Photomicrosensors. Photomicrosensor DATA BOOK. Data Book

Photomicrosensors DATA BOOK Photomicrosensor Data Book Photomicrosensor with Cable (Non-light-modulated) Slot-type Photomicrosensor (Non-light-modulated) Slot-type Photomicrosensor with Connector (Light-modulated) Slot-type Photomicrosensor with Cable Broad Slot-type Photomicrosensor Long-distance Through-beam Photomicrosensor Photomicrosensor with Amplifier and Cable Slot-type Reflective Photomicrosensor Light Convergent Reflective Photomicrosensor Reflective Photomicrosensor with Sensitivity Adjuster (Non-light-modulated) Retroreflective Photomicrosensor with Lens Pipe-mounting Liquid Level Photomicrosensor with Built-in Amplifier Wafer-carrier Mounting Photomicrosensors

Sensing Guide Application Examples 10 Definition of Terms 4 Interpreting Engineering Data General Precautions 7 Slot type Nonmodulated Models with connectors EE-SX97 Ultra-compact, pre-wired models EE-SX91 41 light Miniature, slim models EE-SX77/87 49 General-purpose models with connectors EE-SX47/67 Modulated Models with connectors EE-SPX74/84 6 light Pre-wired models EE-SPX-W 71 Models with long sensing distance EE-SPX0N/40N 7 Throughbeam Modulated Models with long sensing distance EE-SPW11/411 79 light Amplifier relay models EE-SPW1/41 8 Reflective Modulated Models with connectors EE-SPX01/401/ (with groove) light EE-SPY0/40 87 Convergent reflective Retroreflective Modulated light Diffusereflective Nonmodulated light Modulated light Models with connectors Models with sensitivity adjuster Models with lens and connectors EE-SPY1/41 9 EE-SY671/67 97 EE-SPZ-A 10 Application Liquid level Models with pipe mounting EE-SPX61 107 Wafer-carrier Reflective models (modulated light) EE-SPY801/80 111 mounting detection Pushbutton-type models EE-SA701/801 11 Peripheral devices Accessories 10

Sensing Guide Photomicrosensors Classified According to Product Model Through-beam Type (with Slot) Appearance Sensing distance Optical modulation Features Indicates models with indicators that light red when the light is interrupted. Output configuration Indicator Model NPN output PNP output Infrared light Page.0 7.0 --- EE-SX970-C1 EE-SX970P- C1 6.0 1. 6. --- EE-SX971-C1 EE-SX971P- C1 14.7.0 1.7 6.0 Built-in connectors --- EE-SX97-C1 EE-SX97P- C1 1. 1.8 1.7 mm (slot width) Nonmodulated light Emitter/receiver window mm / ( outputs) --- EE-SX974-C1 EE-SX974P- C1.0 16.7 6.0 0.8 mm --- EE-SX97-C1 EE-SX97P- C1 1.4.0 --- EE-SX976-C1 EE-SX976P- C1 1. 1.4.0 --- EE-SX977-C1 EE-SX977P- C1 1. Note: The table includes only basic specifications. Be sure to check the detailed specifications and precautions on the page given in the right column before using the Photomicrosensor.

Appearance Sensing distance Optical modulation Features Output configuration Indicator Model NPN output PNP output Page 1 6 EE-SX910-R EE-SX910P-R 4 1.4 1 1 Ultracompact pre-wired models EE-SX911-R EE-SX911P-R 11.7 1.4 1 Emitter/receiver window ( outputs) --- EE-SX91-R EE-SX91P-R 41 1.4 1. mm 1 0.8 mm EE-SX91-R EE-SX91P-R 16 11.7 6 mm (slot width) Nonmodulated light EE-SX914-R EE-SX914P-R 1.4 1.1 1 1.1 18 4.6 18 1 1 19.1 Miniature, slim, pre-wired models Emitter/receiver window 1.4 mm 0.7 mm --- EE-SX770 EE-SX770P EE-SX770A EE-SX770R --- EE-SX870 EE-SX870P EE-SX870A EE-SX870R --- EE-SX771 EE-SX771P EE-SX771A EE-SX771R --- EE-SX871 EE-SX871P EE-SX871A EE-SX871R --- EE-SX77 EE-SX77P EE-SX77A EE-SX77R --- EE-SX87 EE-SX87P EE-SX87A EE-SX87R 49 Note: The table includes only basic specifications. Be sure to check the detailed specifications and precautions on the page given in the right column before using the Photomicrosensor. 4

Appearance Sensing distance Optical modulation Features Output configuration Indicator Model NPN output PNP output Page. 6.9 (selectable) --- EE-SX670 EE-SX670P EE-SX670A EE-SX670R.4 --- EE-SX470 EE-SX470P 1. 14. (selectable) --- EE-SX671 EE-SX671P EE-SX671A EE-SX671R 6. --- EE-SX471 EE-SX471P. (selectable) --- EE-SX67 EE-SX67P EE-SX67A EE-SX67R 1.4 6 --- EE-SX47 EE-SX47P. Generalpurpose models with connectors (selectable) --- EE-SX67 EE-SX67P EE-SX67A EE-SX67R 1.4 1. 1.6 1.8 1. mm (slot width) Nonmodulated light Emitter/receiver window mm --- EE-SX47 EE-SX47P --- EE-SX674 EE-SX674P (selectable) EE-SX674A EE-SX674R --- EE-SX474 EE-SX474P 0.8 mm. 16.7 6 --- EE-SX67 EE-SX67P 1.4. 1. (selectable) --- EE-SX676 EE-SX676P 1.4. --- EE-SX677 EE-SX677P 1. Note: The table includes only basic specifications. Be sure to check the detailed specifications and precautions on the page given in the right column before using the Photomicrosensor.

Appearance Sensing distance Optical modulation Features Output configuration Indicator Model NPN output PNP output Page 6. 6. --- EE-SX670 -WR EE-SX670P -WR.4 6. 18.7 1. --- EE-SX671 -WR EE-SX671P -WR 6. 6 --- EE-SX67 -WR EE-SX67P -WR 1.4 6. 1.4.7 1.8 1. mm (slot width) Nonmodulated light General-purpose pre-wired models Emitter/receiver window mm (selectable) -- --- EE-SX67 -WR EE-SX674 -WR EE-SX67P -WR EE-SX674P -WR 1.6 1.4 0.8 mm 6 --- EE-SX67 -WR EE-SX67P -WR 16.7 1. 6. --- EE-SX676 -WR EE-SX676P -WR 1.4 1.4 6. --- EE-SX677 -WR EE-SX677P -WR 1. v 1. --- EE-SPX740 --- 7.4 Models with connectors --- EE-SPX840 --- 1. 7.6 mm (slot width) Emitter/receiver window --- EE-SPX74 --- --- EE-SPX84 --- 1 1. 1 7 Modulated light 1 mm 0. mm Models with connectors --- EE-SPX74 --- --- EE-SPX84 --- --- EE-SPX741 --- 6 1. 1.4 mm (slot width) Emitter/receiver window 7. mm --- EE-SPX841 --- 0.8 mm Note: The table includes only basic specifications. Be sure to check the detailed specifications and precautions on the page given in the right column before using the Photomicrosensor. 6

Classified According to Product Model Through-beam Type (with Slot) Infrared light Appearance Sensing distance Optical modulation Features Output configuration Model Page 4 6 7 Models with connectors Emitter/receiver window 1 mm 0. mm EE-SPX01 EE-SPX401 87 1. EE-SPX0-WA 7 1 1..6 mm (slot width) Pre-wired models Emitter/receiver window EE-SPX40-WA EE-SPX04-WA 7 1 1 mm 0. mm EE-SPX404-WA 1. Modulated light EE-SPX06-WA 71 7.4 EE-SPX406-WA 7. Pre-wired models Emitter/receiver window EE-SPX0-WA 14. 1. mm (slot width) mm 0.8 mm EE-SPX40-WA 6 6 7.4 1 mm (slot width). 0. EE-SPX0N EE-SPX40N 7 Through-beam Type Infrared light Appearance Sensing distance Optical modulation Features Output configuration Model Page.4 7 8 1 m 00 mm Modulated light Compact size Bright, easy-to-see, light (ON-state) indicator Compact, slim profile Excellent space efficiency EE-SPW11 (set including emitter and receiver) EE-SPW411 (set including emitter and receiver) EE-SPW1 EE-SPW1-A EE-SPW41 EE-SPW41-A 79 8 Note: The table includes only basic specifications. Be sure to check the detailed specifications and precautions on the page given in the right column before using the Photomicrosensor. 7

Classified According to Product Model Reflective Type Infrared light Appearance Sensing distance Sensing method Optical modulation Features Output configuration Model Page 0 EE-SPY01 0 6 7 mm Diffusereflective Resistant to external light interference EE-SPY401 EE-SPY0 87.8 6 7 Horizontal model Modulated light EE-SPY40 EE-SPY11.8 6 8 Vertical model to mm Convergent reflective Resistant to background interference EE-SPY411 EE-SPY1 9 6 8 EE-SPY41.4 Horizontal model 7 Vertical model 7 1 to mm Diffusereflective Nonmodulated light Equipped with sensitivity adjuster (selectable) EE-SY671 EE-SY67 97.4 Retroreflective Type Infrared light Appearance Sensing distance Optical modulation Features Output configuration Model Page 7.4 6 00 mm Modulated light Modulated light EE-SPZ01-A EE-SPZ401-A 10 Note: The table includes only basic specifications. Be sure to check the detailed specifications and precautions on the page given in the right column before using the Photomicrosensor. 8

