Ultra High-speed High-precision Laser Displacement Sensor HL-C2 SERIES. panasonic-electric-works.net/sunx

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1 981 Ultra High-speed High-precision Sensor SERIES Related Information General terms and conditions... F-17 Glossary of terms / General precautions... P.1397 / P.145 Sensor selection guide... P.967~ About laser beam... P.143~ PHOTO PHOTO MEASURE panasonic-electric-works.net/sunx Conforming to EMC Directive Conforming to FDA regulations series are introduced to limited countries only, because some models falls under WA (Wassenaar Arrangement).B.6.b.1.a, and NSG (Nuclear Suppliers Group) guidelines 1.B.3.b.1. Please contact our office for details. This product is classified as a Class 1 / Class / Class 3R Product in IEC / JIS standards and a Class I / Class II / Class llla Product in FDA regulations 1 CFR Never look at or touch the direct laser beam and its reflection. Ultra high-speed, high-precision laser displacement sensors using a combination of new technology Excellent basic performance These sensors achieve an excellent level of performance in the three basic functions which are required of reflective type laser displacement sensors. They can provide Surplus, Reliability and Confidence to production sites which demand high speeds and high precision. MSGB Ultra-high speed calculation processor 3F 3F Sampling inearity Resolution 1 khz ±.3 %.5 µm 1F Sampling inearity Resolution 1 khz ±. %.1µm HDC-CMOS sensors.1 mil.4 mil High-resolution lens Resolution HDC-CMOS sensor Sampling The HDC-CMOS sensors have been developed specially for the series. High density light-receiving cells and a processing speed which is close to maximum limits result in high resolutions and high speeds which exceed all expectations for laser displacement sensors. HDC: High Density inear Cell Comparison of cell structures (Image) Increased cell width Increased cell density Previous

2 Ultra High-speed High-precision Sensor SERIES 98 APPICATIONS Measurement of the positions of patterned glass of deformed narrow pitch connector leg pins Measurement of HDD surface variations PHOTO PHOTO High-resolution lens High-resolution lens has been newly designed to perfectly suit HDC-CMOS sensors. The light-receiving part can create images at a minimum point from light received from a variety of different angles to produce images with even greater precision. Resolution inearity MEASURE Comparison of beam quality (Image) Image Previous MSGB Resolution inearity Exclusive optical equipment and diaphragm structure sustain laser beam of high quality at a radiant density that is close to ideal in the Gaussian distribution. Emission intensity adjustment function, using the newest algorithm, is able to follow any deviation of the light receiving intensity instantaneously maintaining the best emitting condition at all times. MSGB: Micro Spot Gaussian Ultra high-speed calculation processor Comparison of beam diameter Previous 3 μm 1.18 mil Image Sampling All signals are digitalized by a high speed processor while achieving high precision and high speed with its exclusive algorithm.

3 983 Ultra High-speed High-precision Sensor SERIES SYSTEM AYOUT PHOTO PHOTO Data buffering function Using this function, about 65, pieces of measurement value data can be temporarily stored. All of this stored data can be utilized for comparison or analysis by loading it into computers. API provided free of charge (Application Programming Interface) The API can be used to control the from a personal computer connected via USB. Sample programs are also available to make program development easier. Download sample programs from the website of Panasonic Electric Works SUNX ( USB. RS-3C (Exclusive wire) Console PC MEASURE Analog voltage / current output Measurement device, etc. RS-3C PC, etc. I/O Devices such as relays & switches Console Intelligent Monitor Easy to operate using the touch panel and simple display. Waveform monitoring and function setting by computer at great convenience Not only measurement values, but also the wavelength of the amount of light received can be displayed. ight receiving intensity in waveform display Buffering display

