Linear Gage / Display Unit Selection Guide

Transcription

1 Linear age / Display Unit Selection uide Laser Hologage.1µm resolution Sine wave output ø15mm plain stem EH-12S Range: 1mm /.4 Laser Hologage Range: 1mm /.4.1µm resolution Square wave output ø15mm plain stem Page -14 Page -12 A low measuring force model is available E-11P EH-11P EH-12P A low measuring force model is available LB series 1µm resolution Square wave output ø9.5mm stem E-11P EH-11P EV-16P EB-11P EH-12P LB series.1 / 1µm resolution Square wave output ø9.5 / ø8mm stem Range: 5mm /.2 Range: 5mm /.2 Page -12 E-11P EH-11P EV-16P EB-11P EH-12P Page -9 Page -9 ø9.5mm stem With stem clamp nut ø8mm stem LB series 1µm resolution Square wave output ø9.5 / ø8mm stem E-11P EH-11P EV-16P EB-11P EH-12P Range: 1mm /.4 ø9.5mm stem With stem clamp nut High accuracy, low measuring force and sine wave output models available Page -9 Page -9 Page -9 ø8mm stem ø9.5mm stem With stem clamp nut With pneumatic cylinder ø8mm stem Page -9 LK series.1 /.5 / 1µm resolution Square wave output ø8mm stem E-11P EH-11P EV-16P EB-11P EH-12P Range: 1mm /.4 Page -6 Page -6 Page -6 L series.1 / 1µm resolution Square wave output ø2mm stem Range: 1mm / 4 LM series Range: 1mm / 4.1 / 1µm resolution Square wave output ø2mm stem Motor-drive operation Page -15 Page -15 E-11P EB-11P EH-11P EH-12P EV-16P Motor-drive unit E-11P EB-11P EH-11P EH-12P EV-16P -2

2 LF series.5 / 1µm resolution Square wave output ø8mm / ø15mm stem E-11P EH-11P EV-16P EB-11P EH-12P Range: 1mm /.4 Range: 25mm / 1 Range: 5mm / 2 ø8mm stem ø15mm stem.5µm /.2 1µm /.4 Page -7.5µm /.2 1µm /.4 ø15mm stem Page -7 Page -7.5µm /.2 1µm /.4 LF series.5 / 1µm resolution Square wave output ø8mm / ø15mm stem With origin point mark Range: 1mm /.4 Range: 25mm / 1 Range: 5mm / 2 E-11Z EB-11Z EH-12Z EV-16Z ø8mm stem.5µm /.2 1µm /.4 ø15mm stem Page -8.5µm /.2 Page -8 1µm /.4 ø15mm stem LF series.1µm resolution Square wave output ø8mm / ø15mm stem E-11P EH-11P EV-16P EB-11P EH-12P Range: 1mm /.4 Range: 25mm / 1 ø8mm stem ø15mm stem Page -13 Page -13.5µm /.2 Page -8 1µm /.4 LF series Range: 25mm / 1 Range: 5mm / 2 5µm resolution Square wave output ø15mm stem E-11P EB-11P EH-11P EH-12P EV-16P Page -7 Page -7-3

3 LD series Range: 1mm /.4 Range: 25mm / 1 Range: 5mm / 2.1mm resolution Digimatic output Absolute linear encoder ø8mm / ø15mm stem EC-11D EB-11D EV-16D E-11D EH-12D ø8mm stem Page -1 Page -1 LS series Range: 12.7mm /.5.1mm resolution Digimatic output Absolute linear encoder ø8mm stem ø15mm stem Page -1 EC-11D EB-11D EV-16D E-11D EH-12D Page -11 ø15mm stem System Connections.5 / 1 / 5µm gage head LK L LF LM LB.1µm gage head LK L LF LM LB Laser Hologage * *EB-11P and EV-16P are not applicable. age head with Origin Point Mark LF Absolute type gage head LS LD.1µm gage head Laser Hologage E-11P EB-11P EH-11P EH-12P EV-16P E-11Z EB-11Z EH-12Z EV-16Z EC-11D E-11D EB-11D EH-12D EV-16D EH-12S Applicable gages & Output function 3/5-stage Limit, BCD 3/5-stage limit, 7ch limit, Serial BCD, Simple analog 3/5-stage limit, RS-232C, Simple BCD, Simple analog 3/5-stage limit, Segment, Parallel BCD, RS-232C 3/5-stage limit, BCD 3/5-stage limit, 7ch limit, Serial BCD, Simple analog 3/5-stage limit, RS-232C, Simple BCD, Simple analog 3/5-stage limit, Segment, Parallel BCD, RS-232C 3/5-stage limit, Digimatic 3/5-stage limit, BCD 3/5-stage limit, 7ch limit, Serial BCD, Simple analog 3/5-stage limit, RS-232C, Simple BCD, Simple analog 3/5-stage limit, Segment, Parallel BCD, RS-232C 3/5-stage limit, RS-232C, Simple BCD, Simple analog Programmable Controller Personal computer Digimatic Mini-processor DP-1VR -4

4 EC counter Single function type Page -16 For Digimatic output gage heads EC-11D E counter Single function type For Digimatic output gage heads For square wave output gage heads For square wave output gage heads with origin point mark Page -17 E-11D E-11P E-11Z EB counter Multi-function type For Digimatic output gage heads For square wave output gage heads For square wave output gage heads with origin point mark Page -18 EB-11D EB-11P EB-11Z EH counter Multi-function type For Digimatic output gage heads For square wave output gage heads (1-axis / 2-axis) For square wave output gage heads with origin point mark Page -19 EH-12D EH-11P EH-12Z For sine wave output gage heads EH-12P EH-12S EV counter Multi-function type for multi-gage system For Digimatic output gage heads For square wave output gage heads For square wave output gage heads with origin point mark Page -21 EV-16D EV-16P EV-16Z -5

