MEMS & Sensors Andy Hurman Product Marketing March 2012 Andrew.hurman@st.com 07802 461034
MEMS Market by Products 2 6,000 Millions of Dollars 4.5B$ (+11%) ST Presence: 5,000 Microphone: Since end of 2010 4,000 Magnetometer: Since 2010 3,000 Gyroscope: Since 2009 2,000 Pressure Sensor: New in 2012 1,000 Accelerometer: Since 2006 0 2009 2010 2011 2012 2013 MEMS market share All segments (extract) * Magnetometer data source from Yole May 2011 Source: IHS isuppli Corp. Jan 2011
ST Investing heavily in MEMS 3 Global & Outstanding Manufacturing Capability Agrate Catania Rousset (France) Crolles (France) Agrate (Italy) Kirkop (Malta) Catania (Italy) Calamba (Philippines) Increase manufacturing capacity toward 3Mpcs/day (by the end of 2011) Sensors (8 MEMS dedicated line) ASIC Front-end Assembly & Testing
Top MEMS suppliers 4 Source: IHS January 2012
ST MEMS at a glance: Leadership through Nimble Innovation 5 630 2011 key facts 225.9 216.3 353.6 ST revenues* in 2011 ~640M$; Reconfirming ST leadership as top MEMS supplier for consumer electronics and mobile handsets Growing faster Growing than faster market than market ST # 1 ST Accelerometer # 1 Accelerometer and Gyroscopes and Gyroscopes 30 99 2006 2007 2008 2009 2010 2011 Motion Sensors Revenues Cumulative shipments more than 1.5 Billion Units ST delivering ST delivering to the to market the market 3Mpcs/day 3Mpcs/day (@end 201) (@end 2011) > 500 > 500 patents patents on on MEMS MEMS covering technology, manufacturing, manufacturing, design design and applications and applications Solutions Solutions (Hardware, Firmware Firmware & & Software) Source: isuppli, Yole Developpment
MEMS Sensors References 6 Sensor Type LIS or L: Linear Inertial Sensor AIS: Automotive Inertial Sensor LPS: Linear Pressure Sensor LSM: Linear Sensor Module Output A: Analog D: Digital LIS 3 D H Package L: LGA Q: QFN S: SO Number of Axis 2: 2-Axis Accelerometer 3: 3-Axis Accelerometer Y: Yaw Gyro PR: Pitch /Roll Gyro PY: Pitch/Yaw Gyro YPR: Yaw/Pitch/Roll Gyro Performance Level H: High M or _: Medium F: Low
MEMS Sensors: Different Sensors Adding Features 7 Accelerometer LIS3DH Senses the linear acceleration (m/s 2 ), tilt, shocks, vibrations, linear displacement Low consumption, High Speed Magnetometer LSM303DLx Senses the magnetic field (gauss) Compact, Low consumption Gyroscope L3G4200D Measures the angular rate ( /s) Mono-structure, High stability, compact Pressure sensor LPS331AP Measures Abs atmospheric pressure (mbar) High resolution, High Speed
MEMS Sensors Applications 8 Gesture recognition, Motion, Position sensing, Pedometer Tilt & Vibration Measurement, Alarm, People Monitoring Image stabilization, Menu Navigation, Portrait / landscape, Shock monitoring, HDD protection, Noise cancellation Gaming & Sport Industrial & Medical Automotive Mobile, PDAs, MP4/MP3 Consumer MEMS Sensors Navigator system, Alarm, Active/passive safety, Headlight control, E-call, Hand-free kit Image scrolling, Shock detection, Power Management, Pointing Robotics Roll over detection, Motion & position sensing, IMU
MEMS Accelerometers The Key Products