Liquid Level Photomicrosensors Classified According to Product Model Appearance EE-SPX61 17. 6 16 Outer diameter of mounting pipe 6 to 1 mm dia., thickness: 1 mm Transparent pipe Optical modulation Modulated light Features Easy mounting Equipped with sensitivity selector Output configuration / (selectable) Infrared light Model Page EE-SPX61 107 Photomicrosensors to Detect Wafer-carrier Mounting Classified According to Product Model Appearance EE-SPY801/80 Sensing distance 0 to mm (wafer carrier) Sensing method Reflective (modulated light) Features Wafer-carrier mounting detection Output configuration Turns ON when wafer carrier is present Model Page EE-SPY80@ 111 Pushbutton Type Appearance Sensing method Features Output configuration Model NPN output PNP output Page EE-SA701/801 Pushbutton Long service life ( million operations) with combination of mechanical and optical sensors ON with no load with no load EE-SA801A EE-SA801A-R EE-SA701-R EE-SA801R EE-SA801R-R EE-SA701P-R 11 Note: The table includes only basic specifications. Be sure to check the detailed specifications and precautions on the page given in the right column before using the Photomicrosensor. 9

Application Examples More Applications Than Ever with High-Accuracy, Low-Cost Sensing 1. Semiconductor Equipment Accurate position detection in ever phase of semiconductor production like die and wire bonding.. Component Mounting Ultimate efficiency and positioning accuracy in chip mounting, including component edge detection and X-Y table limit detection.. Component-Assembly Robots Optimum performance for cam positioner timing detection and upper/lower limit detection in assembly work, where vertical positioning is ultimately important. 10

1. Semiconductor Equipment 1-1. Die Bonders Die bonders lift semiconductor chips of precut semiconductor wafers with a suction nozzle and bond then to reed frames. Position Detection on X-Y Tables Mechanical problems are prevented by detecting the limits along the X and Y axes. Applicable Models EE-SPY01/401 EE-SPY0/40 EE-SY671/67 Modulated Light for Applications Subject to External Light Interference EE-SPY0 EE-SX970 Position Detection for Reed Frame Cases First a Sensor detects the lower limit of the case in which reed frames are set. The reed frames are then taken out one at a time as the case rises unit another Sensor detects the upper limit and the next case is moved into place. Applicable Models EE-SX67/47 Series EE-SX77/87 Series EE-SX91 Series EE-SX97 Series Built-in Connector for Downsizing and Easier Connection EE-SX970 EE-SX770 EE-SX910-R 11

1-. Wire Bonders When die bonding is completed, a wire bonder connects gold wires between the semiconductor chips and reed frames. EE-SPY01 Position Detection on X-Y Tables Mechanical problems are prevented by detecting the limits along the X and Y axes. Applicable Models EE-SPY01/401 EE-SPY0/40 EE-SY671/67 Reflective Sensor with Sensitivity Adjustment EE-SY671 EE-SX970 Reed frame EE-SPY01 Position Detection for Reed Frame Cases First, a Sensor at the bottom detects when the reed frame case has reached the proper position. Two other Sensors detect the start and stop points of the case as it rises up and reed frames are taken out. Applicable Models EESX67/47 Series EESX77/787 Series EESX91 Series EE-SPY01/401 EE-SY671/67 EE-SX97 Series Built-in Connector for Downsizing and Easier Connection EE-SX970 1

1-. Precision Presses After die bonding, wire bonding, and element formation are completed, precision presses in clean rooms complete processing by performing bending and cutting operations. EE-SX971 Workpiece Press mold Upper and Lower Limit Detection for Press Molds The upper and lower limits of press molds must be detected to properly time the movement of reed frames and the press mold. Applicable Models EE-SX67/47 Series EE-SX91 Series EE-SX97 Series Built-in Connector for Downsizing and Easier Connection EE-SX971 Position Detection for Reed Frame Cases First, the lower Sensor detects the top of the case in which the reed frames are set. The reed frames are then taken out one at a time as the case rises until the upper Sensor detects Applicable Models EE-SX67/47 Series Built-in Connector EE-SX77/87 Series for Downsizing and EE-SX91 Series Easier Connection EE-SX97 Series EE-SX97 EE-SX970 EE-SX77 EE-SX91-R Reed frame EE-SPY01 1

1-4. Precision Presses These presses are specially designed for semiconductor production and are generally enclosed in glass to ensure optimum environmental conditions. EE-SX971 Reed frame Confirmation of Reed Frame Case Conveyors Pilot holes are used to move reed frames. Here, Slot-type Photomicrosensors are used to confirm that the tips of the conveyor mechanism are properly engaged with the holes. Applicable Models EE-SX67/47 Series EE-SX77/87 Series EE-SX91 Series EE-SX97 Series Built-in Connector for Downsizing and Easier Connection EE-SX97 EE-SX970 Press mold Upper and Lower Limit Detection for Press Molds The upper and lower limits of press molds must be detected to properly time the movement of reed frames and the press mold. Applicable Models EE-SX67/47 Series EE-SX77/87 Series EE-SX91 Series EE-SX97 Series Built-in Connector for Downsizing and Easier Connection EE-SX970 EE-SX770 EE-SX910-R 14

1-. Sensing LCD Casette Vertical Position cm LCD substrate EE-SPX04 1-6. Checking Wafer Casettes 1-7. Detecting Fluid EE-SPY11 Application Water contained within a tank is pressurized to create water vapor. Liquid water rises in a FEP tube for water level monitoring. EE-SPX61 Sensors are used to detect the water levels. EE-SPX61 Sensor Water FEP Pipe 1

. PCB Component Mounters -1. Chip Mounters Chip mounters accurately position and attach electronic component chips to printed wiring boards. Position Detection on X-Y Tables Mechanical problems are prevented by detecting the limits along the X and Y axes. EE-SPX0-WA Applicable Models EE-SX67/47 Series EE-SX77/87 Series EE-SX91 Series EE-SPX0N/40N EE-SPX0/40-WA EE-SPX04/404-WA EE-SPX0/40-WA EE-SX97 Series Modulated Light for Applications Subject to External Light Interference with Attached Cable EE-SPX0-WA EE-SPX0N/40N Detection of Chip Case Ends As component cases are fed and the components are mounted, Sensors are waiting to detect when the case has completed processing. Applicable Models EE-SX67/47 Series EE-SX77/87 Series EE-SX91 Series EE-SX97 Series EE-SPX0N/40N EE-SPX0/40-WA EE-SPX04/404-WA EE-SPX0/40-WA Modulated Light for Applications Subject to External Light Interference with 1-mm Slot EE-SPX0N/40N 16

-. Adhesive Dispensers Adhesive dispensers apply an adhesive to hold components on a printed wiring board in position before they are soldered. EE-SPX0-WA Position Detection on X-Y Tables Mechanical problems are prevented by detecting the limits along the X and Y axes. Applicable Models EE-SX67/47 Series EE-SX77/87 Series EE-SX91 Series EE-SPX0/40 EE-SPX0/40-WA EE-SPX04/404-WA EE-SPX0/40-WA Modulated Light for Applications Subject to External Light Interference with Attached Cable EE-SPX0-WA EE-SPX0-WA Detection of Valve Operation A Sensor detects the number of times the valve is opened so that the amount o adhesive remaining can be determined. Applicable Models EE-SX67/47 Series EE-SX91 Series EE-SPX0/40-WA EE-SPX04/404-WA EE-SPX0/40-WA Modulated Light for Applications Subject to External Light Interference with Attached Cable EE-SPX0-WA Motor Adhesive cylinder 17

-. Cream Solder Printers These devices print a cream solder onto printer wiring boards before components are mounted. Solder screen PWB die PWB Rail EE-SX970 Detection of the Screen Die End The position of the die is detected so that the screen can be accurately positioned onto it. Applicable Models EE-SX67/47 Series EE-SX77/87 Series EE-SX91 Series EE-SX97 Series Solder roller EE-SX971 100-mA Direct Switching for Build-in Application EE-SX770 Horizontal and Vertical Positioning of the Solder Roller The horizontal and vertical position of the solder roller is detected so that solder can be coated without waste. Applicable Models EE-SX67 Series EE-SX91 Series EE-SX97 Series Built-in Connector for Downsizing and Easier Connection EE-SX971 Solder screen 18

-4. Lead Component Inserters This device automatically inserts radial or axial lead components onto the printed wiring boards. Position Detection on X-Y Tables Mechanical problems are prevented by detecting the limits along the X and Y axes. Applicable Models EE-SX67/47 Series EE-SX91 Series EE-SPX0N/40N EE-SPX0/40-WA EE-SPX04/404-WA EE-SPX0/40-WA EE-SX97 Series EE-SPX0-WA Modulated Light for Applications Subject to External Light Interference with Attached Cable EE-SPX0-WA EE-SPX0N/40N Detection of Chip Case Ends As component cases are fed and the components are mounted, Sensors are waiting to detect when the case has completed processing. Applicable Models EE-SX67/47 Series EE-SPX0N/40N EE-SX91 Series EE-SPX0/40-WA EE-SX97 Series EE-SPX04/404-WA EE-SPX0/40-WA Modulated Light for Applications Subject to External Light Interference with 1-mm Slot EE-SPX0N/40N 19

-. Sensing an Arm s Starting Point EE-SPX0N/40N Feeder 0

. Electronic Component Manufacturing Equipment -1. Assembly Robots Robots are used to manufacture relays, switches, and other electronic components. The work performed in assembly is based on vertical movement. Completed parts are automatically moved to pallets. EE-SX970 Detection of Motor Rotation and Workpiece Position Cams are used to detect motor rotation, while the bottom limit of the workpiece is detected to ensure accurate operation. Applicable Models EE-SX67/47 Series EE-SX77/87 Series EE-SX91 Series EE-SX97 Series Built-in Connector for Downsizing and Easier Connection EE-SX970 1

-. Sequential Presses A series of different types of presses are aligned to sequentially produce relays, switches, and other components containing contacts. EE-SX971 Upper and Lower Limit Detection for Press Molds The upper and lower limits of press molds must be detected to properly time the movement of reed frames and the press mold. Applicable Models EE-SX67/47 Series EE-SX77/87 Series EE-SX91 Series EE-SX97 Series Built-in Connector for Downsizing and Easier Connection EE-SX971 Press mold EE-SX970 Detection of Motor Rotation for Sequential Parts Feeders A cam is used with a Sensor to detect motor rotation and thus feed the hoop material at set intervals. Applicable Models EE-SX67/47 Series EE-SX77/87 Series EE-SX91 Series EE-SX97 Series Built-in Connector for Downsizing and Easier Connection EE-SX970