5 Linear age LK SERIES 542 Slim type Compact design with a 12mm outside diameter. Excellent protection against dust and splashing water (IP66) in harsh shop-floor environments. Maximum permissible acceleration values for shock and impact, 1(11ms) (IEC ) Output differential square wave signals for a wide range of applications. Employs linear stroke ball bearings on the spindle movement for durability. Thrust Stem with a clamp nut is optional. Interchangeable contact points for dial indicators can be used. Accuracy: Refer to the list of specifications (excludes quantizing error) Resolution: 1µm,.5µm or.1µm Scale type: Photoelectric linear encoder Max. response speed: 15mm/s, 4mm/s ( ) Contact point: ø3mm carbide Stem: ø8mm Bearing type: Linear ball bearing Measuring force: Refer to the list of specifications Output signal: 9 phase difference, differential square wave (RS-422A equivalent) Signal pitch:.4µm ( ), 2µm ( ), 4µm ( ) Dust/Water protection level: IP66 Standard Accessory 53861: Wrench for contact point Range Order No. Resolution Accuracy* Measuring force** Stem dia. Remarks 1mm (.4 ) mm (1.5+L/5)µm.8N /.75N /.7N 8mm old banded 1mm (.4 ) mm (1.5+L/5)µm.8N /.75N /.7N 8mm Blue banded 1mm (.4 ) mm (.8+L/5)µm.8N /.75N /.7N 8mm reen banded *L = Measured length (mm) **Orientation of gage: Spindle DOWN / Horizontal / Spindle UP : Rubber boot (1mm) 924: Extension cable (5m) 92433: Extension cable (1m) 92432: Extension cable (2m) 2ADE23: Air drive unit 2ADB68: Thrust stem set 2ADB681: Thrust stem 2ADB682: 2ADB683: Wrench ø12 Connector Connecting cable (2m) 82.7 for thrust stem M9.5X.5 ø or longer (stroke) RM12BPE-6PH (HIROSE) Refer to the Linear age leaflet (E4174) for -6

6 Linear age LF SERIES 542 Economical Design Accuracy: Refer to the list of specifications (excludes quantizing error) Resolution: 5µm, 1µm or.5µm Scale type: Photoelectric linear encoder Max. response speed: 15mm/s Contact point: ø3mm carbide Stem: ø8mm or ø15mm Bearing type: Linear ball bearing Measuring force: Refer to the list of specifications Output signal: 9 phase difference, differential square wave (RS-422A equivalent) Signal pitch: 2µm ( , ), 4µm ( , , ), 2µm ( , , ) Dust/Water protection level: IP , , , , -613 Standard Accessories 53861: Wrench for contact point (for 1mm range models) 21187: Wrench for contact point (for 25/5mm range models) : Rubber boot (1mm) 254: Rubber boot (25mm) 255: Rubber boot (5mm) 924: Extension cable (5m*) 92433: Extension cable (1m*) 92432: Extension cable (2m*) 2ADB68: Thrust stem set (for 1mm range models) 2ADN37: Thrust stem set (for 25/5mm range models) 2ADB683: Thrust stem wrench (for 1mm range models) 2ADB693: Thrust stem wrench (for 25/5mm range models) Range Order No. Resolution Accuracy* Measuring force** Stem dia. 1mm (.4 ) mm (1.5+L/5)µm 1.2N / 1.1N / 1.N 8mm 1mm (.4 ) mm (1.5+L/5)µm 1.2N / 1.1N / 1.N 8mm 25mm (1 ) mm (1.5+L/5)µm 4.6N / 4.3N / 4.N 15mm 25mm (1 ) mm (1.5+L/5)µm 4.6N / 4.3N / 4.N 15mm 25mm (1 ) mm (7.5+L/5)µm 4.6N / 4.3N / 4.N 15mm 5mm (2 ) mm (1.5+L/5)µm 5.7N / 5.3N / 4.9N 15mm 5mm (2 ) mm (1.5+L/5)µm 5.7N / 5.3N / 4.9N 15mm 5mm (2 ) mm (7.5+L/5)µm 5.7N / 5.3N / 4.9N 15mm *L = Measured length (mm) **Orientation of gage: Spindle DOWN / Horizontal / Spindle UP ø18 Dimensions with a thrust stem installed ø18 Thrust stem 2ADB681 4 Connecting cable 2m (screw top height) 13.8 ø M9.5.5 for thrust stem ø8 2ADB682 M or longer (stroke) , (screw top height) 56.1 ø Refer to the Linear age leaflet (E4174) for Dimensions with a thrust stem installed Thrust stem 2ADN ø (screw top height) 3.7 2ADB692 M18 1 Connecting cable 2m ø M14.5 for thrust stem 26 or longer (stroke) Dimensions with a thrust stem installed Thrust stem 2ADN ø M14.5 for thrust stem 2ADB692 M18 1 Connecting cable 2m ø or longer (stroke) , , , ,

