PRISMO Vario. Specifications and Performance Features. Industrial Measuring Technology from Carl Zeiss. Wide sensor variety

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Industrial Measuring Technology from Carl PRISMO Vario Specifications and Performance Features Wide sensor variety For all requirements Highly versatile More measuring options

PRISMO Vario Technology The PRISMO Vario machine technology Design: All mechanical components have been designed for high accuracy, dynamics and resistance to ambient influences, making PRISMO Vario fast and accurate. Bridge-type CMM with stationary machine table, lateral bridge drive. All axes with 4-side bearing. Computer aided error correction of motion axes (CAA Computer Aided Accuracy) Scales made of glass ceramics Highly effective passive anti-vibration system due to elastomer spring elements Supplied ex works with MPS (Multiple Probe System) option for the Vario sensor package air bearings, special characteristics: wide bearing area, tilt resistant, torsionally rigid Control: The high reliability and an optimum controller action of the control technology are the original trademarks: ISC (Intelligent Scanning Control) with highly integrated control technology Modular design with disk drive for firmware upgrades "Active scanning" for deflection-independent control of the measuring force Protective class: IP 54 for controler in cabinet B57 with cooling system Operation: Standard control panel for manual joystick operation at an off-line measuring location Overdrive for speed control in the CNC mode Dynalog control panel for computer-independent machine control (option) The PRISMO Vario sensor technology DT Measuring probe for contacting single-point measurement VAST XT Measuring probe for contacting scanning and single-point measurement Just the right one, if statements are required not only on dimension and position but also on form and all with one machine! Upgrading options from DT to XT All styli and adapter plates can be retained The same stylus changing magazine All CNC programs can be directly used Simple supplementing of scanning functions RDS rotary dynamic sensor Lateral swivel axis offering the following advantages over articulated joints with a stacked tilt/swivel axis: Tilt/swivel range ± 180 Minimum loss in measuring range 2.5 increments of swivel axes With RST-P, TP6, TP20 Touch trigger probes for single point measurement With ViScan Optical 2D camera sensor with image analysis function and autofocus for measuring normal to the image plane With DTS Optical probe (diode probe) for single point measurement Stylus changing magazine (option) VAST magazine for DT and VAST XT RDS magazine The PRISMO Vario measuring ranges With its wide variety of bridge sizes PRISMO Vario covers your measuring volume, too Measuring range position, working surface, large bridge clearance and long permissible probe extensions permit optimum utilization of the measuring range (see machine sketches) The outstanding PRISMO accuracy is guaranteed, tested and reliably met in the entire measuring volume as always with measuring machines The PRISMO Vario evaluation systems User-friendly operation and functionality of the overall system are our benchmark. Therefore, our software system is the most successful and the most frequently used worldwide.the necessary computer performance is supplied by powerful workstations with UNIX operating system or highquality PCs providing future proof and networking capabilities. The software library covers a wide variety of application requirements with its basic package and options: Prismatic workpieces Curves and free-form surfaces Gears Macro subroutine technique CAD programming Graphic record composition and