-. Component Inspectors These inspectors check all optical components, such as LEDs and phototransistors, and consist of both a parts feeder and devices that distinguish good components from no-good ones. EE-SX971 Workpiece Position Detection After Inspection After inspection, a Sensor activates a mechanism when necessary to separate out no-good components. Applicable Models EE-SX67/47 Series EE-SX77/87 Series EE-SX91 Series EE-SX97 Series Built-in Connector for Downsizing and Easier Connection EE-SX971 Cam Position Detection Photomicrosensors detect various cams to ensure proper timing of various operations. Applicable Models EE-SX67/47 Series EE-SX77/87 Series EE-SX91 Series EE-SX97 Series 100-mA Direct Switching for Built-in Application EE-SX67 EE-SX67

Photomicrosensors Definition of Terms Term Reference diagram Explanation Non-modulated light --- Method used to detect light steadily emitted by the emitter element. Light modulation --- Method used to detect light emitted in pulses by the emitter element. Throughbeam (with slot) Slot width Emitter Sensing distance Receiver The slot width, i.e., the distance between the opposing faces of the emitter and receiver. Sensing distance Sensing distance Throughbeam Retroreflective Emitter Sensing distance Receiver The minimum distance that can be set considering factors such as the variation between products and fluctuations in temperature. Note: The actual value under standard conditions for each method is longer than the rated sensing distance. Diffusereflective Emitter/receiver Emitter/receiver Sensing distance Reflective panel Sensing object The minimum distance that can be set for a standard sensing object (white paper) considering factors such as the variation between products and fluctuations in temperature. Note: The actual value under standard conditions for each method is longer than the rated sensing distance. Releases Differential distance Response frequency Throughbeam Sensing object Operates Releases Reflective Operates Releases Example for Slot-type Photomicrosensor.1 mm 1 mm 1 mm t = 0. mm Differential distance Disk Operates The difference in distance between the operating point and releasing point. The frequency at which an object satisfying specified conditions (size, transparency rate, reflection factor, sensing distance, and power supply voltage) can be repeatedly detected. Response time Light input 0 Control output 0 Operating time (ton) Releasing time (toff) t t The delay from the light input turning ON/ until the control output operation or release operation. The following equation generally applies. Operating time (Ton) Releasing time (Toff) White paper White paper Ambient illumination Receiver Receiver White paper The level of illumination on the sensing surface that enables stable operation of the Sensor. Receiver 4

Photomicrosensors Interpreting Engineering Data Sensing Position Characteristics Example for the EE-SX770 Repeated Sensing Position Characteristics Example for the EE-SX770 Tr ON Tr Δd = ±0.00 mm d d Tr 0 1.0.0.0 4.0.0 6.0 Distance d (mm) The graph shows the position of the edge of the sensing object where the Sensor will respond. Tr 0/V.16.18.0. Distance d (mm) Vcc = 4 V, No. of repetitions: 0, Ta = C The graph shows the fluctuation in the position of the edge of the sensing object where the Sensor operates. Use this as a rough guide for the positioning accuracy of the sensing object. Receiver Output Excess Gain vs. Sensing Distance Characteristics Example for the EE-SPW11/411 Parallel Movement Characteristics Example for the EE-SPW11/411 Receiver output excess gain (multiple) 1,000 00 00 100 0 0 10 1 Distance Y (mm) 140 10 100 80 60 40 0 Distance Y Distance X 0 0. 0.4 0.6 0.8 1.0 1. 1.4 1.6 1.8 Distance between sensors (m) The receiver output excess gain shows values when setting the maximum sensitivity. The values above are typical for models with a rated sensing distance of 1 m. It can be seen that the receiver output excess gain is increased by a factor of approximately ten at the rated sensing distance. 0 0. 0.4 0.6 0.8 1 1. 1.4 1.6 1.8 Distance X (m) Through-beam Sensor: The graph shows the position of the sensing limit of the receiver when the position of the emitter is constant. Retroreflective Sensor: The graph shows the position of the sensing limit of the Reflector when the position of the Sensor is constant. Multiple Through-beam Sensors: A range of 1. times the amount shown in the graph is required to prevent mutual interference.

Photomicrosensors Operating Range Characteristics Example for the EE-SPY01 and EE-SPY401 Distance Y (mm) 1 11 10 9 8 7 6 4 Sensing object: (reflection factor: 90%) White paper (1 1 mm ) Operates Releases 1 0 4 1 0 1 4 Y X Distance X (mm) The graph shows the point where sensing starts when a standard sensing object is moved perpendicular to the optical axis. The curved line on the right in the graph shows values for when the sensing object is approaches from the right side. Note: These values are for standard sensing objects. If the sensing object changes, the operating range and sensing distance will also change. 6

Photomicrosensors General Precautions Refer to Precautions section for individual models for specific precautions for each model. Warning These products cannot be used in safety devices for presses or other safety devices used to protect human life. This product is designed for use in applications for sensing workpieces and workers that will not affect levels of safety. Precautions for Safe Use Be sure to use the product safely according to the following precautions. Wiring Item Power Supply Do not apply any voltage exceeding the rated voltage range. Applying any excessive voltage or supplying AC power (100 VAC or higher) to a DC-type sensor may cause the Sensor to explode or burn. Load Short-circuit Do not short-circuit the load. Doing so may cause the Sensor to explode or burn. DC -wire NPN output sensor DC -wire NPN output sensor Examples Brown Sensor Black Blue Brown Load Load (Load short-circuit) Sensor Black Blue Wiring Be sure to wire the Sensor correctly and be careful not to connect the polarities incorrectly, otherwise the Sensor may explode or burn. DC -wire NPN output sensor (Example) Wrong polarity Brown Sensor Black Blue Load DC -wire NPN output sensor (Example) Wrong polarity or wrong wiring Sensor Brown Blue Black Load Sensor Brown Blue Black Load Connection with No Load If connected to the power supply without any load, internal elements may explode or burn. Make sure that a proper load is connected to the Sensor. DC -wire NPN output sensor Sensor Brown Black 1 to 4 VDC Blue 0 V AND Connections Do not use AND connections such as in the example shown in the diagram here. Voltage will be applied to the Vcc terminal without the GND terminal of Sensor being securely grounded, and may cause the Sensor to malfunction. Depending on the model used, inrush current to Sensor when Sensor 1 is turned ON may result in malfunction. Sensor 1 Sensor Sensor Brown (Vcc) Black (OUT) Blue (GND) Sensor Brown (Vcc) Load Black (OUT) Blue (GND) to 4 VDC 0 V 7

Photomicrosensors Precautions for Correct Use Installation The Sensors without light modulation (i.e., EE-SX, EE-SY) are built into the device being used and are, therefore, not equipped to deal with interference from an external light source. When using a Sensor without light modulation in an area exposed to an incandescent light or other external light interference, install so as to minimize the effects of external light sources. Mount the Sensors securely on a flat surface. Mount the Sensor with two M screws, using a spring washer to ensure the screws will not become loose. Use a tightening force of 6 kgf cm (0.9 N m) max. Note: Be sure to read the precautions for the model being used before tightening the screws. Install so that nothing can collide with the sensing section of the Sensor. Damage to the sensing surface will result in inferior performance. Before using the Sensor, check to be sure that it has not become loose due to vibration or shock. Wiring Surge If there is surge in the power supply, try connecting a capacitor (with a capacitance of 0.1 to 1 μf) or a Zener diode (ZD in the diagram below, with a rated voltage of 0 to V). Use the Sensor only after confirming that the surge has been removed. L OUT When driving a small inductive load, such as a relay, wire as shown below. (Be sure to connect a diode to absorb the reverse voltage.) ZD ZD: Zener diode 0.1 to 1 μf Voltage Output A Sensor with an open-collector output can be connected to a counter with a voltage input by connecting a resistor between the power source and output. Select a resistor with reference to the following example. The resistance of the resistor is generally 4.7 kω and its wattage is 1/ W for a supply voltage of 4 V and 1/4 W for 1 V. Example: EE-SX670 SW main circuit If resistance R = 4.7 kω for the EE-SX670, the input voltage at the high level is as follows: Input voltage VH = Z R + Z 4.7 k 4 V 4.7 k + 4.7 k = 1 V VCC = And the input voltage and load current at the low level are as follows: Input voltage VL 0.4 V (Residual voltage for 40-mA load current) Residual voltage IC = VCC R Tr Counter Insert a resistor (Voltage input type) +Vcc 4 V Power supply R Input terminal (CP) Output (Input Z impedance: approx. 4.7 kω) 0 V 0 V = VCC =.1 ma 40 ma R Note: Refer to the ratings of the Sensor for the residual voltage of the load current. Terminals Make sure that the terminals are not subjected to stress (external force). Stress will cause damage to the terminals. Terminal Terminal OUT D X Relay Separate the wiring for the Sensor from high-tension lines or power lines. If the wiring is routed in the same conduit or duct as such lines, the Sensor will be damaged or its operation will be affected by inductive interference. Make sure that the connectors (either dedicated or commercially available) are securely locked. +V 0 V 8