7 Linear age LF SERIES 542 Economical Design with Origin Point Mark , , , -165 Range Order No. Resolution Accuracy* Measuring force** Stem dia. Remarks 1mm (.4 ) mm (1.5+L/5)µm 1.2N / 1.1N / 1.N 8mm w/ origin point mark 1mm (.4 ) mm (1.5+L/5)µm 1.2N / 1.1N / 1.N 8mm w/ origin point mark 25mm (1 ) mm (1.5+L/5)µm 4.6N / 4.3N / 4.N 15mm w/ origin point mark 25mm (1 ) mm (1.5+L/5)µm 4.6N / 4.3N / 4.N 15mm w/ origin point mark 5mm (2 ) mm (1.5+L/5)µm 5.7N / 5.3N / 4.9N 15mm w/ origin point mark 5mm (2 ) mm (1.5+L/5)µm 5.7N / 5.3N / 4.9N 15mm w/ origin point mark *L = Measured length (mm) **Orientation of gage: Spindle DOWN / Horizontal / Spindle UP Accuracy: Refer to the list of specifications (excludes quantizing error) Resolution: 1µm or.5µm Scale type: Photoelectric linear encoder Max. response speed: 15mm/s Contact point: ø3mm carbide Stem: ø8mm or ø15mm Bearing type: Linear ball bearing Measuring force: Refer to the list of specifications Output signal: 9 phase difference, differential square wave (RS-422A equivalent) Signal pitch: 4µm ( , , ) or 2µm ( , , ) Dust/Water protection level: IP66 Standard Accessories 53861: Wrench for contact point (for 1mm range models) 21187: Wrench for contact point (for 25/5mm range models) : Rubber boot (1mm) 254: Rubber boot (25mm) 255: Rubber boot (5mm) 2ADB68: Thrust stem set (for 1mm range models) 2ADN37: Thrust stem set (for 25/5mm range models) 2ADB683: Thrust stem wrench (for 1mm range models) 2ADB693: Thrust stem wrench (for 25/5mm range models) ø16.7 ø16.7 Dimensions with a thrust stem installed Connecting cable 6 2m M9.5.5 for thrust stem (screw top height) 56.1 ø Thrust stem 2ADB (screw top height) ø ADB682 M or longer (stroke) , ø Dimensions with a thrust stem installed (screw top height) Thrust stem 2ADN ø Connecting cable 2m 61.7 ø M14.5 for thrust stem 26 or longer (stroke) ADB692 M , Dimensions with a thrust stem installed Thrust stem 2ADN ø ADB692 M Connecting cable 2m ø M14.5 for thrust stem 51.5 or longer (stroke) , Refer to the Linear age leaflet (E4174) for -8

8 Accuracy: Refer to the list of specifications (excludes quantizing error) Resolution: 1µm Scale type: Photoelectric linear encoder Max. response speed: 9mm/s Contact point: ø3mm carbide Stem: ø8mm or ø9.5mm Bearing type: Linear ball bearing Measuring force: Refer to the list of specifications Output signal: 9 phase difference, differential square wave (RS-422A equivalent) (Sign-wave output: , ) Signal pitch: 4µm Dust/Water protection level: IP54 Standard Accessory 53861: Wrench for contact point : Rubber boot for 5mm LB (spare) : Rubber boot for 1mm LB (spare) 924: Extension cable (5m) 92433: Extension cable (1m) 92432: Extension cable (2m) Linear age LB SERIES 542 Extra-slim type Extremely compact design. Available with an outside diameter as small as 8mm. The small photoelectric linear encoder assures high precision over the entire stroke range , H, The ball bearings used in the spindle unit ensure superb durability , H, Refer to the Linear age leaflet (E4174) for Range Order No. Resolution Accuracy Measuring force* Stem dia. Remarks 5mm (.2 ) mm 2µm.65N /.6N /.55N 8mm 1mm (.4 ) mm 2µm.8N /.75N /.7N 8mm 1mm (.4 ) H.1mm 1µm.8N /.75N /.7N 8mm 1mm (.4 ) mm 2µm.8N /.75N /.7N 8mm Sine wave output 1mm (.4 ) mm 2µm.6N /.55N /.5N 8mm Low measuring force 1mm (.4 ) mm 2µm.8N /.75N /.7N 8mm w/ pneumatic cylinder 1mm (.4 ) mm 2µm.8N /.75N /.7N 8mm w/ pneumatic cylinder 5mm (.2 ) mm 2µm.65N /.6N /.55N 9.5mm 1mm (.4 ) mm 2µm.8N /.75N /.7N 9.5mm 1mm (.4 ) H.1mm 1µm.8N /.75N /.7N 9.5mm 1mm (.4 ) mm 2µm.8N /.75N /.7N 9.5mm Sine wave output 1mm (.4 ) mm 2µm.6N /.55N /.5N 9.5mm Low measuring force 1mm (.4 ) mm 2µm.8N /.75N /.7N 9.5mm w/ pneumatic cylinder **Orientation of gage: Spindle DOWN / Horizontal / Spindle UP Connector 82.7 (HIROSE) RM12BP-6PH 47 1 Dsub 15-pin Sine wave output model (542-41, ) Connecting cable (2m) Connecting cable (2m) ø L 4.9 (thread) ø9 18 ø8 7.3 ø ø9 ø9.5 ø , H, No.2365 L=11.5 to ø L 4.9 (thread) 113 ø4.2 ø7.9 ø Knurl ø9.5 ø No.2365 L=11.5 to , H, (39.3) Air inlet (Applicable air hose: ID ø2.5) ø8 -.9 ø L (thread) Stroke 1.5mm or longer ø4.2 ø7.9 Knurl ø12 ø ø14 No.2365 L = 11.5 to 13. Compatible air hose (ID: ø2.5) ø (No.2365) L=11.5 to ø Applicable air hose (ID ø2.5) L Knurl Stroke 1.5mm or longer 113-9