Accelerometer Product Focus LIS3DH 10 3-Axis Accelerometer Digital SPI/I2C output Able to measure accelerations with 4 selectable Full Scale: ±2, 4, 8 and 16g High Resolution (up to12 bit) Very low power consumption: 2µA in Low power mode (1Hz), 11µA in Normal mode (50Hz) and.5µa in Power down mode High Flexibility: 8 ODR user selectable: 1/10/25/50/100/400/1600/5000 Hz Bandwidth up to 2.5KHz 32-level FIFO (for 16-bit data) 3 ADC Inputs Temperature sensor Wide Power supply range 1.71 to 3.6V Self test function Small size package 3x3x1 (in mm)
Accelerometer Product Focus LIS3DH Very low power consumption 11 ODR (Hz) Normal mode (µa) PDown 0.4 0.4 1 2 2 10 4 3 25 6 4 50 11 6 100 20 10 200 38 18 400 73 36 1250 185-1600 - 99 5000-184 Low power mode (µa)
NEW Accelerometer LIS3DSH 12 3-Axis Digital Accelerometer 5 selectable Full Scale: ±2, 4, 6, 8, 16g Anti-aliasing filter 2 programmable embedded finite-state machines You can customize your required motion detection needs within the device itself. Can identify specific motions and launch appropriate applications. Reduces the Microcontroller workload cheaper lower power Micro Very High Resolution (up to 14 bit) and low noise (150µg/vHz) Low power consumption: 11µA in Active mode (3.1Hz) and 2µA in Power down mode High Flexibility: ODR user selectable: from 3.1 to 1600 Hz Bandwidth up to 800Hz 32-level FIFO (for 16-bit data) Wide Power supply range 1.71 to 3.6V Self test function P2Pcompatible with LIS3DH* *no ADC Available for MM in Q3 2012
AECQ-100 High performance High performance Smaller size High performance High runner High performance High performance High runner Very High performance Accelerometers - Portfolio 13 Lower noise / higher performances Higher resolution / Embedded Features LIS332AX/AR 100µg/ Hz ±2g 3 x 3 x 0.9 LIS33DE 6/8-bit ±2 / ±8g 3 x 3 x 0.9 LIS331DL 8-bit ±2 / ±8g 3 x 3 x 0.9 LIS331HH 12-bit ±6 / ±12 / ±24g 3 x 3 x 0.9 LIS331DLH 12-bit ±2 / ±4 / ±8g 3 x 3 x 0.9 LIS3DSH 14-bit ±2, 4, 6, 8, 16g 3 x 3 x 0.9 LIS352AX/AR 100µg/ Hz ±2g 3 x 5 x 0.9 LIS331DLM 8-bit ±2 / ±4 / ±8g 3 x 3 x 0.9 LIS3DH 12-bit ±2, 4, 8, 16g 3 x 3 x 0.9 LIS344ALH 50µg/ Hz ±2 / ±6g 4 x 4 x 1.5 LIS35DE 6/8-bit ±2 / ±8g 3 x 5 x 0.9 LIS302DL 8-bit ±2 / ±8g 3 x 5 x 0.9 LIS3LV02DL 12-bit ±2 / ±6g 4.4 x 7.5 x 0.9 AIS328DQ 12-bit ±2 / ±4g / ±8g 4 x 4 x 1.8 Analog interface Digital interface I2C/SPI
AIS328DQ: 3-axis digital Accelerometer for NEW Automotive AIS328DQ Automotive Inertial Sensor 3 axes 2/4/8g full scale Digital Output QFPN package 14 Product qualified, full Q100 qualification done 12 bit resolution, low power consumption (<10μA at 10Hz ODR) Stacked-die assembly in a small QFPN 4x4x1.8 24L package Target applications: security systems, inertial navigation, telematic boxes, intelligent power saving, motion activated functions, AEC-Q100 - PPAP available AIS328DQ ntities of 3Ku
AIS1200PS AIS1200PS: single-axis high-g accelerometer for airbags 15 Automotive Inertial Sensor 1 axis 200g full scale PSI5 Interface SO16N package Current status: under development Engineering samples availability: Now Qualification, PPAP, and mass production: 2013 PSI5 v.1.3 asynchronous mode Integrated 2 nd order low-pass Bessel filter Input voltage: 5V 16V Operating temperature: -40 125 C Current consumption: <10mA Target applications: peripheral accelerometers for airbags
MEMS Gyroscopes
