 LS 600 LB With Slimline Scale Housing Absolute position measurement position measurement Very high repeatability Typically for manual machines LC 400 LS 400 LF 400 LS Exposed Linear Encoders Very high accuracy Two-Coordinate Encoders High traversing speed and large measuring lengths Absolute position measurement LIP, LIF PP LIDA LIC Length Gauges Accuracy ± 0.1 µm Accuracy ± 0.2 µm Accuracy to ± 0.5 µm Accuracy ± 1 µm Accuracy ± 2 µm, absolute position measurement HEIDENHAIN-CERTO HEIDENHAIN-METRO HEIDENHAIN-METRO HEIDENHAIN-SPECTO ACANTO

3 LC, LF, LS, LB Sealed Linear Encoders With Full-Size Scale Housing Linear encoders with full-size scale housing are characterized particularly by high tolerance to vibration. Absolute linear encoders of the LC 100 and LC 200 series provide the absolute position value without any previous traverse required. Depending on the version, incremental signals can be output additionally. The LC 100 can be mounted to the same mating dimensions as the incremental linear encoders of the LS 100 series and feature the same mechanical design. Because of their high accuracy and defined thermal behavior, LC 100 and LS 100 series linear encoders are especially well suited for use on numerically controlled machine tools. The incremental encoders of the LF type feature measuring standards with relatively fine grating periods. This makes them particularly attractive for applications requiring very high repeatability. The LS 600 series incremental linear encoders are used for simple positioning tasks, for example on manual machine tools. The LC 200 (absolute) and LB (incremental) linear encoders were conceived for very long measuring lengths up to 30 meters. Their measuring standard a steel tape with METALLUR or AURODUR graduation is delivered as a single piece, and after the housing sections have been mounted, is pulled into the housing, drawn to a defined tension and fixed at both ends to the machine casting. LC 100 series Absolute position measurement Defined thermal behavior High vibration rating Two mounting attitudes LC 200 series Absolute position measurement for large measuring lengths up to 28 m Defined thermal behavior High vibration rating Two mounting attitudes LS 100 series position measurement Defined thermal behavior High vibration rating Two mounting attitudes LF 185 Very high repeatability Thermal behavior similar to steel or cast iron High vibration rating Two mounting attitudes LB 382 For large measuring lengths up to 30 m Defined thermal behavior High vibration rating Two mounting attitudes LS 600 series Typically for manual machines Simple installation signals Signal period Absolute position values Accuracy grade Recommended measuring step Measuring lengths ML Reference mark 8

4 LC 100 LF 185 LC 200 LS 600 Absolute LC 115 LC 211 LC 195 F/M/S 1) LC 281 LF 185 LS 187 LS 177 LS 688 C LS 628 C LB 382 DIADUR glass scale METALLUR steel scale SUPRADUR phase grating on steel DIADUR glass scale DIADUR glass scale AURODUR steel scale tape LC 211: 1 V PP LS 187: 1 V PP LC 281: 1 V PP LS 177: TTL LS 688 C: 1 V PP LS 628 C: TTL 1 V PP 40 µm 4 µm LS 187: 20 µm LS 177: 4 µm/2 µm 20 µm 40 µm LC 115/LC 2x1: EnDat 2.2 LC 195: Fanuc/Mitsubishi/Siemens ± 5 µm, ± 3 µm ± 5 µm ± 3 µm, ± 2 µm ± 5 µm, ± 3 µm ± 10 µm ± 5 µm ± 5 µm: to 0.01 µm 2) To 0.01 µm 2) ± 3 µm: to µm 2) To 0.1 µm To 0.1 µm LS 688 C: to 1 µm LS 628 C: 5 µm To 0.1 µm Up to mm Up to mm Up to mm Up to mm Up to mm One or distance-coded; LS 6xx C: distance-coded 1) Available upon request 2) Resolution of the absolute position values 9

