Characterization of MEMS Devices
|
|
- Noreen Willis
- 5 years ago
- Views:
Transcription
1 MEMS: Characterization Characterization of MEMS Devices Prasanna S. Gandhi Assistant Professor, Department of Mechanical Engineering, Indian Institute of Technology, Bombay,
2 Recap Fabrication of MEMS Conventional VLSI fabrication Nonconventional methods Design and analysis of MEMS Characterization of MEMS
3 Today s Class Why characterization?? Why optics?? Principles of optics useful in characterization Tools for optical characterization Profilometer Microscope Methods for characterization of mechanical properties SPM based tools: STM and AFM
4 Why Characterization? Material properties change at micro-scale, different from bulk properties due to grain boundary effect Successful design/manufacturing of MEMS devices need reliable knowledge of MEMS material properties Verification of design and validation of models proposed Calibration of devices and signals Electronic analysis: noise vs signal Research various new effects: example Biosensor devices
5 Why Optics for Characterization? Noninvasive technique Does not disturb sensitive MEMS device Very high resolutions possible Higher measurement range possible Several optical phenomenon can be made use of
6 Principles of Optics Wave nature of light Interference Wave division Amplitude division Diffraction + Diffr. grating Moire interference Holography
7 Principles of Optics Interference Wave division Amplitude division Beam splitter Young s double slit Reference mirror Michaelsons Interferometer Analysis??
8 Principles of Optics Interference Test device Mach-Zehnder Interferometer Used for laser-doppler vibrometer
9 Polarization Concept of polarization of light
10 Principles of Optics Interference Source Partially Reflecting Lens Mirrors Febry-Parot Interferometer Screen Another method for interference
11 Diffraction Grating Fringes Principles of Optics Diffraction grating Source Diffraction Fringes Diffraction Grating
12 Principles of Optics Moire Fringes Specimen Grating Fringes Master Grating Rotational Mismatch Translational Mismatch
13 Profilometer Profilometer principle A B D C Laser-photodetector combination As the scanning of sample is done the laser spot moves on the photodetector (PSD) because of bending of cantilever over asperities The movement results in differential voltage output from the PSD
14 Profilometer Another technology Sensor Camera Spot size [µm] 1,5 Integrated in-axis camera Vertical resolution [µm] 0,020 Field of view [mm] 0,6x0, 8 Measurement frequency [Hz] 10,000 copyright Solarius Development Inc Stand off [mm] 2 or 5 Laser diode Class I Linearity [%] <0,08 Wavelength [nm] 630
15 Profilometer Another technology Sensor Camera copyright Solarius Development Inc Spot size [µm] 2 Integrated off-axis camera Vertical resolution [µm] 0,1 Magnification 200x Measurement frequency [Hz] 1400 Stand off [mm] 5 Laser Class II Linearity [%] ±0.5 Wavelength [nm] 670
16 Microscope for Measurement of Dimensions Grating used in CD ROM Taking image on CCD camera and processing with precalibration for measurement of MEMS device dimensions Various types of microscopes
17 Limitations of Microscope Q: is it possible to increase the magnification of microscope indefinitely and expect improved resolution?? Minimum resolution possible is comparable with wavelength of light
18 SPM: STM and AFM STM invented in early 80s by Binnig and Rohrer. Real limitations: only used to image conducting materials. Cannot distinguish between atoms of different elements within a compound material.
19 Atomic Force Microscope
20 AFM Image Kriptan- polymer surface characteristics using AFM
21 Conclusions Various optical principles Characterization tools Microscope Ellipsometer Profilometer Various methods of characterization of mechanical properties
1. Motivation 2. Nanopositioning and Nanomeasuring Machine 3. Multi-Sensor Approach 4. Conclusion and Outlook
Prospects of multi-sensor technology for large-area applications in micro- and nanometrology 08/21/2011-08/25/2011, National Harbor E. Manske 1, G. Jäger 1, T. Hausotte 2 1 Ilmenau University of Technology,
More informationSingle Photon Interference
December 19, 2006 D. Lancia P. McCarthy Classical Interference Intensity Distribution Overview Quantum Mechanical Interference Probability Distribution Which Path? The Effects of Making a Measurement Wave-Particle
More informationMEMS SENSOR FOR MEMS METROLOGY
MEMS SENSOR FOR MEMS METROLOGY IAB Presentation Byungki Kim, H Ali Razavi, F. Levent Degertekin, Thomas R. Kurfess 9/24/24 OUTLINE INTRODUCTION Motivation Contact/Noncontact measurement Optical interferometer
More informationOPSE FINAL EXAM Fall CLOSED BOOK. Two pages (front/back of both pages) of equations are allowed.
