MEMS SENSORS. Solutions Guide. Edition 3. Sense the Possibilities.

Transcription

1 MEMS SENSORS Solutions Guide Edition 3 Sense the Possibilities

2 Sense the possibilities This guide offers comprehensive product parametric tables for the most innovative products from our supplier partners. Take advantage of our late cut off shipping times, expert resources as well as the industry s broadest and deepest component inventory. DOWNLOAD THE COMPLETE GUIDE Look for these buttons to learn more about the products being featured. Click to view associated Dev boards, purchase products and watch videos. Hover over with your mouse to see block diagrams. Follow us and stay up to date DATASHEET DEV BOARD VIDEO BLOCK DIAGRAM MEMS evaluation and development platforms available. CLICK TO LEARN MORE

3 We are delighted to announce the launch of our MEMS Sensors virtual catalog. As you know, MEMS sensors have seen a rapid adoption rate in consumer devices like tablets and smartphones. But this has also prompted adoption in many other applications, like industrial automation, automotive, wearable electronics, medical devices, navigation tools, security equipment, and so much more. MEMS are rapidly becoming a very integral part of our daily lives. This is why Future is uniquely positioned to support your application requirements in MEMS sensing. We have an excellent stocking position on the leading devices in the market, offer a world-class engineering service from design to delivery, and have excellent relationships with top tier suppliers in this space. We invite you to have a look at this highly enriching catalog to guide your selection in your next-generation MEMS sensing designs. This v-cat is filled with reference designs, specification info, and other collateral. As well, since the sensors market is always changing, we ve had the opportunity to add even more New Product Introductions since our print Sensor Solutions Guide was launched in Q4 of last year. Of course a critical part of enabling your design is the availability of development tools and evaluation platforms; we are more than happy to arrange on site demos. Please read through this publication and consult the back cover for all the details. We look forward to working with you sense the possibilities!

4 TABLE OF CONTENTS u ACCELEROMETERS u INTERSIL TECHNICAL ARTICLE u GYROSCOPES u MAGNETOMETERS u DIGITAL PRESSURE SENSORS u SILICON MICROPHONES

5 ACCELEROMETERS 6 GYROSCOPES BOSCH STMICROELECTRONICS FREESCALE MAGNETOMETERS What is an accelerometer? An accelerometer measures acceleration or G force; this may be static, such as gravity, or dynamic, such as produced by changes in velocity (direction) of an object in motion. Accelerometers are commonly produced in a Microelectromechanical systems (MEMS) based manufacturing process with integrated signal processing & conditioning circuits in the same IC. With the growing popularity of consumer portable devices like smartphones and tablets, accelerometers are experiencing significant growth and improvements which include increased functionality, higher accuracy and sensitivity. Application Cases Real Life Examples Free fall detection Laptop and hard disk drives Gaming Controls Sports / Healthcare User interface Image stabilization Balance control GPS navigation Automobiles Nintendo Wii remotes Sport watches with footpod from Nike and Polar Nike + ipod Sports kit Smartphones & related apps Camcorders, DSCs Segways, robotics GPS receivers Airbag restraint systems, ESP (Electronic Stability Programs), ABS (Anti-lock Braking Systems), tilt measurement for alarm systems, Active suspension systems

6 DIGITAL PRESSURE SENSORS SILICON MICROPHONES The Industry s Broadest Selection of 2 X 2 mm Accelerometers Bosch accelerometers are advanced, ultra-small, triaxial, low-g acceleration sensors with digital interfaces, aiming for low-power consumer electronics applications. They allow measurement of accelerations in 3 perpendicular axes and thus sense tilt, motion, shock and vibration in cellular phones, handhelds and computer peripherals. Featured Parts User programmable g-range & bandwidth Low-power consumption SPI (3-wire/4-wire) and I 2 C interface User programmable interrupt engine BMA220 BMA222 BMA250 BMA255 BMA280 DATASHEET DATASHEET DATASHEET DATASHEET DATASHEET DEV BOARD DEV BOARD DEV BOARD Ultra low-power auto-wake-up mode Self-test capability

