Linear Positioning Stage Reference Manual

Transcription

1 PP-30 Series Linear Positioning Stage

2 PP-30 Piezo Positioner Stage Rev 3.00 MICRONIX USA, LLC Barranca Parkway, E-106 Irvine, CA Tel: Fax:

3 CONTENTS 1. INTRODUCTION PRODUCT DESCRIPTION RECOMMENDED CONTROLLERS TECHNICAL DATA LOAD CHARACTERISTICS MODEL CONFIGURATIONS PP-30 ORDER NUMBERS PREPARING TO INSTALL THE PP INSTALLATION PREPARATION PACKAGE CONTENTS INSTALLING THE PP PP-30 INSTALLATION General Mounting Mounting to an Optical Table X-Y Mounting X-Z Mounting CONNECTING THE PP ATMOSPHERIC ENVIRONMENTS Open Loop Installation & Wiring Diagram Closed Loop Installation & Wiring Diagram VACUUM ENVIRONMENTS Handling and Preparation Open loop Installation & Wiring Diagram Closed Loop/Encoder Installation & Wiring Diagram USING THE ENCODER MODULE Encoder Module Overview Encoder Module Pinout Operating and Electrical Specifications Output Signals TECHNICAL SPECIFICATIONS ELECTRICAL CONNECTIONS MMCX Connector DIMENSIONS PP-30 8mm, 18mm, & 30mm Open Loop Versions PP-30 8mm Closed Loop/Encoder Version PP-30 18mm & 30mm Closed Loop/Encoder Versions SUPPLEMENTARY INFORMATION UNITS AND CONVENTIONS PERSONAL SAFETY MAINTENANCE ACCESSORIES

4 1. Introduction 1.1 Product Description The PP-30 is designed for precise positioning of small loads. With its space saving construction, piezo motor, and optional linear encoder, the PP-30 delivers nanometer resolution in a compact package. Ball bearings ensure smooth motion over 8, 18 or 30mm travel lengths. Multiple PP-30 stages can be combined to stack in XY or XYZ configurations for either vacuum or non-vacuum environments Features: Travel ranges of 8, 18 and 30 mm Load capacity up to 1kg 2mm/sec maximum speed 5 nm encoder resolution Bearings and Bearing Shaft Carriage Motor Shaft Motor MMCX Connector Base PP-30 8, 18 & 30mm Open Loop (Shown in center position) PP & 30mm Closed Loop (Shown in center position) Encoder Head Encoder Scale Encoder Scale Encoder Head PP-30 8mm Closed Loop (Shown in center position) 2

5 1.2 Recommended Controllers The following controllers are available from MICRONIX USA: MMD-100 MMD-1x1 PMC-100 MMC-100 MMC Technical Data Motor PM-001 Speed Max. (mm/sec) 2 Resolution Typical (nm) 1.5 (Open Loop), 5 (Encoder Version) Bi-directional Repeatability (nm) ± 10 (Closed Loop) Uni-directional Repeatability (nm) ± 10 (Closed Loop) Accuracy (µm) ± (Closed Loop) 1.4 Load Characteristics Load Characteristics Fx(N) Fy(N) Fz(N) Mx(Nm) My(Nm) Mz(Nm) PM

6 2. Model Configurations 2.1 PP-30 Order Numbers Order No. PP PM mm 1 18 mm 2 30 mm 3 Open Loop 0 Analog 2 Digital, 5 nm* 3 No Limit Switches 0 Non-vacuum 0 Vacuum prepared, 10-6 mbar 1 Vacuum prepared, 10-9 mbar 2 * Other resolutions available upon request. Contact MICRONIX USA for custom version and stacking configurations. 4

7 3. Preparing to Install the PP Installation Preparation When mounting the stage it is important to consider the flatness of the mounting surface, as the stage will conform to the shape of that mounting surface. A surface that is not flat can adversely affect the performance and structural integrity of the stage. The stage is calibrated and guaranteed to be within specification at 20 C ±5 C. Be sure to use the stage under the following conditions: Mount to a clean and flat surface which is free of debris, burrs or dings An indoor atmosphere free of corrosive gasses, and condensation Temperature range of 0-40 C Relative humidity between 20-80% Locate away from water, heat, and electrical noise 3.2 Package Contents If product is damaged or there are missing components, contact MICRONIX USA immediately. Do not discard product packaging in case of return shipment. Package Should Contain: PP-30 Linear Stage Any other previously agreed upon components such as a controller and cable 5