4 Ultra High-speed High-precision Sensor SERIES 984 ORDER GUIDE s Type Small beam spot type inear beam spot type Small beam spot type inear beam spot type Small beam spot type inear beam spot type Appearance Measurement center distance and measuring range 1 ±1 mm.394 ±.39 in 3 ±5 mm ±.197 in 11 ±15 mm ±.591 in Resolution size Model No. class.1 µm.4 mil ø µm 5 µm ø.787 mil approx..1 mil 1F 1FE.1 µm.4 mil 7 µm 1F-MK 5 µm mil approx..1 mil 1FE-MK.5 µm.1 mil ø3 µm 3F 5 µm ø1.181 mil approx..1 mil 3FE.5 µm.1 mil 3 1, µm 3F-MK 5 µm mil approx..1 mil 3FE-MK.1 µm.4 mil 11F 5 µm.1 mil ø8 µm 11FE.1 µm ø3.15 mil approx..4 mil 11F5 5 µm.1 mil 11F5E.1 µm.4 mil 11F-MK 5 µm.1 mil 8 1,7 µm 11FE-MK.1 µm mil approx..4 mil 11F5-MK 5 µm.1 mil 11F5E-MK FDA: Class I IEC: Class 1 FDA: Class II IEC: Class FDA: Class II IEC: Class FDA: Class IIIa IEC: Class 3R FDA: Class II IEC: Class FDA: Class IIIa IEC: Class 3R s Compact consoles High-resolution ow-resolution Type Appearance Model No. NPN output PNP output NPN output PNP output C C-P CE CE-P Applicable sensor head 1F(-MK) 3F(-MK) 11F(-MK) 11F5(-MK) 1FE(-MK) 3FE(-MK) 11FE(-MK) 11F5E(-MK) Type Appearance Model No. English display DP-EX Japanese display DP Chinese display DP-CH Korean display DP-KR Options Designation Appearance Model No. Description Intelligent monitor AiM Enables the waveform display of each measurement condition setting and of measurement values as well as monitoring of measurement data and received light intensity data. ND filter F1 When the amount of reflected light is large at the time that a specular reflective sensor is installed, reducing the amount of laser light to an appropriate level enables a higher precision measurement. (ight detection rate: 98 %) CCJ ength: m 6.56 ft, Weight: kg approx. extension cable CCJ5 CCJ1 CCJ CCJ3 ength: 5 m ft, Weight:.4 kg approx. Cabtyre cable with connector on both ends ength: 1 m 3.88 ft, Weight:.7 kg approx. Cable outer diameter: ø6.6 mm ø6 in Connector outer diameter: ø14.7 mm ength: m ft, Weight: 1.4 kg approx. ø.579 in max. ength: 3 m ft, Weight:. kg approx.

5 985 Ultra High-speed High-precision Sensor SERIES SPECIFICATIONS s Type Small beam spot type Item Model No. 1F(E) 3F(E) 11F(E) 11F5(E) Setup mode Specular reflective Diffuse reflective Specular reflective Diffuse reflective Specular reflective Diffuse reflective Specular reflective Measurement center distance 1 mm.394 in 3 mm in 6.4 mm 1.39 in 11 mm in 16.7 mm 4.1 in 11 mm in 16.7 mm 4.1 in Measuring range (Note 3) ±1 mm ±.39 in ±5 mm ±.197 in ±4.6 mm ±.181 in ±15 mm ±.591 in ±14.5 mm ±.571 in ±15 mm ±.591 in ±14.5 mm ±.571 in Resolution [Average number of samples] (Note 4).4 μm.16 mil [56].1 μm.4 mil [4,96] (1FE: 5 μm.1 mil [56]).1 μm.4 mil [56].5 μm.1 mil [4,96] (3FE: 5 μm.1 mil [56]) inearity (Note 5) ±. % F.S. ±.3 % F.S. Temprerature characteristics ight source Class 1 (IEC / JIS / FDA, Notice No.5), Max. output:.1 mw.1 % F.S./ C.4 μm.16 mil [56].1 μm.4 mil [4,96] (11FE and 11F5E: 5 μm.1 mil [56]) Red semiconductor laser (Peak emission wavelength: 658 nm.6 mil) Class (IEC / JIS), Class II (FDA) Max. output: 1 mw size (Note 6) ø μm ø.787 mil approx. ø3 μm ø1.181 mil approx. ø8 μm ø3.15 mil approx. Receiving element Indicator Environmental resistance Cable emission Measuring range Pollution degree Protection inear image sensor Green ED (lights up during laser emission) Class 3R (IEC / JIS), Class IIIa (FDA) Max. output: 5 mw Yellow ED (lights up when near the measurement center distance, blinks when within the measuring range, and lights out when outside of the measuring range.) 3 (Industrial environment) IP67 (IEC) (excluding the connector) Ambient temperature to +45 C +3 to +113 F (No dew condensation), Storage: to +7 C 4 to +158 F Ambient humidity Ambient illuminance Vibration resistance Shock resistance Cable extension Material 35 to 85 % RH, Storage: 35 to 85 % RH Incandescent light: 3, lx at the light-receiving face 1 to 55 Hz (period: 1 min.) frequency, 1.5 mm.59 in amplitude in X,Y and Z directions for two hours each 196 m/s acceleration ( G approx.) in X,Y and Z directions for three times each Cabtyre cable,.5 m 1.64 ft long with connector Extension up to total 3 m ft is possible, with optional cable. Enclosure: Die-cast aluminum, Case cover: Die-cast aluminum, Front cover: Glass Weight 5 g approx. (including cable) 3 g approx. (including cable) Accessory English warning label: 1 set [The FDA regulations conforming type includes a set of both the IEC label (written in English) and JIS label (written in Japanese)]. Notes: 1) 1F, 3F, 11F, 11F5 fall under the Japanese Export Control. These products are introduced to limited countries only. Please refer to PRECAUTIONS FOR PROPER. ) Where measurement conditions have not been specified precisely, the conditions used were as follows: supply voltage 4 V DC, ambient temperature + C +68 F, sampling rate 4 µs, average number of samples: 56, object measured at measurement center distance is made of white ceramic [an aluminum vapor deposition surface reflection mirror was used 1F(E)] and digital measurement values. 3) Measuring range at sampling periods of μs and 1 μs is as follows. Model No. 1F(E) 3F(E) 11F(E), 11F5(E) Setup mode Specular reflective Diffuse reflective Specular reflective Diffuse reflective Specular reflective Sampling μs 1 μs +.1 to +1. mm +.4 to +.39 in +.8 to +1. mm +.3 to +.39 in to +5. mm to in +3.8 to +5. mm +.15 to in to +4.6 mm to in +3.6 to +4.6 mm +.14 to in +.5 to +15. mm +. to in +1.5 to +15. mm +.49 to in +.5 to mm +. to in +1.5 to mm +.49 to in 4) The P-P value for the deviation in the digital measurement values at the measurement center range has been converted for the measurement center distance. 5) Indicates error with respect to the ideal linear values for digital displacement output when standard objects were measured by our company. It may vary depending on the types of objects being measured. 6) This beam diameter is the size at the measurement center distance. These values were defined by using 1/e (13.5 %) of the center light intensity. If there is a slight leakage of light outside the normal spot diameter and if the periphery surrounding the sensing point has a higher reflectivity than the sensing point itself, then the results may be affected.