CLOSED BOOK. Two pages (front/back of both pages) of equations are allowed. YOU MUST SHOW YOUR WORK. ANSWERS THAT ARE NOT JUSTIFIED WILL BE GIVEN ZERO CREDIT. ALL NUMERICAL ANSERS MUST HAVE UNITS INDICATED.
More informationInterference. Electric fields from two different sources at a single location add together. The same is true for magnetic fields at a single location.
Interference Electric fields from two different sources at a single location add together. The same is true for magnetic fields at a single location. Thus, interacting electromagnetic waves also add together.
More informationHyperspectral interferometry for single-shot absolute measurement of 3-D shape and displacement fields
EPJ Web of Conferences 6, 6 10007 (2010) DOI:10.1051/epjconf/20100610007 Owned by the authors, published by EDP Sciences, 2010 Hyperspectral interferometry for single-shot absolute measurement of 3-D shape
More informationSPECTRUM. The world s first fully automated Raman AFM. AFM - confocal Raman - SNOM - TERS AFM KPFM. Raman. AFM-Raman characterization of PS-PVAC
Raman KPFM AFM AFM-Raman characterization of PS-PVAC polymer blend film SPECTRUM The world s first fully automated Raman AFM AFM - confocal Raman - SNOM - TERS The first fully integrated & automated AFM
More informationA. K. Srivastava, K.C. Sati, Satyander Kumar alaser Science and Technology Center, Metcalfe House, Civil Lines, Delhi , INDIA
International Journal of Scientific & Engineering Research Volume 8, Issue 7, July-2017 1752 Optical method for measurement of radius of curvature of large diameter mirrors A. K. Srivastava, K.C. Sati,
More informationLab 2 Report. Carlin Gettliffe
Lab 2 Report Carlin Gettliffe Abstract: In this lab we investigated the wave-particle duality of light. We verified light s wave properties by conducting both a double slit experiment and constructing
More informationChapter 2: Wave Optics
Chapter : Wave Optics P-1. We can write a plane wave with the z axis taken in the direction of the wave vector k as u(,) r t Acos tkzarg( A) As c /, T 1/ and k / we can rewrite the plane wave as t z u(,)
More informationWave Particle Duality with Single Photon Interference
Wave Particle Duality with Single Photon Interference Gerardo I. Viza 1, 1 Department of Physics and Astronomy, University of Rochester, Rochester, NY 14627 In the experiments of the Mach-Zehnder Interferometer
More informationThe Anfatec Level AFM a short description. Atomic Force Microscopy - approved devices for affordable prices
The Anfatec Level AFM a short description Atomic Force Microscopy - approved devices for affordable prices Our system is complete for almost all typical applications. It provides all basic modes as: contact
More informationCertus Standard. NanoScanTechnology. Basic Datasheet. reasoned innovations. Basic Configuration of Scanning Probe Microscope
NanoScanTechnology reasoned innovations Nano Scan Technology Ltd. Russia, 141700, Dolgoprudny, Zavodskaya St, 7 Phone: +7 (495) 642-40-68 +7 (495) 642-40-67 Skype: NanoScanTech E-mail: info@nanoscantech.ru
More informationSingle Photon Interference Christopher Marsh Jaime Vela
Single Photon Interference Christopher Marsh Jaime Vela Abstract The purpose of this experiment was to study the dual wave-particle nature of light. Using a Mach-Zehnder and double slit interferometer,
More informationLab2: Single Photon Interference
Lab2: Single Photon Interference Xiaoshu Chen* Department of Mechanical Engineering, University of Rochester, NY, 14623 ABSTRACT The wave-particle duality of light was verified by multi and single photon
