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MEMS motion sensor: 3 axis analog output gyroscope Preliminary data Features Analog supply voltage 2.7 V to 3.6 V Wide extended operating temperature range (-40 C to 85 C) 3 indipendent angular rate channels ±400 dps and ±1600 dps full-scale High shock survivability Embedded self-test ECOPACK RoHS and Green compliant (see Section 5) Application Motion and man machine interface Gaming and virtual reality input devices Fitness and wellness Pointing device and remote controllers Industrial and robotics Personal navigation devices Description The LYPR540AH is a three axis yaw, pitch and roll analog gyroscope featuring three separate analog output channels. LYPR540AH provides amplified (±400 dps full scale) and not amplified (±1600 dps full scale) outputs for each sensible axis available at the same time through dedicated pins, and is capable of detecting rates with a -3 db bandwidth up to 140 Hz. LGA-28L (4.4x7.5x1.1 mm) ST 3 axis gyroscope family leverages on robust and mature manufacturing process already used for the production of hundreds milion micromachined accelerometers with excellent acceptance from the market. Sensing element is manufactured using specialized micromachining processes, while the IC interfaces are realized using a CMOS technology that allows to design a dedicated circuit which is trimmed to better match the sensing element characteristics. The LYPR540AH is available in plastic Land Grid Array (LGA) package. Several years ago ST pioneered successfully the usage of this package for accelerometers. Today ST has the widest manufacturing capability and strongest expertise in the world for production of sensors in plastic LGA package. Table 1. Device summary Order code Temperature range [ C] Package Packing LYPR540AH -40 to +85 LGA-28L Tray LYPR540AHTR -40 to +85 LGA-28L Tape and reel November 2009 Doc ID 16747 Rev 1 1/12 This is preliminary information on a new product now in development or undergoing evaluation. Details are subject to change without notice. www.st.com 12

Contents LYPR540AH Contents 1 Block diagram and pin description............................. 3 1.1 Block diagram............................................... 3 1.2 Pin description.............................................. 3 2 Module specifications........................................ 5 2.1 Mechanical characteristics..................................... 5 2.2 Electrical characteristics....................................... 6 2.3 Absolute maximum ratings..................................... 7 3 Terminology................................................ 8 3.1 Sensitivity.................................................. 8 3.2 Zero-rate level.............................................. 8 3.3 Self-test................................................... 8 4 Application hints............................................ 9 4.1 External capacitors........................................... 9 4.2 Soldering information......................................... 9 5 Package information........................................ 10 6 Revision history........................................... 11 2/12 Doc ID 16747 Rev 1

Block diagram and pin description 1 Block diagram and pin description 1.1 Block diagram Figure 1. Block diagram 1.2 Pin description Figure 2. Pin connection Doc ID 16747 Rev 1 3/12

Block diagram and pin description LYPR540AH Table 2. Pin description Pin# Name Function 1-7 NC Internally not connected 8 Reserved Connect to GND 9 ST Self tets (logic 0: normal mode; logic 1: self test) 10 NC Internally not connected 11 GND 0V supply voltage 12 VCONT_1G PLL filter connection 13 VCONT_2G PLL filter connection 14 FILTVDD_2G PLL filter connection 15 4xZ Z amplified output 16 4xY Y amplified output 17 4xX X amplified output 18 NC Internally not connected 19 NC Internally not connected 20 Z Z not amplified output 21 Y Y not amplified output 22 X X not amplified output 23 Reserved Connect to GND 24-27 Reserved Connect to VDD 28 VDD Power supply 4/12 Doc ID 16747 Rev 1

Module specifications 2 Module specifications 2.1 Mechanical characteristics Vdd = 3V, T = 25 C unless otherwise noted (a) Table 3. Mechanical characteristics Symbol Parameter Test conditions Min. Typ. (1) Max. Unit FS Not amplified output (X,Y,Z) ±1600 FSA So SoA Measurement range Sensitivity Amplified output (4xX,4xY,4xZ) ±400 Not amplified output (X,Y,Z) 0.8 Amplified output (4xX,4xY,4xZ) 3.2 dps mv/dps SoDr Sensitivity change vs. temperature 0.07 %/ C Voff Zero-rate level 1.5 V VoffDR Zero rate level drift over temperature 0.08 dps/ C NL Non linearity (2) Best fit straight line ±1 % FS BW Bandwidth (3) 140 Hz Rn Rate noise density 0.02 dps/ Hz Top Operating temperature range -40 +85 C 1. Typical specifications are not guaranteed. 2. Guaranteed by design. 3. The product is capable of measuring angular rates extending from DC to the selected BW. a. The product is factory calibrated at 3 V. The operational power supply range is from 2.7 V to 3.6 V. Doc ID 16747 Rev 1 5/12