6 Ultra High-speed High-precision Sensor SERIES 986 SPECIFICATIONS s Type inear beam spot type Item Model No. 1F(E)-MK 3F(E)-MK 11F(E)-MK 11F5(E)-MK Setup mode Specular reflective Diffuse reflective Specular reflective Diffuse reflective Specular reflective Diffuse reflective Specular reflective Measurement center distance 1 mm.394 in 3 mm in 6.4 mm 1.39 in 11 mm in 16.7 mm 4.1 in 11 mm in 16.7 mm 4.1 in Measuring range (Note 3) ±1 mm ±.39 in ±5 mm ±.197 in ±4.6 mm ±.181 in ±15 mm ±.591 in ±14.5 mm ±.571 in ±15 mm ±.591 in ±14.5 mm ±.571 in Resolution [Average number of samples] (Note 4).4 μm.16 mil [56].1 μm.4 mil [4,96] (1FE-MK: 5 μm.1 mil [56]).1 μm.4 mil [56].5 μm.1 mil [4,96] (3FE-MK: 5 μm.1 mil [56]) inearity (Note 5) ±. % F.S. ±.3 % F.S. Temprerature characteristics.4 μm.16 mil [56].1 μm.4 mil [4,96] (11FE-MK and 11F5E-MK: 5 μm.1 mil [56]).1 % F.S./ C ight source size (Note 6) Receiving element Class 1 (IEC / JIS / FDA, Notice No.5), Max. output:.1 mw 7 μm mil approx. Red semiconductor laser (Peak emission wavelength: 658 nm.6 mil) Class (IEC / JIS), Class II (FDA) Max. output: 1 mw 3 1, μm mil approx. inear image sensor Class 3R (IEC / JIS), Class IIIa (FDA) Max. output: 5 mw 8 1,7 μm mil approx. Indicator Environmental resistance Cable emission Measuring range Pollution degree Protection Green ED (lights up during laser emission) Yellow ED (lights up when near the measurement center distance, blinks when within the measuring range, and lights out when outside of the measuring range.) 3 (Industrial environment) IP67 (IEC) (excluding the connector) Ambient temperature to +45 C +3 to +113 F (No dew condensation), Storage: to +7 C 4 to +158 F Ambient humidity Ambient illuminance Vibration resistance Shock resistance Cable extension Material 35 to 85 % RH, Storage: 35 to 85 % RH Incandescent light: 3, lx at the light-receiving face 1 to 55 Hz (period: 1 min.) frequency, 1.5 mm.59 in amplitude in X,Y and Z directions for two hours each 196 m/s acceleration ( G approx.) in X,Y and Z directions for three times each Cabtyre cable,.5 m 1.64 ft long with connector Extension up to total 3 m ft is possible, with optional cable. Enclosure: Die-cast aluminum, Case cover: Die-cast aluminum, Front cover: Glass Weight 5 g approx. (including cable) 3 g approx. (including cable) Accessory English warning label: 1 set [The FDA regulations conforming type includes a set of both the IEC label (written in English) and JIS label (written in Japanese)]. Notes: 1) 1F-MK, 3F-MK, 11F-MK, 11F5-MK fall under the Japanese Export Control. These products are introduced to limited countries only. Please refer to PRECAUTIONS FOR PROPER. ) Where measurement conditions have not been specified precisely, the conditions used were as follows: supply voltage 4 V DC, ambient temperature + C +68 F, sampling rate 4 µs, average number of samples: 56, object measured at measurement center distance is made of white ceramic [an aluminum vapor deposition surface reflection mirror was used 1F(E)-MK] and digital measurement values. 3) Measuring range at sampling periods of μs and 1 μs is as follows. Model No. 1F(E)-MK 3F(E)-MK 11F(E)-MK, 11F5(E)-MK Setup mode Specular reflective Diffuse reflective Specular reflective Diffuse reflective Specular reflective Sampling μs 1 μs +.1 to +1. mm +.4 to +.39 in +.8 to +1. mm +.3 to +.39 in to +5. mm to in +3.8 to +5. mm +.15 to in to +4.6 mm to in +3.6 to +4.6 mm +.14 to in +.5 to +15. mm +. to in +1.5 to +15. mm +.49 to in +.5 to mm +. to in +1.5 to mm +.49 to in 4) The P-P value for the deviation in the digital measurement values at the measurement center range has been converted for the measurement center distance. 5) Indicates error with respect to the ideal linear values for digital displacement output when standard objects were measured by our company. It may vary depending on the types of objects being measured. 6) This beam diameter is the size at the measurement center distance. These values were defined by using 1/e (13.5 %) of the center light intensity. If there is a slight leakage of light outside the normal spot diameter and if the periphery surrounding the sensing point has a higher reflectivity than the sensing point itself, then the results may be affected.