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9 4. Installing the PP-30 All mounting patterns require M2.5 screws for mounting and M1.5 x 5mm dowel pins for precision alignment. Additional brackets and screws may be needed for custom applications. While installing, be careful not to touch the motor shaft. 4.1 PP-30 Installation General Mounting For general mounting configurations, mount the carriage to the mounting surface. Align carriage with clearance holes to access carriage mounting pattern. Requires: 2x M1.5 x 5mm Dowel Pins 2x M2.5 x 10mm Slotted Cheese Head Screws (PP-30 Open Loop & 8mm Closed Loop Versions) M2.5 x 14mm Slotted Cheese Head Screws (PP-30 18mm & 30mm Closed Loop Versions) NOTE: Screw head height may not exceed 2mm PP-30 Open Loop & 8mm Closed Loop Versions Clearance Holes Customer Supplied Base Plate or Mounting Surface PP-30 18mm & 30mm Closed Loop Versions Direction of Travel 7

10 4.1.2 Mounting to an Optical Table Mounting to an optical table requires the use of the Adapter Base Plate (P/N: ). Additional screws will be needed to mount the Adapter Base Plate to the optical table. Requires: 2x M2.5 x 10mm Slotted Cheese Head Screws (PP-30 Open Loop & 8mm Closed Loop Versions) M2.5 x 14mm Slotted Cheese Head Screws (PP-30 18mm & 30mm Closed Loop Versions) 2x M1.5 x 5mm Dowel Pins 1x Adapter Base Plate (P/N: ) 4x M6 or ¼-20 Socket Head Cap Screws for mounting to an optical table (Customer Supplied) NOTE: Screw head height may not exceed 2mm PP-30 Open Loop & 8mm Closed Loop Versions Direction of Travel Adapter Base Plate (P/N: ) PP-30 18mm & 30mm Closed Loop Versions NOTE: The Adapter Base Plate fits all optical tables with 1 inch or 25mm square hole patterns 8

11 4.1.3 X-Y Mounting For X-Y mounting, follow the instructions for mounting the X-axis stage, outlined in section General Mounting, then proceed to mount the Y-axis stage, as shown below: Requires: 2x M2.5 x 10mm Slotted Cheese Head Screws (PP-30 Open Loop & 8mm Closed Loop Versions) M2.5 x 14mm Slotted Cheese Head Screws (PP-30 18mm & 30mm Closed Loop Versions) 2x M1.5 x 5mm Dowel Pins NOTE: Screw head height may not exceed 2mm PP-30 Open Loop & 8mm Closed Loop Versions Direction of Travel NOTE: Screw head height may not exceed 2mm PP-30 18mm & 30mm Closed Loop Versions Direction of Travel 9

12 4.1.4 X-Z Mounting For X-Z mounting, fasten the stages together first (as shown below), then proceed to mount the X-axis stage to the mounting surface, outlined in section General Mounting. Requires: 2x M2.5 x 4mm Slotted Cheese Head Screws 4x M1.5 x 5mm Dowel Pins PP-30 Open Loop & 8mm Closed Loop Versions NOTE: Screw head height may not exceed 2mm Direction of Travel PP-30 18mm & 30mm Closed Loop Versions Direction of Travel 10

13 5. Connecting the PP Atmospheric Environments The PP-30 is black anodized for atmospheric environments. This allows for a harder surface finish and greater durability over the life of the stage Open Loop Installation & Wiring Diagram Connecting the PP-30 in an open loop only requires that the MMCX coaxial motor cable be connected to a compatible controller. No other cables or components are needed Closed Loop Installation & Wiring Diagram Using the PP-30 stage with an encoder requires a closed loop compatible controller (PMC-100) that recognizes encoder feedback. Connect the stage as shown below using the supplied 15 to 9 pin cable to connect the Encoder Module to the Controller. See Section if connecting to the PMA-100 Controller 11

