Denton Vacuum Phoenix 400 Continuous In-Line Sputtering Deposition System General Specifications

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1 Phoenix 400 Continuous In-Line Sputtering Deposition System s

2 Phoenix 400X System Overview Denton Vacuum s Phoenix 400X Continuous In-Line Sputtering system provides users optimal uniform coating thicknesses and highly homogeneous coatings. Denton Vacuum s Phoenix 400X system is comprised of five distinct stations or chambers, including: Load/unload, two dual-interlocked pre-process buffer, single-process chamber configured to accommodate up to 3 rotary sputter sources. As substrates pass linearly on the transport system, the flat pallet or carrier is synchronized in its passage among these five separate chambers, from initial intake into, through interlocked buffer, to process under sputtering cathodes, emerging though an additional interlocked buffer, and finally out exit load lock and completion of the run. The Phoenix 400X Continuous In-Line Sputtering software provides an automated, synchronized conveyance for challenging layer stacks and simple product mixes. Carriers are configured to accommodate 2 x 3 substrates. Denton products come with full process acceptance testing at Denton Vacuum, installation, customer site process acceptance, and an 18 month parts and labor warranty. Page 2 of 9

3 System Details Pallet loading and unloading stations Atmosphere Automatic transfer thru gate valve assembly. Easily adaptable for factory automation Expandable One (1) EH250/E2M80 mechanical pump and blower package for fast cycling Buffer chambers Two (2) Chamber with full-width top opening lids. Approximate internal chamber dimensions: 30.0 long x 39.0 wide x 9.0 tall. One (1) Ebara EBT 2400 l/s turbo pump Gas flow control and gauging and valves (3 position gate valve) for equalizing pressure between the buffer chamber and the process chamber 304 stainless steel construction. Viewport to provide viewing of substrate pallets. Automatic transfer thru gate valve assembly. Process Chamber Main process chamber for horizontal sputter-down deposition: Approximate internal chamber dimensions: 60.0 long x 39.0 wide x 9.0 tall. 304 stainless steel construction. Two 10.0 pumping port. Viewports to provide viewing of substrate and transport. Machined port for connection to buffers through transfer valves. Spare ports for integration of analytical instruments. Three cathode positions lid mounted for sputtering down. Cross contamination shields. Mechanical lifts to raise the lid with integral safety latches. Two complete sets of removable, internal stainless steel shields (multi-piece construction to facilitate removal and reinstallation). Page 3 of 9

4 Vacuum Pumping System Base pressure to be better than 2x10-7 torr. (2) Ebara EBT 2400 l/s turbo pumps for main deposition chamber. Water-cooled, supported by internal water manifold. Turbo temperature display integrated to system controls. (2) VAT 10.0 three position gate valves with NW 25 gauge port (high vacuum valve). (2) Ebara EV-a10-2U dry mechanical pumps (36 CFM) For supporting the turbo pumps in the deposition chamber for roughing. System Vacuum Gauging and Control (5) Inficon BPG400 Full Range Gauge transmitters (main chamber, turbo pumps stub and buffers) (8) Inficon PSG500 Pirani Gauge transmitters (above the rough pumps). (3) Inficon CDG045 Capacitance Manometer with ceramic diaphragm. Substrate Transport Fully automatic horizontal transport system with external drive motor and ferrofluidic rotary motion feedthrough. Stainless steel construction. Multi pallet handling with position sensors. Automatic pallet transfer from load lock to load lock. Variable speed control. Position sensors with live feedback to system controls. Fully integrated to system controls for speed control and automatic recipe capabilities. (20) Pallets with a working deposition area of 22 x 22 - machined for 2 x 3 substartes, minimum 60 substrates/pallet positioned to allow room for operator handling. Page 4 of 9

5 Sputter Sources (Qty 1) high utilization 27 L x 5 diameter rotary cathode (sputter up). Source to substrate distance: 6.0. Cooling water flow sense on each cathode dedicated cooling water circuit (safety interlock). MKS 2179 Mass flow controller (200 SCCM full scale): Mass flow controller supplied with close-coupled, bellows-sealed, electropneumatic, isolation valve. All controllers interfaced to discrete analog I/O for flow control and display. Sputter Power Supply (Qty 1) 20.0kW DC power supply. Fully integrated to system controls for remote operation in manual and automatic modes. Hardwired safety interlock (chamber door, vacuum safety switch, cathode water, output cable disconnected). Hardwired interlocks at cathode end of the power output cables to prevent operation of power supply with detached output cable. Power supply interfaced for remote on/off and output setpoint operation in manual and automatic modes. Power setpoint can be ramped up during programmed recipe steps. System Control and Automation Computer control (Windows); flat-panel display; keyboard/mouse interface. ProcessPro control software configured for specific delivered hardware: Computer control of pumps, valves, deposition sources, transport, gauging, gas/flow control, setpoints, and automatic process sequence activation. Multiple log-in capabilities. Graphic system display provides complete operational interface to subsystem controls with data entry and feedback. Also displays of current system status. Alarm structure includes visual and audible alerts. Datalog file generated and stored for each automatic sequence. Page 5 of 9