9 Linear age LD SERIES 575 with ABSOLUTE Linear Encoder The LD is an ultra-compact ABS Linear age designed to fit into very tight spaces. It keeps track of its origin point once set ,-326-3,-326-5, (Refer to page VIII for details.) The use of an absolute scale* in the sensor makes it possible to maintain the origin setting even when the power is switched off. Special linear ball bearings are used for the spindle guide to ensure a long service life. Optional thrust stem and tightening nut facilitate setup of the LD linear gage in holes of a plate or fixture. Metric Range Order No. Resolution Accuracy Measuring force* Stem dia. 1mm mm 2µm 1.2N / 1.1N / 1.N 8mm 1mm mm 2µm 1.2N / 1.1N / 1.N 8mm 1mm mm 2µm 1.2N / 1.1N / 1.N 8mm 1mm mm 2µm 1.2N / 1.1N / 1.N 8mm 25mm mm 2µm 4.6N / 4.3N / 4.N 15mm 25mm mm 2µm 4.6N / 4.3N / 4.N 15mm 25mm mm 2µm 4.6N / 4.3N / 4.N 15mm 25mm mm 2µm 4.6N / 4.3N / 4.N 15mm 5mm mm 3µm 5.7N / 5.3N / 4.9N 15mm 5mm mm 3µm 5.7N / 5.3N / 4.9N 15mm 5mm mm 3µm 5.7N / 5.3N / 4.9N 15mm 5mm mm 3µm 5.7N / 5.3N / 4.9N 15mm Connecting cable length : 2m (no suffix), 3m ( suffix -3 ), 5m (suffix -5 ), 7m (suffix -7 ) *Orientation of gage: Spindle DOWN / Horizontal / Spindle UP Inch Range Order No. Resolution Accuracy Measuring force* Stem dia N / 1.1N / 1.N 8mm N / 1.1N / 1.N 8mm N / 1.1N / 1.N 8mm N / 1.1N / 1.N 8mm N / 4.3N / 4.N 15mm N / 4.3N / 4.N 15mm N / 4.3N / 4.N 15mm N / 4.3N / 4.N 15mm N / 5.3N / 4.9N 15mm N / 5.3N / 4.9N 15mm N / 5.3N / 4.9N 15mm N / 5.3N / 4.9N 15mm Connecting cable length : 2m (no suffix), 3m ( suffix -3 ), 5m (suffix -5 ), 7m (suffix -7 ) *Orientation of gage: Spindle DOWN / Horizontal / Spindle UP ,-327-3,-327-5, ,-328-3,-328-5, Accuracy: Refer to the list of specifications (excludes quantizing error) Resolution: 1µm or.5 Scale type: Capacitance-type ABSOLUTE linear encoder Max. response speed: Unlimited Contact point: ø3mm carbide Stem: ø8mm or ø15mm Bearing type: Linear ball bearing Measuring force: Refer to the list of specifications Output signal: Digimatic output External input: Origin-setting signal (Absolute origin position can be changed externally.) Dust/Water protection level: IP66 Standard Accessories 53861: Wrench for contact point (for 1mm range models) 21187: Wrench for contact point (for 25/5mm range models) : 1mm rubber boot (spare) 254: 25mm rubber boot (spare) 255: 5mm rubber boot (spare) 2ADB68: Thrust stem set (for 1mm model) 2ADN37: Thrust stem set (for 25mm/5mm model) 2ADB683: Thrust stem wrench (for 1mm range models) 2ADB693: Thrust stem wrench (for 25mm/5mm range models) 5275*: Digimatic Power Supply Unit * To denote your AC line voltage add the following suffixes to the order No. (e.g.: 5275A): A for UL/CSA, D for CEE, E for BS, F for SAA, DC for China, K for EK, No suffix is required for JIS/1V Refer to the Linear age leaflet (E4174) for (screw top height) Connecting cable 2m.6 (screw top height) Thrust stem 2ADB681 Dimensions with a thrust stem installed ADB682 M ø Connecting cable 6 2m M9.5.5 for thrust stem 1.6 or longer (stroke) 61.5 ø Dimensions with a thrust stem installed Thrust stem 2ADN (screw top height) ø ADB692 M Connecting cable 2m 8.6 M14.5 for thrust stem 61.7 ø or longer (stroke) (28.3) Dimensions with a thrust stem installed Thrust stem 2ADN ø ø M14.5 2ADB692 M18 1 for thrust stem : 1mm range model : 25mm range model : 5mm range model 51.5 or longer (stroke)

10 Linear age LS SERIES 575 IP66 Water/Dust Protection with ABSOLUTE Linear Encoder (Refer to page VIII for details.) The LS is a compact Linear age designed to fit into tight spaces. Accuracy: Refer to the list of specifications (excludes quantizing error) Resolution:.1mm or.5 Scale type: Capacitance-type ABSOLUTE linear encoder Max. response speed: Unlimited Contact point: ø3mm carbide Stem: ø8mm or 3/8 DIA Bearing type: Slide bearing Measuring force: Refer to the list of specifications Output signal: Digimatic output Dust/Water protection level: IP : Spare rubber boot 93594: Air Drive Unit (metric) Air Drive Unit (inch) 2ADF64: SPC cable extension adapter 2ADD95: Extension cable (.5m) : Extension cable (1m) 514: Extension cable (2m) Metric Range Order No. Resolution Accuracy Measuring force* Stem dia. 12.7mm mm.15mm 2.N / 1.8N / 1.6N 8mm *Orientation of gage: Spindle DOWN / Horizontal / Spindle UP Inch Range Order No. Resolution Accuracy Measuring force* Stem dia N / 1.8N / 1.6N 3/8 DIA *Orientation of gage: Spindle DOWN / Horizontal / Spindle UP ø ø8 -.9 Refer to the Linear age leaflet (E4174) for -11

11 Laser Hologage SERIES 542.1mm Resolution Type These extra-high accuracy gaging heads have a resolution up to.1mm. The compact dimensions allow easy installation into very tight spaces. The Laser Hologage utilizes a unique holography scale as the length standard, ensuring excellent measuring accuracy and repeatability. A linear ball bearing in the spindle guide provides excellent durability for an extended service life. The.1mm reading type LB linear gage ( ) comes with a clamp nut on the stem Accuracy: Refer to the list of specifications (excludes quantizing error) Resolution:.1µm Scale type: Laser-hologram measurement sensor Max. response speed: 25mm/s Contact point: R1.5mm carbide Stem: ø15mm Bearing type: High precision linear ball bearing Measuring force: Refer to the list of specifications Output signal: 9 phase difference, differential square wave (RS-422A equivalent) Signal pitch:.25µm Standard Accessory 53861: Wrench for contact point Range Order No. Resolution Accuracy Measuring force* Stem dia. Remarks 1mm (.4 ) µm.2µm.55N /.45N /.35N 15mm 1mm (.4 ) µm.2µm.1N / / 15mm Low measuring force *Orientation of gage: Spindle DOWN / Horizontal / Spindle UP : Stem fixture for fixing to top surface : Stem fixture for fixing to bottom surface : Spindle lifting cable 97175: Laser Hologage stand Connecting cable (2m) (HIROSE) RM12BP-6PH (.1m type) 85 1 (Measuring range) ø15h6 Stem dia Connector for lifting cable m type with R1.5 carbide point Linear age LB SERIES 542.1mm Resolution Type Range Order No. Resolution Accuracy Measuring force* Stem dia. 5mm (.2 ) µm.8µm.65N /.6N /.55N 9.5mm *Orientation of gage: Spindle DOWN / Horizontal / Spindle UP Accuracy: Refer to the list of specifications (excludes quantizing error) Resolution:.1µm Scale type: Photoelectric linear encoder Max. response speed: 38mm/s Contact point: R1.5mm carbide Stem: ø9.5mm Bearing type: Linear ball bearing Measuring force: Refer to the list of specifications Output signal: 9 phase difference, differential square wave (RS-422A equivalent) Signal pitch:.4µm Dust/Water protection level: IP54 924: Extension cable (5m) 92433: Extension cable (1m) 92432: Extension cable (2m) : Rubber boot Connecting cable (2m) ø9 18 ø L ø14 (No.2365) ø (HIROSE) RM12BP-6PH (thread) 5 (Measuring range) L=11.5~13. Refer to the Linear age leaflet (E4174) for -12