Gyro product focus - L3G4200D 17 3-Axis Gyroscope, Digital SPI/I2C output High precision, 16 bit resolution Able to measure rotations with 3 selectable Full Scale: ±250 /s, ±500 /s and ±2000 /s Power down and Sleep modes Interruption and Data Ready output lines High performances: Yaw sense High Sensitivity: 8.75m /s @ 250 /s FS High Resolution: 0.03 /s/ Hz @ 40Hz High Thermal Stability (0.08 /s/ C) Programmable Low and High pass filters High Shock Survivability: 10000g for 0.1ms High number of embedded Features: Drive Pitch sense 4 Output Data Rates:100, 200, 400, 800Hz 32-level FIFO, 8-bit temperature output Self test function Small package 4x4 LGA Roll sense
NEW Gyro product focus L3GD20 18 3-Axis Gyroscope, Digital SPI/I2C output High precision, 16 bit resolution Able to measure rotations with 3 selectable Full Scale: ±250 /s, ±500 /s and ±2000 /s Power down (5µA) and Sleep (2mA) modes Interruption and Data Ready output lines High performances: Audio and mechanical noise immunity High Resolution & High Thermal Stability High Shock Survivability: 10000g for 0.1ms High number of embedded Features: 4 Output Data Rates:95, 190, 380, 760Hz 8-bit temperature output, FIFO Programmable Low and High pass filters Self test function P2p adaptable and SW-compatible with the L3G4200D
MEMS Gyroscopes Key Products Yaw Pitch & Roll Pitch & Yaw Yaw, Pitch & Roll 21 LY3200ALH ±2000dps LPR4150AL ±1500dps ±6000dps 4x5x1 LPY4150AL ±1500dps ±6000dps 4x5x1 Gaming 3x5x1 LY3100ALH ±1000dps 3x5x1 LY330ALH ±300dps 3x5x1 LPR450AL ±500dps ±2000dps 4x5x1 LPR430AL ±300dps ±1200dps 4x5x1 LPR410AL ±100dps ±400dps 4x5x1 LPY450AL ±500dps ±2000dps 4x5x1 LPY430AL ±300dps ±1200dps 4x5x1 LPY410AL ±100dps ±400dps 4x5x1 L3G3250A± 2500dps ±625dps 3x3.5x1 L3G4200D L3GD20 ±2000dps ±500dps ±250dps 4x4x1 Pointing devices Gesture recognition Signature Robotics People Monitoring Car Navigation IMU LPR403AL ±30dps ±120dps LPY403AL ±30dps ±120dps Image Stabilization 4x5x1 4x5x1 Single axis Dual axis Tri axis
A3G4250D: 3-axis digital Gyroscope for NEW Automotive A3G4250D Automotive 3 axes Gyroscope 4x4 LGA 16L 250dps full scale Digital Output 22 Pin-to-pin compatibility with L3G4200D Low power consumption, 250dps full-scale Low noise and high-stability over temperature Target applications: vehicle tracking systems, rate activated functions, inertial navigation assistance, adaptive front beams, AEC-Q100 - PPAP available 22
MEMS Sensors Modules 23 Package size Package _: Normal Sensor Type LSM: Linear Sensor Module Output D: Digital L: LGA C: Compact LSM 3 0 3 D L H C Number of Accel Axis 3: 3-Axis Accelerometer Number of Gyro Axis 0: No gyroscope Performance Level H: High M or _: Medium Number of Magneto Axis 3: 3-Axis Magnetometer
MEMS IMU (inemo - Inertial Movement Unit)
NEW LSM330DLC: MEMS Module inemo Inertial Module 25 MEMS Accelerometer + Gyroscope sensor 3-axis accelerometer, ±2 ±4 ±8 ±16g Full Scale 3-axis gyroscope, ±250 ±500 ±2000 dps Full Scale SPI/I²C digital interface Power-down mode 4x Interrupt lines (2x gyro and 2x accel) Small 4x5 package LSM330DLC* MEMS IMU Targeted applications 6-axis Smart remote control Enhanced GPS navigation system 6 Degrees of Freedom for Movement reconstruction, recognition and intelligent power saving * Available in Q1 2012 for MM
MEMS E-compass
