Standard Operating Procedure FS-1 Film Sense Ellipsometer (spectroscopic)

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1 Standard Operating Procedure FS-1 Film Sense Ellipsometer (spectroscopic) The Film Sense FS-1 is a spectroscopic ellipsometer dedicated to advanced and rapid characterization of thin film structures for research and quality control. 1.0 Operation Procedures: DELICATE To protect the machine and the safety of your samples, please use extreme care in placing and aligning your samples. Do not hit, jar, or adjust the left and right heads of this unit. See the cleanroom staff if you need a different angle of incidence. Use care when making any adjustments. Please take a moment to review general lab safety information in section 13 of this document. 2.0 Turn on the Computer or log-in, if it is already on; Press the power switch for FS-1 Ellipsometer unit (located on the right head of the unit). 3.0 On the computer, open the Film Sense measurement interface shortcut on the desktop. You will see default Mode: Single Measurement and default Model: SiO2 on Si. 4.0 Sample Alignment: 4.1 Click Align Sample button, you will see a displayed Intensity very low (<1) because no sample is on stage. Page1

2 4.2 Put your sample over the region where the colored lights are being reflected, on the center of stage. You will see Intensity value increases to perhaps > Adjust the Y alignment by rotating the knob at bottom right side of the FS-1 unit. Aim to adjust the AlignY to be less than ± Adjust the X alignment by rotating the knob at bottom back side of the FS-1 unit. Aim to adjust the AlignX to be less than ± Adjust the height knob at the top rear the stage to maximize Intensity (>9.5). Page2

3 5.0 Measure Sample: 5.1 Choose the pre-existing Model with which you want to analyze the data in the Model drop-down list. If there is no model for your sample, then choose none here. 5.2 Choose Acquisition time, standard= 1s, long= 10s (fit slightly improves). 5.3 Click Measure Sample ; wait for the results or data to appear below. 6.0 Analyze Data: 6.1 If a pre-existing Model is chosen, then the Fit Result will show up right after the measurement, showing you Fit error, thickness, refractive index and other fitting parameters. If that s all you need, then you can skip to step 7 now. 6.2 Further analyze the data by switching into Mode: Analysis Model. 6.3 To specify the number of layers: click Model Settings - # of Layers - Back. 6.4 In each layer, choose the material model of layer first. If you can t find your material model then try step Check the parameters you want to fit for each layer, except substrate. Specify the numerical range of each of the fitting parameters, as well as the step size. Substrate layer is usually not checked to fit because it should be a known layer in a two or more layer model. 6.6 When the model is built. Click Fit Data to generate the fitting results. In the figure below, the fitting merit is shown. Fit.Diff should be close to or lower than for film thickness< 100nm. If the fitting is bad, try different layer material models, or customize layers or substrate following step Customize Layer and Model (optional): 7.1 Click Manage Models & Layers in Analysis Model Mode. 7.2 In the All Layers drop-down list, you can find more built-in material models, choose one. Click Add to Favorites, now you will be able to find it in Model building drop-down list in step To use a measured substrate as customized layer: Go to Mode: Single Measurement, measure your substrate following step 5 using Model: none; Switch to Mode: Analysis Model, click Manage Models & Layers, click Save Current Layer. Name it and it will be saved in the All Layers drop-down list, which can be used in the Model building stage. Page3

4 8.0 If you have data files for saving or transfer, please use a browser-based to send those files to yourself. Do not store your data on the Film Sense computer. Delete your temporary files when you are done. Do not use USB flash drives. 9.0 Log off and shut down the Computer; Turn off the power for FS-1 Ellipsometer unit Specifications / Features Banded Wavelength Ellipsometer (BWE) acquires ellipsometric data across 4 discrete bands in the visible spectrum, with bands centered at 465 nm (blue), 525 nm (green), 580 nm (yellow), and 635 nm (red). The standard angle of incidence is set at User Requirements: The Ellipsometer (spectroscopic) Film Sense FS-1 must be used by authorized personnel only. All authorized users are expected to read and understand this SOP and follow the operation instructions carefully. No unauthorized personnel may use this equipment. All users must wear appropriate personal protective equipment. To become an authorized user, one must: 1. Complete Environment, Health & Safety (EH&S) training 2. Complete initial orientation and training for the Davis Hall EE Cleanroom 3. Receive training on this piece of equipment from lab personnel 4. Schedule equipment time using the calendar 5. Read and fully understand this SOP 12.0 General Safety: 12.1 Required Personal Protective Equipment Users must wear coveralls, bouffant caps, shoe covers, safety glasses, and gloves. Shorts, open-toed shoes, high heels, and skirts, are forbidden Emergency Procedures and Contacts For non-life threatening emergencies: use the main cleanroom phone and call the emergency contact #'s listed on the wall. For police/ambulance; call In case of fire or other life threatening emergency: Exit the cleanroom through an emergency exit door. Pull one of the fire alarms located in the main hallway outside of the cleanroom. Dial campus police / ambulance at University after-hours laboratory use policy: No working alone, use the buddy system! Page4

5 # Revised by Date Modification 1 Jonathan McMahon 11/23/16 Document initial release. 2 David Eason 12/2/16 Revised and released, instrument on-line Page5

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