statistics Network operation The PRISMO Vario concept Wide sensor spectrum from universal DT single point sensor to scanning with VAST XT or contacting and optical sensors on the RDS In the metrology room or on the shopfloor Flexibility provided by contacting and optical sensors Future proof, as all sensor can be retrofitted Open for growing metrology requirements Die PRISMO Vario measuring range reserves / -restrictions With fixed probes such as VAST, VAST DT and the VAST XT, the entire measuring area that begins underneath the probe head can be completely utilized. Because of the optimal location of the measuring range, it is easily possible to increase the range of the Z axis by changing probes or probe systems. (See pp 3-5. Dimensions and required space measurements C-VAST). Alternatively, this area can be used advantageously for clamping fixtures or pallets. Nominal meas. range Extended meas. range With RDS: Effective measuring range may be reduced. With standard articulating probe holders (i.e. RDS), effective measuring volume is often relocated further down in the measuring range (due to the size of the probe) and in some cases, further reduced by the articulating motion. That is why with articulating probe holders, a larger measuring range is recommended or even necessary. RDS RST 40 56 30 126 mm Effective meas. range Nominal meas. range 2

PRISMO Vario 5 Measuring ranges, Dimensions The PRISMO Vario measuring range portfolio PRISMO 5 Machine 7/9/5 Measuring ranges X in mm (in.) 700 (27.6) Y in mm (in.) 900 (35.4) Z in mm (in.) 500 (19.7) Machine weight (approx.) kg (lb) 1600 (3520) Permissible workpiece weight kg (lb) 1200 (2640) The PRISMO Vario dimensions PRISMO 5 h min. assembly clearance H C b 300 mm (12 in.) Transport height (T) of machine unit with transport mechanisms T l Device 7/9/5 L 1740 (69) l 1195 (47) H 2930 (115) a 850 (33.5) A 1525 (60) B 1465 (58) b 925 (36) h 720 (27.2) C-RDS 602 (23.7) C-VAST XT / DT 695 (27.4) T 1950 (76.8) a 5 B A L Dimensions in mm (in.) C: Distance between table top and lower edge of probe PRISMO Vario 7 Measuring ranges, Dimensions The PRISMO Vario measuring range portfolio PRISMO 7 Machine 9/12/7 9/15/7 9/18/7 9/24/7 Measuring ranges X in mm (in.) 900 (35.4) 900 (35.4) 900 (35.4) 900 (35.4) Y in mm (in.) 1180 (46.5) 1500 (59.1) 1800 (70.9) 2400 (94.5) Z in mm (in.) 700 (27.6) 700 (27.6) 700 (27.6) 700 (27.6) CMM weight (approx.) kg (lb) 2250 (4960) 2900 (6390) 3410 (7520) 4740 (10430) Permissible workpiece weight kg (lb) 1300 (2860) 1500 (3300) 1500 (3300) 2000 (4400) The PRISMO Vario dimensions PRISMO 7 h min. assembly clearance H C b 300 mm (12 in.) Transport height (T) of machine unit with transport mechanisms T l Device 9/12/7 9/15/7 9/18/7 9/24/7 L 2040 (80) 2340 (92) 2640 (194) 3240 (128) l 1495 (59) 1795 (71) 2095 (83) 2950 (116) H 3030 (119) a 850 (33.5) A 1700 (67) B 1640 (65) b 1100 (43) h 820 (32.3) C-RDS 712 (28) C-VAST XT / DT 805 (31.7) T 2100 (82.7) 2150 (84.6) a 5 B A L Dimensions in mm (in.) C: Distance between table top and lower edge of probe 3

PRISMO Vario 10 Measuring ranges, Dimensions The PRISMO Vario measuring range portfolio PRISMO 10 X = 1200 Machine 12/18/10 12/24/10 12/30/10 12/42/10 Measuring ranges X in mm (in.) 1200 (47.2) 1200 (47.2) 1200 (47.2) 1200 (47.2) Y in mm (in.) 1800 (70.9) 2400 (94.5) 3000 (118.1) 4200 (165.4) Z in mm (in.) 1000 (39.4) 1000 ( 39.4) 1000 ( 39.4) 1000 ( 39.4) Machine weight (approx.) kg (lb) 5810 (12810) 7050 (15540) 8200 (18080) 12000 (26460) with increased workpiece weight kg (lb) 5910 (13030) 7150 (15760) 8300 (18300) - Permissible workpiece weight kg (lb) 2000 (4410) 2500 (5510) 3500 (7710) 3500 (7710) Increased workpiece weight kg (lb) 5000 (11020) 5000 (11020) 5000 (11020) - The