7 987 Ultra High-speed High-precision Sensor SERIES SPECIFICATIONS s Type NPN output type PNP output type Item Model No. C(E) C(E)-P Connectale sensor head Number of connectable units: Max. units. Supply voltage 4 V DC ±1 % including ripple. (P-P) 5 ma approx. at sensor heads connected Current consumption 35 ma approx. at 1 sensor head connected (1 ma approx. is additionally required when the mini console is connected) Sampling cycle Analog output Voltage (Note ) Current (Note 3) Alarm output Output operation Short-circuit protection Judgment output (HI, GO, O) Output operation Short-circuit protection Strobe output Output operation Short-circuit protection 1 µs, µs, 4 µs, 1 µs, µs, 4 µs, 1 ms, ms Voltage output scale: 5 to +/F.S (initial value) Output range during normal status: 1. to +1. V Output at abnormal status: 1.8 V or +1.8 V Resolution: mv, inearity: ±.5 % F.S. Max. ma, output impedance 5 Ω, Response delay time: 1.5 µs/v approx. Current output scale: 4 to ma/f.s (initial value) Output range during normal status: to 4 ma Output at abnormal status: 1 ma or 5 ma Resolution: 3 µa, inearity ±.5% F.S. oad impedance: 5 Ωmax., Response delay time: 1 µs approx. NPN open-collector transistor Maximum sink current: 1 ma Applied voltage: 3 V DC or less [between alarm output and Common( )] Residual voltage: 1 V or less (at 1 ma sink current) NPN open-collector transistor Maximum sink current: 1 ma Applied voltage: 3 V DC or less [between judgment output to Common( )] Residual voltage: 1 V or less (at 1 ma sink current) NPN open-collector transistor Maximum sink current: 1 ma Applied voltage: 3 V DC or less [between strobe output to Common( )] Residual voltage: 1 V or less (at 1 ma sink current) Opened when the amount of light is insufficient Incorporated Opened at output operation Incorporated Opened at data determination Incorporated PNP open-collector transistor Maximum source current: 1 ma Applied voltage: 3 V DC or less (between alarm output and +V) Residual voltage: 1 V or less (at 1 ma source current) PNP open-collector transistor Maximum source current: 1 ma Applied voltage: 3 V DC or less (between judgment output to +V) Residual voltage: 1 V or less (at 1 ma source current) PNP open-collector transistor Maximum source current: 1 ma Applied voltage: 3 V DC or less (between strobe output to +V) Residual voltage: 1 V or less (at 1 ma source current) Remote interlock input control input Zero set input emission is delayed when connected to Common ( ). emission stop at open Applied voltage: 3 V DC or less (eak current:.1 ma or less) emission is stopped when connected to Common ( ). is emitted immediately after opened. Applied voltage: 3 V DC or less (eak current:.1 ma or less) Zero set is ON when connected with Common ( ). Zero set turns to OFF after continuously connected to Common ( ) for one second. Applied voltage: 3 V DC or less (eak current:.1 ma or less) emission is delayed when connected to I (+). emission stop at open Applied voltage: 3 V DC or less (eak current:.1 ma or less) emission is stopped when connected to external power (+). is emitted immediately after opened. Applied voltage: 3 V DC or less (eak current:.1 ma or less) Zero set is ON when connected with external power (+). Zero set turns to OFF after continuously connected to external power (+) for one second. Applied voltage: 3 V DC or less (eak current:.1 ma or less) Timing input ON at/during connection to Common ( ) (depending on analysis mode) Applied voltage: 3 V DC or less (eak current:.1 ma or less) ON at/during connection to external power (+) (depending on analysis mode) Applied voltage: 3 V DC or less (eak current:.1 ma or less) Reset input Reset is done when connected to Common ( ). Applied voltage: 3 V DC or less (eak current:.1 ma or less) Reset is done when connected to external power (+). Applied voltage: 3 V DC or less (eak current:.1 ma or less) Memory change input Memory is specified when connected to Common ( ). Applied voltage: 3 V DC or less (eak current:.1 ma or less) Memory is specified when connected to external power (+). Applied voltage: 3 V DC or less (eak current:.1 ma or less)