7 ACCELEROMETERS 6 GYROSCOPES BOSCH STMICROELECTRONICS FREESCALE Sensing and Processing in One MMA9550L DATASHEET DEV BOARD MAGNETOMETERS VIDEO BLOCK DIAGRAM Freescale s Xtrinsic MMA9550L intelligent motion sensing platform is an industry first with integration of a MEMS accelerometer, a 32-bit embedded ColdFire microcontroller, flash memory and a dedicated architecture to manage other sensors. The MMA9550L may be programmed to provide free fall detection. +2g, +4g, +8g 3-axis digital accelerometer One slave serial peripheral interface or I²C interface operates up to 2 Mbps One master I²C interface operates up to 400 Kbps 8-, 10-, and 14-bit raw or trimmed analog-to-digital converter (ADC) data available 1.8-volt supply voltage

8 DIGITAL PRESSURE SENSORS SILICON MICROPHONES Xtrinsic Low-power, 3-axis Accelerometers MMA845x DATASHEET DEV BOARD VIDEO BLOCK DIAGRAM The MMA845x are smart low-power, three-axis capacitive micro machined accelerometers with 10, 12 or 14 bits of resolution. These accelerometers are packed with embedded functions with flexible user-programmable options, configurable to two interrupt pins. Embedded interrupt functions allow for overall power savings relieving the host processor from continuously polling data to 3.6-volt supply voltage (1.71 to 1.89 for low-power) ±2g/±4g/±8g dynamically selectable full scale Supply voltage : 1.95 to 3.6 V Low noise: 150 micro/per root Hertz Programmable 2 interrupt pins for size, 7 or 8 interrupt sources Interrupt and IIC interface supply: 1.62 to 3.6 V Low-Power, Easy Design Integration MMA8491Q DATASHEET VIDEO BLOCK DIAGRAM The Xtrinsic MMA8491Q 3-axis accelerometer is an ultra low-power tilt sensor that enables smart meters, home appliances, asset tracking applications, gaming and remote controls through auto-on/auto-sleep energy-efficient operation housed in a specialized industrial package. Low-profile 2 x 2 x 1.0 mm DFN pkg High sensitivity: 1 mg per LSB Low noise: 150 micro g/root Hertz Low-power mode: 7 micro amps Interrupt and IIC interface supply: 1.62 to 3.6 V Supply voltage : 1.95 to 3.6 V

9 ACCELEROMETERS 6 GYROSCOPES MAGNETOMETERS BOSCH FREESCALE STMICROELECTRONICS 10- & 12-bit XTrinsic Accelerometers with Embedded Functionality MMA865xFC DATASHEET BLOCK DIAGRAM Freescale s MMA865xFC Xtrinsic 10- & 12-bit accelerometer has industry leading performance in a small 2 x 2 x 1 mm DFN package. This accelerometer is packed with embedded functions that include flexible user-programmable options and two configurable interrupt pins. Overall power savings is achieved through inertial wake-up interrupt signals that monitor events and remain in a low-power mode during periods of inactivity. Low-profile 2 x 2 x 1.0 mm DFN package High sensitivity: 1 mg per LSB Low noise: 150 micro g per root Hertz Low-power mode: 7 micro amps Interrupt and IIC interface supply: 1.62 to 3.6 V Supply voltage: 1.95 to 3.6 V

10 DIGITAL PRESSURE SENSORS SILICON MICROPHONES Digital Output, Ultra Low-power, High Performance 3-axis nano Accelerometer LIS3DH DATASHEET DEV BOARD VIDEO BLOCK DIAGRAM The LIS3DH is an ultra low-power high performance 3-axis linear accelerometer belonging to the nano family, with digital I2C/SPI serial interface standard output. The device features ultra low-power operational modes that allow advanced power saving and smart embedded functions. Wide supply voltage: 1.71 V V ±2g/±4g/±8g/±16g dynamically selectable full scale Independent IOs supply (1.8 V) and supply voltage compatible I2C/SPI digital output interface Ultra low-power mode consumption 16-bit data output down to 2 μa