Photomicrosensors Design Considerations Influence of Power Supply and Cable Length (EE-SP Models) When using a Sensor with a model number beginning with EE-SP with light modulation, make sure that the power and cable length are considered in the design. These models are more easily influenced than models with direct light modulation (i.e., Sensors with model numbers beginning with EE-SX or EE-SY). Sensors with light modulation that are easily affected: EE-SPX01/401, EE-SPY0@/40@, EE-SPZ01@/401@, EE-SPY1@/41@ EE-SPX0/40, EE-SPW11/411, EE-SPX74@/84@, EE-SPX@@@-W Sensors with light modulation that are not easily affected: EE-SPX61, EE-SPY801/80 All Sensors with model numbers beginning with EE-SX and EE-SY without light modulation are not easily influenced by power or cable length. Reasons for Interference from Power and Cable Length on Models with Light Modulation The emitter LED is lit using pulses for models with light modulation. As a result, the large current required to emit light from the LED will produce pulsation in the current consumption. Photoelectric Sensors have built-in capacitors with sufficient capacity. Therefore, these Sensors are not influenced by pulsating current consumption. Incorporating built-in capacitors with sufficient capacity in compact Photomicrosensors, however, is difficult, thereby resulting in pulsating current consumption. Operation may not be able to keep up with the pulsation in the current consumption depending on the cable length and the type of power supply used, and this may result in unstable operation. Countermeasures Adding a Capacitor Attach a capacitor (e.g., film capacitor) of 10 μf min. to the wires as close as possible to the Sensor. (Use a capacitor with a dielectric strength that is at least twice the Sensor's power supply voltage. Do not use tantalum capacitors. Short-circuit malfunctions may result in the capacitor igniting due to the large current flow.) Current Emitter (LB) Main circuit 10 μf min. to 4 VDC Cable Length Design the configuration using a total cable length of m max. for the Sensor. To use a cable longer than m, attach a capacitor with a capacitance of approximately 10 μf to the wires as shown below (the distance between the terminal and the capacitor must be within m). Make sure that the total cable length is no longer than approximately m. To use a cable length longer than m, use a PLC or other means to read the sensor output and then transmit the signals using a PLC with communications functions. Although cables can be extended longer than m, performance will be affected by the noise interference from adjacent cables and other devices and the influence of cable specifications. Voltage drops due to resistance in wiring materials will also influence performance. Therefore, factors, such as the difference in voltage between the end of the cable and the sensor and noise levels, must be given full consideration. Vcc OUT GND 1 to 4 VDC Capacitance of OUT 10 μf min. 0 V Extension cable m max. Note: Refer to the precautions for the Sensor being used before extending cables. The length that cables can be extended depends on the Sensor model and cable specifications. EE-SX, EE-SY, and all other Sensors without light modulation are not easily affected by cable length (effective extension from 0 to 0 m is possible). 9

Photomicrosensors Using a Switching Power Supply Take either of the following countermeasures as required if connecting a Sensor with optical modulation to a switching power supply. 1. Attach a capacitor of 10 μf min to the wires as close as possible to the Sensor. (Use a capacitor with a dielectric strength that is at least twice the Sensor's power supply voltage. Do not use tantalum capacitors. Short-circuit malfunction may result in the capacitor igniting due to the large current flow.). Connect to the 0-V line of the power source or connect to the power source via a capacitor of approximately 0.47 μf to reduce the impedance of the mounting base to prevent inductive noise from entering the mounting base.. Connect the noise filter terminal (neutral terminal to ACG) of the switching power supply to the case (FG) and 0-V terminal of the power supply. Note: The line connected as mentioned above should be grounded or connected to the mounting base to ensure stable operation. Countermeasures to Handle Inductive Noise Sensor Mounting base OUT Sensor Mounting base 1 to 4 VDC Capacitance of 10 μf min. m max. C (0.47 μf) To the sensor To the power supply 4. Insert a plastic insulator of approximately 10 mm between the Sensor and the mounting base. 0 V +V G 0 V ACG FG +V G 0 V Grounding Extension cable Switching power supply Switching power supply Input Effects of Inductive Noise When there is inductive noise in the Sensor mounting frame (metal), the output of the Sensor may be affected. In this case, ensure that there is no electrical potential difference between the Sensor 0-V terminal and the Sensor mounting frame, or put a 0.47-μF capacitor between the 0-V terminal and the frame. Output Signal Processing Set a processing speed slower than 100 ms to prevent noise interference. Reflective Photomicrosensors Sensing Distance The maximum sensing distance of each Reflective Photomicrosensor model is based on sensing a sheet of white paper with a reflection factor of 90%. The sensing distance varies with the other conditions of the objects being detected. Typical Example EE-SPY0/40 Series Sensing distance (mm) Sensor Mounting frame 0.47 μf 1 to 4 VDC Power supply Background Objects The Reflective Photomicrosensor detects objects by sensing the difference in the reflection factor between the object and the background, therefore the background objects should not be glossy. 0 V 1 Sensing object White paper (reflection factor: 90%) 10 L L 0 1 7 10 0 0 0 Sensing area L (mm ) Sensing object Background object Decrease reflection from the background object, e.g., by providing a sufficient distance to the background or by using a black sponge as the background. 0

Photomicrosensors PLC Connections a Brown (Vcc) NPN open collector output Main circuit Black (OUT) 1 to 4 VDC IN COM Internal circuits Blue (GND) Brown (Vcc) NPN voltage output Main circuit Black (OUT) 1 to 4 VDC IN COM Internal circuits Blue (GND) Brown (Vcc) PNP open collector output Main circuit Black (OUT) 1 to 4 VDC IN COM Internal circuits Blue (GND) Relay Connections Operating from same power supply Brown (Vcc) Operating from different power supplies Brown (Vcc) NPN open collector output Main circuit Relay Black (OUT) Main circuit Black (OUT) Relay Blue (GND) Blue (GND) Counter Connections No-voltage Input Transistor input (voltage input) Brown (Vcc) Brown (Vcc) External resistance ( ) NPN open collector output Main circuit Black (OUT) to 4 VDC Blue (GND) CP1 (N) CP (N) (Reset) Input common Main circuit Black (OUT) to 4 VDC Blue (GND) 1 to 4 VDC (CP1) (CP) (Reset) ( ) Refer to the information on the specific model for details on calculating external resistance. Brown (Vcc) Brown (Vcc) ( ) NPN voltage output Main circuit Black (OUT) to 4 VDC Blue (GND) CP1 (N) CP (N) (Reset) Input common Main circuit Black (OUT) to 4 VDC Blue (GND) 1 to 4 VDC (CP1) (CP) (Reset) ( ) 1

Photomicrosensors Other Precautions Do not disconnect the Connector from the Sensor when power is supplied to the Sensor, or Sensor damage could result. Avoid installing the Sensor in the following places to prevent malfunction or trouble: 1. Places exposed to dust. Places exposed to corrosive gases. Places exposed to water, oil, or chemicals 4. Outdoor or places exposed to intensive light, such as direct sunlight Be sure to use the Sensor under the rated ambient temperature. The Sensor may be dissolved by exposure to organic solvents, acids, alkali, or aromatic hydrocarbons, causing deterioration in characteristics. Do not expose the Sensor to such chemicals.

Slot-type Photomicrosensor EE-SX97 Built-in connector enables downsizing and easier connection. Protective circuit for safe operation. A built-in connector minimizes the shape and dimensional requirements. Two outputs: light-on and dark-on. Complete lineup including seven different shapes. Safer operation with built-in power supply reverse polarity protection. Output overcurrent protection with a thermal shutdown circuit (patent pending). *1 The indicator can be seen from many directions to enable installation in more locations. Connector with lock that mates with commercially available connectors. * *1. Output overcurrent protection is provided only on output (OUT) on NPN models. *. Recommended connector: J.S.T. Mfg. Co., Ltd. Contacts: SPHD-001T-P0., Housing: PAP-04V-S Ask the manufacturer of the connector for details. Be sure to read the Safety Precautions on page 7. Features Built-in Connector for Downsizing and Easier Connection A built-in connector minimizes the shape and dimensional requirements. And wiring costs can be reduced by using commercially available connectors. Previous Model EE-SX97 Series..0 (16.) Approx. 40% Smaller (.) Use Commercial Connectors The use of a commercially available connector simplifies connections and the positive lock holds the connector in place. Recommended Connector: J.S.T. Mfg. Co., Ltd. Contacts: SPHD-001T-P0., Housing: PAP-04V-S *Ask the manufacturer of the connector for details. Safer Operation with Built-in Power Supply Reverse Polarity Protection The built-in power supply reverse polarity protection protects against reverse connection of the power supply or outputs for safer operation at the assembly site. NPN Light indicator (orange) Main circuit Reverse polarity protection Vcc 1 OUT1 Load (Control output) OUT to (Control output) 4 VDC GND (0 V) 4 Load 1 Built-in Thermal Shutdown Circuit Control output on models with NPN outputs is protected from output overcurrents by a built-in thermal shutdown circuit. Easy-to-see Indicator The indicator can be seen from up to four directions to enable installation in more locations. Display Two Outputs: and All models provide both a light-on and dark-on output so that the output can be switched according to the application simply by changing the wiring.

EE-SX97 Ordering Information Sensors Infrared light Appearance Standard Sensing method Connecting method Sensing distance Operating mode Indicator mode NPN output Model PNP output EE-SX970-C1 EE-SX970P-C1 L-shaped EE-SX971-C1 EE-SX971P-C1 T-shaped, slot center 7 mm EE-SX97-C1 EE-SX97P-C1 Close-mounting Throughbeam type (with slot) Connector model (4 poles) mm (slot width) / (selectable) Incident light EE-SX974-C1 EE-SX974P-C1 T-shaped, slot center 10 mm EE-SX97-C1 EE-SX97P-C1 F-shaped EE-SX976-C1 EE-SX976P-C1 R-shaped EE-SX977-C1 EE-SX977P-C1 Accessories (Order Separately) Type Cable length Model Connector with Cable 1 m EE-1017 1M m EE-1017 M Connector with Robot Cable 1 m EE-1017-R 1M m EE-1017-R M 4

