Pacific Northwest. ESD in Cleanrooms. Regional ESD. Tutorial. February 7, 2001 Doubletree Hotel Lloyd Center Portland, OR. Audit Measurements

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1 ANSI/ESD S20.20 ESD in Cleanrooms Pacific Northwest ESD Regional Tutorial February 7, 2001 Doubletree Hotel Lloyd Center Portland, OR Audit Measurements Information, n, tools, solut lutions It s all about control! Co-sponsored by ESD Northwest and the ESD Association

2 Electrostatic discharge costs! ESD can result in lost time, reduced quality, lower profits. But you can control the problems of ESD! The Pacific Northwest Regional ESD tutorial gives you the practical tools and knowledge to Set up and manage an effective program according to ANSI/ESD Use the proper measurements when auditing your program Implement effective ESD controls in cleanrooms Designed for engineering, production, quality, test, purchasing, marketing, sales--anyone involved in ESD control. In three sessions, the Pacific Northwest Regional ESD tutorial provides you with the information and techniques you need to understand and manage the problems of ESD.

3 Sessions Wednesday, February 7 8:00 AM - Registration Opens 8:30 AM - Continental Breakfast 9:00 AM - 12:00 PM: Session 1 ANSI/ESD S20.20 ESD Control Program Standard Learn the necessary elements for defining and generating a comprehensive ESD control program based on this recently adopted ESD Standard. The course will help you to recognize there is no one size fits all and that tailoring is a fact of life for both administrative and technical requirements. This tutorial is designed for those who are new to the field and for those who wish to increase their understanding of this new standard. Dave Leeson, Motorola 12:00 PM - 1:00 PM: Lunch 1:00 PM - 2:45 PM: Session 2 ESD Control in Cleanrooms Static charge in cleanrooms must be controlled to enhance the production of semiconductors and other products. Contamination issues make typical static control methods more difficult to use in cleanrooms. This session includes lessons learned from 200MM semiconductor manufacturing, technology trends, and their implications on ESD controls. Julian Montoya, Intel 3:00 PM - 5:00 PM: Session 3 ESD Audit Measurements In this session you will learn specific techniques and procedures for making measurements when performing ESD facility audits. This session will cover how to measure floors, work surfaces, equipment, footwear, garments, production aids, ionizers, and ESD ground circuits according to the ANSI/ESD S20-20 administrative and technical requirements. Stephen Halperin, SHA/ Prostat

4 Speakers Stephen A. Halperin is President of Stephen Halperin and Associates and Prostat Corporation. Noted for his work in facility evaluation and auditing, product development, independent testing, and consulting, Steve has lectured and consulted domestically and internationally. He is Senior Vice President of the ESD Association, has served on the Association s Board of Directors, and chaired its educational development and standards committees. In 1991, he was awarded the Association s Outstanding Contributions Award. He is NARTE certified as an ESD Control Engineer and ESD Control Technician. Dave E. Leeson is a 27-year veteran of Motorola and has been involved with design of test equipment, microelectronics packaging, materials testing design and quality assurance engineering and management. Dave was the co-chair of the ESD Association standards working group that produced ANSI/ESD S20.20, ESD Control Program. Dave is a member of Motorola s Scientific and Technical Society and has a patent for a surface acoustic wave probing apparatus. He is a qualified ISO 9000 lead assessor and member of the ESD Association. Julian A. Montoya is Intel s Corporate Electromagnetic Compatibility and Telecommunications Infrastructure Program Manager, where he is responsible for the selection, design, and implementation of electromagnetic interference controls, electrostatic discharge controls, and telecommunications infrastructures for Intel facilities worldwide. Julian is a member of IEEE s EMC, Engineering Management, and Reliability societies; the ESD Association; and SEMI exit charge and regulatory compliance work groups. He has written or co-written papers on the subjects of electromagnetic compatibility, electrostatic compatibility, and regulatory compliance. Where to Stay For accommodations, contact the Doubletree Hotel-Lloyd Center direct at 1000 NE Multnomah, Portland, OR Ph:

5 How to Register Registration fees include copies of presentations, continental breakfast, lunch, and coffee break. Use the attached Registration Form. Visa, MasterCard and American Express accepted. If paying by credit card, you may fax your registration to ( ). Payment must accompany registration. Please register by January 26, Cancellation Requests will be honored if received in writing and postmarked no later than January 26, For additional information, phone ( ) Registration Form Make checks payable to ESD Association and mail with registration form to: ESD Association, 7900 Turin Road, Bldg. 3, Rome, NY Fax registration: Cancellation Requests will be honored if received in writing and postmarked no later than January 26, Payment must accompany registration. The registration deadline is January 26, Please Print or Type Last Name First Name Company Name Mailing Address City State Zip Code Phone Fax Registration Code from Address Label Is address: Home address or Office address Check if under the Americans with Disabilities Act, you require auxiliary aids or services Method of Payment (Company purchase orders are not accepted.) Check (Make payable to ESD Association) Credit Card # Expiration Date Corporate Code Type (circle): Visa MasterCard AMEX Name on Card Cardholder Signature Tutorial Fees Members of ESD Northwest: $325 per person Others: $360 per person Fees include copies of each presentation, continental breakfast, lunch, coffee break Payment must accompany registration