11 ACCELEROMETERS 6 GYROSCOPES BOSCH STMICROELECTRONICS FREESCALE MAGNETOMETERS Ultra Low-power, High Performance 3-axis Linear Accelerometer for Automotive Applications AIS328DQ DATASHEET DEV BOARD BLOCK DIAGRAM The AIS328DQ is an ultra low-power high performance 3-axis linear accelerometer with a digital serial interface SPI standard output. An I2C compatible interface is also available. The device features ultra low-power operational modes that allow advanced power saving and smart sleep-to-wakeup functions. Wide supply voltage range: 2.4 V to 3.6 V Low voltage compatible IOs: 1.8 V Ultra low-power mode consumption: down to 10 μa ±2g/±4g/±8g dynamically selectable full scale SPI / I2C digital output interface 16-bit data output AEC-Q100 qualification

12 DIGITAL PRESSURE SENSORS SILICON MICROPHONES Assisting in the Design of a High Performance Analog Front End Solution By: Paul Lee, Product Marketing Manager, Intersil Read the artivle by Paul Lee, Productvery Marketing Manager Precisely measuring small signals in noisy The gain of the ISL28617 can be proenvironments is very challenging and most grammed from attenuation of 0.1 to a ASSISTING THE DESIGN gain up to 10,000 via two external resistors, application solutions IN utilize high performance instrumentation amplifiers. OF A HIGH PERFORMANCE RIN and RFB. The input and output stages have Intersil s newest FRONT instrumentation amplifier individual power supply pins, which enable ANALOG END ISL28617 provides the precision and high input signals riding on a high common mode SOLUTION performance needed in most analog front end voltage to be level shifted to a low voltage applications such as test and measurement, device, such as an A/D converter. The rail-todata acquisition, biomedical, and weigh scale rail output stage can be powered from the same supplies as the ADC, which preserves applications. Intersil s newest instrumentation amplifier ISL28617 provides the precision and high the ADC maximum input dynamic range and needed in mostto analog front end applications such as test and measurement, Theperformance ISL28617 was developed accomplish eliminates ADC input overdrive. acquisition, biomedical, and weigh scale applications. thedata following: Theinput, ISL28617 is capable of instrumentation a very high level The ISL28617 is a high performance, differential differential output amplifier Provide adesigned fully differential, rail-to-rail for precision analog to digital applications and it was to (120dB) of CMRR performance developed common mode output for optimally driving ADCs accomplish the following: rejection from DC to as high as 1kHz. Limit the output swing to prevent output Furthermore, ISL28617 overdrive Provide a fully differential, rail-to-rail output for optimally driving ADCs offers low noise (8.6nV/ Hz at 1kHz and 85nVRMS from 0.1 to the gain output swing to output MLimit aximize accuracy byprevent removing on- overdrive 10Hz) for improved signal to noise (SNR) and component tolerances and external chip Allow any gain, including attenuation. for superior signal conditioning. PC board parasitic resistance Maximize gain accuracy by removing on-chip component tolerances and external PC To facilitate and assist in the design of high parasitic resistance Eboard nable user control of amplifier precision performance analog front-end withuser choice of external resistor level Enable control of amplifier precision level with choice of external resistor solutions, tolerance. an evaluation board is available to fully assess the tolerance Maintain CMRR>100dB and remove CMRR sensitivity to gain resistor tolerance performance of the ISL28617 instrumentation PProvide rovide aalevel levelshift shiftinterface interfacefrom frombipolar bipolar analog input signal sources to unipolar, and amplifiers. bipolarinput ADCsignal outputsources terminations analog to unipolar, and bipolar ADC output terminations READ THE FULL ARTICLE IN FTM