PRISMO Vario dimensions PRISMO 10, X = 1200 h C min. assembly clearance b H 300 mm (12 in.) Transport height (T) of machine unit with transport mechanisms T l Device 12/18/10 12/24/10 12/30/10 12/42/10 L 2040 (80) 2340 (92) 2640 (194) 3495 (138) l 1495 (59) 1795 (71) 2095 (83) 2950 (116) H 3540 (138)* 3770 148)** 3590 (141) a 590 (23.2)* 820 (32)** 640 25.2) A 2000 (79) B 2050 (81) b 1435 (57) h 1220 (48) C-RDS 1086 (42.8) C-VAST XT / DT 1179 (46.4) T 2900 (114.2) * without base ** with base a 30 B A L Dimensions in mm (in.) C: Distance between table top and lower edge of probe The PRISMO Vario measuring range portfolio PRISMO 10 X = 1600 Machine (U-profile granite table) 16/24/10 16/30/10 Measuring ranges X in mm (in.) 1600 (63) 1600 (63) Y in mm (in.) 2400 (94.5) 3000 (118) Z in mm (in.) 1000 (39.4) 1000 (39.4) CMM weight (approx.) kg (lb) 10500 (23100) 12500 27500) Permissible workpiece weight kg (lb) 3500 (7700) 3500 (7700) The PRISMO Vario dimensions PRISMO 10, X = 1600 h 105 min. assembly clearance b 3 C b 2 H 300 mm (12 in.) Transport height (T) of machine unit with transport mechanisms T l Device 16/24/10 16/30/10 L 3540 (139) 4140 (163) l 2995 (118) 3620 (143) H 3840 (151) a 590 (23.2) A 2450 (96) B 2400 (94) b 1 / b 2 / b 3 1835 (72) / 1910 (75) h 1530 (60) C-RDS 1386 (54.6) C-VAST XT / DT 1479 (58.2 T 3200 (126) b 1 a 30 B A L Dimensions in mm (in.) C: Distance between table top and lower edge of probe 4

PRISMO Vario Accuracy The PRISMO Vario Accuracy PRISMO PRISMO 10 PRISMO 10 5 + 7 X=1200 10) X=1600 10) With DT 2) Length (size) measuring error 1) MPE acc. DIN EN ISO 10360-2 for E in µm (in./1000) at 18-22 C 1.7 + L/300 2.9 + L/250 4.2 + L/250 (64-72 F) (0.067+L/300) (0.114+L/250) (0.165+L/250) at 18-26 C 2.3 + L/300 3.2 + L/250 4.7 + L/200 (64-79 F) (0.091+L/300) (0.126+L/250) (0.185+L/200) Probing error MPE acc. DIN EN ISO 10360-2 for P in µm (in./1000) 1.8 (0.071) 2.9 (0.114) 4.8 (0.189) With VAST 2) XT Length (size) measuring error 1) as DT as DT as DT Probing error Scanning probing error MPE acc. DIN EN ISO 10360-4 for THP in µm (in./1000) 4.1 (0.161) 4.9 (0.193) 5.3 (0.209) required measuring time J (sec) 72 72 72 Form measurement error 3) MPE for roundness RON t (MZCI) in µm (in./1000) 2.6 (0.102) 3.8 (0.150) 8.0 (0.315) acc. DIN EN ISO 12181 (VDI/VDE 2617 Part 2.2) RDS With contacting probes Length (size) measuring error 1) MPE acc. DIN EN ISO 10360-2 for E in µm (in./1000) 2.3 + L/300 5.0 + L/250 8.0 + L/200 (0.091 + L/300) (0.197 + L/250) (0.315 + L/200) RST-P 4) 5) Standard - - TP6 6), TP20 7) Optional Standard Standard With ViScan 8) Probing error Two-dimensional probing uncertainty R 2 in µm (in./1000) 10 (0.394) 10 (0.394) 10 (0.394) acc VDI/VDE 2617 Part 6 One-dimensional probing uncertainty R 1 in µm (in./1000) 50 (1.969) 50 (1.969) 50 (1.969) of autofocus acc. VDI/VDE 2617 Part 6 With DTS 8) Probing error One-dimensional probing uncertainty 9) R 1 uni in µm (in.) 25 (1) 25 (1) 25 (1) acc. VDI/VDE 2617 Part 6 Scales Resolution Glass ceramic; from Y>2400 mm steel scales and automatic temperature measurement are used 0.2 µm (0.000 008 in.) 1) Measured length in mm (in.) 2) DT, VAST XT : acceptance with stylus length 60 mm (2.4 in.) and tip diameter 8 mm (0.3 in.) 3) Roundness in scanning mode with v scan = 5 mm/sec (0.2 in./sec), filter 50 UPR 4) RST: acceptance with stylus length 40 mm (1.6 in.) and tip diameter 3 mm (0.12 in.) 5) The probe can be operated at an acoustic pressure of max. 75 db (A) for single frequencies and max. 80 db (A) for combination frequencies in the range 50-2000 Hz. 6) TP6: acceptance with stylus length 21 mm 0.83 in.)and tip diameter 3 mm (0.12 in.) 7) TP20: acceptance with stylus length 10 mm 0.4 in.) and tip diameter 3 mm (0.12 in.). Module change with TP20 only by using RDS magazine 8) The use of optical probes is only recommended in conjunction with a contacting sensor (RST-P or TP6/20), temperature range 18-22 C (64-72 F) 9) Probing uncertainty at flat and plane surfaces acc. VDI/VDE 2617 part 6 10) For PRISMO 10 with Y > 2400: 18-24 C (64-75 F) 5