Ratings and Specifications EE-SX97 Type Standard L-shaped T-shaped, slot center 7 mm Close-mounting *1. The differential distance is the value when a sensing object is moved in a lateral direction to the slot. *. The response frequency was measured by detecting the following rotating disk. T-shaped, slot center 10 mm F-shaped R-shaped NPN EE-SX970-C1 EE-SX971-C1 EE-SX97-C1 EE-SX974-C1 EE-SX97-C1 EE-SX976-C1 EE-SX977-C1 Item PNP EE-SX970P-C1 EE-SX971P-C1 EE-SX97P-C1 EE-SX974P-C1 EE-SX97P-C1 EE-SX976P-C1 EE-SX977P-C1 Sensing distance mm (slot width) Sensing object Opaque: 0.8 mm min. Differential distance 0.0 mm max. *1 Light source (Peak wavelength) Indicator Supply voltage Current consumption Control output Infrared LED with a peak wavelength of 940 nm Light indicator (orange LED) to 4 VDC ±10%, ripple (p-p): 10% max. 1 ma max. Load power supply voltage: to 4 VDC, Load current: 0 ma max., Off-state current : 0.mA max, 0 ma load current with a residual voltage of 1.0 V max., ma load current with a residual voltage of 0.4 V max. Protection circuit Power supply reverse polarity protection; output reverse polarity protection; overcurrent protection (only OUT on models with NPN output) Response frequency 1 khz min. ( khz average) * Ambient illumination Ambient temperature range Ambient humidity range Vibration resistance (Destruction) Degree of protection Connecting method Shock resistance (Destruction) Weight (Packed state) Material Case/Cover Emitter/receiver 1,000 lx max. with fluorescent light on the surface of the receiver Operating: to C Storage: 0 to 80 C (with no icing or condensation) Operating: % to 8% Storage: % to 9% (with no icing or condensation) 10 to,000 Hz 0.7-mm single amplitude (1-min periods, 10 cycles) each in X, Y, and Z directions Destruction: 00 m/s for times each in X, Y, and Z directions IEC 609 IP0 Connector Approx. g Polybutylene terephthalate (PBT) Polycarbonate (PC) Disk Connector Product Connector with Cable Connector with Robot Cable Model EE-1017 EE-1017-R 1 mm.1 mm 1 mm t = 0. mm Item Appearance Contact resistance Insertion strength Surplus strength Cable length Ambient temperature range Housing Materials Contact mω max. (at 10 ma DC and 0 mv max.) 0 N max. 1. N min. 1 m, m 10 to +60 C Nylon Phosphor bronze

EE-SX97 Engineering Data (Typical) Sensing Position Characteristics Sensing Position Characteristics Repeated Sensing Position Characteristics EE-SX970 EE-SX970 EE-SX970 Insert direction Insert direction d Insert direction d = ±0.00 d d 0 1 4 6 Distance d (mm) 0 1 4 6 Distance d (mm).0..4.6 Distance d (mm) Vcc = 4 V, No. of repetitions: 0, Ta = C Differential distance = 0.0 mm max. Note: Data is provided for dark conditions. Light interference and the translucence of the sensing object can affect operation. I/O Circuit Diagrams Output configuration Model Output transistor operation status Timing charts Output circuit NPN output PNP output EE-SX970-C1 EE-SX971-C1 EE-SX97-C1 EE-SX974-C1 EE-SX97-C1 EE-SX976-C1 EE-SX977-C1 EE-SX970P-C1 EE-SX971P-C1 EE-SX97P-C1 EE-SX974P-C1 EE-SX97P-C1 EE-SX976P-C1 EE-SX977P-C1 OUT1: OUT: Light incident Light interrupted Light indicator ON (orange) Output 1 ON transistor Load 1 Operates (relay) Releases Output ON transistor Load Operates (relay) Releases Light indicator (orange) Main circuit Light indicator (orange) Main circuit Vcc 1 OUT1 (Control output) OUT (Control output) GND (0 V) 4 Vcc 1 Load 1 OUT1 (Control output) Load to 4 VDC OUT (Control Load 1 output) Load 4 GND (0 V) to 4 VDC Connector pin arrangement 1 4 Connector pin arrangement 1 4 6

Safety Precautions EE-SX97 Refer to Warranty and Limitations of Liability. WARNING This product is not designed or rated for ensuring safety of persons either directly or indirectly. Do not use it for such purposes. Precautions for Safe Use Operating Environment These Photomicrosensors have an IP0 (conforms to IEC) enclosure and do not have a water-proof or dust-proof structure. Therefore, do not use them in applications in which the sensor will be subjected to splashes from water, oil, or any other liquid. Liquid entering the Sensor may result in malfunction. Precautions for Correct Use Make sure that this product is used within the rated ambient environment conditions. Installation Mount the Sensor with two M screws, using plain washers and spring washers to ensure the screws will not become loose. Use a tightening force of 0.4 N m max. Wiring Unused Output Lines Be sure to isolate output lines that are not going to be used. Wiring method Connection is made using a connector. Do not solder to the pins (leads). The pins (leads) are soldered to the internal board of the Sensor. Therefore, direct soldering of the pins (leads) may result in an internal disconnection causing malfunction. Others The power cable connected to the Sensor must not be more than 10 m in length. Only output (OUT) on NPN models is provided with overcurrent protection. If an overcurrent occurs, heat generated by the output transistor will activate the thermal shutdown circuit and OUT will turn. Check the wiring and load current and cycle the power supply. If there is no overcurrent, normal operation will be resumed. (The thermal shutdown circuit will be activated again if there is an overcurrent.) This function does not provide protection against load short circuits. If the electric power of the output transistor increases due to a load short-circuit or near load short-circuit, the Sensor may be damaged. An output pulse may occur when the power supply is turned ON depending on the power supply and other conditions. The operation of the Sensor will be stable 100 ms after turning ON the power supply. 7

EE-SX97 Dimensions (Unit: mm) Tolerance class IT16 applies to dimensions in this datasheet unless otherwise specified. Sensors EE-SX970-C1 EE-SX970P-C1 6 0 Terminal Arrangement 0.8 6.8 Optical axis.6 1.4..9. 7 A + Vcc B 1 OUTPUT1 C OUTPUT D GND (0 V) Slit Mounting screw holes 9.7 10.8 1.8.7 Two, M.1. 7.4 Indicator window Four, R1.6 Indicator window 0 0±0.1 1 4 EE-SX971-C1 EE-SX971P-C1 6. 0 Terminal Arrangement Optical axis. 7 14.7..9 A + Vcc B 1 OUTPUT1 C OUTPUT D GND (0 V) 1.8 6.8 0.8.6 1.4 Mounting screw holes 10.8 Slit 9.7.1 9 1. Two, M. 7..7 Indicator window Four, R1.6 1 4 0 0±0.1 EE-SX97-C1 EE-SX97P-C1 Terminal Arrangement Optical axis 7 1.6 6 A + Vcc B 1 OUTPUT1 C OUTPUT D GND (0 V) 0.8 6.8 1.7 1.4.6 1.6 4.1 Slit 1.7 9 10.8 Mounting screw holes Two, M 6. Four, R1.6 0 0±0.1 Indicator window Indicator window 1 4 8

EE-SX97 EE-SX974-C1 EE-SX974P-C1 Two,. dia. 7. 7 1.7 Terminal Arrangement A + Vcc B 1 OUTPUT1 C OUTPUT D GND (0 V) 6.8 0.8 Optical axis 1.8 1.4.6 Mounting screw holes Two, M. Slit 9 1. 7±0.1 Indicator window 1 4 EE-SX97-C1 EE-SX97P-C1 Terminal Arrangement 0.8 6.8 Optical axis 10 16.7 1.4 4.6 6 A + Vcc B 1 OUTPUT1 C OUTPUT D GND (0 V). 4.1 Slit 1 10.8.7 9 Mounting screw holes Two, M 6 Four, R1.6 0 0±0.1 Indicator window Indicator window 1 4 EE-SX976-C1 EE-SX976P-C1 Terminal Arrangement 0.8 6.8 Optical axis 1.4..6.4 dia. A + Vcc B 1 OUTPUT1 C OUTPUT D GND (0 V) Mounting screw holes Slit 10.8.7 9 Two, R1.6.1 M.6 dia. 16.±0.1.7 6.7 Indicator window 7 1. 7±0.1 Indicator window 1 4 9

EE-SX97 EE-SX977-C1 EE-SX977P-C1 Terminal Arrangement A + Vcc B 1 OUTPUT1 C OUTPUT D GND (0 V).4 dia. Optical axis. 1.4.6 6.8 0.8 Mounting screw holes Two, R1.6.1 16. 10.8.7 9 Slit 16.±0.1.6 dia. M 6.7.7 7 1. Indicator window 7±0.1 Indicator window 1 4 Accessories (Order Separately) Connector Connector with Cable EE-1017 Connector with Robot Cable EE-1017-R 10.8 8 0± 1,000 +0 0 ± (8) 1± 4 1 Connector with Cable: EE-1017 Vinyl insulated round cord: 4 dia., 4 cores, (Cross section area of conductor: 0. mm / insulator: 1.1 mm dia.) Connector with Robot Cable: EE-1017-R Robot instrumentation cord: 4 dia., 4 cores, (Cross section area of conductor: 0. mm / insulator: 1.1 mm dia.) Terminal Arrangement A + Brown B 1 Black C White D Blue 40

Compact Pre-wired Photomicrosensor with Built-in Amplifier (Non-modulated) EE-SX91 Meeting Customer Needs with Compact Sensors that Mount with M Screws Both light-on and dark-on outputs provided. A compact size and choice of five models for a wide range of applications. Compact NPN and PNP output models. Mount using M or M screws. Indicator is visible in many directions for installation in any location. Maximum load current of 100 ma. Flexible robot cables are standard on all models. Be sure to read Safety Precautions on page 46. Features A Compact Size and Choice of Five Models for a Wide Range of Applications Select any of five models to minimize the space required. Indicator Visible from Many Directions for Installation in Any Location The light indicator can be checked from up to four directions. Compact NPN and PNP Output Models Both NPN and PNP output models are available for use according to system requirements. Maximum Load Current of 100 ma Output control of up to 100 ma is supported for either NPN or PNP outputs. Mount Using M or M Screws The EE-SX91 can be mounted using M or M screws, so it can easily replace an existing compact sensor mounted with M screws. Flexible Robot Cables: Standard on All Models Robot Cables are effective for moving parts, and are provided as standard equipment with all models. Both and Outputs Both light-on and dark-on outputs are provided on all models, allowing outputs to be switched by simply changing the wiring according to the application. 41

EE-SX91 Ordering Information List of Models Models with Robot Cables Infrared light Appearance Standard Sensing method Sensing distance Output configuration Indicator mode Connecting method (Cable length) NPN output Model PNP output EE-SX910-R 1M * EE-SX910P-R 1M * L-shaped EE-SX911-R 1M * EE-SX911P-R 1M * F-shaped Throughbeam type (with slot) mm (slot width) ( outputs) Lit when light is incident Pre-wired models (1 m) EE-SX91-R 1M * EE-SX91P-R 1M * R-shaped EE-SX91-R 1M * EE-SX91P-R 1M * U-shaped EE-SX914-R 1M * EE-SX914P-R 1M * * Prewired models with a -m cable are also available. When ordering, specify the cable length by adding M for the end of the model number (e.g., EE-SX910-R M). 4