13 ACCELEROMETERS GYROSCOPES 6 BOSCH MAGNETOMETERS STMICROELECTRONICS What is a gyroscope? Angular rate sensors, or gyroscopes, measure an object s speed of rotation. Angular rate sensors are unique in that they require no frame of reference to function; an angular rate sensor installed in an airplane will tell you how quickly the aircraft is turning. In contrast, a car s wheel speed sensor must be mounted in the frame of reference, in this case the car body, to be able to measure the speed of the wheel rotating next to it. Application Cases Real Life Examples Navigation GPS Dead reckoning Sporting / medical Image stabilization User interface Motion control Balance control / inertial stabilization Automobiles Golf practice devices, gait recorders Camcorders, DSCs Wireless mouse, virtual reality headsets Robotics, industrial machine controls Segways, robotics, mass storage devices Roll over detection vehicle stability (ESP)

14 DIGITAL PRESSURE SENSORS SILICON MICROPHONES 16-Bit Resolution in a 3 X 3 mm Package BMG160 DATASHEET The BMG160 is an ultra-small, digital 3-axis angular rate sensor. The BMG160 allows low-noise measurement of angular rates in 3 perpendicular axes and is designed for use in cellular phones, handhelds, computer peripherals, man-machine interfaces, virtual reality features, remote and game controllers. 16-bit Digital resolution ±1 /s Zero rate offset /s/k Zero rate offset over temperature /s/ Hz Noise density 5.0 ma Current consumption 3 mm x 3 mm x 0.95 mm³ LGA package 6-Axis Inertial Measurement System in Package 3D Accelerometer and 3D Gyroscope LSM330DLC DATASHEET DEV BOARD ST s family of MEMS sensor modules leverages the robust and mature manufacturing processes already used for the production of micro machined accelerometers. The various sensing elements are manufactured using specialized micro machining processes, while the IC interfaces are developed using a CMOS technology that allows the design of a dedicated circuit. Analog supply voltage: 2.4 V to 3.6 V 3 independent acceleration channels and 3 angular rate Digital supply voltage IOs: 1.8 V channels Low-power mode Power-down mode

15 ACCELEROMETERS GYROSCOPES 6 BOSCH MAGNETOMETERS STMICROELECTRONICS Automotive Qualified, High Stability and Sensitivity Gyroscope A3G4250D DATASHEET The A3G4250D is a low-power 3-axis angular rate sensor able to provide unprecedented stability at zero rate level and sensitivity over temperature and time. It includes a sensing element and an IC interface capable of providing the measured angular rate to the external world through a standard SPI digital interface. An I2C-compatible interface is also available. The sensing element is manufactured using a dedicated micro machining process developed by STMicroelectronics to produce inertial sensors and actuators on silicon wafers. Wide supply voltage: 2.4 V to 3.6 V ±245 dps full scale I2C/SPI digital output interface 16-bit rate value data output inemo system-on-board 8-bit temperature data output Two digital output lines (interrupt and data ready) AEC-Q100 Qualified Cortex M3 32-bit MCU This 9-DoF inertial system represents a fully integrated solution that can be used in numerous applications such as virtual reality, augmented reality, image stabilization, human machine interfaces, robotics and inertial body tracking.

16 DIGITAL PRESSURE SENSORS SILICON MICROPHONES Accuracy and Design Flexibility with Extremely LowPower Consumption L3GD20 DATASHEET The L3GD20 includes a sensing element and an IC interface capable of providing the measured angular rate to the external world through a digital interface (I2C/SPI). The sensing element is manufactured using a dedicated micro machining process developed by STMicroelectronics to produce inertial sensors and actuators on silicon wafers. The IC interface is manufactured using a CMOS process that allows a high level of integration to design a dedicated circuit which is trimmed to better match the sensing element characteristics. Three selectable full scales (250/500/2000 dps) Two digital output lines I2C/SPI digital output interface A complete set of communication interfaces in a very small size form factor (13x13x2 mm) makes the inemo-m1 system-on-board a flexible solution for effortless orientation estimation in embedded applications. LEARN MORE 16-bit-rate value data output 8-bit temperature data output Integrated low- and high-pass filters with user-selectable bandwidth