5 LC, LF, LS Sealed Linear Encoders With Slimline Scale Housing Sealed linear encoders with slimline scale housing are primarily used where installation space is limited. Absolute linear encoders of the LC 400 series provide the absolute position value without any previous traverse required. Like the LS 400 series incremental linear encoders, their high accuracy and defined thermal behavior make them especially well suited for use on numerically controlled machine tools. The incremental encoders of the LF type feature measuring standards with relatively fine grating periods. This makes them particularly attractive for applications requiring very high repeatability. The LS 300 series incremental linear encoders are used for simple positioning tasks, for example on manual machine tools. LC 400 series Absolute position measurement Defined thermal behavior LS 400 series position measurement Defined thermal behavior LF 485 Very high repeatability Thermal behavior similar to steel or cast iron LS 300 series Typically for manual machines Simple installation with mounting spar The use of a mounting spar can be of great benefit when mounting slimline linear encoders. They can be fastened as part of the machine assembly process. The encoder is then simply clamped on during final mounting. Easy exchange also facilitates servicing. Moreover, installation with a mounting spar significantly improves the encoder s acceleration behavior. Fixed stop Mounting spar Scale housing Clamping spring Scanning unit 10

6 LC 400 LS 400 LF 485 LS 300 Absolute LC 415 LC 495 F/M/S 1) LF 485 LS 487 LS 477 LS 388 C LS 328 C DIADUR glass scale SUPRADUR phase grating on steel DIADUR glass scale DIADUR glass scale signals 1 V PP LS 487: 1 V PP LS 477: TTL Signal period 4 µm LS 487: 20 µm LS 477: 4 µm/2 µm LS 388 C: 1 V PP LS 328 C: TTL 20 µm Absolute position values LC 415: EnDat 2.2 LC 495: Fanuc/Mitsubishi/ Siemens Accuracy grade ± 5 µm, ± 3 µm ± 5 µm, ± 3 µm ± 10 µm Recommd. measuring step Measuring lengths ML ± 5 µm: to 0.01 µm 2) To 0.1 µm 0.1 µm LS 388 C: to 1 µm ± 3 µm: to µm 2) LS 328 C: 5 µm Up to mm 3) Up to mm Up to mm 3) Up to mm Reference mark One or distance-coded Distance-coded 1) Available upon request 2) Resolution of the absolute position values 3) Over ML mm only with mounting spar or tensioning elements 11

7 LIP, LIF Exposed Linear Encoders For Very High Accuracy The exposed linear encoders of the LIP and LIF types are characterized by small measuring steps together with high accuracy. The measuring standard is a phase grating applied to a substrate of glass or glass ceramic. LIP and LIF encoders are typically used for: Measuring machines and comparators Measuring microscopes Ultra-precision machines such as diamond lathes for optical components, facing lathes for magnetic storage disks, and grinding machines for ferrite components Measuring and production equipment in the semiconductor industry Measuring and production equipment in the electronics industry The LIF 481 V is suited for special applications in high vacuum (to 10 7 bar). LIP 300 series Very high resolution with measuring steps to 1 nm Very high repeatability through an extremely fine signal period Defined thermal behavior thanks to a measuring standard on Zerodur glass ceramic LIP 400 series Small dimensions Measuring steps as fine as µm Scale available with various thermal expansion coefficients LIP 500 series Measuring lengths up to 1440 mm Measuring steps to 0.05 µm ML = 70 mm LIF 400 series Fast, simple scale fastening with PRECIMET adhesive film Relatively insensitive to contamination thanks to SUPRADUR graduation Position detection through limit switches and homing track LIP 382 LIP 372 LIP 481 LIP 471 LIP 581 LIP 571 Coefficient of linear expansion DIADUR phase grating on Zerodur glass ceramic therm (0 ± 0.1) 10 6 K 1 DIADUR phase grating on glass or Zerodur glass ceramic therm K 1 (glass) or therm (0 ± 0.1) 10 6 K 1 (Zerodur) DIADUR phase grating on glass therm K 1 signals LIP 382: 1 V PP LIP 372: TTL LIP 481: 1 V PP LIP 471: TTL LIP 581: 1 V PP LIP 571: TTL Signal period LIP 382: µm LIP 372: µm LIP 481: 2 µm LIP 471: 0.4 µm/0.2 µm LIP 581: 4 µm LIP 571: 0.8 µm/0.4 µm Accuracy grade ± 0.5 µm ± 1 µm; ± 0.5 µm ± 1 µm Position error per signal period typically ± µm ± 0.02 µm ± 0.04 µm Recommd. measuring step 1 nm 1 µm to µm 1 µm to 0.05 µm Measuring lengths (ML) 70 to 270 mm 70 to 420 mm 70 to 1440 mm Reference mark None One One or distance-coded 12