Ratings and Specifications EE-SX91 Type Standard L-shaped F-shaped R-shaped U-shaped NPN models Pre-wired models EE-SX910-R EE-SX911-R EE-SX91-R EE-SX91-R EE-SX914-R PNP Item models Pre-wired models EE-SX910P-R EE-SX911P-R EE-SX91P-R EE-SX91P-R EE-SX914P-R Sensing distance mm (slot width) Sensing object Differential distance Light source Indicator Supply voltage Current consumption Control output Protection circuits Response frequency Ambient illumination Ambient temperature range Ambient humidity range Vibration resistance (Destruction) Shock resistance (Destruction) Degree of protection Opaque: 1. 0.8 mm min. 0.0 mm max. GaAs infrared LED with a peak wavelength of 940 nm Light indicator (red LED) to 4 VDC ±10%, ripple (p-p): 10% max. 1 ma max. Load power supply voltage: to 4 VDC Load current: 100 ma max. current: 0. ma max. 100 ma load current with a residual voltage of 1.0 V max. ma load current with a residual voltage of 0.4 V max. Power supply reverse polarity protection; output reverse polarity protection khz min. (8 khz average) Light incident: 1 μs average; light interrupted: 40 μs average* 1,000 lx max. with fluorescent light on the surface of the receiver Operating: to C Storage: 0 to 80 C (with no icing or condensation) Operating: % to 8% Storage: % to 9% (with no icing or condensation) 10 to,000 Hz 0.7-mm single amplitude for. h (1-min periods, 10 cycles) each in X, Y, and Z directions 00 m/s for times each in X, Y, and Z directions IEC609 IP0 Connecting method Pre-wired Models (standard cable length: 1 m) Pre-wired Models Approx. 17 g Weight (packed state) Models with Connectors Approx. 7 g Materials Case/cover Emitter/receiver Polybutylene phthalate (PBT) Polycarbonate (PC) * The response frequency was measured by detecting the following rotating disk. The response times for light incidence and light interruption are shown in the timing chart. Disk Light incident Light interrupted OUT1 output ON transistor mm t=0. mm 1 mm mm OUT output ON transistor 1 μs avg. 40 μs avg. 4

EE-SX91 Engineering Data (Typical) Sensing Position Characteristics EE-SX910 EE-SX910 EE-SX911 d Insertion direction Insertion direction d Insertion direction d 0 1 4 6 0 1 4 6 0 1 4 6 Distance d (mm) Distance d (mm) Distance d (mm) Repeated Sensing Position Characteristics EE-SX910 d=±0.00 d.14.16.18. Distance d (mm) Vcc = 4 V, No. of repetitions: 0, Ta = C (Differential distance = 0.0 mm max.) Note: The data applies to dark status. Operation may be affected by external light interference or light coming through the sensing object. 44

EE-SX91 I/O Circuit Diagrams Output type Model Output transistor operation status Timing charts Output circuit NPN output EE-SX910-R EE-SX911-R EE-SX91-R EE-SX91-R EE-SX914-R Light incident Light interrupted Light indicator ON (red) Light indicator Main circuit 1 4 Brown OUT1 Load 1 (Black) Load OUT (White) to 4 VDC OUT1: OUT: Output 1 transistor ON (Blue) PNP output EE-SX910P-R EE-SX911P-R EE-SX91P-R EE-SX91P-R EE-SX914P-R Load 1 Operates (e.g., relay) Releases Output transistor ON Load Operates (e.g., relay) Releases Light indicator Main circuit 1 4 (Brown) OUT1 (Black) OUT (White) (Blue) Load to 4 VDC Load 1 4

EE-SX91 Safety Precautions Refer to Warranty and Limitations of Liability. WARNING This product is not designed or rated for ensuring safety of persons either directly or indirectly. Do not use it for such purposes. Precautions for Safe Use Power Supply Voltage Do not exceed the voltage range Brown indicated in the specifications. Sensor Applying a voltage exceeding the specifications or using an AC Blue Black White power supply may result in rupture or burning. Faulty Wiring Do not reverse the power supply polarity. Doing so may result in Brown Black rupture or burning. Sensor Do not short-circuit the load. (Do not connect to the power supply.) Doing so may result in rupture or burning. Dispose of this product as industrial waste. Blue Brown White Sensor Blue Load Load Load Load + (Load short-circuit) Load Black White Load + Precautions for Correct Use Installation It is assumed that EE-SX91 Sensors will be built into a device. These Sensors use non-modulated light and are not equipped to deal with interference from an external light source. When they are used in locations subject to external light interference, such as near a window or under an incandescent light, install them to minimize the effects of external light interference. Mount the Sensors securely on a flat surface. Use M or M.0 screws to secure the Photomicrosensor. (The stronger M screws are recommended. In addition, use flat washers and spring washers to prevent the screws from loosening.) Refer to the following table for the correct tightening torque. Screw diameter Tightening torque M.0 0.1 N m max. M 0.4 N m max. If the Sensor is to be used on a moving part, secure the cable connection point so that it is not directly subjected to stress. Wiring Unused Output Lines Be sure to isolate output lines that are not going to be used. Connecting to Devices with Voltage Input Specifications A Sensor with an open-collector output can be connected to a counter with a voltage input by connecting a resistor between the power source and output. Select a resistor with reference to the following example. The resistance of the resistor is generally 4.7 kω and its wattage is 1/ W for a supply voltage of 4 V and 1/4 W for 1 V. EE-SX91 series SW main circuit Example: EE-SX91 Series Load Resistance of 4.7 kω Connected in a Counter Counter Specifications Input impedance Tr +Vcc Voltage judged as high level (input ON) Voltage judged as low level (input ) Insert a resistor Counter (Voltage input type) Output 0 V 0 V.6 KΩ 4. to 0 VDC 0 to VDC The high and low levels are found using the following formulas. The input device specifications must satisfy both formulas. High level: Input voltage VH = Z R+Z Low level: Vcc 4 V Load current Ic = = =.1 ma 100 ma R R Input voltage VL 1.0 V (Residual voltage for 100-mA load current) Note: Refer to the ratings of the Sensor for the residual voltage of the load current. R 4 V Power supply Input terminal (CP) Z.6 k Vcc = 4.7 k+.6 k (Input impedance: approx..6 kω) 4 V = 1 V 46

EE-SX91 Other Precautions Do not disconnect the Connector from the Sensor when power is supplied to the Sensor, or Sensor damage could result. Do not install the Sensor in the following places to prevent malfunction or trouble: 1. Places exposed to dust or oil mist. Places exposed to corrosive gas. Places directly or indirectly exposed to water, oil, or chemicals 4. Outdoor or places exposed to intensive light, such as direct sunlight Be sure to use the Sensor under the rated ambient temperature. The Sensor may be dissolved by exposure to organic solvents, acids, alkali, or aromatic hydrocarbons, aliphatic chloride hydrocarbons causing deterioration in characteristics. Do not expose the Sensor to such chemicals. Make sure the total length of the power cable connected to the product is less than 10 m. 47

EE-SX91 Dimensions (Unit: mm) Tolerance class IT16 applies to dimensions in this datasheet unless otherwise specified. Photomicrosensors EE-SX910-R EE-SX910P-R 6 4 Optical axis EE-SX911-R EE-SX911P-R 1.7 6 1 Optical axis. () 1 8 Optical axis.7 Two,. dia. 18.7 1.4.7 EE-SX910-R 4.6 dia. Indicator window 1. 6. 8..8 0.8 Sensing window Robot cable of.8 dia., 4 cores, (0.1 mm with 0.8-mm dia. insulator); Standard length: 1 m 1.6. Robot cable of.8 dia., 4 cores, (Four, R1.6) 8 (0.1 mm with 0.8-mm dia. insulator); Standard length: 1 m 1.4 6.9 6. 1.7 Indicator window Optical axis 10 () EE-SX911-R 4 1. 6 0.8 Sensing window EE-SX91-R EE-SX91P-R EE-SX91-R EE-SX91P-R 6 6 Sensing window 11.7 1. 1. 6. () (R1.6) 0.8 1 8.. dia. 1.9 1.6 * 4 6.7 1.4 Optical axis Optical axis 6. 8. Indicator window.7 4.6 dia. Optical axis 8. 6. Indicator window 4.6 dia..7 1.4 4 6.7 * Optical axis 1. dia. () 8 1 Sensing window. 6. (R1.6) 11.7. 1.6 1.9 0.8 1. Robot cable of.8 dia., 4 cores, (0.1 mm with 0.8-mm dia. insulator); Standard length: 1 m EE-SX91-R EE-SX91-R Robot cable of.8 dia., 4 cores, (0.1 mm with 0.8-mm dia.insulator); Standard length: 1 m * The lug is used to prevent turning. When installing, make a fixed hole of.1 to. mm dia. * The lug is used to prevent turning. When installing, make a fixed hole of.1 to. mm dia. EE-SX914-R EE-SX914P-R 6 Optical axis 6. 16 1.4 Optical axis Sensing window 0.8.7 () 1. 8. 8. 11. 8 Indicator window Two,. dia. Indicator window EE-SX914-R Robot cable of.8 dia., 4 cores, (0.1 mm with 0.8-mm dia. insulator); Standard length: 1 m 48

