PCG550, PCG552, PCG554

Transcription

1 PCG550, PCG55, PCG554 Pirani Capacitance Diaphragm Gauge The INFICON Pirani Capacitance Diaphragm Gauge (PCG55x) combines the INFICON Pirani technology with the advantages of a ceramic capacitance diaphragm sensor in a single product. In the measurement range between 10 mbar and atmosphere the capacitance diaphragm technology provides gas-type independent, highly accurate values for reliable pressure measurement. The PCG55x offers also a variety of features which allows the right product configuration for the demanded application. ADVANTAGES Gas-type independent above 10 mbar allows safe venting with any gas mixture High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection Fast atmospheric detection eliminates waiting time and shortens process cycle Versatile of mounting orientation provides engineering freedom in tool design Available with Tungsten (PCG550) or Nickel (PCG55) filament or with a fully ceramic coated (PCG554) sensor unit for highly corrosive applications Easy to exchange plug & play sensor element with on-board calibration data guarantees high reproducibility and low cost of ownership Selectable output signal for easy integration Optional atmospheric switch, display and digital interfaces Diagnostic port on all versions Compliance & standards: CE, EN, UL, CSA, RoHS applications Load Lock control Fore vacuum pressure measurement Safety circuits in vacuum systems General vacuum measurement and control in the medium and rough vacuum range

2 ORDERING INFORMATION PCG550, PCG55, PCG554 3 P C Filament Tungsten 1 Nickel Ceramic coated 3 Tungsten, galv. isolated 1) 6 Nickel, galv. isolated 1) 7 Ceramic coated, galv. isolated 1) 8 Measurement range V 3) V V V Digital interface Unit ) mbar 0 Torr 1 Pa micron 3 Flange DN 16 ISO-KF 1 DN 16 ISO-KF long tube DN 16 CF-F 4 DN 16 CF-R long tube 5 DN 5 ISO-KF 6 4 VCR female D 8 VCR female E 1/8" NPT F Surface mount 9 mm / 1.15 inch K 4 VCR 90 female M 7/16-0 UNF male N 0 None 3) 1 DeviceNet 4) Profibus DP Electrical connection 0 FCC, 8-pin 3) 1 D-Sub, 9-pin D-Sub, 15-pin HD 4 D-Sub, 15-pin HD, with RS485 5) Display, switching functions 0 None 1 LCD setpoints (solid state) 3 ATM & setpoints (solid state) 4 LCD & setpoints (solid state) 5 ATM & LCD & setpoints (solid state) 6 setpoints (mechanical) 6) 7 ATM & setpoints (mechanical) 6) 1) Only with D-Sub 9-pin connector available ) When selecting LCD (liquid crystal display) choose desired pressure unit 3) Choose these settings when using an INFICON VGC40x controller 4) Only with D-Sub 9-pin connector and galvanically isolated available 5) Only without additional digital interface available 6) Only with D-Sub 9-pin connector without LCD available

3 SPECIFICATIONS Type PCG550 PCG55 PCG554 Filament Tungsten Nickel ceramic coated Measurement range mbar (Torr) ( ) Accuracy mbar (N ) % of reading ± mbar (N ) % of reading ± mbar % of reading ± mbar % of reading ±.5 Repeatability mbar (N ) % of reading ± Admissible pressure bar (absolute) 5 Pressure, max. bar (absolute) 10 Admissible temperature Operation (ambient) C Storage C Bakeout at flange C 80 Long tube C 50 Supply voltage V / A DC Power consumption Without fieldbus W.5 DeviceNet W 3 Profibus W 3 Output signal analog 3PCx-0xx-xxx0 V xxx1 V xxx V xxx3 V Measuring range 3PCx-0xx-xxx0 V xxx1 V xxx V xxx3 V Voltage vs. pressure 3PCx-0xx-xxx0 V / Decade PCx-0xx-xxx1 / -xxx / -xxx3 V / Decade 1 Load impedance kω >10 Setpoint relay Range (N ) mbar Relay contact n.o., potential free Hysteresis % of threshold 10 Contact rating Solid state relays V / A DC 30 / 0.3 Mechanical relays V / A DC 30 / 1 Switching time ms 30 Interface (digital) Electrical connection 3PCx-0xx-x0xx -x1xx -xxx -x4xx RS3C FCC, 8-pin D-Sub, 9-pin, male D-Sub, 15-pin HD, male D-Sub, 15-pin HD, with RS485, male Cable length m (ft) 100 ( 330) RS3C operation m (ft) 30 ( 100) Materials exposed to vacuum W, Ni, NiFe, Al O 3, Ni, NiFe, Al O 3, SnAg, Al O 3, stainless steel SnAg, stainless steel, stainless steel, glass glass (continued) 3