More informationCalibration of a portable interferometer for fiber optic connector endface measurements
Calibration of a portable interferometer for fiber optic connector endface measurements E. Lindmark Ph.D Light Source Reference Mirror Beamsplitter Camera Calibrated parameters Interferometer Interferometer
More informationOPTI 513R / Optical Testing
OPTI 513R / Optical Testing Instructor: Dae Wook Kim Meinel Building Rm 633, University of Arizona, Tucson, AZ 85721 E-Mail: dkim@optics.arizona.edu Website: sites.google.com/site/opti513r/ Office Hours:
More informationHOLOEYE Photonics. HOLOEYE Photonics AG. HOLOEYE Corporation
HOLOEYE Photonics Products and services in the field of diffractive micro-optics Spatial Light Modulator (SLM) for the industrial research R&D in the field of diffractive optics Micro-display technologies
More informationInterference of Light
Lecture 22 Chapter 22 Physics II Wave Optics: Interference of Light Course website: http://faculty.uml.edu/andriy_danylov/teaching/physicsii Wave Motion Interference Models of Light (Water waves are Easy
More informationRay Optics. Lecture 23. Chapter 23. Physics II. Course website:
Lecture 23 Chapter 23 Physics II Ray Optics Course website: http://faculty.uml.edu/andriy_danylov/teaching/physicsii Let s finish talking about a diffraction grating Diffraction Grating Let s improve (more
More informationPHYSICS - CLUTCH CH 32: WAVE OPTICS.
!! www.clutchprep.com CONCEPT: DIFFRACTION Remember! Light travels in a straight line so long as it isn t disturbed - This allows light to be described as RAYS A common way to disturb light is to have
More informationOptics Vac Work MT 2008
Optics Vac Work MT 2008 1. Explain what is meant by the Fraunhofer condition for diffraction. [4] An aperture lies in the plane z = 0 and has amplitude transmission function T(y) independent of x. It is
More informationSingle Photon Interference
University of Rochester OPT253 Lab 2 Report Single Photon Interference Author: Nicholas Cothard Peter Heuer Professor: Dr. Svetlana Lukishova September 25th 2013 1 Abstract Wave-particle duality can be
More informationPast Paper Questions Waves
Past Paper Questions Waves Name 1. Explain the differences between an undamped progressive transverse wave and a stationary transverse wave, in terms of amplitude, (ii) phase and (iii) energy transfer.
More informationLecture: P1_Wk3_L5 Contact Mode Scans. Ron Reifenberger Birck Nanotechnology Center Purdue University 2012
Lecture: Contact Mode Scans Ron Reifenberger Birck Nanotechnology Center Purdue University 2012 1 The Purpose of a Microscope is to Obtain an Image Reflected laser spot Laser Diode Four-Quadrant Photodetector
More informationTutorial Solutions. 10 Holographic Applications Holographic Zone-Plate
10 Holographic Applications 10.1 Holographic Zone-Plate Tutorial Solutions Show that if the intensity pattern for on on-axis holographic lens is recorded in lithographic film, then a one-plate results.
More informationL 32 Light and Optics [3]
L 32 Light and Optics [3] Measurements of the speed of light The bending of light refraction Total internal reflection Dispersion Dispersion Rainbows Atmospheric scattering Blue sky red sunsets Light and
More informationLab 2 Report. Carlin Gettliffe
Lab 2 Report Carlin Gettliffe Abstract: In this lab we investigated the wave-particle duality of light. We verified light s wave properties by conducting both a double slit experiment and constructing
More informationPhysical Optics. 1 st year physics laboratories. University of Ottawa.