PRISMO Vario Sensor System, Speed, Environment The PRISMO Vario sensor system Die PRISMO Vario Sensor Variety Alternatives in basic equipment Optional on RDS DT VAST XT RST-P 1) ViScan DTS Probing method Universal Universal Touch trigger Optical Optical single point probe scanning probe single point probe 2D image sensor single point sensor with autofocus Min. probing force 50 mn 50 mn 10 mn - - Meas. rate single points up to 2 sec/point up to 2 sec/point up to 1.7 sec/point - - scanning - up to 200 Points/sec - - - Stylus length max. 500 mm (19.7 in.) 500 mm (19.7 in.) Stylus: 90 mm (3.5 in.) - - Extensions: 300 mm (12 in.) Stylus mass max. 500 g (17.6 oz) 500 g (17.6 oz) 10 g (0.35 oz) - - The PRISMO Vario dynamics PRISMO 5 + 7 PRISMO 10 PRISMO 10 X = 1200 X = 1600 Travel speeds Setup mode: 0 to 70 mm/s (0 to 2.8 ips) 0 to 70 mm/s (0 to 2.8 ips) 0 to 70 mm/s (0 to 2.8 ips) Series measurement Axis max. 300 mm/s (0 to 12 ips) max. 300 mm/s (0 to 12 ips) max. 300 mm/s (0 to 12 ips) mode: Vector max. 520 mm/s (20.5 ips) max. 520 mm/s (20.5 ips) max. 520 mm/s (20.5 ips) Acceleration: Axis max. 1.4 m/s 2 (55 in/s 2 ) max. 0.8 m/s 2 (31.5 in/s 2 ) max. 0.6 m/s 2 (23.6 in/s 2 ) Vector max. 2.4 m/s 2 (94.5 in/s 2 ) max. 1.4 m/s 2 (55 in/s 2 ) max. 1,0 m/s 2 (39.3 in/s 2 ) Scanning speed: max. 100 mm/s (3.9 ips) max. 100 mm/s (3.9 ips) max. 100 mm/s (3.9 ips) The PRISMO Vario Temperature reserves Temperature conditions for guaranteeing the Ambient temperature 2) 18-26 C (64-79 F) 3) specified length-measuring error Temperature gradients 1.0 K/h 2.0 K/d 1.0 K/m (0.3 K/ft) Ambient temperature for ready-to operate status 10-35 C (59-95 F) Relative air humidity 40 to 70% Floor vibrations PRISMO Vario is equipped with an elastomer /viscose damping system and therefore very vibration resistant (limit curves on request). On request, we perform a vibration analysis. 1) TP6/TP20 (Renishaw) see manufacturer's documentation 2) The sensor-related restrictions are described in the part "PRISMO Vario accuracy" 3) For PRISMO 10 with Y > 2400: 18-24 C (64-75 F) 6

PRISMO Vario Environment The PRISMO Vario link to your network/production Power requirements Compressed-air supply Data technology 1/N/PE 100/110/115/120/125/230/240 V (±10%); 50-60 Hz (±3.5%). Total power consumption max. 2000 VA Supply pressure 6 to 10 bar (87 to 145 psi), pre-filtered. Consumption approx. 10 l/min (0.35 cfm) at 5.0 bar (73 psi) operating pressure. Air quality acc. to ISO 8573 Part 1: Class 4 The PRISMO Vario product line can be equipped with workstations or with high quality PC systems. On request the systems can be equipped with components for connecting to your network. The PRISMO Vario Safety Safety regulations PRISMO Vario fulfills the EC guide lines on machines 89/392/EWG in the version 91/368/EWG and bears the CE and GS symbol. DIN EN ISO 9001 Our PRISMO Vario CMMs comply with CE and GS regulations. The Carl quality assurance system is certified in accordance with DIN EN ISO 9001. The PRISMO Vario and even more The experience and Service The following options can be offered on request: - Rotary table as integrated 4th axis - Different types of control panel - Pallet and feed systems - Extensive computer and peripheral options - Diverse software options - Training, CNC programming, Service - is inventor and leader in innovative CNC coordinate metrology - is the largest manufacturer of CNC coordinate