F 470 LASER GLASS SCRIBER

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1 FANTOM LASER INSIDE F 470 LASER GLASS SCRIBER MODERN LASER TECHNOLOGY APPLICABLE FOR VIRTUALLY ANY PRECISION GLASS SCRIBING APPLICATION LCD'S, TN, STN, CSTN, TFT, PDP, VFD, E/L, OLED, FLCD, MD, PLED, LCOS

2 - A component for the In-Line Laser Cutting Systems for Flat Panel Display Manufacturing. The is a stand alone Laser Singulation System for the Flat Panel Display Industry comprising easy integration with In-Line operation and a Brand New development, featuring Fantom laser Singulation TECHNOLOGY. Zero Width Laser Cutting Technology is an innovative method of splitting glass without generating a visible seam, as a basic method of controllable propagation of a Micro-Crack, using recent achievements in LASER SCIENCE, MATERIAL PROCESSING, AND A NUMBER OF OTHER UNIQUE SEMICONDUCTOR AND AIROCPACE TECHNOLOGIES supported by a series of patents and patent applications. PTG has taken this method to the next level, with a completely new discovery called the FANTOM METHOD - Singulation of nonmetallic materials on a molecular level, normally with invisible seam, with tremendous speed (10 times faster then ZWLCT ) and no material loss. It produces no particles, chips or other debris associated with conventional Laser or Mechanical Scribe and Break technology. General advantages of ZWLCT Include: High scribing speed - up to 1000 mm/s Extremely high accuracy- up to 10 microns achievable Unlimited component size No treatment of edges after processing Easy integrated into any conventional process Easy changed glass-processing thickness. Increased glass strength. Excellent surface integrity of cut surface. Precise edge geometry Edge strength comparable with original material Cut edge totally free of stress. This is extremely important for some applications and usually requires an additional process. Process capabilities Capable of Singulation ITO coated double layer glass without any limitations. Capable of Singulation of any type of display glass (except quartz) without realignments. Provide extremely stable Singulation line with highest possible edge quality. Microns level straitens of Singulation line No cheeping and no glass particles generated on initial, middle (crossing) and final stages of the Singulation process. No overheating of the glass surface, no long term edge micro fracturing No problems of Singulation along the glue seal line. (Straightness of cut dose not change even next to and along the seal line) Cross Cuts no cut initiations on the crossing, no chipping No surface scratches, as glass substrate does not touch the surface of the table. Ability to handle the miniature substrates and micro displays Scribe line straightness measured in microns. Advantages for customer. No Grinding & Cleaning Line Necessary Total space for Laser Singulation line 4 times smaller (X and Y on one machine) No separate breaking system required. Two flip-over stations can be eliminated. Two breaking stations can be eliminated. The panel is 3 to 5 times mechanically stronger. Provides multiple functions: Scribing, Breaking, Inspection, Measurement (Ideal for R&D) Ease of installation gives the system plug-n-play characteristics and quick start-up times. Page 2 of 5 Spec Sheet.doc