Photomicrosensor with Slim Cable (Non-modulated) EE-SX77/87 Slim, Compact Photomicrosensor that is still easy to use. Compact, thin profile enables dense mounting. Indicator is visible from both sides. Wide operating voltage range: to 4 VDC Be sure to read Safety Precautions on page. Ordering Information Pre-wired Models Appearance Sensing method Cable length Sensing distance Infrared light Output configuration Indicator mode Model NPN output* PNP output Standard Incident light EE-SX770 M EE-SX770P M No incident light EE-SX770A M EE-SX770R M Incident light EE-SX870 M EE-SX870P M No incident light EE-SX870A M EE-SX870R M L-shaped Through-beam type (with slot) m mm (slot width) Incident light EE-SX771 M EE-SX771P M No incident light EE-SX771A M EE-SX771R M Incident light EE-SX871 M EE-SX871P M No incident light EE-SX871A M EE-SX871R M T-shaped Incident light EE-SX77 M EE-SX77P M No incident light EE-SX77A M EE-SX77R M Incident light EE-SX87 M EE-SX87P M No incident light EE-SX87A M EE-SX87R M * Models with NPN outputs are available with pre-wired e-con connectors. Specify an NPN output by adding "-ECON" and the cable length (0. m or m) to the end of the model number. (Example: EE-SX770-ECON 0.M) 49

EE-SX77/87 Ratings and Specifications Item Sensing distance Sensing object Differential distance Light source Indicator Supply voltage Current consumption Control output NPN models PNP models Response frequency * Ambient illumination Ambient temperature range Ambient humidity range Vibration resistance Shock resistance Degree of protection Type Standard L-shaped T-shaped EE-SX770/EE-SX870 EE-SX770A/EE-SX870A EE-SX770P/EE-SX870P EE-SX770R/EE-SX870R mm (slot width) Opaque: 0.8 mm min. 0.0 mm GaAs infrared LED with a peak wavelength of 940 nm * The response frequency was measured by detecting the following rotating disk. EE-SX771/EE-SX871 EE-SX771A/EE-SX871A EE-SX771P/EE-SX871P EE-SX771R/EE-SX871R Light indicator (red) (turns ON when light is interrupted for models with A or R suffix) to 4 VDC ±10%, ripple (p-p): 10% max. ma max. (NPN models), 0 ma max. (PNP models) NPN open collector: to 4 VDC, 100 ma max. 100 ma load current with a residual voltage of 0.8 V max. 40 ma load current with a residual voltage of 0.4 V max. current (leakage current): 0. ma max. PNP open collector: to 4 VDC, 0 ma max. 0 ma load current with a residual voltage of 1. V max. current (leakage current): 0. ma max. 1 khz min. ( khz average) 1,000 lx max. with fluorescent light on the surface of the receiver Operating: to + C Storage: 0 to +80 C (with no icing) Operating: % to 8% Storage: % to 9% (with no condensation) Destruction: 0 to,000 Hz (peak acceleration: 100 m/s ) 1.-mm double amplitude for h (4-min periods) each in X, Y, and Z directions Destruction: 00 m/s for times each in X, Y, and Z directions IEC609 IP60 Connecting method Pre-wired (standard cable length: m) Weight (packaged) Material Approx. 0 g Case: Polybutylene phthalate (PBT) EE-SX77/EE-SX87 EE-SX77A/EE-SX87A EE-SX77P/EE-SX87P EE-SX77R/EE-SX87R Disk.1 mm 1 mm 1 mm t = 0. mm 0

Engineering Data (Typical) EE-SX77/87 Sensing Position Characteristics Sensing Position Characteristics Repeated Sensing Position Characteristics EE-SX770 Tr ON Tr ON Tr d d = ±0.00 mm d d Tr 0 1.0.0.0 4.0.0 6.0 Distance d (mm) Tr 0 1.0.0.0 4.0.0 6.0 Distance d (mm) Tr 0/V.16.18.0. Distance d (mm) Vcc = 4 V No. of repetitions: 0, Ta = C Note: The data applies to dark status. Operation may be affected by external light interference or light coming through the sensing object. I/O Circuit Diagrams NPN Output Model Output configuration Timing charts Output circuit EE-SX770 EE-SX771 EE-SX77 EE-SX870 EE-SX871 EE-SX87 Incident Interrupted Light indicator (red) ON Output transistor ON Load (e.g., relay) Operates Releases Incident Interrupted Light indicator (red) Output transistor ON ON Load (e.g., relay) Operates Releases Light indicator (red) Main circuit Brown (Vcc) 1 Load 4 Black (OUT) (control output) 100 ma max. Blue (GND) to 4 VDC EE-SX770A EE-SX771A EE-SX77A EE-SX870A EE-SX871A EE-SX87A Incident Interrupted Light indicator (red) ON Output transistor ON Load (e.g., relay) Operates Releases Incident Interrupted Light indicator (red) ON Output transistor ON Load (e.g., relay) Operates Releases Light indicator (red) Main circuit Brown (Vcc) 1 Load 4 Black (OUT) (control output) 100 ma max. Blue (GND) to 4 VDC 1

1 1 EE-SX77/87 PNP Output Model Output configuration Timing chart Output circuit EE-SX770P EE-SX771P EE-SX77P EE-SX870P EE-SX871P EE-SX87P Incident Interrupted Light indicator (red) ON Output transistor ON Load (e.g., relay) Operates Releases Incident Interrupted Light indicator (red) ON Output transistor ON Load (e.g., relay) Operates Releases Light indicator (red) Main circuit Brown (Vcc) 1 Black (OUT) 4 Load Blue (GND) to 4 VDC EE-SX770R EE-SX771R EE-SX77R EE-SX870R EE-SX871R EE-SX87R Incident Interrupted Light indicator (red) ON Output transistor ON Load (e.g., relay) Operates Releases Incident Interrupted Light indicator (red) ON Output transistor ON Load (e.g., relay) Operates Releases Light indicator (red) Main circuit Brown (Vcc) 1 Black (OUT) 4 Load Blue (GND) to 4 VDC Applicable Connectors 1.8 4 Vinyl-insulated round cable of 4 dia., 4 cores, (0. mm with 1.1-mm dia. insulator) E9-ECON@M Note: The @ symbol is used to indicate the cable length. The cable length is m or m. 4 Vinyl-insulated round cable of 4 dia., 4 cores, (0. mm with 1.1-mm dia. insulator) E9-ECONW@M Note: The @ symbol is used to indicate the cable length. The cable length is 0. to m in increments of 0.1 m. 1 4 Shield color Pin No. Use Brown (1) Power supply (+V) White () --- Blue () Power supply (0 V) Black (4) Output Note: Pin is not used. Pre-wired e-con Connector Pin Arrangement 1 4 Note: Pin is not used. Safety Precautions Refer to Warranty and Limitations of Liability. WARNING This product is not designed or rated for ensuring safety of persons either directly or indirectly. Do not use it for such purposes. Precautions for Correct Use Make sure that this product is used within the rated ambient environment conditions.

EE-SX77/87 Dimensions Standard EE-SX770/770P EE-SX870/870P EE-SX770A/770R EE-SX870A/870R (Unit: mm) Tolerance class IT16 applies to dimensions in this datasheet unless otherwise specified. L-shaped EE-SX771/771P EE-SX871/871P EE-SX771A/771R EE-SX871A/871R T-shaped EE-SX77/77P EE-SX87/87P EE-SX77A/77R EE-SX87A/87R 1.. 0. 4 Optical axis 4 19.1 Optical axis.9 9 Two 6 dia. 6..1 18 1 0. Optical axis Two,. dia. holes 4 0.7 0. 0.4 1 9 0..9 7.8 1 1 18 1 Optical axis 0.4 Four, R1.6 Optical axis 4 4. 0.7 1 1 9.1.9 1 1 0.7 1. Optical axis 4. 0.4 1 Four, R1.6 Two, R Six, R Indicator window dia. Indicator window dia. Indicator window dia.,000 +0 0 Vinyl-insulated round cable of.4 dia., cores, (0.08 mm with 0.7-mm dia. insulator); Standard length: m,000 +0 0 4 Vinyl-insulated round cable 4.6 of.4 dia., cores, (0.08 mm with 0.7-mm dia. insulator); Standard length: m,000 +0 0 Vinyl-insulated round cable of.4 dia., cores, (0.08 mm with 0.7-mm dia. insulator); Standard length: m

4 MEMO

Slot-type Photomicrosensor (Non-modulated) *1 EE-SX47/67 Global Standard Slot-type photomicrosensors with 0- to 100-mA direct switching capacity. Series includes models that enable switching between dark-on and light-on operation. Response frequency as high as 1 khz. Easy operation monitoring with bright light indicator. Wide operating voltage range: to 4 VDC Models in which the light indicator turns ON for dark-on operation are also available. A wide range of variations in eight different shapes. Flexible robot cable is provided as a standard feature. * Be sure to read Safety Precautions on page 9. *1. Pre-wired Models are available only in the EE-SX67 Series. *. Only for Pre-wired Models. Ordering Information Connector Infrared light Appearance Sensing method Connecting method Sensing distance Output configuration Indicator mode Model NPN output PNP output Standard / (selectable) * Incident light EE-SX670 EE-SX670P No incident light EE-SX670A EE-SX670R Incident light EE-SX470 EE-SX470P L-shaped / (selectable) * Incident light EE-SX671 EE-SX671P No incident light EE-SX671A EE-SX671R Incident light EE-SX471 EE-SX471P T-shaped, slot center 7 mm / (selectable) * Incident light EE-SX67 EE-SX67P No incident light EE-SX67A EE-SX67R Incident light EE-SX47 EE-SX47P Closemounting Closemounting Throughbeam type (with slot) Connector (4 poles) / (selectable) * Incident light EE-SX67 EE-SX67P No incident light EE-SX67A EE-SX67R mm Incident light EE-SX47 EE-SX47P (slot width) / Incident light EE-SX674 EE-SX674P (selectable) * No incident light EE-SX674A EE-SX674R Incident light EE-SX474 EE-SX474P T-shaped, slot center 10 mm / (selectable) * Incident light EE-SX67 EE-SX67P F-shaped / (selectable) * Incident light EE-SX676 EE-SX676P R-shaped / (selectable) * Incident light EE-SX677 EE-SX677P *. when the L terminal of the connector is opened, and light-on when the L terminal and positive (+) terminal are connected. Do not connect the L terminal to 0 V when using dark-on operation. When using light-on, it is useful to select the connector EE-1001-1. The L terminal and positive (+) terminal of this connector are connected in advance.