measuring machines worldwide - offers machine service, software service and in some countries a Hotline - invests a high amount of sales volume in research and technlogy - and measuring machines are future-oriented - with Carl 3D Metrology GmbH is the largest contractor of metrology services Explanations to PRISMO accuracy MPE = Maximum Permissible Error As defined in the DIN EN ISO 10360, every specification for accuracy will be noted with "Maximum Permissible error (MPE)". MPE defines a maximum value that a measuring deviation is not allowed to exceed. Accuracy results are represented as an index number. MPE E describes the length measuring error and MPE P describes the probing error. Maximum Permissible Error for length measurement Z Maximum Permissible Error for probing MPE E To determine length measuring error, calibrated gage blocks or step gage blocks are measured. With every measurement, 5 different lengths in 7 different positions within the measuring range of the CMM will be X determined according to ISO 10360-2. Every length will be measured 3 times. None of the 105 measurements are allowed to deviate from the calibrated value by more then the specified amount. The specification is in most cases dependent on the length, written in the form MPE E =A+L/K, whereby L represents the length. Sometimes the formula will be written as MPE E =A+F L/K, in which case the formula must be converted in order to compare to it to the first variation. For example, the values MPE E =2.5+1.5 L/333 and MPE E =2.5+L/220 are the same. Maximum Permissible Error for form measurement (roundness) t MPE RONt(MZCI) The application of CMMs for form measurement is discussed in VDI 2617, sheet 2.2. Parameters for roundness measurements are defined in DIN EN ISO 12181. For testing, a 50 mm ring gage with negligible form error is measured with high point density (with : scanning mode). From the measurement results, a so called Tschebyscheff-circle (MZCI = minimum zone circle) is calculated. The outcome of the form deviation results in the range of radial distances of this circle. It is not allowed to exceed the specification. 2 4 5 7 1 6 3 Y MPE P To determine the probing error, a sphere (diameter 10 to 50 mm) with negligible form error will be probed on 25 recommended positions (from ISO 10360-2). From the measurement results, a so called Gaussian least squares sphere is calculated. The range of radial distances from ther associated is not allowed to exceed the specification. Maximum Permissible Error for scanning probing MPE THP and MPE J 2 To determine the scanning probing error, 3 1 a sphere (diameter of 25 mm) with negligible form error will be scanned along 4 4 recommended scanning lines (from ISO 10360-4). When comparing the measurements with the MPE THP specifications, there are two conditions that must be met. First, the range that is determined from radial distances from the associated sphere is not allowed to exceed the specification (see MPE P ). Second, the deviation between the radial distances and the calibrated sphere diameter is not allowed to exceed the specification. Additionally, the time required (J) for the test must be specified, as speed has an enormous influence on the results. When the accuracy and time needed is indicated, the specification of the scanning probing error is an important indicator of the productivity of a CMM. 7

Carl Industrial Metrology 73446 Oberkochen/Germany Sales: +49 18 03 33 63 36 Service:+49 18 03 33 63 37 Fax: +49 73 64 20 38 70 E-mail: imt@zeiss.de Internet:www.zeiss.de/imt 60-22-217/I-e Printed in Germany. VII/2002 Noo Subject to technical modification and to changes in scope and design. Printed on chlorine-free paper. Carl conception, text and design: Carl.