17 ACCELEROMETERS GYROSCOPES MAGNETOMETERS6 BOSCH FREESCA What is a Magnetometer? A magnetometer is a device that can measure magnetic field strength or direction. They are widely used for measuring the earth s magnetic fields. In recent years magnetometers have been miniaturized to the extent that they can be incorporated in integrated circuits at very low cost and are finding increasing use as compasses in consumer devices such as mobile phones and tablet computers. Combined with other sensing devices and micro processors, applications such as electronic compasses, remote controls and location-based navigation services can be achieved. Application Cases Real Life Examples Navigation Location-based services (LBS) E-compass GPS enhancement Sporting / medical Pedometer Industrial Vibration monitoring and compensation

18 LE DIGITAL PRESSURE SENSORS SILICON MICROPHONES STMICROELECTRONICS Fully Compensated e-compass in a 3 X 3 mm Footprint BMC050 DATASHEET The BMC050, is a fully compensated electronic compass that delivers excellent performance in a very small size. The BMC050 6-axis, digitial e-compass comes in a small 3 mm x 3 mm x 0.95 mm LGA package. It comprises Bosch Sensortec proprietary FlipCore geomagnetic sensing technology with Bosch Sensortec s well-proven, leading-edge MEMS sensor technology for the accelerometer. Digital interfaces: I²C, SPI, 4 interrupt pins Supply voltage: 1.62 V V Supply voltage I/O: 1.20 V to 3.6 V Operating Temp: -40 C to +85 C Package (LGA): 3 mm x 3 mm x 0.95 mm 3-Axis Digital Geomagnetic Sensor in a 1.56 X 1.56 mm Footprint BMM150 DATASHEET BMM150 is a low-power and noise 3-axis digital geomagnetic sensor to be used in compass applications. The 12-pin wafer level chip scale package (WLCSP) with a size of 1.56 x 1.56 mm² and 0.60 mm height, provides highest design flexibility to the developer of mobile devices. Applications like virtual reality or gaming on mobile devices such as mobile phones, tablet PCs or portable media players require 9-axis inertial sensing including magnetic heading information. -40 C to +85 C Temperature range I²C and SPI Digital interfaces 0.3μT Resolution ±50μT Zero-B offset <1% FS Non-linearity

19 ACCELEROMETERS GYROSCOPES MAGNETOMETERS6 BOSCH FREESCA Xtrinsic High Accuracy, 3D Magnetometer MAG3110 DATASHEET DEV BOARD VIDEO BLOCK DIAGRAM The MAG3110 is a small, low-power digital 3D magnetic sensor with a wide dynamic range to allow operation in PCBs with high extraneous magnetic fields. The MAG3110 magnetometer measures the three components of the local magnetic field which will be the sum of the geomagnetic field and the magnetic field created by components on the circuit board. 80 Hz maximum sampling rate I²C interface 400 khz -40 C to +85 C operation.95 to 3.6-volt supply 6-Axis Xtrinsic Sensor FXOS8700CQ DATASHEET DEV BOARD BLOCK DIAGRAM Xtrinsic sensor combines industry leading accelerometer and magnetometer sensors in a small 3 x 3 x 1.2 mm QFN plastic package. The 14-bit accelerometer and 16-bit magnetometer are combined with a high-performance ASIC to enable an e-compass solution capable of a typical orientation resolution of 0.1 degrees and sub 5 degree compass heading accuracy for most applications. Highly integrated Wide dynamic range ±1200 μt Embedded vector magnitude detection Embedded autonomous hard iron calibration Low-power consumption