8 Ultra High-speed High-precision Sensor SERIES 988 SPECIFICATIONS s Item Power Type NPN output type PNP output type Model No. C(E) C(E)-P Green ED (lights up at power on) Indicator A radiation B radiation Alarm 1 Alarm RS-3C interface USB interface Green ED (lights up during or immediately before laser emission of sensor head A) Green ED (lights up during or immediately before laser emission of sensor head B) Red ED (lights up when OUT1 can not be measured due to insufficient amount of light) Red ED (lights up when OUT can not be measured due to insufficient amount of light) Baud rate: 9,6, 19,, 38,4, 115, bit/s USB. Full-speed (USB 1.1 compatible) compliant Setting / data display Environmental resistance Material Weight Compact console (optional) Ambient temperature to +5 C +3 to +1 F (No dew condensation or icing allowed), Storage: to +7 C 4 to +158 F Ambient humidity Vibration resistance Shock resistance Accessories 35 to 85 %RH 1 to 55 Hz frequency (period: 1 min.),.75 mm.3 in amplitude in X, Y and Z directions for 3 min. each 196 m/s acceleration (G approx.) in X, Y, and Z directions for three times each Case: Polycarbonate 45 g approx. CD-ROM: 1 pc., USB cable ( m 6.56 ft long): 1 pc., Short bracket: 1 pc. Notes: 1) C and C-P fall under the Japanese Export Control. These products are introduced to limited countries only. Please refer to PRECAUTIONS FOR PROPER. ) The linearity is F.S.= V to digital measurement value. Response delay time is the period after update of measurement value. 3) The linearity is F.S.=16 ma to digital measurement value. Response delay time is the period after update of measurement value. Compact console Item Power Display Display element Back light Type English display Japanese display Chinese display Korean display Model No. DP-EX DP DP-CH DP-KR Supplied by controller STN monochrome CD White ED Display range to anguage English Japanese Chinese Korean Touch panel Environmental resistance Material Weight Operational force.5 N or less ifetime 1,, times or more (Note 1) Environment resistance IP65 (at initial status) (Note ) Dust prevention and drip-proof at the front panel (waterproof packing is used at the contact surface to board) Ambient temperature to +5 C +3 to +1 F (No dew condensation or icing allowed), Storage: to +6 C 4 to +14 F Ambient humidity Electrostatic noise resistance Vibration resistance Shock resistance Accessories to 85 %RH, Storage: 1 to 85 %RH 5, V or more (panel surface) 1 to 55 Hz frequency,.75 mm.3 in amplitude in X, Y and Z directions for 1 min. each 98 m/s or more acceleration (1G approx.) in X, Y and Z directions for four times each Case: PPE, Front protective sheet: Polyester 3 g approx. Connector cable for connecting the controller to the console : 1 pc., Mounting bracket: 1 set Notes: 1) This value indicates the average lifetime of the unit when used under a normal temperature of +5 C +77 F. ) When reinstalling the console, replace the water proof packing. (Part No: AIGT181, 1 packs included)