Module specifications LYPR540AH 2.2 Electrical characteristics Vdd = 3 V, T = 25 C unless otherwise noted Table 4. Electrical characteristics Symbol Parameter Test conditions Min. Typ. (1) Max. Unit Vdd Supply voltage 2.7 3 3.6 V Idd Supply current 10.8 ma VST Self-test input Logic 0 level 0 0.2*Vdd Logic 1 level 0.8*Vdd Vdd Top Operating temperature range -40 +85 C 1. Typical specifications are not guaranteed. V 6/12 Doc ID 16747 Rev 1

Module specifications 2.3 Absolute maximum ratings Stresses above those listed as absolute maximum ratings may cause permanent damage to the device. This is a stress rating only and functional operation of the device under these conditions is not implied. Exposure to maximum rating conditions for extended periods may affect device reliability. Table 5. Absolute maximum ratings Symbol Ratings Maximum value Unit Vdd Supply voltage -0.3 to 6 V Vin Input voltage on any control pin (ST) -0.3 to Vdd +0.3 V A Acceleration 3000 for 0.5 ms g 10000 for 0.1 ms g T STG Storage temperature range -40 to +125 C ESD Electrostatic discharge protection 2 (HBM)TBC kv This is a mechanical shock sensitive device, improper handling can cause permanent damages to the part This is an ESD sensitive device, improper handling can cause permanent damages to the part Doc ID 16747 Rev 1 7/12

Terminology LYPR540AH 3 Terminology 3.1 Sensitivity An angular rate gyroscope is a device that produces a positive-going output voltage for counterclockwise rotation around the sensitive axis considered. Sensitivity describes the gain of the sensor and can be determined by applying a defined angular velocity to it. This value changes very little over temperature and time. 3.2 Zero-rate level Zero-rate level describes the actual output signal if there is no angular rate present. The zero-rate level of precise MEMS sensors is, to some extent, a result of stress to the sensor and therefore zero-rate level can slightly change after mounting the sensor onto a printed circuit board or after exposing it to extensive mechanical stress. This value changes very little over temperature and time. 3.3 Self-test Self-test allows testing the mechanical and electrical part of the sensor, allowing the seismic mass to be moved by means of an electrostatic test-force. The Self-test function is off when the ST pin is connected to GND. When the ST pin is tied to Vdd, an actuation force is applied to the sensor, emulating a definite Coriolis force. In this case the sensor output will exhibit a voltage change in its DC level which is also depending on the supply voltage. When ST is active, the device output level is given by the algebraic sum of the signals produced by the angular velocity acting on the sensor and by the electrostatic test-force. If the output signals change within the amplitude specified then the mechanical element is working properly and the parameters of the interface chip are within the defined specification. 8/12 Doc ID 16747 Rev 1

Application hints 4 Application hints Figure 3. LYPR540AH electrical connection 4.1 External capacitors The device core is supplied through Vdd line. Power supply decoupling capacitors (C2=100 nf ceramic, C1=10 µf Al) should be placed as near as possible to the supply pin of the device (common design practice). All the voltage and ground supplies must be present at the same time to have proper behavior of the IC (refer to Figure 3). The LYPR540AH IC includes a PLL (phase-locked loop) circuit to synchronize driving and sensing interfaces. Capacitors and resistors must be added at the FILTVDD_2G, VCONT_2G, VCONT_1G pins (as shown in Figure 3) to implement a second-order lowpass filter. 4.2 Soldering information The LGA package is compliant with the ECOPACK, RoHS and Green standard. It is qualified for soldering heat resistance according to JEDEC J-STD-020C. Leave pin 1 Indicator unconnected during soldering. Land pattern and soldering recommendation are available at www.st.com/ Doc ID 16747 Rev 1 9/12

Package information LYPR540AH 5 Package information In order to meet environmental requirements, ST offers these devices in different grades of ECOPACK packages, depending on their level of environmental compliance. ECOPACK specifications, grade definitions and product status are available at: www.st.com. ECOPACK is an ST trademark Figure 4. LGA-28L: mechanical data and package dimensions mm Dim. Min. Typ. Max. A1 1.1 A2 0.855 A3 0.2 D1 4.25 4.4 4.55 E1 7.25 7.5 7.55 N1 0.3 L1 5.4 L2 1.8 P2 1.2 T1 0.6 T2 0.4 M 0.1 d 0.3 k 0.05 h 0.1 Outline and mechanical data LGA-28L (4.4x7.5x1.1mm) Land Grid Array Package Pin 1 Indicator E1 k k C A A3 D P2 d = L1 = h C N1 D1 L2 k E B E k D Seating Plane A2 A1 M T2 T1 TOP VIEW K 8190050A 10/12 Doc ID 16747 Rev 1

Revision history 6 Revision history Table 6. Document revision history Date Revision Changes 06-Nov-2009 1 Initial release. Doc ID 16747 Rev 1 11/12

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