12 Linear age LF SERIES 542.1mm Resolution Type Accuracy: Refer to the list of specifications (excludes quantizing error) Resolution:.1µm Scale type: Transmission-type photoelectric linear encoder Max. response speed: 4mm/s Contact point: ø3mm carbide Stem: ø8mm or ø15mm Bearing type: Linear ball bearing Measuring force: Refer to the list of specifications Output signal: 9º phase difference, differential square wave (RS-422A equivalent) Signal pitch:.4µm Dust/Water protection level: IP66 Standard Accessories 53861: Wrench for contact point (for 1mm range models) 21187: Wrench for contact point (for 25mm range models) Range Order No. Resolution Accuracy Measuring force* Stem dia. 1mm (.4 ) mm (.8+L/5)µm 1.2N / 1.1N / 1.N 8mm 25mm (1 ) mm (.8+L/5)µm 4.6N / 4.3N / 4.N 15mm *L = measued length (mm) **Orientation of gage: Spindle DOWN / Horizontal / Spindle UP 924: Extension cable (5m) 92433: Extension cable (1m) 92432: Extension cable (2m) : Rubber boot (1m) 254: Rubber boot (25m) 2ADB68: Thrust stem set (for 1mm range models) 2ADN37: Thrust stem set (for 25mm range models) 2ADB683: Thrust stem wrench (for 1mm range models) 2ADB693: Thrust stem wrench (for 25mm range models) Dimensions with a thrust stem installed Thrust stem 2ADB681 ø ADB M (screw top height) Connecting cable 2m M9.5.5 for thrust stem 1.6 or longer (stroke) 61.5 ø (screw top height) Connecting cable 2m2m Dimensions with a thrust stem installed Thrust stem 2ADN371 ø ADB692 M ø15 M14.5 for thrust stem 26 or longer (stroke) (28.3) 13.8 Refer to the Linear age leaflet (E4174) for -13

13 Laser Hologage SERIES 542.1mm Resolution Type The Mitutoyo Laser Hologage is a high-end digital gaging system that employs laser beam interference to make highly accurate and repeatable measurements. It features ultra-fine diffraction gratings which create a holographic pattern that acts as a very finely graduated scale. The Laser Hologage is suitable for measuring ultra-high precision parts, especially those in semiconductor and related industries. Highly accurate measurement due to an ultra-high resolution of.1mm (.1µm), which is close to the performance of laser interferometers. Excellent measuring stability the design is also highly resistant to unfavorable environmental conditions such as air movement and atmospheric pressure changes. High precision linear ball bearings are used in the guide for extremely smooth movement and exceptional durability. A display unit is provided. Accuracy: Refer to the list of specifications (excludes quantizing error) Resolution:.1µm Scale type: Laser-hologram measurement sensor Max. response speed: 25mm/s Contact point: R5mm carbide Stem: ø15mm Bearing type: High precision linear ball bearing Measuring force: Refer to the list of specifications Output signal: 9 phase difference, two-phase sine wave Signal pitch:.25µm Standard Accessory 53861: Wrench for contact point : Stem fixture for fixing to top surface : Stem fixture for fixing to bottom surface : Spindle lifting cable 97175: Laser Hologage stand age head Display unit Range Order No. Resolution Accuracy Measuring force** Stem dia. Remarks 1mm (.4 ) *.1µm / 1µinch.1µm.55N /.45N /.35N 15mm 1mm (.4 ) *.1µm / 1µinch.1µm.1N / / 15mm Low measuring force * To denote your AC power cable add the following suffixes to the order No.: A for UL/CSA, D for CEE, DC for CCC, E for BS, K for EK, No suffix is required for JIS/1V ** Orientation of gage: Spindle DOWN / Horizontal / Spindle Up 45.4 Display Unit 144 Connector for lifting cable (.1m type) 1 (Measuring range) ø15h6 (Stem dia.) µm type with R5 carbide point 2 1 (3.1) Refer to the Linear age leaflet (E4174) for -14

