± 2g Tri-axis Accelerometer Specifications

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Product Description The is a Tri-axis, silicon micromachined accelerometer with a full-scale output range of +/-2g (19.6 m/s/s). The sense element is fabricated using Kionix s proprietary plasma micromachining process technology. Acceleration sensing is based on the principle of a differential capacitance arising from acceleration-induced motion of the sense element, which further utilizes common mode cancellation to decrease errors from process variation, temperature, and environmental stress. The sense element is hermetically sealed at the wafer level by bonding a second silicon lid wafer to the device using a glass frit. A separate ASIC device packaged with the sense element provides signal conditioning and self-test. The accelerometer is delivered in a 5 x 3 x 0.9 mm LGA plastic package operating from a 2.5 5.25V DC supply. There are 4 factory programmable modes of operation for the KXRB5: Mode 00 The three outputs (X, Y, Z) are read through the digital SPI interface, which is also used to command Selftest and Standby Mode. The digital I/O pads are powered from a separate power pin, and will interface to 1.8V logic. Mode 01 The three outputs (X, Y, Z) are provided on three analog output pins. The KXRB5 also features an integrated 3-channel multiplexer (X, Y, Z). The Enable pin must be high for normal operation and low for power shutdown. Mode 10 The three outputs (X, Y, Z) are provided on three analog output pins. The KXRB5 also features an integrated 4-channel multiplexer (X, Y, Z, Aux In). The Enable pin must be high for normal operation and low for power shutdown. Mode 11 The three outputs (X, Y, Z) are provided on three analog output pins. The KXRB5 also features an integrated 4-channel multiplexer (X, Y, Z, Aux In). The Enable pin must be low for normal operation and high for power shutdown. The is factory programmed to be in MODE 10. www.kionix.com - info@kionix.com Page 1 of 13

Functional Diagram Mode 10 X Sensor 32K Output X 7 C 2 Y Sensor Charge Amplifier 1kHz LPF 32K Output Y 8 C 3 Z Sensor 32K Output Z 9 Self Test 5 Oscillator C 4 Vdd 13 GND 10 Logic MUX 12 Aux In 6 Enable 3 4 11 S0 S1 Vmux www.kionix.com - info@kionix.com Page 2 of 13

Product Table 1. Mechanical Analog (specifications are for operation at 3.3V and T = 25C unless stated otherwise) Parameters Units Min Typical Max Operating Temperature Range ºC -40-85 Zero-g Offset V 1.584 1.65 1.716 Zero-g Offset Variation from RT over Temp. mg/ºc 0.2 Sensitivity mv/g 640 660 680 Sensitivity Variation from RT over Temp. %/ºC 0.01 (xy) 0.02 (z) Offset Ratiometric Error (V dd = 3.3V ± 5%) % 0.2 Sensitivity Ratiometric Error (V dd = 3.3V ± 5%) % 1.2 (xy) 0.2 (z) Self Test Output change on Activation g 2 (xy) 0.6 (z) Non-Linearity % of FS 0.1 Cross Axis Sensitivity % 2 Noise Density (on filter pins) g / Hz 45 www.kionix.com - info@kionix.com Page 3 of 13

Table 2. Electrical Analog (specifications are for operation at 3.3V and T = 25C unless stated otherwise) Parameters Units Min Typical Max Supply Voltage (V dd) Operating V 2.5 3.3 5.25 Current Consumption Operating (full power) A 300 500 700 Standby A 1 Input Low Voltage V 0.2 * V dd Input High Voltage V 0.8 * V dd Analog Output Resistance(R out) k 24 32 40 Power Up Time 1 ms 11 Bandwidth (-3dB) 2 Hz 800 1000 1200 Notes: 1. The typical value assumes no external capacitor on the output pin. If there is an external capacitor, power up time is 11ms + 5 times the RC time constant of this optional user defined low pass filter. 2. Internal 1 khz low pass filter. Lower frequencies are user definable with external capacitors. www.kionix.com - info@kionix.com Page 4 of 13