Physical Optics 1 st year physics laboratories University of Ottawa https://uottawa.brightspace.com/d2l/home INTRODUCTION Physical optics deals with light as a wave which can bend around obstacles (diffraction)
More informationMode-Field Diameter and Spot Size Measurements of Lensed and Tapered Specialty Fibers
Mode-Field Diameter and Spot Size Measurements of Lensed and Tapered Specialty Fibers By Jeffrey L. Guttman, Ph.D., Director of Engineering, Ophir-Spiricon Abstract: The Mode-Field Diameter (MFD) and spot
More informationInspection of Laser Generated Lamb Waves using Shearographic Interferometry
1st International Symposium on Laser Ultrasonics: Science, Technology and Applications July 16-18 28, Montreal, Canada Inspection of Laser Generated Lamb Waves using Shearographic Interferometry Oliver
More informationPHYSICS. Chapter 33 Lecture FOR SCIENTISTS AND ENGINEERS A STRATEGIC APPROACH 4/E RANDALL D. KNIGHT
PHYSICS FOR SCIENTISTS AND ENGINEERS A STRATEGIC APPROACH 4/E Chapter 33 Lecture RANDALL D. KNIGHT Chapter 33 Wave Optics IN THIS CHAPTER, you will learn about and apply the wave model of light. Slide
More informationExperiment 8 Wave Optics
Physics 263 Experiment 8 Wave Optics In this laboratory, we will perform two experiments on wave optics. 1 Double Slit Interference In two-slit interference, light falls on an opaque screen with two closely
More informationHANDBOOK OF THE MOIRE FRINGE TECHNIQUE
k HANDBOOK OF THE MOIRE FRINGE TECHNIQUE K. PATORSKI Institute for Design of Precise and Optical Instruments Warsaw University of Technology Warsaw, Poland with a contribution by M. KUJAWINSKA Institute
More informationReview Article Advanced Nanomeasuring Techniques for Surface Characterization
International Scholarly Research Network ISRN Optics Volume 212, Article ID 859353, 23 pages doi:1.542/212/859353 Review Article Advanced Nanomeasuring Techniques for Surface Characterization SalahH.R.Ali
More informationCollege Physics 150. Chapter 25 Interference and Diffraction
College Physics 50 Chapter 5 Interference and Diffraction Constructive and Destructive Interference The Michelson Interferometer Thin Films Young s Double Slit Experiment Gratings Diffraction Resolution
More informationInterference of Light
Lecture 23 Chapter 22 Physics II 08.07.2015 Wave Optics: Interference of Light Course website: http://faculty.uml.edu/andriy_danylov/teaching/physicsii Lecture Capture: http://echo360.uml.edu/danylov201415/physics2spring.html
More informationAbout the Final Exam(1)
About the Final Exam(1) The exam will be on 7:45-9:45am, Wednesday, Dec 22 in: 2103 Chamberlin, and 810 Ingraham (Allocation to be announced) It will be exactly 120 minutes. Distribution of tests starts
More informationSample Sizes: up to 1 X1 X 1/4. Scanners: 50 X 50 X 17 microns and 15 X 15 X 7 microns
R-AFM100 For Nanotechnology Researchers Wanting to do routine scanning of nano-structures Instrument Innovators Using AFM as a platform to create a new instrument Educators Teaching students about AFM
More informationOPTI510R: Photonics. Khanh Kieu College of Optical Sciences, University of Arizona Meinel building R.626
OPTI510R: Photonics Khanh Kieu College of Optical Sciences, University of Arizona kkieu@optics.arizona.edu Meinel building R.626 Important announcements Homework #2 is assigned, due Feb. 12 Travel to NSF
More informationReview Session 1. Dr. Flera Rizatdinova
Review Session 1 Dr. Flera Rizatdinova Summary of Chapter 23 Index of refraction: Angle of reflection equals angle of incidence Plane mirror: image is virtual, upright, and the same size as the object
More informationInterference of Light
Interference of Light Review: Principle of Superposition When two or more waves interact they interfere. Wave interference is governed by the principle of superposition. The superposition principle says
More informationPhysical & Electromagnetic Optics: Diffraction Gratings
31/05/2018 Physical & Electromagnetic Optics: Diffraction Gratings Optical Engineering Prof. Elias N. Glytsis School of Electrical & Computer Engineering National Technical University of Athens Multiple
More informationApplications of Piezo Actuators for Space Instrument Optical Alignment
Year 4 University of Birmingham Presentation Applications of Piezo Actuators for Space Instrument Optical Alignment Michelle Louise Antonik 520689 Supervisor: Prof. B. Swinyard Outline of Presentation
More informationChapter 24 - The Wave Nature of Light
Chapter 24 - The Wave Nature of Light Summary Four Consequences of the Wave nature of Light: Diffraction Dispersion Interference Polarization Huygens principle: every point on a wavefront is a source of