Digital Compass LSM303DLHC NEW 29 MEMS Accelerometer + Magnetic sensor 3-axis accelerometer: ±2g/±4g/±8g/±16g full scale 12 bit resolution,1mg/digit sensitivity ODR up to 5KHz 3-axis magnetic sensor: from ±1.3 to ±8.1 gauss full scale 2mgauss resolution, 0.9mgauss (x,y) and 1mgaus (z) sensitivity ODR up to 220Hz I²C digital interface 2.16 to 3.6 voltage range (1.8V I/Os), 110µA consumption, 1µA in Sleep mode (Accel is activated) Embedded FIFO and Temperature sensor 2 Interrupt lines, events detection LSM303DLHC MEMS Compass ODR: Output Data Rate
MEMS Pressure Sensors
NEW LPS331AP 260 1260 mbar absolute digital output barometer 31 Dimension Pressure range Overpressure ADC resolution Power consumption LPS331AP 3x3x1 260-1260 mbar > 20 bar 24 bits 45 µa (high res.) @ 1Hz ODR pcell asic Pressure noise 0.020 mbar (rms) * Relative Accuracy pressure (0 65 C) Max Data Rate/ODR Compensation Offset management Linear: ± 2 mbar (embedded) Quadratic: ± 1 mbar (external sw) High resolution mode: Selectable: 1Hz, 7Hz,12.5Hz One shot (max conversion time) = 45 msec Digital features Linear Embedded Quadratic external SW Autozero One point calibration dedicated register
MEMS Microphones
MicroPhone ST MEMS Microphones: key specs MP 45 D T 02 2 nd Generation Package Size Output Hole config 33 Part number Top / Bottom port Package (mm3) Analog / Digital Voltage (V) SNR (DB) Sensitivity dbfs AOP (dbspl) BW (KHz) Current (µa) MP34DB01 Bottom 3x4x1 Digital 1.64-3.6 62-26 120 20 600 Done MP34DT01 Top 3x4x1 Digital 1.64-3.6 63-26 120 20 600 Done MP45DT02 Top 3.76x4.72 Digital 1.64-3.6 58-26 120 10 650 Done MP
MEMS Microphone MP45DT02 34 Omni-directional sensitivity Digital PDM output interface Acoustic overload point: 120dBSPL Available now SNR: 58dB (A-weighted @ 1KHz, 1Pa) Sensitivity: -26dBFS PSRR: -70dBFS (217Hz sq.wave, 100mVpp) THD+N: <1% @ 100dBSPL HLGA 4.72 x 3.76 (thickness: 1.25mm) Supply voltage: 1.64V / 3.6V Current consumption: Normal mode: 650μA Power-down mode: 20μA Temperature range: -30ºC / +85ºC 34
NEW MEMS Microphone MP34DB01 Bottom-port Digital microphone, Pulse Density Modulation single bit output with stereo support 35 Omni-directional sensitivity High level performance for: Signal to noise ratio: 62dB (@1KHz) Acoustic overload point: 120 dbspl Sensitivity of -26dBFS Power supply rejection: -70 dbfs 10ms wake-up time High Frequency response: Voice / Hearing range 20Hz to 20kHz Low power consumption (normal / low power): 650µA / 20µA Small Package, 3x4x1 HLGA package Single supply voltage from 1.64 to 3.6V STM32
NEW MEMS Microphone MP34DT01 36 Top-port Digital microphone, Pulse Density Modulation single bit output with stereo support Omni-directional sensitivity High level performance for: Signal to noise ratio: 63dB (@1KHz) Acoustic overload point: 120 dbspl Sensitivity of -26dBFS Power supply rejection: -70 dbfs 10ms wake-up time High Frequency response: Voice / Hearing range 20Hz to 20kHz Low power consumption (normal / low power): 650µA / 20µA Small Package, 3x4x1 HLGA package Single supply voltage from 1.64 to 3.6V
ST MEMS Microphone Benefits Excellent sound quality 37 Amplified Output Ultra-compact size Suitable for SMD soldering High stability of sensitivity over temperature, humidity, time and reflow, Very stable unit to unit performance Beam forming and noise cancellation to enable superior sound quality Example of applications: Hands-free kit, emergency call, voice recognition and recording, 37
