Mag.x system 125 A new high end modular microscope. Dr. Ralf Großkloß QIOPTIQ
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1 Mag.x system 125 A new high end modular microscope Dr. Ralf Großkloß QIOPTIQ
2 Mag.x system 125 A new high end modular microscope Dr. Ralf Großkloß QIOPTIQ
3 Resolution Speed Sensitivity Qioptiq
4 Optical setup Defect size typ µm High through put Maximum of information Magnification 1x - 10x Diffraction limited Pixel size typ µm Fast image acquisition Large sensor Qioptiq
5 Optical setup Microscopic approach Illumination Defect size typ. 0,5-10 µm High through put Maximum of information Coaxial illumination Different mag Magnification 1x - 20x Diffraction limited Very high NA Pixel size typ µm Fast image acquisition Large sensor Qioptiq
6 Optical setup what s available? Microscopic systems Magnification ranges 1x -20x Image size up to 50-60mm BUT: Sensor resolution not used in the best possible way due to low optics MTF a magnifying optics is needed with up to 60mm image size, with different magnifications, with coaxial illumination and which does not limit the system resolution Qioptiq
7 Some microscope basics Tube lens Objective f Objective f Tube Object structure s Diameter 2y Ø ExP Resolution limit on image side : s =1,22/2* λ/ NA NA = sin (Ø ExP / 2 * f Tube ) Ø ExP, λ und f Tube determine the resolution in the image space. Qioptiq
8 How to modify for large sensors? Standard f Tube Existing systems, designed for small image area f Objektiv object with same structure s same Ø 2y Qioptiq
9 How to modify for large sensors? Standard just higher mag f Tube Different tube lens Different NA!!! f Tube Fits for large sensors But: poor system MTF f Objektiv Same objective Same Ø AP object with same structure s same Ø 2y object with same structure s same Ø 2y Qioptiq
10 How to modify for large sensors? Standard just higher mag original mag and NA field doubled f Tube Different tube lens Different NA!!! f Tube Same focal length NA = original NA f Objektiv Same objective Same Ø AP New objective Double Ø AP object with same structure s same Ø 2y object with same structure s same Ø 2y object with same structure s double Ø 2y Qioptiq
11 Mag.x 125 Description Qioptiq
12 Mag.x 125 Qioptiq
13 Mag.x 125 camera plane aperture stop field stop object plane Qioptiq
14 Different base units Motorized base unit with turret Compact base unit Direct adapter Qioptiq
15 Different objectives and tube lenses Tube lenses Objective lenses 1x tube 2.25x tube 2x lens 5x lens Qioptiq
16 accessories Control box Illumination box Mechanics Qioptiq
17 Mag.x 125 characteristics I Long distance lenses, large Fields, high NA Enough space for handling / less risc for collisions More flexibility in inspection Working distances LD Plan Apo 5X/0.20: 13.0 mm LD Plan Apo 2X/0.08: 24.8 mm Highly chromatically corrected ( nm ) The contrast is maintained over the entire spectrum No refocusing is required Exact object space telecentricity Homogenuous optical quality over the entire sensor format Qioptiq
18 Mag.x 125 characteristics II Illumination built-in coupled illumination beam path for brightfield illumination Operates on the Köhler principle Motorized or manual Relationship of illumination and imaging aperture can be appropriately adjusted for individual inspection tasks Pupil position can be adjusted to the particular objective lens used (this ensures the optimum telecentric illumination for any lens) Qioptiq
19 Mag.x 125 motorized turret Motorized turret Programmable interface All objectives parfocalized Motorized Illumination optics Qioptiq
20 Mag.x 125 Color performance 760 Image height 28.1mm 644nm 436nm wavelength [nm] µm Focal shift [µm] Lateral color Longitudinal color (5x obj-lens, 2.25x tube lens) Qioptiq
21 Mag.x 125 MTF- and Telecentr.-performance Contrast [%] lp/mm 200lp/mm 500lp/mm Image height 28.1mm 644nm 436nm center object height 2,5mm MTF contrast telecentricity error (5x obj-lens, 2.25x tube lens) Qioptiq
22 Mag.x 125 detection limit CCD TDI sensor, image circle 56mm (Courtesy of HB Technology in Korea) Object side Line width 0,4µm (5x obj-lens, 2.25x tube lens, white LED lighting) Qioptiq
23 Applications Semiconductor industry Flat panel inspection OLED inspection Packaging Photovoltaic and solar panel inspection Universities, laboratories Qioptiq
24 outlook Qioptiq
25 Mag.x 125 Thank you. and see you at QIOPTIQ booth 1H66 Qioptiq
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