Leica EM ACE Coaters Cleaning Procedure. Version 06/14
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1 Leica EM ACE Coaters Cleaning Procedure Version 06/14
2 Table of contents 1.1 Advantages of the new coater design Cleaning routine for normal use Cleaning material Removing internal components Leica EM ACE Leica EM ACE Page 1 Leica EM ACE200 and EM ACE600 Operating Manual Coater Cleaning 06/14
3 Cleaning procedure for Leica EM ACE coaters 1.1 Advantages of the new coater design Large glass door: removable and easy to wipe flat surface. Internal shielding: easily removable to clean or exchange. Shutter, stage and source: all removable to clean or exchange. Compared to the traditional coater design, all parts of a Leica Coater can be individually removed and cleaned or, if special cleanliness is needed, even exchanged for spare parts. For most coaters the top and the bottom are fixed in the machine and cannot be accessed for cleaning. Only the glass cylinder can be cleaned. This is more difficult than cleaning a flat piece of glass as the front door solution provides. Cleaning Process Items needed: Latex Nitril gloves IMPORTANT: Gloves could be contaminated at the outside with powder (talc) or dirt therefore wash them with soap and rinse with ethanol before usage! Ethanol or Isopropanol (close to 100%) Acetone (close to 100%) Non Scratching, Polishing, Cleaning Compound (e.g. Bell Jar Kleen) on a calcium carbonate basis or metal polish paste (e.g. Unipol, Starglanz,...) Cleaning of Internal Shielding, Shutter and Stage, Source 1. Remove internal shielding, shutters and stage out of the coating chamber please also see sequence of pictures for details. Page 2 Leica EM ACE200 and EM ACE600 Operating Manual Coater Cleaning 06/14
4 2. Clean these parts with the Non Scratching Polishing, Cleaning Compound (using water) or metal cleaning paste. 3. Rinse all parts with warm water to remove the remaining powder/paste. 4. Rinse parts with distilled water. 5. Remove distilled water from all cleaned surfaces wipe with lint-free paper wetted with pure ethanol. 6. Wipe down surfaces with acetone and lint-free tissue. ATTENTION: DO NOT TOUCH OR GO NEAR ANY ELECTRONIC PARTS! Cleaning powder can cause oxidation and acetone could dissolve the cable insolation. Cleaning of Coating Chamber 1. Clean with the Non Scratching Polishing, Cleaning Compound (using water) or metal cleaning paste. 2. Do not rinse with water use a damp, lint-free tissue to remove cleaning compound or paste 3. ATTENTION: DO NOT TOUCH OR GO NEAR ANY ELECTRONIC PARTS. Cleaning powder can cause oxidation and acetone could dissolve the cable insolation 4. After cleaning (as described above) switch on and pump the coater. Within 10 minutes 10-5 mbar should be reached. In case the pressure cannot be reached vent the coater and clean again with acetone. The surface of the tissue should not show any black coloration. ATTENTION: DO NOT TOUCH OR NO NEAR ANY ELECTRONIC PARTS. 5. Vent coater and replace internal shielding, shutters and stage for the next coating run. Page 3 Leica EM ACE200 and EM ACE600 Operating Manual Coater Cleaning 06/14
5 1.2 Cleaning routine for normal use Usually, only the glass door needs to be cleaned, depending on the layer thickness, every 5 to 15 runs. The chamber shielding, especially when always using the same material, does not need to be cleaned regularly. When material starts to layer off the chamber it is recommended to take the shielding out and clean it. 1.3 Cleaning material Any abrasive works well for metal. Scotch-brite, metal cleaning paste, cleaning powder etc.. Do not use strong abrasives (like Scotch - brite) on the glass door as this can lead to scratches and vacuum leaks. Washing the parts afterwards with soap and water followed by a distilled water rinse and letting them dry off is an easy way to remove the residues. Isopropanol or Ethanol can be used for the finish. 1.4 Removing internal components Leica EM ACE600 Open the door and remove it Remove the table Remove chamber shields and the One shutter is removed, remove the 2 shutters second one Page 4 Leica EM ACE200 and EM ACE600 Operating Manual Coater Cleaning 06/14
6 Pull out the main-shield and remove the back shields Empty chamber Shutter with glow discharge electrode Back shield Chamber shielding Page 5 Leica EM ACE200 and EM ACE600 Operating Manual Coater Cleaning 06/14
7 1.4.2 Leica EM ACE200 Door with coating Open the door and remove it Disconnect the QSG Remove the QSG Unscrew and disconnect the shutter spring Coating chamber with shielding Page 6 Leica EM ACE200 and EM ACE600 Operating Manual Coater Cleaning 06/14
8 Remove the table Remove the table extension Take out the shield Empty vacuum chamber Page 7 Leica EM ACE200 and EM ACE600 Operating Manual Coater Cleaning 06/14
9 The statement by Ernst Leitz in 1907, With the User, For the User, describes the fruitful collaboration with end users and driving force of innovation at Leica Microsystems. We have developed five brand values to live up to this tradition: Pioneering, High-end Quality, Team Spirit, Dedication to Science, and Continuous Improvement. For us, living up to these values means: Living up to Life. LIFE SCIENCE DIVISION - NANO TECHNOLOGY LNT The Leica Microsystems Nano Technology Division s focus is to provide the most compehensive product portfolio for the preparation of biological, medical and industrial samples for investigation in the Electron and Light Microscope. Excellent Sample Preparation is a prerequisite for perfect microscopy. Your image starts here! Leica Microsystems an international company with a strong network of worldwide customer services: Active worldwide Tel. Fax Australia North Ryde Austria Vienna Belgium Diegem Canada Concord/Ontario Denmark Ballerup France Nanterre Cedex Germany Wetzlar Italy Milan Japan Tokyo Korea Seoul Netherlands Rijswijk People s Rep. of China Hong Kong Shanghai Portugal Lisbon Singapore Spain Barcelona Sweden Kista Switzerland Heerbrugg United Kingdom Milton Keynes USA Buffalo Grove/lllinois Leica EM ACE600 and EM ACE200 Operating Manual - Cleaning Procedure, English, Version 06/2014 Copyright by Leica Mikrosysteme GmbH, Vienna, Austria, Subject to modifications. LEICA and the Leica Logo are registered trademarks of Leica
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