More informationInterference of Light
Lecture 23 Chapter 22 Physics II Wave Optics: Interference of Light Course website: http://faculty.uml.edu/andriy_danylov/teaching/physicsii Lecture Capture: http://echo360.uml.edu/danylov201415/physics2spring.html
More informationCertus Light. NanoScanTechnology. Basic Datasheet. reasoned innovations. Entry Level Scanning Probe Microscope. Scanning Probe Microscope
NanoScanTechnology reasoned innovations Nano Scan Technology Ltd. Russia, 141700, Dolgoprudny, Zavodskaya St, 7 Phone: +7 (495) 642-40-68 +7 (495) 642-40-67 Skype: NanoScanTech E-mail: info@nanoscantech.ru
More informationNovel Magnetic Field Mapping Technology for Small and Closed Aperture Undulators
Novel Magnetic Field Mapping Technology for Small and Closed Aperture Undulators Erik Wallen and Hyun-Wook Kim 06.06.2017 Outline Introduction - Measurement systems at LBNL - Activities at LBNL - Need
More informationf. (5.3.1) So, the higher frequency means the lower wavelength. Visible part of light spectrum covers the range of wavelengths from
Lecture 5-3 Interference and Diffraction of EM Waves During our previous lectures we have been talking about electromagnetic (EM) waves. As we know, harmonic waves of any type represent periodic process
More informationInterference of Light
Interference of Light Young s Double-Slit Experiment If light is a wave, interference effects will be seen, where one part of wavefront can interact with another part. One way to study this is to do a
More informationPhysics 214 Midterm Fall 2003 Form A
1. A ray of light is incident at the center of the flat circular surface of a hemispherical glass object as shown in the figure. The refracted ray A. emerges from the glass bent at an angle θ 2 with respect
More informationPhy 133 Section 1: f. Geometric Optics: Assume the rays follow straight lines. (No diffraction). v 1 λ 1. = v 2. λ 2. = c λ 2. c λ 1.
Phy 133 Section 1: f Geometric Optics: Assume the rays follow straight lines. (No diffraction). Law of Reflection: θ 1 = θ 1 ' (angle of incidence = angle of reflection) Refraction = bending of a wave
More information3D OPTICAL PROFILER MODEL 7503
3D Optical Profiler MODEL 7503 Features: 3D OPTICAL PROFILER MODEL 7503 Chroma 7503 is a sub-nano 3D Optical Profiler developed using the technology of white light interference to measure and analyze the
More informationIf these are waves of light then we could say that constructive interference
What You Need to Know: In the past two labs weve been thinking of light as a particle that reflects off of a surface or refracts into a medium. Now we are going to talk about light as a wave. If you take
More informationChapter 24. Wave Optics. Wave Optics. The wave nature of light is needed to explain various phenomena
Chapter 24 Wave Optics Wave Optics The wave nature of light is needed to explain various phenomena Interference Diffraction Polarization The particle nature of light was the basis for ray (geometric) optics
More informationA SUPER-RESOLUTION MICROSCOPY WITH STANDING EVANESCENT LIGHT AND IMAGE RECONSTRUCTION METHOD
A SUPER-RESOLUTION MICROSCOPY WITH STANDING EVANESCENT LIGHT AND IMAGE RECONSTRUCTION METHOD Hiroaki Nishioka, Satoru Takahashi Kiyoshi Takamasu Department of Precision Engineering, The University of Tokyo,
More informationTo see how a sharp edge or an aperture affect light. To analyze single-slit diffraction and calculate the intensity of the light
Diffraction Goals for lecture To see how a sharp edge or an aperture affect light To analyze single-slit diffraction and calculate the intensity of the light To investigate the effect on light of many
More informationReflections from a thin film
Reflections from a thin film l Part of the wave reflects from the top surface and part from the bottom surface l The part that reflects from the top surface has a 180 o phase change while the part that
More informationOPTI510R: Photonics. Khanh Kieu College of Optical Sciences, University of Arizona Meinel building R.626
OPTI510R: Photonics Khanh Kieu College of Optical Sciences, University of Arizona kkieu@optics.arizona.edu Meinel building R.626 Important announcements Homework #2 is assigned, due Feb. 11 Mid-term exam
More informationLab 12 - Interference-Diffraction of Light Waves
Lab 12 - Interference-Diffraction of Light Waves Equipment and Safety: No special safety equipment is required for this lab. Do not look directly into the laser. Do not point the laser at other people.
