Standard Operating Manual

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1 Standard Operating Manual J.A. Woolam M-2000V Spectroscopic Ellipsometer Version 1.0 Page 1 of 13

2 Contents 1. Picture and Location 2. Process Capabilities 2.1 Cleanliness Standard 2.2 Features 2.3 Sample size 3. Contact List and How to Become a Qualified User 3.1 Emergency Responses and Communications 3.2 Training to Become a Qualified User 4. Operating Procedures 4.1 System Description 4.2 Important Cautions 4.3 Initialization 4.4 Data Acquisition 4.5 Data analysis Version 1.0 Page 2 of 13

3 1. Picture and Location Fig 1: J.A. Woolam M-2000V Spectroscopic Ellipsometer is located at NFF Phase II Room Process Capabilities Ellipsometry can be used to measure thin film thickness and/or optical constants (refractive index n and extinction coefficient k). 2.1 Cleanliness Standard Prior of any measurement, samples should be submitted to NFF for approval. 2.2 Features Wavelength: 370nm to 1000nm, ~ 390 wavelengths Collimated light beam: ~3mm in diameter Version 1.0 Page 3 of 13

4 Fixed angle: 66 degree Data acquisition and data analysis software: WVASE Sample size The maximum sample size is 100mm x 100mm x 20mm (length x width x height). And the desired area on the sample for measurement should not be less than 10mm x 10mm. 3. Contact List and How to Become a User 3.1 Emergency Responses and Communications Safety Officer: Mr. Wing Leong CHUNG & Deputy Safety Officer: Mr. Man Wai LEE & NFF Phase 2 Technicians: Mr. Li Ho,or Mr. Chen Yi gong Security Control Center: (24hr) & (24hr) 3.2 Training to Become a Qualified User Read all materials on the NFF website concerning this ellipsometer. Version 1.0 Page 4 of 13

5 4. Operating Procedures 4.1 System Description Ellipsometry is a measurement technique that uses polarized light to characterize thin films. However, it never directly measures the sample parameters of interest (thicknesses and optical constants). What Ellipsometry actually measures are the change in polarization state of light reflected from the surface of a sample. The measured valves are expressed as psi (ψ) and delta (Δ). Then, user need to construct a model in the WVASE32 software representing the actual sample structure that you have measured. The components of the model are basically the optical constants of the substrate and sample layers and the thicknesses of the layers. Known values of parameters (optical constants and/or thicknesses) are given into the model. For those unknown parameters (optical constants and/or thicknesses you are going to find), we need to give initial guess of values. The software can then generate calculated valves of ψ and Δ based on the given model. The calculated data (ψ c and Δ c ) can now be compared with the measured data (ψ and Δ). The software varies the unknown parameters and generates data until it finds a set of optimized parameters that yield calculated data that closely match the measured data. In this document, three examples of data analysis are given. You should follow all these examples one by one to get some basic operating techniques and experiences in using WVASE32 for data analysis. Please refer to the Guide to Using WVASE32 and other materials provided by J. A. Woollam Co., Inc. for details of Ellipsometry and more modeling methods. Version 1.0 Page 5 of 13

6 4.2 Important Cautions (1) Don t touch any lenses surface and optical openings. (2) Keep hands/fingers/body parts away from the instrument while automatic z-alignment is taking place. (3) Make sure your samples are tidy; especially there should be no sticky residue on the bottom surface. 4.3 Initialization The following shorthand is used throughout this document. Example: Select Hardware Acquire Data Align Sample means: Select the Hardware window. Then click Acquire Data on the top menu bar. Choose Align Sample (Or right click on the space of the Hardware window to choose Acquire Data then Align Sample.). If you can t see the window required on the screen, click Window on the top menu bar, and then choose the required window. You can also choose Reset Window Layout to show all windows on the screen. (1) If the Wvase 32 program (V.A.S.E for Windows) is already opened, go to Sample Loading and Alignment directly. (2) Double click the Wvase 32 WITHOUT FOCUSING program icon. (3) Select Hardware Initialize. (4) Enter your project number MFFxxx for the hardware log. Click Ok. Version 1.0 Page 6 of 13

7 Sample Loading and Alignment (1) Select Hardware Setup Load Sample. Wait for the prompt box. Remove previous sample. Then click Ok. (2) Enter your sample s thickness in the prompt box. Click Ok. Wait for the pop-up window. Place your sample on the Sample Stage and align it according to the Fig. 2. In the Fig. 2, a white ellipse represents the approximate location of the light spot. The red square is 1cm x 1cm in size. It is suggested that the area you are going to measure covers the red square. Then click Ok. Fig. 2: Top view of the Sample Stage. (3) Adjust the two tilt knobs located on the front side and right side of the sample stage to centre the cross hair on the Hardware window. (4) Press ESC key to allow the Auto z alignment by the system. Click No in the pop-up window and then click Ok. (5) Select Hardware Acquire Data Align Sample. (6) Centre the cross hair again. Press ESC key. (7) Select Hardware Acquire Data Sample Z-Translation Alignment to allow the Auto z alignment. Version 1.0 Page 7 of 13