8 PP Exposed Linear Encoders Two-Coordinate Encoders The PP two-coordinate encoders feature as measuring standard a planar phase-grating structure on a glass substrate. This makes it possible to measure positions in a plane. ML = 120 mm Applications include: Measuring and production equipment in the semiconductor industry Measuring and production equipment in the electronics industry Extremely fast X-Y tables Measuring machines and comparators Measuring microscopes LIF 481 LIF 471 SUPRADUR phase grating on glass or Zerodur glass ceramic therm K 1 (glass) or therm (0 ± 0.1) 10 6 K 1 (Zerodur) LIF 481: 1 V PP LIF 471: TTL LIF 481: 4 µm LIF 471: 0.8 µm to 0.04 µm ± 3 µm Coefficient of linear expansion signals PP 281 DIADUR phase grating on glass therm K 1 1 V PP Signal period 4 µm Accuracy grade ± 2 µm Position error per signal period typically ± 0.04 µm ± 0.04 µm 1 µm to 0.1 µm 70 to 1020 mm (up to 3040 mm on request) One Recommd. measuring step Measuring range Reference mark To 0.01 µm 68 mm x 68 mm (other measuring ranges upon request) One per coordinate 13

9 LIC, LIDA Exposed Linear Encoders For High Traversing Speeds and Large Measuring Lengths The LIC and LIDA exposed linear encoders are designed for high traversing speeds up to 10 m/s and large measuring lengths of up to 30 m. The LICs make absolute position measurement possible over measuring lengths up to 27 m. In their dimensions and mounting they correspond to LIDA 400 incremental linear encoders. On the LIC and LIDA linear encoders, steel scale tapes typically serve as substrate for METALLUR graduations. With the LIDA 403, graduation carriers of glass or glass ceramics permit thermal adaptation thanks to their different coefficients of linear expansion. LIC and LIDA exposed linear encoders are typically used for: Coordinate measuring machines Testing machines PCB assembly machines PCB drilling machines Precision handling devices Position and velocity measurement on linear motors LIC and LIDA are particularly easy to mount with various mounting possibilities: LIDA 403 Scale of glass or glass ceramic is bonded directly onto the mounting surface. LIC 4015, LIDA 4x5 One-piece steel scale tape is drawn into an aluminum extrusion and tensioned at its ends The aluminum extrusions can be screwed or bonded onto the mounting surface. LIC 4017, LIDA 4x7, LIDA 2x7 One-piece steel scale-tape is drawn into aluminum extrusions and fixed at center. The aluminum extrusions are bonded onto the mounting surface. LIC 4019, LIDA xx9, LIDA 2x9 One-piece steel scale tape is bonded directly to the mounting surface. LIC 4000 series Absolute position acquisition up to 27 m Compatible in its mounting dimensions to the LIDA 400 Various mounting options LIP 400 series Large measuring lengths up to 30 m Various mounting options Limit switches LIDA 200 series Scale tape cut from roll Large mounting tolerances For simple applications Absolute LIC 4015 LIC 4017 LIC 4019 LIDA 483 LIDA 473 Coefficient of linear expansion METALLUR steel scale tape LIC 4015: therm Same as mounting surface LIC 4017/LIC 4019: therm K 1 METALLUR graduation on glass ceramic or glass therm K 1 (glass) therm K 1 (Robax glass ceramic) therm (0 ± 0.1) x 10 6 K 1 (Zerodur glass ceramic) signals LIDA 483: 1 V PP ; LIDA 473: TTL Signal period LIDA 483: 20 µm; LIDA 473: 4 µm/2 µm/0.4 µm/0.2 µm Absolute position values EnDat 2.2 Accuracy grade ± 5 µm ± 15 µm ± 3 µm; ± 5 µm Position error per signal period typically ± 0.08 µm ± 0.2 µm Recommd. measuring step To 0.01 µm (absolute position values) 1 µm to 0.1 µm Measuring lengths ML 140 to mm 240 to mm 70 to mm 240 to mm (Robax glass ceramic to 1640 mm) Reference mark One or distance-coded 14

