Agilent. Integrated Dry Turbo Pumping System

Transcription

1 Agilent Mini-Task AG81 Integrated Dry Turbo Pumping System

2 Agilent Mini-TASK AG81 Dry Turbo Pumping System Compact, Portable Vacuum System: Just Plug and Pump The Agilent Mini-TASK AG81 (Active Gauge) is a small and compact, easy-to-use, integrated dry vacuum system, featuring the Agilent Turbo-V 81 MacroTorr pump with improved vacuum performance, backed by a dry 10 l/min diaphragm pump Turbo-V 81-M: improved vacuum performance The Turbo-V 81-M is a high performance turbo-drag pump with improved mechanical design aimed at: Higher foreline pressure tolerance Higher pumping speed and throughput Excellent compression ratio Unique Agilent Turbo Pump Technology No maintenance required: Agilent Turbo Pumps don t need oil refills Operability in any position Low Power Requirement (optimized by new generation controller) Reading Card and new Generation Controller Large Pressure Reading Display Universal voltage V, 50/60 Hz I/O and serial interface T-Plus Navigator Software allows communication with your PC Worldwide Service Capability Three levels of Product Support 24h Advance Exchange Factory Repair Upgrade Program allow global coverage of service needs to maximize productivity and uptime Active Gauge Capability FRG-700 Active Full Range combined gauge: Pirani and Cold Cathode from atmosphere to 5x10-9 mbar (7x10-9 Torr) Pressure data available on independent channels: Serial communication Analog output The gauge can be connected/disconnected from the Mini-TASK during normal operation.

3 Features New Generation Turbomolecular Pump Agilent Turbo-V 81-M Compact, Light, Dry, Clean and Robust System Universal voltage (90V/240V) - CE, C_CSA_US, RoHs compliant RS-232 or Analogical Communication High vacuum gauge driving card Large pressure data display Pressure driven set point, Analog set point Active Gauge FRG-700 Active Full Range combined gauge: Pirani and Cold Cathode from atmosphere to 5x10-9 mbar (7x10-9 Torr) Compact, stand-alone transducers Simple, rugged electronics with metal enclosure LED status indicator CSA/UL and CE certified Benefits Designed for demanding applications Cost-effective pumping solution for small volumes Can be used world-wide Easy to use: plug and play system Compatible with world-wide power configurations Complies with world-wide safety standards Easy system pressure measurement DIY Active Gauge Kit This accessory can be ordered separately, and includes: Active Gauge FRG-700 Cable for gauge connection Vacuum Tee and Connecting Hardware (Flanges according to the System inlet flange)

4 Agilent Mini-TASK AG81 Dry Turbo Pumping System Pumping Speed vs Inlet Pressure Pressure vs Time (with a pump down vol. of 1 lt.) Inlet pressure Pressure (mbar) Pumping speed (l/s) Time (sec) Technical Specifications KF40 ISO63 CFF 4.5 in. Pumping Speed (l/s) N H He Base pressure 2 x 10-7 mbar 2 x 10-7 mbar 5 x 10-8 mbar* Bakeout temperature 80 C at inlet 80 C at inlet 120 C at inlet Shipping Weight lbs. (kg) 16.4 (7.5) 16.4 (7.5) 18.3 (8.3) Pumpdown time (1 liter volume) 60 sec. to 24 mbar; 120 sec. to 1 x 10-4 mbar; 160 sec. to 7 x 10-5 mbar Turbo pump rotational speed 80,000 rpm Start-up time Less than 2 minutes Operating position Any Operating ambient temperature 5 C to 35 C / 32 F to 122 F Input Voltage and Frequency 90V to 240V AC; 50 Hz / 60 Hz Maximum input power 220 VA Serial communications RS-232 cable, 9-pin D-type male, 9-pin D-type female, T-Plus Navigator Software * According to standard DIN , the base pressure is that measured in a leak-free test dome, 48 hours after the completion of test dome bake-out, with a Turbopump fitted with a ConFlat Flange Ordering Information KF40 ISO63 CFF 4.5in Mini-TASK AG Accessories DIY Full Range Gauge Kit* EU plug power cable**, 2 meters (1 ph) USA plug power cable**, 2 meters (1 ph) UK plug power cable**, 2 meters (1 ph) Serial Cable and T-Plus Navigator Software NOTE Special Vent Valve available on request * The DIY Gauge Kit can be ordered separately, and includes Full Range Gauge FRG-700, Cable for gauge connection, Vacuum Tee and Connecting Hardware (Flanges according to the System inlet flange) ** Power Cord to be ordered separately