8 (8) Select Hardware Acquire Data Align Sample again. If the signals X and Y are still not within ±5, repeat step 6-9. Otherwise, press ESC key. 4.4 Data Acquisition (1) Select Hardware Acquire Data Spectroscopic_Scan. (2) Change the number of Revs/meas to 20. Click Ok to start the scan. (3) In the prompt box, click Yes if you want to save the data. 4.5 Data Analysis There are three wafers labeled 1, 2 and 3 respectively in a wafer box. Please measure them accordingly before doing data analysis for the following examples. Example 1: To find the thickness of the thermal oxide. Sample: SiO2[~25nm]/Si (1) Select the Model window. If there is a previous model, delete it by selecting Model DeleteMod. Click Yes. (2) Select Model AddLayer to add the Si substrate layer. In the Open prompt box, input si_jaw in the field under File name, click Ok. In the Layer prompt box, enter 0.5 mm for the Thickness (The thickness of the Si substrate does not matter if there is no reflection from the substrate backside). Click Ok. (3) Select Model AddLayer to add the SiO2 layer. In the Open prompt box, input sio2_jaw in the field under File name, click Ok. In the Layer prompt box, estimate and input the SiO2 layer thickness. Also, check the small box Fit next to the Thickness to declare it as a fit parameter. Click Ok. (4) Press Ctrl+G to generate data (ψ c and Δ c ) according to the model. The Graph Version 1.0 Page 8 of 13

9 window then shows the red curves for the generated data, together with the measured data (dotted curves) for comparison. (5) If the generated curves are very close to the measured curves, go to step 7. (6) Otherwise, click on the sio2_jaw layer in the Model window. The Layer dialog box will be displayed again. Guess and input another value of the SiO2 layer thickness. Go to step 4. (Tips: You can point (NOT click) the mouse cursor directly on the number showing the thickness (Fig. 3), change the thickness simply by scrolling up and down the mouse wheel (Hold down the Ctrl or even Ctrl+Shift at the same time to allow faster change.). The curves of the calculated data according to the new thickness are automatically re-plotted on the Graph. No need to press Ctrl+G.) Fig. 3 (7) Press Ctrl+F to let the software to vary all the fit parameters (In this example, thickness of the sio_jaw layer only) to obtain model-calculated data which matches the measured data as closely as possible. When the fit converges, a window showing the message Change in MSE is less than limit will prompt. Go to step 9. (8) If the prompt message is Maximum iterations reached, click ok. Then repeat pressing Ctrl+F and click ok until it shows Change in MSE is less than limit. (9) Click Ok You can find the best fit SiO2 layer thickness on the model. Version 1.0 Page 9 of 13

10 Example 2: To find both thickness and refractive index of LPCVD Low Stress Nitride. LSN[~80nm]/Si (1) Do step 1 and 2 of Example 1. (2) Select Model AddLayer. In the Open prompt box, input Cauchy in the field under File name, click Ok. In the Cauchy Layer prompt box, check the Thickness Fit box. In the field An, input 2.0 as the refractive index of Silicon Nitride is about two. Click Ok. (3) Change the thickness of the Cauchy layer (using the Tips on Example 1, step 6) until the generated curves and the measured curves match closely. Press Ctrl+F. Click Ok. (4) Click on the Cauchy layer, the Cauchy Layer prompt box will be displayed again. Check also the An Fit box. Click Ok. Press Ctrl+F. Click Ok. (5) Do the same as step 4 but this time check also the Bn and Cn Fit boxes. (6) Do the same as step 4 but this time check also the k Amplitude and Exponent Fit boxes as shown in Fig.4. Fig. 4 (7) The fitted thickness can be found on the model. For the optical constants. Click on Version 1.0 Page 10 of 13

11 the layer and then click Optical Constants >>. Fig. 5: Save the optical constants, click Save and click No in the prompt box. Example 3: To find both thickness and refractive index of LPCVD a-si. Sample: a-si[~80nm]/sio2[~100nm]/si (1) Select Model File Open Model to open the model a-si_on_oxide.mod. The location is at c:\documents and settings\owner\desktop\my model\. In the model, the first layer is SiO2. The second layer is a-si. The third layer is native oxide. Fig. 6 Version 1.0 Page 11 of 13

12 (2) Click on sio2_jaw layer. Change the thickness to 1000Å. (If the thickness of SiO2 is confirmed, you can fix it by unchecking the thickness fit box.) (3) Adjust the thickness of the a-si_genosc layer (using the Tips on Example 1, step (6) until the generated curves and the measured curves match closely. It is better to view ψ curves only in doing this step. Follow the below tips to display ψ curves only. (Tips: Sometimes both ψ and Δ on the same graph may look a little bit messy (Fig. 7). You can select to view only one type of data on the graph. Double click on the graph area, the 2D Graph Style prompt box will be displayed. Uncheck the Double Y-axis box. Click Ok. Select Graph Type to choose the type of data (Psi ψ, Delta Δ, etc.) to be displayed (see Fig. 7 and 8)). Fig. 7 Fig. 8 Version 1.0 Page 12 of 13

13 (4) Press Ctrl+F and follow Example 1, step 8 to fit the model s parameters. You should get the following result. Fig. 9: Reference: Guide to Using WVASE32 by J. A. Woollam Co., Inc. Version 1.0 Page 13 of 13

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