Tools, SW & Evaluation Kits
STEVAL-MKI109V2 MEMS support tools Possible Daughter boards: 41 High Runner LIS3DH MKI105V1 LSM303DLHC MKI106V1 L3GD20 MKI107V2 STM32-based MEMS motherboard compatible with ST MEMS adapters And many others LSM303DLHC + L3GD20 MKI108V2 LPS331AP MKI120V1
NEW emotion: STEVAL-MKI109 MEMS support tools Magnetic field interference scanner: 42 + STEVAL-MKI114 DIL24 adapter for emotion Probe
MEMS Microphone tools 43 Board: Microphone USB demo STM32 based: STEVAL-MKI116V1 for MP34DB01 STEVAL-MKI117V1 for MP34DT01 STEVAL-MKI117V2 for MP345T02 STM32F4 discovery kit MP45
NEW Wireless Extension Boards for emotion 44 Cable replacement BT module for emotion (STEVAL-MKI109) Fully compatible with Unico SW STEVAL-MKI115
Demonstration board SW for Gyroscope Dedicated software is provided with the demonstration board to evaluate sensor functionality and to learn about all the possible configurations allowed. 46 Example for L3G4200D
STEVAL-MKI062V2 inemo 10-DOF 10-DegreesOfFreedom platform: 3-Axis Accelerometer 3-Axis Gyroscopes 3-Axis Magnetometer 1 Dimension of pressure information 47 STLM75: temperature sensor with 55 to +125 C range and I 2 C MCU - STM32F103RE http://www.st.com/internet/evalboard/product/250367.jsp
NEW 9-Axis inemo Module 48 Compact design: 13 x 13 x 2 mm L3G4200D: 3-axis digital gyroscope LSM303DLHC: 6-axis geomagnetic module STM32F103REY: WLCSP, ARM -based 32-bit MCU LDS3985M33R: ultra low drop-low noise voltage regulator. Flexible interfaces: CAN, USART, SPI and I 2 C serial interfaces; full-speed USB 2.0 Free ADC channels for external inputs inemo SW Fusion SW embedded as an option Available end of Q2 inemo-m1 and end of Q4 2012 for inemo-pro (sensor fusion SW embedded)
inemo Sensor Fusion Engine API 51 3-axis Magnetometer Readings 3-axis Accelerometer Readings 3-axis Gyroscope Readings Sensor Fusion Algorithm Quaternions Heading Pitch, Roll and Yaw Linear Acceleration Gravity The API compensates the non idealities of standalone sensors Filtering includes: Magnetic distortions registered on the magnetometer Dynamic distortion (hand jitter), measured by the accelerometer Inherent drift of the Gyroscope VIDEO *Quaternion is a mathematic notation to define orientation and rotation for 3D objects in the space
Key Messages & Conclusion
Products focus for 2012 54 3-axis Digital Accelerometer: LIS3DH (LIS331DLH) 3-axis Digital Gyroscope: L3G4200D switch to L3GD20 6-axis Digital e-compass: LSM303DLM switch to LSM303DLHC Absolute Pressure Sensor: LPS331AP Digital Microphone: MP45DT02 or MP34DT01
2 billion motion sensors already sold in the market Continuous challenges 55 MEMS Mechanical structure design: Die shrink with superior or equal Mechanical properties ASIC electronic design: Reduce power consumption Increase available features Technology & Packaging Increase Manufacturing and Test equipments capacity Develop new products and Modules (System in Package) Many applications & domains are still to investigate for MEMS ST is the company to provide you a complete set of sensors
For more information: 56 Web site www.st.com/mems gildas.henriet@st.com Product Marketing Manager Europe & MEA Tel: +33 1 5807 7563 Mob: +33 6 8286 8066