5 Applications Electron Microscopy and Mass Spectrometry The Agilent Mini-TASK AG81 Integrated Turbo Pumping System is the perfect tool to keep the column of an electron microscope under vacuum while performing maintenance or repair on the device. The oil-free nature of the system guarantees freedom from contamination of the column. Research & Development Particle Accelerators This Turbo Pumping System may be used in any laboratory where there is a need to create high vacuum in small-volume chambers quickly and easily. It performs best when evacuating volumes of 10 liters or less. The new generation electronics and the pressure display ensure the accuracy of the process. Semiconductor Manufacturing The Mini-TASK AG81 is particularly well suited for evacuating load-lock chambers. Its oil-free design ensures the purity of the process. The Mini-TASK AG81 may be mounted in any position, making it suitable for most system configurations. Industrial Applications The Mini-TASK AG81 Turbo Pumping System can create and maintain the required vacuum level in a separate chamber of an industrial system during maintenance or repair. It is well suited for applications in Medical accelerators for cancer therapy.

6 Agilent Mini-TASK AG81 - Outline Drawings KF 40 CFF 4.5 in. ISO [14.24] J1 IN-OUT J2 SERIAL [13.556] [13.559] [9.84] Dimensions: millimeters [inches] [6.38] [9.84] [6.38] United States and Canada 121 Hartwell Avenue Lexington, MA USA Tel.: Toll-Free: Fax: vpl-customerservice@agilent.com Benelux Netherlands B.V. Herculesweg PL Middelburg The Netherlands Tel: Fax: Brazil Brasil Avenida Marcos Penteado de Ulhoa Rodrigues, andar Castelo Branco Office Park, Torre Jacarandá - Tamboré Barueri, Sao Paulo CEP: Toll free : China (China) Co. Ltd No.3, Wang Jing Bei Lu, Chao Yang District, Beijing, China Tel.: +86 (10) Fax: +86 (10) Toll-Free: vpc-customerservice@agilent.com France France 7 avenue des Tropiques Z.A. de Courtaboeuf - B.P Les Ulis cedex France Tel.: +33 (0) Fax: +33 (0) vpf.sales@agilent.com Germany & Austria Alsfelder Strasse 6 Postfach Darmstadt Germany Tel.: +49 (0) Fax: +49 (0) India India Pvt. Ltd. G01. Prime corporate Park, 230/231, Sahar Road, Opp. Blue Dart Centre, Andheri (East), Mumbai India Tel: /8200 Fax: Toll Free: cag_india@agilent.com Italy Italia S.p.A. via F.lli Varian Leini, (Torino) Italy Tel.: Fax: Toll-Free: vpt.sales@agilent.com vpt-customerservice@agilent.com Japan Japan, Ltd. 8th Floor Sumitomo Shibaura Building Shibaura Minato-ku Tokyo Japan Tel.: Toll-Free: Fax: vpj-customerservice@agilent.com Korea Korea Ltd. Shinsa 2nd Bldg. 2F Daechi-dong Kangnam-gu, Seoul Korea Tel.: Toll-Free: Fax: vpk-customerservice@agilent.com Mexico Concepcion Beistegui No 109 Col Del Valle C.P Mexico, D.F. Tel.: Fax: Singapore Singapore Pte Ltd No.1 Yishun Avenue 7 Singapore Tel: Fax : Toll-Free: vps-customerservice@agilent.com South East Asia Sales Sdn Bhd Unit 201, Level 2 uptown 2, 2 Jalan SS21/37, Damansara Uptown Petaling Jaya, Selangor, Malaysia Tel : Fax: Toll-Free: vps-customerservice@agilent.com Taiwan Taiwan Limited 20 Kao-Shuang Rd., Pin-Chen City, 324 Taoyuan Hsien, Taiwan, R.O.C. Tel Toll Free: vpw-customerservice@agilent.com UK & Ireland UK Ltd 6 Mead Road Oxford Industrial Park Yarnton, Oxford OX5 1QU UK Tel.: +44 (0) Fax: +44 (0) vpt-customerservice@agilent.com This information is subject to change without notice, Inc Published July 15, 2011 VPD-0611EN