20 ALE DIGITAL PRESSURE SENSORS SILICON MICROPHONES STMICROELECTRONICS Ultra Compact High Performance e-compass: 3D Accelerometer and 3D Magnetometer Module LSM303DLHC DATASHEET The LSM303DLHC is a system-in-package featuring a 3D digital linear acceleration sensor and a 3D digital magnetic sensor. All full scales available are fully selectable by the user. LSM303DLHC includes an I2C serial bus interface that supports standard and fast mode 100 khz and 400kHz. The system can be configured to generate interrupt signals by inertial wake-up/free fall events as well as by the position of the device itself. Thresholds and timing of interrupt generators are programmable by the end user on the fly. Magnetic and accelerometer parts can be enabled or put into power-down mode separately. 3 magnetic field channels and 3 acceleration channels ±2g/±4g/±8g/±16g selectable full scale 16-bit data output From ±1.3 to ±8.1 gauss magnetic field full scale I2C serial interface Analog supply voltage 2.16 V to 3.6 V

21 ACCELEROMETERS GYROSCOPES MAGNETOMETERS What is a pressure sensor? A pressure sensor is a device that generates an electrical signal as a function of the pressure measured in a media (i.e. gas or liquid). Various technologies can be used to measure pressure, for example piezoelectric, piezoresistive strain gage, capacitive or electromagnetic. Application Cases Real Life Examples Navigation Indoor navigation enhancement (floor/level detection) Altimeter/barometer Enhancement of GPS navigation (e.g. time-to-first-fix improvement, dead-reckoning, slope detection) Medical Blood pressure monitor, Anesthesia unit monitor Ventilators and respirators, Infusion pumps, Spirometry

22 DIGITAL PRESSURE SENSORS 6 SILICON MICROPHONES BOSCH FREESCALE STMICROELECTRONICS Ultra low-power, High Performance Digital Barometric Pressure Sensor BMP180 DATASHEET DEV BOARD The BMP180 has a very high performance, which enables applications in advanced mobile devices, such as smartphones, tablet PCs and sports devices. The ultra lowpower consumption down to 3 μa makes the BMP180 the leader in power saving for your mobile devices. It is also distinguished by its very stable behavior with regard to the independency of the supply voltage. Low-power: 5μA at 1 sample per sec. in standard mode Temperature measurement included I 2 C interface Fully calibrated Pb-free, halogen-free and RoHS compliant MSL 1 Next Generation Absolute Barometric Pressure Sensor in a 2 X 2.5 mm Footprint BMP280 DATASHEET BMP280 is an absolute barometric pressure sensor especially designed for mobile applications. Its small dimensions and its low-power consumption allow for the implementation in battery powered devices such as mobile phones, GPS modules or watches. It is based on Bosch s proven piezoresistive pressure sensor technology featuring high accuracy and linearity as well as long term stability and high EMC robustness. 8-Pin LGA with metal 2.0 x 2.5 x 0.95 mm³ Temperature Operation range 0 to +65 C I²C and SPI Interface 2.74 μa average current consumption 0.1 μa average current consumption in sleep mode 5.5msec average measurement time

23 ACCELEROMETERS GYROSCOPES MAGNETOMETERS make it PRECISE Smart devices are becoming a bigger part of guiding us on life s journey and sensors enable you to precisely track your course. Freescale is building upon 30 years of MEMS sensing technology success with its new Xtrinsic lineup. With increased intelligence and decision-making capabilities, Xtrinsic sensors are ideal for the latest consumer, industrial and medical products. By integrating multiple highly precise, energy-efficient sensing functions with the right logic and customizable software, you ll be able to touch, tap, tilt and transmit your way to next-generation designs. A smarter, more interactive world. Let s make it. The Smart Choice for Precise Pressure and Altitude Detection MPL3115A2 DATASHEET DEV BOARD VIDEO BLOCK DIAGRAM Freescale s Xtrinsic MPL3115A2 has very low-power consumption, smart features and requires zero data processing for mobile devices, medical and security applications. The Xtrinsic MPL3115A2 pressure sensor smart features include digital output, two interrupts for auto-wake, minimum/maximum threshold detection and autonomous data acquisition. MCU usage can be limited since the MPL3115A2 pressure sensor can process sensor data locally, reducing communications required with the host processor. Less than 1 foot / 0.3 m resolution Pressure range: kpa Compensated, direct reading (software is not needed) 20-bit pressure measurement (Pascals) 20-bit altitude measurement (meters) 12-bit temperature measurement