Table 3. Environmental Parameters Units Min Typical Max Supply Voltage (V dd) Absolute Limits V -0.3-7.0 Operating Temperature Range ºC -40-85 Storage Temperature Range ºC -55-150 Mech. Shock (powered and unpowered) g - - 5000 for 0.5ms ESD HBM V - - 3000 Caution: ESD Sensitive and Mechanical Shock Sensitive Component, improper handling can cause permanent damage to the device. This product conforms to Directive 2002/95/EC of the European Parliament and of the Council of the European Union (RoHS). Specifically, this product does not contain lead, mercury, cadmium, hexavalent chromium, polybrominated biphenyls (PBB), or polybrominated diphenyl ethers (PBDE) above the maximum concentration values (MCV) by weight in any of its homogenous materials. Homogenous materials are "of uniform composition throughout." HF This product is halogen-free per IEC 61249-2-21. Specifically, the materials used in this product contain a maximum total halogen content of 1500 ppm with less than 900-ppm bromine and less than 900-ppm chlorine. Soldering Soldering recommendations available upon request or from www.kionix.com. www.kionix.com - info@kionix.com Page 5 of 13

Application Schematic Mode 10 Table 4. KXRB5 Pad Descriptions Pad Name Description 1 Vdd The power supply input. Decouple this pin to ground with a 0.1uF ceramic capacitor (C 1). 2 NC Not Connected Internally (can be connected to Vdd) 3 S0 MUX selector 0 (See Output Select Table). Connect to Vdd or Ground if not used. 4 S1 MUX selector 1 (See Output Select Table). Connect to Vdd or Ground if not used. 5 ST Self Test: High - Device is in self-test mode; Low - Normal operation 6 Enable Enable: High - Normal operation; Low - Device is in standby, power down mode 7 X Output Analog output of the x-channel. Optionally, a capacitor (C 2) placed between this pin and ground will form a low pass filter. 8 Y Output Analog output of the y-channel. Optionally, a capacitor (C 3) placed between this pin and ground will form a low pass filter. 9 Z Output Analog output of the z-channel. Optionally, a capacitor (C 4)placed between this pin and ground will form a low pass filter. 10 GND Ground 11 Vmux Multiplexed analog output. Float if the multiplexer is not used. 12 Aux In Auxiliary input for multiplexer. Connect to Vdd or Ground if not used. 13 Vdd The power supply input. Decouple this pin to ground with a 0.1uF ceramic capacitor (C 1). 14 Vdd The power supply input. Decouple this pin to ground with a 0.1uF ceramic capacitor (C 1). S0 S1 ST Enable 1 2 3 4 5 6 14 KXRB5 7 X C 2 13 12 11 10 9 8 C 4 C 1 C 3 Vdd Aux In Vmux Z Y Important Technical Note: Power Up / Power Down Proper functioning of power-on reset (POR) is dependent on the specific Voff and Toff profile of individual applications. It is recommended to minimize Voff and maximize Toff. The application should be evaluated with the range of Voff and Toff expected within the application as POR performance can vary depending on these parameters. In order to guarantee proper reset regardless of Voff and Toff, a software reset can be issued via the SPI protocol. Please refer to Technical Note KXRB5 and KXSB5 Accelerometer Reset Sequence document to ensure proper POR function in your application. www.kionix.com - info@kionix.com Page 6 of 13

Application Design Equations The bandwidth is determined by the filter capacitors connected from pins 7, 8 and 9 to ground. The response is single pole. Given a desired bandwidth in Hz, f BW, the filter capacitors are determined by: C 2 C 3 C 4 4.97x10 f BW 6 www.kionix.com - info@kionix.com Page 7 of 13