More informationToday: Interferometry, Diffraction
Physics 228 Please check list of students w/o registered iclicker! Today: Interferometry, Diffraction Diffraction is a further expansion of the idea of interference: Instead of two sources we consider
More informationCoherent Gradient Sensing Microscopy: Microinterferometric Technique. for Quantitative Cell Detection
Coherent Gradient Sensing Microscopy: Microinterferometric Technique for Quantitative Cell Detection Proceedings of the SEM Annual Conference June 7-10, 010 Indianapolis, Indiana USA 010 Society for Experimental
More informationThe location of the bright fringes can be found using the following equation.
What You Need to Know: In the past two labs we ve been thinking of light as a particle that reflects off of a surface or refracts into a medium. Now we are going to talk about light as a wave. If you take
More information4D IMAGING AT YOUR FINGERTIPS Real-time, Portable, High-Resolution Solutions for your Quality Control Needs
STDO Dynamic 3D 4D Imaging Microscopy Instrument Systems 4D IMAGING AT YOUR FINGERTIPS Real-time, Portable, High-Resolution Solutions for your Quality Control Needs STDO-HOLO Overview: STDO-HOLO enables
More informationPhysics 123 Optics Review
Physics 123 Optics Review I. Definitions & Facts concave converging convex diverging real image virtual image real object virtual object upright inverted dispersion nearsighted, farsighted near point,
More informationDraft SPOTS Standard Part III (7)
SPOTS Good Practice Guide to Electronic Speckle Pattern Interferometry for Displacement / Strain Analysis Draft SPOTS Standard Part III (7) CALIBRATION AND ASSESSMENT OF OPTICAL STRAIN MEASUREMENTS Good
More informationChapter 24. Wave Optics. Wave Optics. The wave nature of light is needed to explain various phenomena
Chapter 24 Wave Optics Wave Optics The wave nature of light is needed to explain various phenomena Interference Diffraction Polarization The particle nature of light was the basis for ray (geometric) optics
More informationAbout the Final Exam(1)
About the Final Exam(1) The exam will be on 2:45-4:45pm, Wednesday, Dec 19 th (See my earlier email for room allocation) It will be exactly 120 minutes. Four (3+1) 8½ x 11 formula sheets are allowed. Must
More informationModels of Light The wave model: The ray model: The photon model:
Models of Light The wave model: under many circumstances, light exhibits the same behavior as sound or water waves. The study of light as a wave is called wave optics. The ray model: The properties of
More informationUniversity Physics (Prof. David Flory) Chapt_37 Monday, August 06, 2007
Name: Date: 1. If we increase the wavelength of the light used to form a double-slit diffraction pattern: A) the width of the central diffraction peak increases and the number of bright fringes within
More informationspecular diffuse reflection.