9 989 Ultra High-speed High-precision Sensor SERIES I/O CIRCUIT AND WIRING DIAGRAMS (ERS) NPN output type Main circuit 1 ma max 1 ma max 1 ma max 1 ma max 1 ma max intemal circuit 4 V Alarm output A1, A Strobe output ST1, ST Judgment output HI1, HI Judgment output GO1, GO Judgment output O1, O Common( ) Zero set input ZS1, ZS Timing input TM1, TM Rest input RS1, RS Memory change input M~M3 control input SRA, SRB Remote interlock input I Common( ) V FG *1 NPN open-collector Non-voltage input transistor output IN IN or Common( ) Common( ) oad oad oad oad oad * * Extemal connection example Non-voltage input I Common( ) External power 3 V DC or less Main unit power 4 V DC ±1 % *1 PNP output type Main circuit 1 ma max 1 ma max 1 ma max 1 ma max 1 ma max intemal circuit 4 V Common(+) Alarm output A1, A oad Strobe output ST1, ST oad Judgment output HI1, HI oad Judgment output GO1, GO oad Judgment output O1, O oad Common( ) *1 * Non-voltage input IN Common( ) or Zero set input ZS1, ZS Timing input TM1, TM Rest input RS1, RS Memory change input M~M3 control input SRA, SRB Remote interlock input I+ Remote interlock input I Common( ) V FG PNP open-collector transistor output IN Common( ) * Extemal connection example Non-voltage input I + I *1 External power 3 V DC or less Main unit power 4 V DC ±1 % Analog output (Common in NPN output type and PNP output type) Main circuit 5 Ω +1 V DC Analog input device 1.8 to +1.8 V (V) Voltage output AGND AGND 1 to 5 ma (I) Current output intemal circuit AGND AGND Extemal connection example Notes: 1) Do not short-circuit analog output terminals or apply voltage to them. ) Use shielded wires for analog outputs.

10 Ultra High-speed High-precision Sensor SERIES 99 I/O CIRCUIT AND WIRING DIAGRAMS (ERS) Terminal arrangement Terminal block 1 Terminal block 3 Terminal block Terminal block 1 Terminal block Terminal block 3 Terminal Function NPN PNP (V)1 Analog voltage output (for OUT1) AGND Analog ground (I)1 Analog current output (for OUT1) (V) Analog voltage output (for OUT) AGND Analog ground (I) Analog current output (for OUT) SRA SRB I control input (for Head A) stop during short circuit control input (for Head B) stop during short circuit ( ) Common ( ) I- Remote interlock stop when opened. ( ) I+ Remote interlock common Terminal NPN PNP ZS TM RS Function Zero set input (for OUT) ON during short circuit (Note 1) Timing input (for OUT) ON during short circuit Reset input (for OUT) ON during short circuit ( ) Common ( ) A ST HI GO O Alarm output (for OUT) Strobe output (for OUT) Judgment HI output (for OUT) Judgment GO output (for OUT) Judgment O output (for OUT) Reserved terminal (Note ) ( ) (+) Common ( ) / Common (+) M M1 M Memory change (16 ways) Terminal NPN PNP ZS1 TM1 RS1 Function Zero set input (for OUT1) ON during short circuit (Note 1) Timing input (for OUT1) ON during short circuit Reset input (for OUT1) ON during short circuit Reserved terminal Reserved terminal ( ) Common ( ) A1 ST1 HI1 GO1 O1 Alarm output (for OUT1) Strobe output (for OUT1) Judgment HI output (for OUT1) Judgment GO output (for OUT1) Judgment O output (for OUT1) Reserved terminal (Note ) ( ) (+) Common ( ) / Common (+) 4V 4 V DC input for power supply M3 ( ) Common ( ) Notes: 1) Turn off the terminal in case short circuit lasts for more than one second. ) Do not connect anything to the reserved terminals; they are connected to the internal circuit. V Power supply ground V FG Frame ground Notes: 1) Turn off the terminal in case short circuit lasts for more than one second. ) Do not connect anything to the reserved terminals; they are connected to the internal circuit. SENSING CHARACTERISTICS (TYPICA) 1F(E) Correlation between measuring distance and error characteristics Setup mode: Specular reflective Aluminum vapor deposition surface reflection mirror (, ±.5 ) Vertical orientation + Aluminum vapor deposition surface reflection mirror (, ± ) Horizontal orientation + Vertical positioning Sampling rate: 4 μs Average number of.5 samples: Measuring distance (mm in) Horizontal positioning.4 + Sampling rate: 4 μs Average number of samples: Measuring distance (mm in)