14 Long Stroke Linear age SERIES 542 1mm Stroke Type Accuracy: Refer to the list of specifications (excludes quantizing error) Resolution: 1µm or.1µm Scale type: Photoelectric linear encoder Max. response speed: 4mm/s or 8mm/s Contact point: ø3mm carbide Stem: ø2mm Bearing type: Bearing guide Measuring force: Refer to the list of specifications Output signal: 9 phase difference, differential square wave (RS-422A equivalent) Dust/Water protection level: IP54 Three version are available; standard model, low measuring force model, and rubber boot model (special order). The resolution of each model can be selected to be.1µm or 1µm Motor drive unit Range Order No. Resolution Accuracy* Measuring force** Stem dia. Remarks 1mm (4 ) µm (2+L/1)µm 2.5µm 8.N / 6.5N / 5.N 2mm Standard 1mm (4 ) µm (2+L/1)µm 2.5µm 3.N / / 2mm Low measuring force 1mm (4 ) µm (2+L/1)µm 2.5µm 8.N / 6.5N / 5.N 2mm w/ rubber boot 1mm (4 ) µm (2.5+L/1)µm 3µm 8.N / 6.5N / 5.N 2mm Standard 1mm (4 ) µm (2.5+L/1)µm 3µm 3.N / / 2mm Low measuring force 1mm (4 ) µm (2.5+L/1)µm 3µm 8.N / 6.5N / 5.N 2mm w/ rubber boot *L = Measured length (mm) **Orientation of gage: Spindle DOWN / Horizontal / Spindle UP Refer to the Linear age leaflet (E4174) for Range Order No. Resolution Accuracy* Measuring force** Stem dia. Remarks 1mm (4 ) µm (2+L/1)µm 2.5µm 3.N / 6.5N / 9.5N 2mm Motor-driven Type 1mm (4 ) µm (2+L/1)µm 2.5µm 4.5N / /6.N 2mm Motor-driven Type 1mm (4 ) µm (2.5+L/1)µm 3µm 3.N / 6.5N / 9.5N 2mm Motor-driven Type 1mm (4 ) µm (2.5+L/1)µm 3µm 4.5N / /6.N 2mm Motor-driven Type *L = Measured length (mm) **Orientation of gage: Spindle DOWN / Horizontal / Spindle UP With rubber boot: , (A counter varies depending on the gage) RM12BP-6P (HIROSE) 2-ø4.5, ø9 depth 5 Cable length (2m) ø Stroke 12 or longer ø , -316, -332, -336 Standard/Low measuring force type Connecting cable (2m) (A counter varies depending on the gage) RM12BP-6P (HIROSE) Stroke 12 or longer 5 ø ø4.5, ø9 depth 4 Rubber boot , -3 Rubber boot type HR1A-7P-6P (HIROSE) Drive unit cable length (2m) Output cable length (2m) (A counter varies depending on the gage) RM12BP-6P (HIROSE) 2-ø4.5, 9 depth ø Stroke 12 or longer ø , -333 Standard type (motordriven type) 17 HR1A-7P-6P (HIROSE) Drive unit cable length (2m) Output cable length (2m) (A counter varies depending on the gage) RM12BP-6P (HIROSE) ø4.5, ø9 depth 4 5 ø Stroke 12 or longer Rubber boot , 335 Rubber boot type (motordriven type)

15 EC Counter SERIES 542 Low-cost, Assembly Type Display Unit for LD and LS Employs DIN size (X48mm) and mounton-panel configuration to facilitate system integration. Able to produce tolerance judgment or Digimatic measurement data output. Functions Preset, O/±N judgment Output (selectable) Tolerance judgment: -N, OK, +N (open-collector) Data: Digimatic code External control signal input Preset, data hold Power supply Via AC adapter : SPC data output cable (1m) 514: SPC data output cable (2m) : DC plug PJ-2 C : I/O cable Order No * Applicable input Digimatic code (SPC) Applicable gage LD, LS Number of gage input 1 Resolution.1mm,.1mm (Automatically set depending on the gage.) Display 6-digit and a negative [-] sign LED (Amber, reen, Red) * To denote your AC power cable add the following suffixes to the order No.: A for UL/CSA, D for CEE, DC for CCC, E for BS, K for EK, No suffix is required for JIS/1V (8) Refer to the Linear age leaflet (E4174) for -16

16 E Counter SERIES 542 Low-cost, Assembly Type Display Unit Functions Preset, direction switch, tolerance judgment (3/5-step, 3 kinds). peak (max., min., runout) measurement, constant number, smoothing, error display/output, protection over keys Output Tolerance judgment: L1 to L5 (Switchover between opencollector output and BCD output by means of a parameter) Control: NOM (normal signal) open-collector BCD: 6-digit (positive/negative-true logic) open-collector (Switchover between tolerance judgment output by means of a parameter) Able to produce 3-step/5-step X 3 kinds of tolerance output and BCD output. A smoothing function reduces display digit fluctuations. Employs DIN size (X48mm) and mounton-panel configuration to facilitate system integration. External control signal input Preset, display hold, peak value clear, tolerance judgment BANK switch Quantization error ±1 count Maximum input frequency 1.25MHz (The response speed depends on the gage being used.) Power supply voltage DC+12 to 24V Power consumption 6W (5mA) or less (Secure power supply more than 1A for each unit.) 2ADB44: I/O output connector 2ADF18: 1-key unit : SPC data output cable (1m) 514: SPC data output cable (2m) 2ADN46: AC adapter 2ZAA: AC cable (Japan) 2ZAA1: AC cable (USA) 2ZAA2: AC cable (EU) 2ZAA3: AC cable (Britain) 2ZAA4: AC cable (Chine) 2ZAA5: AC cable (korea) 2ADD93: Terminal connecting cable Order No Applicable input Differential square-wave Differential square-wave Digimatic code (SPC) with origin point mark Applicable gage LK, LF, LB, LM, LF with origin point mark LD, LS (excluding with origin point and sign wave types) Number of gage input 1 Resolution (Depending on the linear gage type connected).1mm,.5mm,.1mm,.5mm,.1mm.1mm,.1mm Tolerance judgment display LED display (3 steps: Amber, reen, Red/5 steps: Amber, Amber flashing, reen, Red flashing, Red) (11) (11) (11) Refer to the Linear age leaflet (E4174) for -17