10 LIC 4015 LIDA 487 LIDA 279 LIDA 485 LIDA 475 LIDA 487 LIDA 477 LIDA 489 LIDA 479 LIDA 287 LIDA 277 LIDA 289 LIDA 279 METALLUR steel scale LIDA 4x5: therm Same as mounting surface LIDA 4x7/LIDA 4x9: therm K 1 Steel scale tape therm K 1 LIDA 48x: 1 V PP ; LIDA 47x: TTL LIDA 28x: 1 V PP ; LIDA 27x: TTL LIDA 48x: 20 µm; LIDA 47x: 4 µm/2 µm/0.4 µm/0.2 µm LIDA 28x: 200 µm; LIDA 27x: 20 µm/4 µm/2 µm ± 5 µm ± 15 µm ± 30 µm ± 0.2 µm ± 2 µm 1 µm to 0.1 µm 5 µm to 0.5 µm 140 to mm 240 to mm Scale tape from the roll 3 m/5 m/10 m One Selectable every 100 mm 15

11 HEIDENHAIN-CERTO Length Gauges Accuracy ± 0.1 µm HEIDENHAIN-CERTO length gauges feature a large measuring range, provide high linear accuracy and offer resolution in the nanometer range. They are used predominantly for production quality control of high-precision parts and for the monitoring and calibration of reference standards. Length gauges reduce the number of working standards required to calibrate gauge blocks. Accuracy The total error of HEIDENHAIN-CERTO length gauges lies within ± 0.1 µm. After linear length error compensation in the evaluation electronics of the ND 28x, for example, HEIDENHAIN guarantees accuracy of ± 0.03 µm for the CT 2500 and ± 0.05 µm for the CT These accuracy grades apply over the entire measuring range at ambient temperatures between 19 C and 21 C and with a temperature variation of ± 0.1 K during measurements using the CS 200 gauge stand for the HEIDENHAIN-CERTO. Plunger actuation The plunger of the CT 2501 and CT 6001 is extended and retracted by an integral motor. It can be actuated by the associated switch box, which can also be controlled by external signal. The CT 2502 and CT 6002 have no plunger drive. The freely movable plunger is connected by a separate coupling with the moving machine element. Mounting The CT 2500 length gauge is fastened by its 16 mm diameter clamping shank. The CT 6000 is fastened with two screws on a plane surface. CT 2501 CT 2502 CT 6001 CT 6002 signals DIADUR phase grating on Zerodur glass ceramic Coefficient of linear expansion: therm 0 ± K 1 11 µa PP Signal period 2 µm System accuracy 1) ± 0.1 µm ± 0.03 µm 2) ± 0.1 µm ± 0.05 µm 2) Recommd. measuring step 0.01 µm and µm with the ND 28x measured value display units Measuring range 25 mm 60 mm Plunger actuation Motor driven Via coupling Motor driven Via coupling Reference mark One 1) At 19 C to 21 C; permissible temperature fluctuation during measurement: ± 0.1 K 2) With linear length-error compensation in the evaluation electronics 16