14 5.2 Vacuum Environments Handling and Preparation The vacuum version of the PP-30 is non-anodized and prepared for use in vacuum environments. Take the necessary precautions (such as wearing gloves, clean room clothing, etc.) when handling the stage as to avoid any contaminants. The connectors that ship with the stage are for testing use only and should be replaced with permanent connectors prior to installation Open loop Installation & Wiring Diagram Connecting the PP-30 in an open loop requires the use of a feed through connector at the vacuum chamber wall. Match wire colors when passing the PP- 30 motor cable through the feed through connector. Temporary test connectors are standard. Requires customer supplied feed through connector 12

15 5.2.3 Closed Loop/Encoder Installation & Wiring Diagram Closed loop installation of the PP-30 stage in vacuum environments requires an intermediate feed through connector at the vacuum chamber wall that can accommodate both the motor cable, and the encoder cable. See Section 5.1.2, if connecting to the PMC-100 Controller. Important: Match wire colors when connecting the Encoder Head (vacuum side) to the Encoder Module (atmospheric side). Also, connect the shield of the Encoder Head to the shield of the Encoder Module through the feed through connector. Temporary test connectors are standard. Requires customer supplied feed through connector 13

16 5.3 Using the Encoder Module When connected in a closed loop, the Encoder Module should display two green LED s indicating a power source and proper encoder alignment. A Red or Yellow LED indicates misalignment of the Encoder Head, if this occurs contact MICRONIX USA. Do not manually adjust the Encoder Head or scale. For more information refer to MicroE Systems Mercury Encoders Encoder Module Overview Proper Alignment LED (Green) 15 pin D-sub Connector Improved Alignment LED (Yellow) Improper Alignment LED (Red) Power/Calibration Indicator Encoder Module Pinout Pin Description Pin Description 1 Reserved 9 B- 2 Transmit** 10 B+ 3 Receive** 11 Alarm** 4 A V 5 A+ 13 Ground 6 Reserved 14 Index + 7 Reserved 15 Index - 8 Reserved *Note: Proprietary pins reserved for manufacturer programming, not required to be connected to controller. 14

17 5.3.3 Operating and Electrical Specifications Power Supply 5VDC 330mA (30mA for sensor) Operating Temperature 0 to 70 C Humidity 10-90% RH non-condensing Output Signals *Note: The index pulse may be aligned with A- or B- at some interpolation values. 15

18 6. Technical Specifications 6.1 Electrical Connections MMCX Connector 6.2 Dimensions Component Center Contact Shield Voltage Description Drive Signal Return Signal < ± 48V DC MMCX Right Angle Connector PP-30 8mm, 18mm, & 30mm Open Loop Versions 16

19 6.2.2 PP-30 8mm Closed Loop/Encoder Version PP-30 18mm & 30mm Closed Loop/Encoder Versions 17

20 7. Supplementary Information 7.1 Units And Conventions All measurements in this document are in the metric system of units. 7.2 Personal Safety Metric Unit English Unit 1 millimeter inches 1 micron inches 1 Newton lbs 1 Newton-meter 8.85 n-lbs The PP-30 linear stage is a delicate mechanical device and should be handled with care. Do not drop or mishandle the stage. Keep hands clear of all moving parts while the stage is in motion to avoid personal injury. Do not touch the motor and shaft, as this will contaminate the lubrication and jeopardize the longevity of the stage. Follow the Safe Operating Environment requirements and use proper cable management to ensure a clean and safe operating environment. Allow for easy access to the stage in case of servicing. 7.3 Maintenance The PP-30 series of linear stages utilizes a maintenance free design. Do not modify the stage or perform any maintenance unless specifically instructed to do so by MICRONIX USA personal. If the stage is not performing up to the original specifications, please contact MICRONIX USA. 7.4 Accessories Adapter Base Plate, Table, PP-30 Used for mounting to an optical table with 1 or 25mm square hole patterns 18