Length, United States, NIST (National Institute of Standards and Technology)

Transcription

1 Calibration or s Laser radiations Other stabilized laser: vacuum wavelength Optical beat frequency E % Yes 1 Length instruments Laser system: error of indicated L Comparison to master length m Q[0.05, 0.1L ], L in m µm 2 95% No 2 Gauge block: central Interferometry, exact fractions mm ( L ), L in mm, s range from 18 to % No 3 Length bar: central Interferometry, exact fractions mm ( L ), L in mm, s range from 33 to % No 3b Gauge block: central comparison to gauge block mm ( L ), L in mm, s range from 25 to % No 4 Length bar: central comparison to length bar mm ( L), L in mm, s range from 58 to % No 5 Length bar: central Line with wrung graduated gage blocks mm ( L ), L in mm 2 95% No 6 Step gauge: face spacing L CMM mm ( L), L in mm µm 2 95% No 7 Line standards Precision line : line spacing, L Line mm Illumination reflection only ( L ) 2 95% No Approved on 14 June The BIPM key comparison database, June /7

2 Calibration or s Line standards Stage micrometer: line spacing, L Line mm Illumination reflection only ( L ) 2 95% No Approved on 14 June Line standards 1-D grating: pitch P Atomic force microscope µm Q[0.003, 0.002P ], P in µm, s range from µm to 0.02 µm µm 2 95% No 11 External cylinder (plug, piston, pin, wire): L External cylinder (plug, piston, pin, wire): Internal cylinder (ring): L stylus comparison comparison mm (35 + 1L), L in mm, s range from 35 to % No mm µm 2 95% No mm ( L ), L in mm, s range from 86 to % No 18 Sphere (ball): L stylus 1 30 mm Q[21, 0.5L ], L in mm, s range from 21 to % No 19 Sphere (ball): L comparison mm ( L ), L in mm µm 2 95% No 21 Angle by circledividers Optical polygon: face Index table and autocollimator º Number of faces 3 to 72 with nominally equal, integer s between sides 0.14 " 2 95% No 22 Angle by circledividers Index table: index Index table and autocollimator 360/n (n = 24) 360/n (n = 3) º Number of divisions n = 3, 4, 5, 6, 8, 9, 10, 12, 15, 18, 20 and " 2 95% No 23 The BIPM key comparison database, June /7

3 Calibration or s Angle artefacts Angle block: included Indexing table and autocollimator º 0.14 " 2 95% No 24 Angle artefacts Angle block: included Indexing table and autocollimator or two autocollimators º 0.18 " 2 95% No 25 Angle prisms Roundness standards Roundness standards Roundness standards Surface texture Optical wedge: deviation External cylinder (plug): Internal cylinder (ring): Sphere or hemisphere: Groove or step-height standard: step height H Autocollimator 0 60 " 0.1 " 2 95% No 27 Spindle-based measuring instrument Spindle-based measuring instrument Spindle-based measuring instrument µm % No µm % No µm µm Sphere 5 mm to 100 mm % No 31 Q[1, 7H ], H in µm, s range from 1 to % No 35 Surface texture Roughness standard: ISO parameters, Rq, Rz µm Q[0.01, 0.013R ], R in µm µm 2 95% No 37 Screw standards Screw standards Thread plug, plain: pitch Threaded plug, tapered: pitch 3-wire method mm 1.25 µm 2 95% No 38 3-wire method mm 1.25 µm 2 95% No 42 CMM artefacts Ball bar: ball spacing CMM mm Kinematically supported ( L ), L in mm µm 2 95% No 60 The BIPM key comparison database, June /7

4 Calibration or s Miscellaneous complex geometry Hardness indenter: radius µm 0.4 µm 2 95% No 61 SEM magnification standard (high kev SRM 484/2070): line spacing SEM with HeNe laser µm to µm 2 95% No 68 standard, SRM 2071: HeNe laser for 0.3 ( = 0.3 ( = µm µm 2 95% No 69 standard, SRM 2071: HeNe laser for 0.3 ( = 0.3 ( = µm 0.31 µm 2 95% No 70 standard, SRM 2072: HeNe laser for µm µm 2 95% No 71 The BIPM key comparison database, June /7

5 Calibration or s standard, SRM 2072: HeNe laser for µm 0.24 µm 2 95% No 72 3 ( standard, SRM 2073: HeNe laser for 3 ( µm 0.08 µm 2 95% No 73 3 ( standard, SRM 2073: HeNe laser for 3 ( µm 0.12 µm 2 95% No 74 standard, SRM 2074: HeNe laser for µm 0.02 µm 2 95% No 75 The BIPM key comparison database, June /7

6 Calibration or s standard, SRM 2074: HeNe laser for µm 0.06 µm 2 95% No 76 standard, SRM 2075: HeNe laser for µm µm 2 95% No 77 standard, SRM 2075: HeNe laser for µm 0.47 µm 2 95% No 78 Linewidth, photomask - SRM 473: linewidth Optical microscopy µm % No 79 Pitch, photomask (magnification standard) - SRM 473: pitch Optical microscopy 2 60 µm % No 80 The BIPM key comparison database, June /7

7 Calibration or s Pitch, microscope (magnification standard) - SRM 2800: pitch Optical microscopy µm % No 81 Pin gage for optical fiber ferrules (SRM 2522): laser µm 0.05 µm 2 95% No 82 Optical fiber ferrule geometry (SRM 2523): laser mm µm 2 95% No 83 Optical fiber coating standard (SRM 2553): Optical fiber coating standard (SRM 2554): laser laser µm µm 2 95% No µm µm 2 95% No 85 Optical fiber coating standard (SRM 2555): laser µm µm 2 95% No 86 The BIPM key comparison database, June /7