11 991 Ultra High-speed High-precision Sensor SERIES SENSING CHARACTERISTICS (TYPICA) 3F(E) Correlation between measuring distance and error characteristics Setup mode: Diffuse reflective White ceramic (, ±1 ) Vertical orientation + Setup mode: Specular reflective Aluminum vapor deposition surface reflection mirror (, ±.5 ) Vertical orientation + 11F(E) 11F5(E) White ceramic (, ±1 ) Horizontal orientation + Aluminum vapor deposition surface reflection mirror (, ± ) Horizontal orientation + Vertical positioning Sampling rate: 4 μs Average number of samples: 56 Measuring distance (mm in) Vertical positioning Sampling rate: 4 μs Average number of samples: 56 Correlation between measuring distance and error characteristics Vertical positioning Horizontal positioning.4.4 Setup mode: Diffuse reflective +1 1 Sampling rate: 4 μs Average number of samples: White ceramic (, ±1 ) Vertical orientation + + Setup mode: Specular reflective Aluminum vapor deposition surface reflection mirror (, ±.1 ) Vertical orientation + White ceramic (, ±1 ) Horizontal orientation Aluminum vapor deposition surface reflection mirror (, ±.5 ) Horizontal orientation + PRECAUTIONS FOR PROPER This catalog is a guide to select a suitable product. Be sure to read instruction manual attached to the product prior to its use. For CE marking compliance, a sensor head, controller and console with the mark attached must be used together. Check that the mark is attached to each device to be connected Measuring distance (mm in) Measuring distance (mm in) Vertical positioning Sampling rate: 4 μs Average number of.1 samples: Measuring distance (mm in) Horizontal positioning Sampling rate: 4 μs Average number of samples: 56 Measuring distance (mm in) Horizontal positioning.4 + Sampling rate: 4 μs Average number of samples: Measuring distance (mm in) Sampling rate: 4 μs Average number of samples: Measuring distance (mm in) Horizontal positioning Sampling rate: 4 μs Average number of.5 samples: Measuring distance (mm in) Never use this product as a sensing device for personnel protection. In case of using sensing devices for personnel protection, use products which meet laws and standards, such as OSHA, ANSI or IEC etc., for personnel protection applicable in each region or country Refer to General precautions and About laser beam.

12 Ultra High-speed High-precision Sensor SERIES 99 PRECAUTIONS FOR PROPER Refer to General precautions and About laser beam. 1F 3F, 11F 11F5 Do not operate products using methods other than those described in the instruction manual included with each product. Control or adjustment through procedures other than those specified may cause hazardous laser radiation exposure. The following labels are attached to the products. Handle each product according to the instruction given on the warning label. This product is classified as a Class 1 Product in IEC / JIS standards and a Class I Product in FDA regulations 1 CFR Do not look at the laser beam through optical devices such as a lens. This product is classified as a Class Product in IEC / JIS standards and a Class II Product in FDA regulations 1 CFR Do not look at the laser beam directly or through optical devices such as a lens. This product is classified as a Class 3R Product in IEC / JIS standards and a Class IIIa Product in FDA regulations 1 CFR Never directly look at or touch the laser beam or its reflection. Below mentioned products fall under Japanese Export Control, which is defined by Foreign Exchange and Foreign Trade Act. Therefore, anyone who wishes to export or transfer these products outside of Japan is required to obtain the necessary license from the Ministry of Economy, Trade and Industry of Japan. Also, these products fall under international export control regulations, such as Nuclear Suppliers Group (NSG) guidelines 1.B.3.b.1 and Wassenaar Arrangement (WA).B.6.b.1.a, and are objects of the regulation. Please comply with the export control in each country. Products subject to control : 1F, 1F-MK, 3F, 3F-MK, 11F, 11F-MK, 11F5, 11F5-MK : C, C-P Note: These products are introduced to limited countries only. Please contact our office for details. size (Unit: mm in) 1F(E) Small beam spot type Measurement center distance Measuring range F(E) Small beam spot type Measurement center distance Measuring range F(E) Small beam spot type Measurement center distance Measuring range F(E)-MK inear beam spot type Measurement center distance Measuring range F(E)-MK inear beam spot type Measurement center distance Measuring range F(E)-MK inear beam spot type Measurement center distance Measuring range

13 993 Ultra High-speed High-precision Sensor SERIES PRECAUTIONS FOR PROPER Refer to General precautions and About laser beam. Mutual interference When installing two or more sensor heads side by side, mutual interference will not occur if the laser spots from other sensor heads do not fall within the shaded areas of the sensor head in the figure below. When connecting two sensor heads to one controller, the mutual interference prevention function can be used. Therefore the measures shown below are not necessary. 3F mounting direction To obtain the greatest precision, the sensor head should be oriented facing the direction of movement of the object s surface, as shown in the figure below. Object with variations in material or color (Unit: mm in) Rotating object 11F Object that has large differences in gaps, grooves and colors (Unit: mm in) Safety standards for laser beam products A laser beam can harm human being s eyes, skin, etc., because of its high energy density. IEC has classified laser products according to the degree of hazard and the stipulated safety requirements. The series is classified as Class 1 / Class / Class 3R laser. (Refer to About laser beam.) Safe use of laser products For the purpose of preventing users from suffering injuries by laser products, IEC 685-1(Safety of laser products). Kindly check the standards before use. (Refer to About laser beam.)