6 System Control and Automation (continued) Full remote setpoint capability: Gas flow rates. Power supply setpoints. Active cathode selection. Multiple operation modes: Manual: front panel manual operation of all subsystems; all safety interlocks are active. Automatic: automatic operation of all subsystems via stored recipe files; manual operation inactive. Service: password protected activation; front panel manual operation of all subsystems; safety interlocks inactive. Recipe generation: automatic process sequence creation and editing. Standard Windows file operations: File Save, Save As, etc. Remote system access via user-controlled internet connection User-defined alerts can be programmed to alert user staff that a machine alarm has been triggered. OPTION: UPS system for data-safe shutdown of control system and computer in the event of main power failure. System Electronic Documentation (provided on USB thumb drive) Complete system documentation, (operations, mechanical, electrical, & maintenance guide) Complete set of all sub-system manuals Complete set of electrical schematics Complete set of mechanical drawings necessary for system maintenance and repair Page 6 of 9

7 Mechanical Requirements Commercially purchased components will be new, of industrial quality and demonstrated "best in class" availability. All ferrous or aluminum metals will have proper finishes to prevent corrosion or oxidation. All pneumatic lines, valves, cylinders and flow controls are designed to operate at a minimum pressure of 80 psi and a maximum pressure of 110 psi. Electrical Standards All electrical equipment shall be in compliance with UL and National Electric Code. All signal power will be isolated from system power; proper shielding and routing practices must be followed. All electrical, electronic, and optical sensors must be adequately protected from process contamination. Three-phase distribution is 208 VAC, 50/60 cycle (all equipment with three phase inputs must be supplied for this voltage); single-phase inputs shall be 208 VAC and 120 VAC. All equipment shall have panelized control with a single entrance protection by a heavy duty disconnect switch. The disconnect switch will have a "lockout" provision to ensure that no electrical power can be delivered to the system during maintenance operations. System will include an upgrade to the power distribution panel to accommodate as many as four cathodes and an additional cryo pump. SAFETY STANDARDS Safety Interlocks The system will be equipped with a hardwired safety interlock system, which fully protects operators and maintenance personnel from personal injury. The following hardwired interlocks will be provided: High Voltage Power supplies: power supply key switch (if equipped), vacuum safety, output cable end interlocks. Bellows switch, frame lower-skin switch and chamber door Heat Power: Vacuum safety bellows switch and chamber door The status of all hardwired safety interlocks will be displayed to the system operator(s) at all times. Page 7 of 9

8 System controller software interlocks will duplicate all hardwired safety interlock status. Moving Parts Sliding surfaces and pinch points must be fully guarded to prevent injury to operators and maintenance personnel. In the event of a power failure, all moving parts are to come to a complete stop. Upon initiating a restart cycle, all moving parts are to proceed to their home position without damage to the equipment or injury to operations and/or maintenance personnel. Power Systems In the event of an interlock dropout or power failure, all power to internal sources of energy power supplies) will be interrupted. When power is restored, or an interlock is satisfied, a hard, manual reset of the affected subsystem will be required. High voltage transformers, vacuum feedthroughs and interconnecting cabling will be enclosed in water-tight enclosures (NEMA 12 rating or better). UTILITIES Electrical 208 VAC (+/- 5 %), 50/60 Hz, 3 phase. 380VAC option available. Panelized control with single entrance protection by heavy duty disconnect switch with "lockout" provision, provided by DVI. Electrical main current rating is not specified until final electrical schematics are drawn. Contact Denton Vacuum for final current rating of the system. Cooling Water GPM; C; psi differential between supply and return (50 psi maximum inlet pressure). Water flow is estimated. Exact water flow requirements to be determined during system design. Contact Denton Vacuum for the final water flow requirements of the system. Multi-circuit water manifolds; supply and return metering valves on each circuit with temperature indication on each circuit's return line. Water circuits requiring flow "sense" (hardware interlocks) will be equipped with a flow switch. Water manifolds will be configured to support one extra cathode. Page 8 of 9

9 Compressed Air Normal dry shop air, psi (system valve operation). Pressure interlock switch to cause system fault alarm for low incoming pressure. Recommended air quality: Dew point: maximum of 2 degrees Centigrade Oil content: 1-5 mg/m 3 Foreign particles, size: maximum of 5 microns, and Foreign particles, concentration: maximum of 5 mg/m 3 Nitrogen Preferentially evaporated from liquid N 2. Customer supplied Process Gas 5N purity. 10 psi. Customer supplied Electrical Grounding Ground connection must be between vacuum system and building steel. Denton supplies 25 of 3 x.050 flat copper conductor. Copper conductor is bolted to the rear of system and is bolted to the nearest available building steel. Never interrupt the protected earth ground. Internet Line Customer supplied direct, internet line for remote online access. Page 9 of 9

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