Lesson 8 Light and Optics The Nature of Light Properties of Light: Reflection Refraction Interference Diffraction Polarization Dispersion and Prisms Total Internal Reflection Huygens s Principle The Nature
More informationBasic optics. Geometrical optics and images Interference Diffraction Diffraction integral. we use simple models that say a lot! more rigorous approach
Basic optics Geometrical optics and images Interference Diffraction Diffraction integral we use simple models that say a lot! more rigorous approach Basic optics Geometrical optics and images Interference
More informationHolography. How is that different than photography? How is it accomplished? Amplitude & Phase
Holography 1948: Dennis Gabor proposes lensless imaging: wavefront reconstruction. Calls it total recording or Holo gram Concept: record and recreate wavefront incident on film. Amplitude & Phase How is
More informationIntroduction: Experiment 1: Wave Properties of Light
Natural Order Properties of Light Lab Introduction: In this lab we will explore the wave and particle nature of light. In the first experiment we will measure the diffraction pattern of light as it passes
More informationPhase. E = A sin(2p f t+f) (wave in time) or E = A sin(2p x/l +f) (wave in space)
Interference When two (or more) waves arrive at a point (in space or time), they interfere, and their amplitudes may add or subtract, depending on their frequency and phase. 1 Phase E = A sin(2p f t+f)
More informationCollege Physics B - PHY2054C
Young College - PHY2054C Wave Optics: 10/29/2014 My Office Hours: Tuesday 10:00 AM - Noon 206 Keen Building Outline Young 1 2 3 Young 4 5 Assume a thin soap film rests on a flat glass surface. Young Young
More informationMeasurement of period difference in grating pair based on analysis of grating phase shift
Measurement of period difference in grating pair based on analysis of grating phase shift Chao Guo, Lijiang Zeng State Key Laboratory of Precision Measurement Technology and Instruments Department of Precision
More informationAccurate alignment technique for nanoimprint lithography
Accurate alignment technique for nanoimprint lithography Li Jiang and Martin Feldman * Department of Electrical and Computer Engineering Louisiana State University Baton Rouge, LA 70803-5901 ABSTRACT The
More informationPolarisation and Diffraction
2015 EdExcel A Level Physics 2015 EdExcel A Level Physics Topic Topic 5 5 Polarisation and Diffraction Polarization Polarization is a characteristic of all transverse waves. Oscillation which take places
More informationHigh spatial resolution measurement of volume holographic gratings
High spatial resolution measurement of volume holographic gratings Gregory J. Steckman, Frank Havermeyer Ondax, Inc., 8 E. Duarte Rd., Monrovia, CA, USA 9116 ABSTRACT The conventional approach for measuring
More informationUnit-22 Interference and Diffraction
Unit-22 Interference and iffraction Objective: In this experiment, we used single-slit, double-slit, circular hole and grating to measure the wavelength of laser. Apparatus: Optical track, diode laser,
More informationMichelson Interferometer
Michelson Interferometer The Michelson interferometer uses the interference of two reflected waves The third, beamsplitting, mirror is partially reflecting ( half silvered, except it s a thin Aluminum
More informationWaves & Oscillations
Physics 42200 Waves & Oscillations Lecture 41 Review Spring 2016 Semester Matthew Jones Final Exam Date:Tuesday, May 3 th Time:7:00 to 9:00 pm Room: Phys 112 You can bring one double-sided pages of notes/formulas.
More informationPositioning system of a metrological AFM: design considerations
Positioning system of a metrological AFM: design considerations AFM workshop LNE, Trappes Jan Piot K.U.Leuven Division PMA Overview Introduction General layout metrological AFM Layout of the positioning
More informationA Level. A Level Physics. WAVES: Combining Waves (Answers) Edexcel. Name: Total Marks: /30
Visit http://www.mathsmadeeasy.co.uk/ for more fantastic resources. Edexcel A Level A Level Physics WAVES: Combining Waves (Answers) Name: Total Marks: /30 Maths Made Easy Complete Tuition Ltd 2017 1.