12 HEIDENHAIN-METRO Length Gauges Accuracy ± 0.2 µm With their high system accuracy and small signal period, the HEIDENHAIN-METRO MT 1200 and MT 2500 length gauges are ideal for precision measuring stations and testing equipment. They feature ball-bush guided plungers and therefore permit high radial forces. Plunger actuation The length gauges of the MT 12x1 and MT 25x1 series feature a spring-tensioned plunger that is extended at rest. In a special version without spring it exercises particularly low force on the measured object. In the pneumatic length gauges MT 1287 and MT 2587, the plunger is retracted to its rest position by the integral spring. It is extended to the measuring position by application of compressed air. Mounting The MT 1200 and MT 2500 length gauges are fastened by their 8h6 standard clamping shank. A mounting bracket is available as an accessory to mount the length gauges to plane surfaces or to the MS 200 from HEIDENHAIN. MT 1281 MT 1287 MT 1271 MT 2581 MT 2587 MT 2571 DIADUR phase grating on Zerodur glass ceramic Coefficient of linear expansion: therm 0 ± K 1 signals 1 V PP TTL 1 V PP TTL Signal period 2 µm 0.4 µm, or 0.2 µm 2 µm 0.4 µm or 0.2 µm System accuracy ± 0.2 µm Recommd. measuring step 0.5 µm to 0.05 µm Measuring range 12 mm 25 mm Plunger actuation Reference mark MT 12x1/MT 25x1: by cable-type lifter or freely movable MT 1287/MT 2587: pneumatic One 17

13 HEIDENHAIN-METRO Length Gauges Accuracy to ± 0.5 µm Large measuring ranges together with their high accuracy make the MT 60 and MT 101 HEIDENHAIN-METRO length gauges attractive for incoming inspection, production monitoring, quality control, or anywhere parts with very different dimensions are measured. But they are also easy to mount as highly accurate position encoders, for example on sliding devices or X-Y tables. Plunger actuation M version length gauges feature an integral motor that retracts and extends the plunger. While the MT 101 M operates at a constant gauging force, the MT 60 M allows you to select from three gauging force levels. K version gauges have no integral plunger actuation. The plunger is freely movable. It can be connected to moving elements such as linear slides and X-Y table by a coupling. Mounting The length gauges are mounted onto a flat surface by two screws. HEIDENHAIN offers the M versions for mounting in the accessory MS 100 and MS 200 gauge stands. MT 60 M MT 60 K MT 101 M MT 101 K signals DIADUR graduation on glass ceramic 11 µa PP Signal period 10 µm System accuracy ± 0.5 µm ± 1 µm Recommd. measuring step 1 µm to 0.1 µm Measuring range 60 mm 100 mm Plunger actuation Motor driven Via coupling Motor driven Via coupling Degree of protection IP 50 Reference mark One 18

14 ACANTO, HEIDENHAIN-SPECTO Length Gauges Accuracy to ± 1 µm Thanks to their very small dimensions, the ACANTO and HEIDENHAIN-SPECTO series length gauges are the product of choice for multipoint inspection apparatus and testing equipment. The absolute position measurement of the ACANTO length gauge is particularly well suited for measuring stations with very many measuring points: as the measured value is already generated in the length gauge there is no need for the counting electronics for each measuring point that would otherwise be necessary. Plunger actuation The length gauges of the AT 1218, ST 12x8 and ST 30x8 series feature a spring-tensioned plunger that is extended at rest. In the AT 1217, ST 12x7 and ST 30x7 pneumatic length gauges, the plunger is retracted to its rest position by the integral spring. It is extended to the measuring position by application of compressed air. Mounting The HEIDENHAIN-SPECTO length gauges are fastened by their 8h6 standard clamping shank. Absolute AT 1218 AT 1217 ST 1288 ST 1287 ST 1278 ST 1277 ST 3088 ST 3087 ST 3078 ST 3077 DIADUR glass scale signals 1 V PP TTL 1 V PP TTL Signal period 20 µm 4 µm/2 µm 20 µm 4 µm/2 µm Absolute position values EnDat 2.2 System accuracy ± 2 µm ± 1 µm Recommd. measuring step 1 µm to 0.1 µm Measuring range 12 mm 12 mm 30 mm Plunger actuation AT 1218/ST 12x8/ST 30x8: by measured object AT 1217/ST 12x7/ST 30x7: pneumatic Degree of protection IP 64 Reference mark One 19