Flip-Chip-Aligner-Bonder Model M-8HP

Transcription

1 Flip-Chip-Aligner-Bonder Model M-8HP 1. Introduction DO NOT CHANGE THE SETTINGS OF THE VIDEO CAMERAS UNLESS YOU ARE AUTHORIZED TO CALIBRATE THE MACHINE AND KNOW WHAT YOU ARE DOING! The laminar flow hood causes some vibration which might be disadvantageous for the alignment procedure. If so turn it off for the time of the alignment but turn it on again when you are finished. In the following steps for calibration and bonding blue color indicates status messages on the video screen and red color buttons on the keypad. 2. Alignment and Bonding Turn on the machine, monitor and mechanical pump. Press any key. Press 1 on the keypad to initialize the machine. Press 2 on keypad to begin operation. Always follow this procedure when you start up the machine. In the following steps for calibration and bonding blue color indicates status messages on the video screen and red color buttons on the keypad. (1) Place pedestal on upper chuck Switch on Pedestal VAC (2) Lower VAC switch (as many rings as necessary) (3) Load samples KEYPAD LO/VAC KEYPAD UP/VAC (4) Flip over upper chuck; Slide left in frame; KEYPAD CLAMP 1

2 (5) Press/toggle joystick-button CAM SCAN (6) Set micrometer on left side of machine to 5 (safety distance to avoid a crash when lower chuck is risen). (7) Move in the camera system between the two chucks. Make sure there is enough space! (8) KEYPAD CAMERA, until CAMERA: UP/ (9) KEYPAD FOCUS, use joystick to focus (10) Press/toggle joystick-button CAM SCAN (11) Search alignment marks and store the position KEYPAD MEM A, (hit key twice to store position) KEYPAD MEM B, (hit key twice to store position) (12) KEYPAD CAMERA, until CAMERA: /LO focus with the focus screw on the right side of the machine (13) Press/toggle joystick-button LO SCAN Find the corresponding alignment marks. (14) KEYPAD CAMERA, until CAMERA: UP/LO (15) Press/toggle joystick-button CAM SCAN Check the alignement KEYPAD GOTO MEM A/B, to move to the marked positions. (13) Press/toggle joystick-button LO SCAN (14) Correct the lateral misalignment using the joystick (15) KEYPAD ROTATE Correct for rotational misalignment using the joystik (16) Repeat steps (14) and (15) until good alignment is achieved for both alignment marks. (17) KEYPAD Il/COL (Switch to the autocollimator mode) (18) KEYPAD P/ROLL Align the two green crosshairs with joystick. (19) KEYPAD Il/COL (Switch back to video mode, the two sample surfaces are now parallel) (20) Press/toggle joystick-button CAM SCAN 2

3 (21) Check alignment again. If not o.k. start over at step (13) (22) Joystick: Move camera to the far left and back corner (Load position, XY LIMIT on screen, otherwise bonding not possible!) (23) KEYPAD RISER Micrometer (left side of the machine): Rise the lower chuck until separation ~0.5 1mm between the samples! (24) KEYPAD PROG AUTO Enter the parameters for the bonding process. (25) KEYPAD * Exit the program menu. (26) KEYPAD AUTO, Start the bonding process Pressing any key during the process will stop the process. 3

4 3. Calibration Turn on the machine, monitor and mechanical pump. Press any key. Press 1 on the keypad to initialize the machine. Press 2 on keypad to begin operation. Always follow this procedure when you start up the machine. In the following steps for calibration and bonding blue color indicates status messages on the video screen and red color buttons on the keypad. (1) Flip over upper chuck (open position) (2) Place square target reticle on lower chuck such that the word up can be read and is in the lower right corner. Align edges approximately parallel to the frame and the crosshair to the center hole of the chuck. (3) KEYPAD LO/VAC (4) Place calibration reticle mount in slide frame for upper chuck and slide left. (5) KEYPAD CLAMP (6) Set micrometer on left side of machine to 5 (safety distance to avoid a crash when lower chuck is risen). (7) KEYPAD RISER (8) Manually rise bottom chuck with micrometer on left side. Leave a small gap between the targets (~0.5-1mm) (9) KEYPAD CALIB KEYPAD ENT With this the safety features are turned off (SAFETY OFF). (10) Press/toggle joystick-button LO SCAN Align crosshairs roughly with the eye using the joystick. (11) Put calibration bridge above upper slideframe (three feet into the corresponding holes). Switch power supply to lamp #1. Turn the autocollimator in position. You should see two green crosshairs through the microscope. 4

5 (12) KEYPAD P/ROLL (13) Align the two green crosshairs using the joystick. The square target reticle on the lower chuck and the target in the upper slide frame should now be parallel! (14) Turn the NIKON objective on the calibration bridge in position. Switch to lamp #2 (15) Move the microscope with the manipulators such that the upper crosshair is focused and in the middle of the field of view. (16) Rise lower chuck manually (micrometer on left side of machine) until PRESS: >0. It can be ~ important is that the two parts do not touch. You should actually be able to see a very small gap. They have to be close enough to see both reticles with the microscope without changing the focus. Since you won t see both in focus if there is a gap between them you have to make a trade-off. So find a distance where the parts do not touch and you can still see both reticles with the microscope. THEY HAVE TO BE A LITTLE BIT OUT OF FOCUS. (17) Press/toggle joystick-button LO SCAN Align laterally with joystick KEYPAD ROTATE Repeat this step until you have an excellent alignment. (18) You now have aligned the to reticles perfectly and the plates are absolutely parallel. From now on, for the rest of the calibration procedure, do no further changes in the LO/SCAN, ROTATE or P/ROLL mode!!!! CHECK ON THE MONITOR WHICH MODE YOU ARE USING! (20) Remove the calibration bridge gently from the machine. (21) KEYPAD RISER, bring down lower chuck. (22) KEYPAD CALIB, turn on safety. (23) ONLY CHANGES TO THE VIDEO SYSTEM NOW! (24) Press/toggle joystick-button CAM SCAN, move in the camera and check if there is enough space between the two chucks to do so. If not you have to lower the lower chuck with the screw on the right side of the machine (focus screw) 5

6 (25) KEYPAD CAMERA, until CAMERA: UP/ Use joystick to search crosshair. (26) KEYPAD FOCUS, focus on the cross hair using the joystick. (27) KEYPAD CAMERA, until CAMERA: /LO focus with the focus screw on the right side of the machine (28) KEYPAD CAMERA, until CAMERA: UP/LO (29) Adjust the cameras with the CAMERA X and CAMERA Y micrometers behind the four lamps. (30) Rotational misalignment: follow (SECTION III page 13, step 39) in the manual. (31) KEYPAD IL/COL, switch to collimator (32) Align the two crosshairs using the X,Y screws (step 44, SECTION III page 14 in the manual) (END) 4. Use of low pressure load cell (a) Switch on the machine while pressing KEYPAD PROG (b) Change load cell max to 2268 (value for high pressure: 45450) switch control unit from high to low (c) Begin operation 6