More informationWORCESTER POLYTECHNIC INSTITUTE
WORCESTER POLYTECHNIC INSTITUTE MECHANICAL ENGINEERING DEPARTMENT Optical Metrology and NDT ME-593L, C 2018 Lecture 03 January 2018 Lasers sources Some operating characteristics: laser modes Schematic
More informationG3 TWO-SOURCE INTERFERENCE OF WAVES
G3 TWO-SOURCE INTERFERENCE OF WAVES G4 DIFFRACTION GRATINGS HW/Study Packet Required: READ Tsokos, pp 624-631 SL/HL Supplemental: Hamper, pp 424-428 DO Questions pp 631-632 #1,3,8,9,10 REMEMBER TO. Work
More informationDiffraction and Interference of Plane Light Waves
1 Diffraction and Interference of Plane Light Waves Introduction In this experiment you will become familiar with diffraction patterns created when a beam of light scatters from objects placed in its path.
More informationLab 7 Interference and diffraction
Prep this lab, as usual. You may paste this entire lab into your notebook, including the data tables. All this should be completed prior to the start of lab on Wednesday, and I will score your completed
More informationWe are IntechOpen, the world s leading publisher of Open Access books Built by scientists, for scientists. International authors and editors
We are IntechOpen, the world s leading publisher of Open Access books Built by scientists, for scientists 4,100 116,000 120M Open access books available International authors and editors Downloads Our
More informationSurface Quality Measurement System Using Laser Technology for Lathe Machines
Surface Quality Measurement System Using Laser Technology for Lathe Machines Sheragin Tavassoli, Suresh Gobee and Vickneswari A/P Durairajah Asia Pacific University of Technology and Innovation Technology
More informationWORCESTER POLYTECHNIC INSTITUTE
WORCESTER POLYTECHNIC INSTITUTE MECHANICAL ENGINEERING DEPARTMENT Optical Metrology and NDT ME-593L, C 2018 Introduction: Wave Optics January 2018 Wave optics: coherence Temporal coherence Review interference
More information1. Which diagram best represents the reflection of light from an irregular surface?
waves 6-2-04 Name 02-JUN-04 1. Which diagram best represents the reflection of light from an irregular surface? 1. 1 3. 3 2. 2 4. 4 2. In a vacuum, a monochromatic beam of light as a frequency of 6.3 X
More information4D Technology Corporation
4D Technology Corporation Dynamic Laser Interferometry for Company Profile Disk Shape Characterization DiskCon Asia-Pacific 2006 Chip Ragan chip.ragan@4dtechnology.com www.4dtechnology.com Interferometry
More informationWave Optics. April 11, 2014 Chapter 34 1
Wave Optics April 11, 2014 Chapter 34 1 Announcements! Exam tomorrow! We/Thu: Relativity! Last week: Review of entire course, no exam! Final exam Wednesday, April 30, 8-10 PM Location: WH B115 (Wells Hall)
More informationLIGHT SCATTERING THEORY
LIGHT SCATTERING THEORY Laser Diffraction (Static Light Scattering) When a Light beam Strikes a Particle Some of the light is: Diffracted Reflected Refracted Absorbed and Reradiated Reflected Refracted
More informationPhysics 228 Today: Diffraction, diffraction grating
Physics 228 Today: Diffraction, diffraction grating Website: Sakai 01:750:228 or www.physics.rutgers.edu/ugrad/228 Diffraction is a further expansion of the idea of interference. We expand from two sources
More informationLecture 4 Recap of PHYS110-1 lecture Physical Optics - 4 lectures EM spectrum and colour Light sources Interference and diffraction Polarization
Lecture 4 Recap of PHYS110-1 lecture Physical Optics - 4 lectures EM spectrum and colour Light sources Interference and diffraction Polarization Lens Aberrations - 3 lectures Spherical aberrations Coma,
More informationChapter 8: Physical Optics
Chapter 8: Physical Optics Whether light is a particle or a wave had puzzled physicists for centuries. In this chapter, we only analyze light as a wave using basic optical concepts such as interference
More informationLeica TCS STED. The Fast Track to Superresolution Technical Documentation
Leica TCS STED The Fast Track to Superresolution Technical Documentation 8 9 6 7 Inverted research microscope Leica DMI6000 CS Scan head Laser and power supply Computer table Air damped optical table 6
More information