3 Features The new and unique Features of FANTOM METHOD and System are: No optical alignment, as there is no external optics. The right laser beam is generated directly by the laser. It is using the FANTOM F250G (250W) patented, maintenance free, mode selective, sealed CO 2 laser generator, specially designed for Laser Glass Singulation and Scribing Applications. Laser is emitting the specific frequency and operating in a special mode enhancing the glass separation process. is a result of combination of a new FPD processing technology, latest developments in semiconductor industry and a FANTOM METHOD of splitting of non metallic materials. It has a Singulation X-axis and indexing Y-axis with open FPD panel frame holding system for easier incorporation into the In-Line environments. The FPD panel frame is separate from the frame holding system, based on the air bearings and has its own +/- 2º of rotation capability for automatic alignment. Depending on the requirements for the In-Line System it can be configured for X and Y Singulation or single axis Singulation. uses PC based controls; touch screen interface and a wide variety of software tools. System is equipped with ultra smooth direct drive servomotors. It is equipped with Remote Internet monitoring and diagnostics. Ability of Singulation on a wafer transfer tape for "Stretch and Remove" technology for easer handling of a small size displays. Price includes installation, startup and training. System includes fully documented operation manual, site plan drawings, recommended spare parts list, and setup tool kit. Features and Specifications Glass Substrate size (mm) 300 x 300, 400x400, 470x300, 470 x 350, 470 x 400, 470 x 470 Nominal Glass Thickness Double layer only mm each layer. Singulation/ Scribing speed mm/s max Cut/scribe placement accuracy ± 0.010mm ( ") Encoder resolution 1 µm Linear accuracy of a positioning system +/- 5µm Minimum Addressable Resolution mm Alignment Vision System with Fully Automatic Fiduciary Marks recognition. Repeatability +/ mm Scribe Chips None Mechanical and Facility Specifications Laser Equipment * Machine Length Machine Width Machine Height Weight Mechanical Contraction Operating Temperature Relative Humidity Electrical Requirements Clean Dry Air Fantom F250GL 250 Watt Mode Selective Sealed CO2 20,000 Hour nominal MTBF 1315 mm 1042 mm 1800 mm (plus 362 mm safety light) 540 kg Heavy-duty aluminum extrusion base & cast iron top. +18 to +25o C 40-80% non-condensing 220V 3 Phase, 60 Hz, 20 A 18o +/- 1o C, 8 2 CFM, <20% humidity. 6 ATM for Japan. Computer Industrial Intel Pentium III 1.0 GHz computer with 18.0GB Hard Drive, 17 monitor. Software UNICUT software, free upgrades, Active X-controls, Universal library, Touch screen interface (Optional) 12, 15, Line Stabilization Transformer Optional Page 3 of 5 Spec Sheet.doc

4 Battery Back Up (Optional) 1.0 KVA APC UPS (For computer Operations) Cooling Systems (Optional) External closed loop laser cooling system with special, non-toxic, clean room compatible mineral fluid. Clean Room Level (Optional) Class 1000, Class 100 * - Specially designed for OWLCT method. System can be customized for specific requirements and applications. In order for PTG to provide the best in continuous product improvement, specifications are subject to change without notice. Specifications subject to change without notice. Options List Components are priced separately, which permits users to customize their machine s capabilities for their specific needs without incurring unnecessary costs. Requirements beyond those listed below will be quoted upon request. Contact PTG s office or visit our website if you need any assistance determining which capabilities best suit your needs. Touch Screen Interface Laser Cooling Unit: Complete your machine by selecting from the Options List. Non contact panel holding table Laser Cut Initiation tool Mechanical Cut Initiation tool Specifications are subject to change without notice. Page 4 of 5 Spec Sheet.doc

5 TECHNICAL SPECIFICATIONS UniCut Software The system employs Windows 2000 NT platforms for reliability and stability giving the user interoperability with an extensive software library. As parts are manufactured, subsequent parts can be designed and placed in a production que, allowing continuous manufacturing. UniCut software is specifically designed to handle LASER machine tool scribing applications. PTG has worked extensively with manufactures and machine tool operators to create a state-of-the-art PC scribing control software package on the basis of the Parker controller and PC Interface. UniCut FEATURES PC-Based Software has an open architecture solution with the latest PC-Based motion controllers and incorporating standard off-the-shelf industrial PC components available from Parker. Machine Vision Most of PTG Laser Systems can be equipped with video cameras for positioning control, laser beam auto alignment, fiduciary and separation marks recognition and edge detection. Home - Built-in-homing routine for all axes (programmable). Library Parts - Built-in user definable library parts. The user can create additional library parts. Retrace -Retrace of the cut path to back up all the way to the beginning. Pause and Resume - On and Off path pause and resume feature. Machine can retrace, skip, resume, jog, or home after the pause. Displays - UniCut can display the user programmable information including current position, program status information and a graphical display of the part being processed. All of the displays are programmable (size, color, location) by the user. System manipulator and Tool box allowing the fool system control and quick cut set up for tests and simple parts like rectangular and circles without any additional CAD CAM software. Free updates and downloads for customers. 41 Sky Line Drive Suite 1001 Lake Mary, FL Phone Fax Page 5 of 5 Spec Sheet.doc

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