4 SPECIFICATIONS (concluded) Type PCG550 PCG55 PCG554 Filament Tungsten Nickel ceramic coated Internal volume DN 16 ISO-KF cm DN 16 ISO-KF long tube cm DN 16 CF-F cm 3 8 DN 16 CF-R long tube cm 3 14 DN 5 ISO-KF, 4 VCR cm VCR cm 3 7 1/8" NPT, 7/16-0 UNF cm 3 5. Surface mount 9 mm / 1.15 inch cm VCR 90 cm Weight Without fieldbus interface g With fieldbus interface g Degree of protection IP 40 Standards EN /-6-3, EN 61010, UL , CSA. No SPECIFICATIONS DeviceNet Protocol DeviceNet, group slave only Data rate switch kbaud 15, 50, 500 or network programmable Cable length 15 kbps m (ft) 500 (1650) 50 kbps m (ft) 50 (85) 500 kbps m (ft) 100 (330) MAC ID Digital functions Specification Device type I / O slave messaging switches (address 00-63) or network programmable read pressure, select units: Torr, mbar, Pa, micron, counts monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error DeviceNet "Vacuum Gauge Device Profile" "CG" for combination gauge polling only Supply voltage for DeviceNet 3PC6- / 3PC7- / 3PC8-0xx-xxxx V / A DC Power consumption 3PC6- / 3PC7- / 3PC8-0xx-xxxx W 3 Connector for DeviceNet Micro-Style, 5-pin, male SPECIFICATIONS Profibus DP Baud rates kbaud 9.6 / 19. / / / 500 MBaud 1.5 / 1 Address Digital functions Connector for Profibus DP switches (address 00-17) or network programmable read pressure, select units: Torr, mbar, Pa, micron, counts monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error D-Sub, 9-pin, female 4

5 SPECIFICATIONS RS485C Baud rates kbaud 9.6 / 19. / 38.4 /57.6 Address switches (address 00-55) Digital functions Connector for RS485 read pressure, select units: Torr, mbar, Pa, micron, counts monitor gauge status, detailed alarm and warning information, safe state allows definition of behavior in case of error D-Sub, 15-pin HD, male spare parts Type PCG550 PCG55 PCG554 Filament Tungsten Nickel ceramic coated Replacement sensor DN 16 ISO-KF DN 16 ISO-KF long tube DN 16 CF-F DN 16 CF-R long tube DN 5 ISO-KF VCR female VCR female /8" NPT Surface mount 9 mm / 1.15 inch VCR 90 female /16-0 UNF male Accessories Centering ring with filter (DN 16 ISO-KF) Diagnostic 1) : Communication adapter ( m) for PC RS3C serial port ) Software to run the diagnostic functions on Windows NT, XP can be downloaded from our website. 5

6 dimensions Standard mm (inch) DeviceNet Profibus RS485 ADDRESS BUS RATE STATUS ADDRESS BUS 45 (1.77) 8 (1.10) P MSD LSD I/O DIA SP SP1 1 5 P ST NET MOD 56 (.0) E C A MSD E C A I/O DIA LSD SP SP1 ST ADDRESS MSD LSD RATE SP1 SP ST E A E A E A ADJ 3 1 ON DIA BUS D-Sub 79.5 (3.13) 65 (.56) FCC 50 (1.97) 67 (.64) Micro-Style 87.5 (3.44) ADJ ADJ 65 (.56) D-Sub 65 (.56) DN 5 ISO-KF 1.5 (0.85) 1/8" NPT 36 (1.4) 7/16-0 UNF 36.5 (1.44) 34 (1.34) mm 4.7 (1.68) 46.3 (1.8) 4 VCR 8 VCR 31.5 (1.6) 4.3 (0.96) 4-VCR (0.57) DN 16 ISO-KF DN 16 ISO-KF long (5.15) 30.9 (1.) DN 16 CF-F DN 16 CF-R long 130. (5.13) reachus@inficon.com Due to our continuing program of product improvements, specifications are subject to change without notice. tiba40e1-c (011-03) 011 INFICON