24 DIGITAL PRESSURE SENSORS 6 BOSCH FREESCALE SILICON MICROPHONES STMICROELECTRONICS MEMS Pressure Sensor, mbar Absolute Digital Output Barometer LPS331AP DATASHEET DEV BOARD VIDEO The LPS331AP is an ultra compact absolute piezoresistive pressure sensor. It includes a monolithic sensing element and an IC interface able to take the information from the sensing element and to provide a digital signal to the external world. The sensing element consists of a suspended membrane realized inside a single mono-silicon substrate. It is capable to detecting pressure and is manufactured using a dedicated process developed by ST, called VENSENS. The VENSENS process allows to build a mono-silicon membrane above an air cavity with controlled gap and defined pressure. 260 to 1260 mbar absolute pressure range High-resolution mode: mbar RMS Low-power consumption: Low resolution mode: 5.5 μa High resolution mode: 30 μa High overpressure capability: 20x full scale Embedded temperature compensation Embedded 24-bit ADC

25 ACCELEROMETERS GYROSCOPES MAGNETOMETERS What is a Silicon Microphone? Silicon Microphones or MEMS (MicroElectrical-Mechanical System) Microphones have a pressure sensitive diaphragm etched directly into silicon through MEMS processing technology. With the help of advanced MEMS processing technologies, silicon microphones offer the advantages of smaller size and higher overall performance compared to the popular electret condenser microphone (ECM). The growing popularity of silicon microphones has made the price point increasingly competitive to ECM technology. Application Cases Real Life Examples Communications / Media Voice-over Internet Protocol (VoIP) A/V learning devices Digital still and video cameras Speech-to-text Gaming Augmented reality input devices Security Speech / voice recognition Anti-theft systems

26 DIGITAL PRESSURE SENSORS SILICON MICROPHONES 6 STMICROELECTRONICS WOLFSON MEMS Omnidirectional, Ultra-Compact Digital Microphone MP34Dx01 DATASHEET VIDEO The MP34DX01 is an ultra-compact, low-power, omnidirectional, digital MEMS microphone built with a capacitive sensing element and an IC interface with stereo operation capability. The sensing element, capable of detecting acoustic waves, is manufactured using a specialized silicon micro machining process dedicated to produce audio sensors. Single supply voltage Low-power consumption 120 dbspl acoustic overload point 62.6 db signal-to-noise ratio Omnidirectional sensitivity 26 dbfs sensitivity

27 ACCELEROMETERS GYROSCOPES MAGNETOMETERS Analog Silicon Microphones WM71xx Series DATASHEET WM7120A DATASHEET WM7110 DEV BOARD DATASHEET WM7120 BLOCK DIAGRAM The WM71xx Series are low-profile silicon analog microphones. They offer high Signal-to-Noise Ratio (SNR) and low-power consumption and are suited to a wide variety of consumer applications. High SNR; selectable sensitivity tolerance options Low supply current 200µA Low-profile packaging Support for automated flow solder assembly Analog output Top Port Package Digital Silicon Microphones WM72xx Series DATASHEET WM7210 BLOCK DIAGRAM DATASHEET WM7220 The WM72xx Series incorporates Wolfson s proprietary CMOS/MEMS membrane technology, offering high reliability and high performance in a miniature, lowprofile package. The WM72xx Series is designed to withstand the high temperatures associated with automated flow solder assembly processes. High SNR; selectable sensitivity tolerance options Low-power Low-profile packaging Support for automated flow solder assembly PDM digital audio output Stereo/array operation

28 DIGITAL PRESSURE SENSORS SILICON MICROPHONES 6 STMICROELECTRONICS WOLFSON MEMS evaluation and development platforms available. CLICK HERE FOR AN ON-SITE DEMO