USING THE MULTIPLEXED OUTPUT OF THE KXRB5 Multiplexer Data Select The KXRB5 features an integrated 4-channel multiplexer. This feature reduces system MCU requirements to only 1 ADC and 2 digital I/O s. The KXRB5 uses two select inputs (S0, S1) to control the data flow from Vmux. When a microprocessor toggles the select inputs, the desired output is attained based on the select table. Note that logic 0 is GND and logic 1 is Vdd. S1 S0 Vmux 0 0 X Output 0 1 Y Output 1 0 Z Output 1 1 Aux In Output Select Table Data Sampling Rate When operating in its multiplexed mode, the KXRB5 has the ability to achieve very high data sampling rates. Internally, the sensor elements (X, Y, and Z) are sequentially sampled in a round robin fashion at a rate of 32 khz per axis. Note that this is a differential capacitance sampling of each sensor element, which stores an analog voltage on the filter cap for each axis. Combine this high sensor element sampling rate with the short 5 µs settling time of the integrated multiplexer, and the user can achieve a performance very close to that of the 3 separate analog outputs. This is more than sufficient to eliminate any aliasing in the final application since the KXRB5 will be operating with a typical bandwidth of ~50Hz and a maximum of 1000Hz. www.kionix.com - info@kionix.com Page 8 of 13

Test! Special Characteristics: These characteristics have been identified as being critical to the customer. Every part is tested to verify its conformance to specification prior to shipment. Table 5. Test Parameter Specification Test Conditions Zero-g Offset @ RT 1.65 +/- 0.066 V 25C, Vdd = 3.3 V Sensitivity @ RT 660 +/- 19.8 mv/g 25C, Vdd = 3.3 V Current Consumption -- Operating 300 <= Idd <= 700 ua 25C, Vdd = 3.3 V www.kionix.com - info@kionix.com Page 9 of 13

Package Dimensions and Orientation 3 x 5 x 0.9 mm LGA www.kionix.com - info@kionix.com Page 10 of 13

Dimension mm inch Min Nom Max Min Nom Max A --- 0.91 1.0 --- 0.036 0.039 A1 0.21 REF 0.008 REF A2 0.66 0.7 0.74 0.026 0.028 0.029 b 0.45 0.5 0.55 0.018 0.020 0.022 D 2.8 3.0 3.2 0.110 0.118 0.126 E 4.8 5.0 5.2 0.189 0.197 0.205 K 3.9 4.0 4.1 0.153 0.157 0.161 e 0.78 0.8 0.82 0.030 0.031 0.032 L 0.75 0.8 0.85 0.029 0.031 0.033 All dimensions and tolerances conform to ASME Y14.5M-1994 Orientation Pin 1 +Y +X +Z When device is accelerated in +X, +Y or +Z direction, the corresponding output will increase. www.kionix.com - info@kionix.com Page 11 of 13

Static X/Y/Z Output Response versus Orientation to Earth s surface (1-g): Position 1 2 3 4 5 6 Diagram Top Bottom Bottom Top X 1.65 V 2.31 V 1.65 V 0.99 V 1.65 V 1.65 V Y 2.31 V 1.65 V 0.99 V 1.65 V 1.65 V 1.65 V Z 1.65 V 1.65 V 1.65 V 1.65 V 2.31 V 0.99 V X-Polarity 0 + 0-0 0 Y-Polarity + 0-0 0 0 Z-Polarity 0 0 0 0 + - (1-g) Earth s Surface www.kionix.com - info@kionix.com Page 12 of 13

Revision History REVISION DESCRIPTION DATE 1 Initial release 09-Oct-2009 2 Revised POR notes 07- "Kionix" is a registered trademark of Kionix, Inc. Products described herein are protected by patents issued or pending. No license is granted by implication or otherwise under any patent or other rights of Kionix. The information contained herein is believed to be accurate and reliable but is not guaranteed. Kionix does not assume responsibility for its use or distribution. Kionix also reserves the right to change product specifications or discontinue this product at any time without prior notice. This publication supersedes and replaces all information previously supplied. www.kionix.com - info@kionix.com Page 13 of 13