Evex NanoAnalysis EDS Acquisition

Transcription

1 NanoAnalysis EDS Acquisition 1. Proper Kv for the sample 2. Correct working distance for EDS 3. Good Image correct magnification & in focus 4. Make note if sample is tilted 5. Adjust beam current for proper Deadtime Microscope Initial Settings EDS Default Setting Acquire Configure Should be setup correctly during installation. This does not have any settings that need to be changed. Use the EDS Tool Bar or EDS Menu to arrive at the Microscope Parameters EDS Tool Bar Enter the Microscope Kv. Use the Geometry Wizard for the detector geometry Enter KV Geometry then click the Apply Button then the OK button this stores the settings Most setting should be correct unless you change the Working Distance or Tilt Geometry Wizard Use EDS/ Acquire/ Begin, Menu or Start Stop Quick Click to start and stop an acquisition EDS Start / Stop Right Click inside spectral window to change acquire time 0 = infinite Change Acquire Time

2 NanoAnalysis EDS Manual Peak Identification Display a Calibrated Spectra Manual Identification is the process of labeling unknown peaks. The Idea is to acquire a spectrum with good statistics. Then move the KLM lines over the peak of interest. If you are sure of your element selection, move the cursor over the peak. Now the KLM line and cursor overlap. Right click inside the spectral area to display the spectral menu then select label peak. Left click inside the spectra moves the cursor Right click displays a menu To change the KLM lines for different elements Type the Element Symbol or Atomic number in the appropriate box After selecting label peak from the menu the atomic symbol will be marked on the spectrum where ever the cursor is. Repeat the procedure to label all other peaks one at a time. Beware of overlapping peaks. i.e. Sulfur K or Molybdenum L? Main Menu File / Report / Spectrum Report

3 NanoAnalysis Image Acquisition SEM Slow Scan Image SEC or BS Initial Settings 1. Image on SEM 2. Scan Generator in Slow scan 3. Relay Box Power ON From Menu's select IMAGING > IMAGE VidxEDS SEM Control Bar will appear Select Options from the Customize Dialog box to change defaults Image Setting Preview Image Adjust Rate and Size Example 256 * 10 usec Default setting Click OK to close Customize Dialog Scan Image Adjust Rate and Size of Example 1024 * 10 usec Default Settings Select Acquire Preview to enable control Preview is used for adjusting the Microscopes contrast and Brightness Select Scan to Acquire Image Needs to know the magnification!!! For Image calibration Click OK to Start the Acquisition Enter the Microscopes Parameters (defaults are zero) Then click OK Example Mag 1000, KV 25, WD 11 ************ This is required for Image calibration and Labeling the Image ***********

4 NanoAnalysis X-Ray Mapping Digial X-Ray Mapping incorporates EDS, ROI s & Imaging. The Microscope beam will be controlled by and the EDS will count the number of X-Ray events that fall into the specific Regions of interest on the spectrum. The results will be placed in individually colored images who s pixel intensities represent the count total for a specified dwell time in each ROI. Regions cannot overlap SEM Slow Scan Image SEC or BS 1. Image on SEM 2. Scan Generator in Slow scan 3. Relay Box Power ON EDS adjust beam for good X-ray counts Note the DT (20%) and Counts In (24470) Acquire an Image Set regions of interest around the elements you want to map See Creating ROI s Flow chart Use the Periodic Chart to create ROI s this will also label the ROI s with the element name Adjust your mapping parameters by clicking Options on the Control Bar Under category select Mapping Defaults Ensure all parameters are correct then select OK Resolution, Grade, Dwell time Control Bar select Map Fill out the Map Save Dialog box and click OK.3dd file will contain all images,maps and the Spectrum

5 NanoAnalysis Creating ROI s Acquire or input a Stored Spectra Regions of Interest are areas in the spectrum that are painted on or highlighted by the user. They are generally used as windows for creating digital dot maps, linescans or just viewing the counts in the windows. The user can adjust the width, color and name of the region. Regions are not allowed to overlap. 1 1 Display appropriate KLM lines 2.Position the cursor over the KLM 3 Rt click in the spectrum to display the menu 4 Slide down to (Add Region) then select the width Type Element Initials in the Symbol box to turn on the KLM Lines 2 Position the cursor over the Peak of interest Right Click in spectral area to view the menu 3 4 Select (Add Region) then choose a width Creating ROI s from the Periodic Table would accomplish the same result Left click on Element Name (Fe) Same result Select the Line then Left click on Create Region To See Region Setting or and Save ROI s go to Regions menu To view Region Data click ROI Icon

6 NanoAnalysis X-Ray Line Scan Digial X-Ray Line Scans incorporates EDS, ROI s & Imaging. The Microscope beam will be controlled by and the EDS will count the number of X-Ray events that fall into the specific Regions of interest on the spectrum. The results will be displayed on an XY graph. X being the position on the line and Y being the intensity of the X-Ray counts. Regions cannot overlap SEM Slow Scan Image SEC or BS 1. Image on SEM 2. Scan Generator in Slow scan 3. Relay Box Power ON EDS adjust beam for good X-ray counts Note the DT (20%) and Counts In (24470) Acquire an Image Set regions of interest around the elements of interest See Creating ROI s Flow chart Use the Periodic Chart to create ROI s this will also label the ROI s with the element name Click Linescan Icon to view Line scan Dialog box Type a File name into the dialog box Select New Line and drag the end points of the line to the desired position Click on Run linescan to define the line properties and dwell time Set the dwell time and number of points in the line. Click Update then OK, line scan will start.lss file will contain all the data in the linescan and the image