17 EB Counter SERIES 542 Assembly Type Display Unit with Multiple Limit Setting Able to produce 3-step/5-step X 7 kinds of tolerance output and limit value output independently for each of 7 channels. Comes with serial BCD output capability, for connection to a programmable controller or personal computer, etc. when minimum cabling requirement is met. Dynamic measurement possible with simplified analog output. Employs DIN size (X48mm) and mounton-panel configuration to facilitate system integration. Functions Preset, tolerance judgment output (3/5-step X 7 kinds), limit value output (2 kinds independently for each of the 7 channels), peak (maximum, minimum, runout) measurement, diverse data output (serial BCD, simplified analog) Output Tolerance judgment: L1 to L5, open-collector Control: Normal operation signal (NORMAL), open-collector External control signal input Preset, display hold, peak value clear, tolerance judgment BANK switch, open-collector or no-voltage contact signal (with/without contact point) Interface Serial BCD: Bit-serial format, open-collector Analog output: 2.5V + Counting value X voltage resolution (25mV/2.5mV): Full-scale to 5V Digimatic input/output: Connecting to the external switch box (No. 2ADF18) makes it easy to enter tolerance limits and preset values. Note) This can not be used when the gage is connected to a Mitutoyo DP-1VR Digimatic Mini-Processor Can connect to a Mitutoyo DP-1VR Digimatic Mini- Processor. Number of tolerance steps can be expanded by making a set of EB-D counters. Quantization error ±1 count Order No Applicable input Differential square-wave Differential square-wave Digimatic code (SPC) with origin point mark Applicable gage LK, LF, LB LF with origin point mark LD, LS Number of gage input 1 Resolution.1mm,.5mm,.1mm,.5mm,.1mm.1mm,.1mm Tolerance judgment display LED display (3 steps: Amber, reen, Red/5 steps: Amber, Amber flashing, reen, Red flashing, Red) (11) (11) (11) Maximum input frequency 1.25MHz (The response speed depends on the gage being used.) Power supply voltage DC+12 to 24V Power consumption 6W (5mA) or less (Secure power supply more than 1A for each unit.) 2ADB44: I/O output connector 2ADF18: 1-key unit : SPC data output cable (1m) 514: SPC data output cable (2m) 2ADN46: AC adapter 2ZAA: AC cable (Japan) 2ZAA1: AC cable (USA) 2ZAA2: AC cable (EU) 2ZAA3: AC cable (Britain) 2ZAA4: AC cable (Chine) 2ZAA5: AC cable (korea) 2ADD93: Terminal connecting cable AC adapter / AC cable

18 Functions Zeroset, preset, limit setting (3 or 5-step), O/±N judgement, O/±N signal output, MAX/MIN/TIR (runout) measurement, counting direction switching, double reading, mm/inch switching, sum/difference calculation of 2 gages, output mode selection Output I/O: Tolerance judgment output (3/5 stages), normal operation output RS-232C, USB or Digimatic code (selectable): Various measurement data (USB used only with SENSORPAK) External Control I/O: Preset, Data hold and Error clear RS-232C: Displayed value output,max/min/tir switching, Zero set, peak value clear, preset value input, tolerance value input and error clear RS Link Up to six EH counters may be connected via one RS-232C or USB port. (daisy chain) (USB used only with SENSORPAK) Error display/output Power-supply voltage error, overspeed error, overflow error, gage error, communication error, and tolerance setting error Maximum input frequency 2.5MHz (differential square-wave): ,542-71, MHz (differential square-wave): Power supply Via AC adapter (12-24V DC, 7mA (max)) EH Counter SERIES 542 Multi-function Display Unit Employs DIN size (144X72mm) and mounton-panel configuration to facilitate system integration. Counter can be used on a desktop mounted to a display stand (included). The standard RS-232C and USB interface allows easy communication with an external PC. (USB used only with SENSORPAK.) A multi-point measuring system can easily be created with the built-in networking function (RS link). (Max. 12points.) The 2-gage input type can perform 2-axis display and make addition or subtraction calculations between 2 gages Order No * ** * ** * ** * ** * ** Applicable input Differential square-wave Differential sine-wave Digimatic code output Applicable gage L, LB, LF, LK LF with Origin Point Mark LB with sine-wave output LD, LS, ID-C Number of gage input 1 2 Resolution.1mm,.5mm,.1mm,.5mm,.1mm Depends on the gage head.1μm,.1μm connected Tolerance judgment display LED display (3 steps: Amber, reen, Red/5 steps: Amber, Amber flashing, reen, Red flashing, Red) * To denote your AC power cable add the following suffixes to the order No.: A for UL/CSA, D for CEE, DC for CCC, E for BS, K for EK, No suffix is required for JIS/1V ** For those models of the Order No. with Suffix "1", AC adapter is not attached as a standard accessory AC adapter (Approx. 1º) Refer to the Linear age leaflet (E4174) for -19

19 Difference/Sum Unit SERIES 542 Used to output a differential calculation result (A+B, A-B) or single value (A, B) of the counting values obtained from the linear gages that are connected to A and B input connectors, respectively. * The minimum readings of the linear gages that are connected to A and B input connectors should be identical. CONNECTION EXAMPLE Measurement of a curved plate thickness L-DF (542-4) (rear panel) Linear gage counter D= (Displacement of Linear age A)+ (Displacement of Linear age B) Workpiece Linear age A D Linear age B Step measurement H= (Displacement of Linear age B)- (Displacement of Linear age A) Linear age A Linear age B H Over-speed error output and the remedies If either of the gages being connected A and B input connectors displaces as to exceed the rated moving speed, the counter will display over-speed error. Response speed: 25mm/s (when 5/1µm linear gages are connected) 5mm/s (when 1µm linear gages are connected) Power supply: Via AC adapter (DC9V, 5mA) Power consumption: 4.5W Dimensions: 236 (w) x 16 (D) x 44.2 (H) mm D/A Conversion Unit SERIES 542 CONNECTION EXAMPLE This unit has a pulse control circuit, counting circuit, and D/A conversion circuit for output of linear gage displacement amount in the form of analog voltage. L-DA1 (542-3) Inputs the zero-setting signal from such as a push-switch. Analog connection cable Linear gage Connecting cable (optional) Linear gage counter Power supply: Via AC adapter (DC9V, 5mA) Dimensions: 236 (w) x 16 (D) x 44.2 (H) mm 542-3* * To denote your AC power cable add the following suffixes to the order No.: A for UL/CSA, D for CEE, E for BS, No suffix is required for JIS/1V Switching of D/A conversion range and resolution When connected to a.1mm linear gage When connected to a.1mm linear gage Range Resolution Range Resolution ±1mm.1mm ±5mm.5mm ±2mm.2mm ±1mm.1mm ±5mm.5mm ±25mm.25mm ±1mm.1mm ±5mm.5mm ±2mm.2mm ±1mm.1mm ±5mm.5mm ±25mm.25mm -2