14 Ultra High-speed High-precision Sensor SERIES 994 PRECAUTIONS FOR PROPER Refer to General precautions and About laser beam. Fuctional description Description emission indicator (Green ED) Measurement range indicator (Yellow ED) Function ights up during laser emission. ights up when the target reaches at approximately center of the measurement. Blinks when the target enters within the measurement range. Turns off the light when the target goes out of the measurement range. 1 3 Description POWER indicator AM1 (Alarm) indicator AM (Alarm) indicator Function ights up in green when electricity is provided to the controller. Abnormal condition indicator for OUT1. ights up in red during dark status (poor light intensity) of OUT1 or the sensor head is in unconnected status. Abnormal condition indicator for OUT. ights up in red during dark status (poor light intensity) of OUT or the sensor head is in unconnected status. 3 ight emitter Emits the laser light. 4 A indicator ights up in green during the laser radiation of Head A. 4 ight receiver 5 Warning label Receives the laser specular light from a measurement target. Shows the laser emission position. Please read carefully before use. 5 B indicator ights up in green during the laser radiation of Head B Analog output terminal control terminal Remote interlock terminal Terminal for analog data output. Stops laser emission in case of short-circuiting. Stops laser emission when its opened. 9 USB connector Used for communication with PC using USB Console connection connector RS-3C connector 1 I/O terminal Used for connecting the mini console. Used for communication with the control devices using RS-3C. Terminal for various I/O (Zero set input, Timing input, Reset input, Alarm output, Strobe output, and Judgment output) and memory change. 13 Power terminal Terminal for power supply to the controller A connection connector B connection connector DIN rail mounting hook recognizes a sensor head which is connected to this connector as A and starts operation. recognizes a sensor head which is connected to this connector as B and starts operation. Used for hooking/removing the sensor heads to/from the 35mm width DIN rail with one-touch simple operation. Note: In case of connecting one sensor head to the controller, be sure to connect the sensor head to 14 the sensor head A connection (HEAD A) side. If the sensor head is connected to 15 the sensor head B connection (HEAD B) side, the measurement cannot be performed.

15 995 Ultra High-speed High-precision Sensor SERIES DIMENSIONS (Unit: mm in) The CAD data in the dimensions can be downloaded from our website. 1F(E) 1F(E)-MK Set mode: Specular reflective type ( ) emitting 1.63 axis receiving axis 75 Measurement ( center distance ) ( ).866 ø6.6 ø M5 Mounting holes, deep (for both sides) ( ) ø14.7 ø.579 3F(E) 3F(E)-MK Set mode: Diffuse reflective type attenuator ( ) -M5 Measurement center distance (3.6.14) emitting axis receiving axis ( ) Mounting holes, deep (for both sides) (55) ø6.6 ø (ø14.7 ø.579) Set mode: Specular reflective type emitting axis receiving axis Measurement ( ) center distance ( ) (.5.98) (.14) F (E) 11F (E)-MK Set mode: Diffuse reflective type attenuator Measurement (.5.98) ( center distanoe ) -M (3.6.14) receiving axis -emitting axis (.185) Mounting holes deep (for both sides) (55) ø6.6 ø ( ) ø14.7 ø.579 Set mode: Specular reflective type ( ) Measurement center distanoe emitting axis receiving axis ( ) (.14 ) 3.4 (.134 )

16 Ultra High-speed High-precision Sensor SERIES 996 DIMENSIONS (Unit: mm in) The CAD data in the dimensions can be downloaded from our website. C(E) C(E)-P DP-EX Compact console ( ) (Display part) (Packing) F (5.197) Suitable for 35 mm in width DIN rail ø4.6 ø (4.158) (Panel thickness: 5 mm.197 in) (8.315) Panel cut-out dimensions Note: The panel thickness should be 1 to 5 mm.39 to.197 in. ND filter.866 Mounting drawing with a sensor head Material: Alminum (Mounting retention) Glass (ND part) ( ) (1.6.63) Notes: 1) Mounting cannot be preformed when the beam attenuator of the sensor head is in use. ) 1F (-MK) cannot be mounted.