20 EV Counter SERIES 542 For Multi-gage System Up to six gages can be connected to one unit. Able to connect up to 1 EV counters to one personal computer using the RS link function to facilitate the configuration of a multi-point measurement system comprising a maximum of 6 gages. A range of output modes to choose from; I/O output for tolerance judgment and segment output, BCD data output and RS-232 output are available. Peak-hold measurements are possible for maximum value, minimum value, runout (TIR), etc. Able to calculate a sum, average, maximum, minimum, maximum difference, etc., between gages connected to the same unit Functions O/±N judgment, O/±N signal output, MAX/MIN/TIR (runout) measurement, counting direction switching, mm/inch switching, calculation of sum, average, maximum, minimum and maximum difference between specified axes, and output-mode selection Output I/O: Normal operation output and O/±N signal (three steps), measurement data (BCD code), or 21-stage segment output (selectable) RS-232C: Various measurement data External Control I/O: Axis designation, preset, data hold, and error clear RS-232: Displayed value output command, MAX/MIN/TIR switching and peak value clear, zero set, preset value input, tolerance value input, error clear, and command to output calculated value between specified axes RS Link Up to 1 EV counters may be connected via a single RS-232 port. (daisy chain) EV and EF counters can be mixed (in which case a total of six counters can be connected). Error display/output Power-supply voltage error, overspeed error, overflow error, gage error, communication error, and tolerance setting error Maximum input frequency 1.25MHz (differential square-wave): Max counting Speed : 5MHz Power supply Terminal block (M3 screws), DC +12 to +24V, 7mA (max.) Order No Applicable input Differential square-wave Digimatic code (SPC) Applicable gage LB (ex..1mm resolution), LF with origin point mark LD, LD-M, LS LF, L, LK Number of gage input 6 Resolution (internal) - no display capability.1mm**,.5mm,.1mm,.5mm,.1mm,.5,.5,.5.1mm*,.1mm,.5 *,.5 *: Will not be indicated when combined with a L gage. **: D-EV is required when the resolution is.1mm System Diagram Display unit 144 EV Counter Linear gage 6.5 Interconnecting EV counters Affixing an EV counter Linear gage EH Counter Tolerance judgment output BCD output Segment output RS-232C output RS-232C output Programmable controller PC system -21

21 D-EV Display Unit Display unit for the EV counter. Allows set-up of EV counter without a personal computer or other equipment. Able to display each axis measurement value and O/N judgment result, total O/N judgment result for all axes, setting details, and errors. DIN compatible compact panel-mounting cutout dimensions 45 x The required power supply is DC +12 to +24V, 2mA at the terminal block. Number of connectable units: One display unit allows external display and setting for one EV counter. Displayed digits: Uses a single sign plus six digits (EV counter operates on eight-digit data internally but displays only the last six digits). LED display: Channel display (also for display of judgment result): 3 (three-color LED) Measurement mode display (current, maximum, minimum, runout): 2 Status display: 1 (two-color) Operating switches: 4 Switches and their functions: Channel switching, measurement mode switching (current value, maximum value, minimum value and runout), parameter setting, preset, and tolerance setting Input/output: RS Link connectors: 1 in and 1 out. Error display: Overspeed, gage error and others. Power supply: Terminal block (M3 screws), DC +12 to +24V, 2mA 2ADD4 UNIT AE MAX TIR MIN +N O -N Code No. Model Serial No. IN 2ADD4 EV-I 1 MADE IN JAPAN RS LINK OUT DC12-24V 2mA +V -V DISP Fn MODE P.SET Refer to the Linear age leaflet (E4174) for Code No. 2ADD4 Model EV-I Serial No. 1 MADE IN JAPAN IN RS LINK OUT DC12-24V 2mA +V -V -22

22 SENSORPAK SENSORPAK CD-ROM This software facilitates the loading of measurement data from a linear gage counter into a personal computer. USB connection is possible with the EH counter. RS-232C cable (option) External trigger signal PLC CPU: 2H or faster OS: Windows 2 or XP Memory: 256MB or more Maximum 6 channels of measuring points can be processed. Possible to perform arithmetical calculation and maximum width calculation using the measurement data. Possible to export the measurement data into MS-Excel. Diverse graphic functions (numeric value display, meter display, bar-graph display, overall judgment display) Frequency of data loading: Max times (6ch) to 6 times (6CH) O/NO-O signal I/O cable RS-Link License key Linear gage / EH, EV counter (max. 1 pcs.) Measurement screen Meter screen Chart screen Order No. 2ADM26-2 (Software only) 2ADM27-2 (Software plus I/O cable) Display function Display type: Counter, bar graph, meter, chart (capable of simultaneous display) Tolerance judgment result: Color display (green/red) Connectable gages: Max. 6 gages Calculation function Calculation items: Sum, difference, total, average, maximum, minimum, range (maximum minimum), calculation with a constant Connectable gages: Max. 3 calculation items (between desired gages) Total tolerance judgment O/N judgment (by specifying gages to be used for total tolerance judgment) O/N signal output with optional I/O cable Input function Trigger function: by means of key, timer or external TR (with optional I/O cable) Data input frequency: Max times (with 6 gages connected) to 6 times (with 6 gages connected) Output function Direct output to EXCEL spreadsheet, CSV file output (compatible with MeasureLink) Connectable items Various Mitutoyo counters (those compatible with RS_LINK) Product requirement Recommendation: PC/AT compatible machine, CPU: Pentium4 2Hz or higher, Memory: 256MB or more Disk: 1MB or more OS: Windows ME, 2, XP Currently supported languages: English, erman, French, Spanish User s manual: English -23