EE-SX47/67 Pre-wired Models Infrared light Appearance Sensing method Sensing distance Output configuration Indicator mode Connecting method NPN output Model PNP output Standard EE-SX670-WR 1M EE-SX670P-WR 1M L-shaped EE-SX671-WR 1M EE-SX671P-WR 1M T-shaped, slot center 7 mm EE-SX67-WR 1M EE-SX67P-WR 1M Closemounting Closemounting Throughbeam type (with slot) mm (slot width) / (selectable) * Incident light Pre-wired Models (1m) EE-SX67-WR 1M EE-SX674-WR 1M EE-SX67P-WR 1M EE-SX674P-WR 1M T-shaped, slot center 10 mm EE-SX67-WR 1M EE-SX67P-WR 1M F-shaped EE-SX676-WR 1M EE-SX676P-WR 1M R-shaped EE-SX677-WR 1M EE-SX677P-WR 1M * operation can be used when the L terminal is left unconnected or operation can be used when the L terminal and positive (+) terminal are connected to each other. Do not connect the L terminal to 0 V when using dark-on operation. Accessories (Order Separately) Connector Models Connector Type Connector with Cable Connector with Robot Cable *Refer to Accessories for details. Cable length Model EE-1001 EE-1001-1 EE-1009 1 m EE-1006 EE-1010 m EE-1006 EE-1010 1 m EE-1010-R m EE-1010-R Connector Hold-down Clip EE-1006A For EE-1006 only. Remarks L terminal and positive (+) terminal are already short-circuited. 6

EE-SX47/67 Ratings and Specifications NPN models PNP models Item Sensing distance Sensing object Differential distance Light source Indicator *1 Supply voltage Current consumption Control output Connector models Type Standard L-shaped Pre-wired models Connector models Pre-wired models Response frequency * Ambient illumination Ambient temperature range Ambient humidity range Vibration resistance Shock resistance Degree of protection Connecting method Weight Material EE-SX670 EE-SX670A EE-SX470 EE-SX670- WR EE-SX670P EE-SX670R EE-SX470P EE-SX670P- WR EE-SX671 EE-SX671A EE-SX471 EE-SX671- WR EE-SX671P EE-SX671R EE-SX471P EE-SX671P- WR T-shaped, slot center 7 mm EE-SX67 EE-SX67A EE-SX47 EE-SX67- WR EE-SX67P EE-SX67R EE-SX47P EE-SX67P- WR EE-SX67 EE-SX67A EE-SX47 EE-SX67- WR EE-SX67P EE-SX67R EE-SX47P EE-SX67P- WR *1. The indicator is a GaP red LED (peak wavelength: 690 nm). *. The response frequency was measured by detecting the rotating disk shown at the right. Close-mounting EE-SX674 EE-SX674A EE-SX474 EE-SX674- WR EE-SX674P EE-SX674R EE-SX474P EE-SX674P- WR T-shaped, slot center 10 mm F-shaped R-shaped EE-SX67 EE-SX676 EE-SX677 EE-SX67- WR EE-SX676- WR EE-SX677- WR EE-SX67P EE-SX676P EE-SX677P EE-SX67P- WR mm (slot width) Opaque: 0.8 mm min. 0.0 mm GaAs infrared LED with a peak wavelength of 940 nm Light indicator (red) (turns ON when light is interrupted for models with A or R suffix) to 4 VDC ±10%, ripple (p-p): 10% max. ma max. (NPN models), 0 ma max. (PNP models) NPN open collector: to 4 VDC, 100 ma max. 100 ma load current with a residual voltage of 0.8 V max. 40 ma load current with a residual voltage of 0.4 V max. current (leakage current): 0. ma max. PNP open collector: to 4 VDC, 0 ma max. 0 ma load current with a residual voltage of 1. V max. current (leakage current): 0. ma max. 1 khz min. ( khz average) 1,000 lx max. with fluorescent light on the surface of the receiver. Operating: to + C, Storage: 0 to +80 C (with no icing or condensation) Operating: % to 8%, Storage: % to 9% (with no icing or condensation) Destruction: 0 to,000 Hz (peak acceleration: 100 m/s ) 1.-mm double amplitude for h (4-min periods) each in X, Y, and Z directions Destruction: 00 m/s for times each in X, Y, and Z directions IEC609 IP0 Connector Models (direct soldering possible), Pre-wired Models (Standard cable length: 1 m), Models with Connectors (Standard cable length: 0.1 m) EE-SX676P- WR EE-SX677P- WR Connector models Approx..1 g Approx. g Approx..4 g Approx.. g Approx. g Approx..7 g Approx.. g Approx.. g Pre-wired models Approx. 18.9 g Approx. 17. g Approx. 17.8 g Approx. 16.8 g Approx. 17.1 g Approx. 18. g Approx. 16.9 g Approx. 16.9 g Case Polybutylene phthalate (PBT) Cover Emitter/receiver Polycarbonate Disk 1 mm.1 mm 1 mm t = 0. mm 7

EE-SX47/67 Engineering Data (Typical) Sensing Position Characteristics Sensing Position Characteristics Repeated Sensing Position Characteristics Tr ON Tr ON Output level transistor d Δd Δd Δd1 Δd4 Δd d ON Ta = C Ta = C Ta = C Tr 0 1.0.0.0 4.0.0 6.0 I/O Circuit Diagrams Distance d (mm) Tr 0 1.0.0.0 4.0.0 6.0 Distance d (mm) 0.00.0.04.06.08 Distance d (mm) Vcc =1 V, No. of repetitions: 0, Δd1 = 0.00 mm, Δd = 0.004 mm, Δd = 0.00 mm, Δd4 = 0.0 mm, Δd = 0.04 mm Note: The data applies to dark status. Operation may be affected by external light interference or light coming through the sensing object. NPN Output Model Output configuration Timing charts Terminal connections Output circuit EE-SX67@ EE-SX67@-WR EE-SX670A EE-SX671A EE-SX67A EE-SX67A EE-SX674A Incident Interrupted Light indicator ON (red) Output ON transistor Load Operates (e.g., relay) Releases Incident Interrupted Light indicator ON (red) Output ON transistor Load Operates (e.g., relay) Releases Incident Interrupted Light indicator ON (red) Output ON transistor Load Operates (e.g., relay) Releases Incident Interrupted Light indicator ON (red) Output ON transistor Load Operates (e.g., relay) Releases Short-circuited between L terminal and positive terminal Open between L terminal and positive terminal *1 Short-circuited between L terminal and positive terminal Open between L terminal and positive terminal *1 Light indicator (red) Main circuit L OUT IC *The terminal arrangement depends on the model. Check the dimensional diagrams. * Load (Control output) 100 ma max. to 4 VDC EE-SX470 EE-SX471 EE-SX47 EE-SX47 EE-SX474 Incident Interrupted Light indicator ON (red) Output ON transistor Load Operates (relay) Releases --- Light indicator (red) Main circuit OUT IC Load to 4 VDC *1. Do not connect the L terminal to 0 V when using dark-on operation. 8

EE-SX47/67 PNP Output Model Output configuration Timing charts Terminal connections Output circuit EE-SX67@P EE-SX67@P-WR EE-SX670R EE-SX671R EE-SX67R EE-SX67R EE-SX674R Light indicator (red) Output transistor Load (relay) Light indicator (red) Output transistor Load (relay) Incident Interrupted ON ON Operates Releases Incident Interrupted ON ON Operates Releases Incident Interrupted Light indicator ON (red) Output ON transistor Load Operates (e.g., relay) Releases Incident Interrupted Light indicator ON (red) Output ON transistor Load Operates (e.g., relay) Releases Short-circuited between L terminal and positive terminal Open between L terminal and positive terminal *1 Short-circuited between L terminal and positive terminal Open between L terminal and positive terminal *1 Light indicator (red) Main circuit L * OUT IC *The terminal arrangement depends on the model. Check the dimensional diagrams. Load to 4 VDC EE-SX470P EE-SX471P EE-SX47P EE-SX47P EE-SX474P *1. Do not connect the L terminal to 0 V when using dark-on operation. Safety Precautions Incident Interrupted Light indicator ON (red) Output ON transistor Load Operates (relay) Releases --- Refer to Warranty and Limitations of Liability. WARNING This product is not designed or rated for ensuring safety of persons either directly or indirectly. Do not use it for such purposes. Precautions for Safe Use Operating Environment These Photomicrosensors have an IP0 (conforms to IEC) enclosure and do not have a water-proof or dust-proof structure. Therefore, do not use them in applications in which the sensor will be subjected to splashes from water, oil, or any other liquid. Liquid entering the Sensor may result in malfunction. Make sure that this product is used within the rated ambient environment conditions. Installation When direct soldering to the terminals, use the following guidelines. Soldering Conditions Item Soldering iron Light indicator (red) Main circuit The terminal base uses a polycarbonate resin, which could be deformed by excessive soldering heat, resulting in damage to the product's functionality. Lot Number and Model Number Legend In the following diagrams, 76d indicates the lot number and factory where the product was manufactured. Do not include this code with the model number when ordering. OUT IC Load Precautions for Correct Use Temperature 0 C max. Permissible time s max. Remarks to 4 VDC The portion between the base of the terminals and the position 1. mm from the terminal base must not be soldered. EE-SX@70@ EE-SX670 76d Model number Lot number and factory code 9

EE-SX47/67 Dimensions (Unit: mm) Tolerance class IT16 applies to dimensions in this datasheet unless otherwise specified. Sensors EE-SX670/670P EE-SX670A/670R EE-SX470/470P Terminal Arrangement (1) Vcc () L L* () OUT OUTPUT (4) GND (0 V) * Pin is not used for the EE-SX470. EE-SX671/671P EE-SX671A/671R EE-SX471/471P Terminal Arrangement (1) Vcc () L L* () OUT OUTPUT (4) GND (0 V) * Pin is not used for the EE-SX471. 9 1. 6. 6.9 Optical axis 8.4..8 1.4 19 19 1.4 4.4 Two,. dia. holes Four, R1 1.8 Two,.8 dia. holes Indicator window 6.4 0.8 0. 0.7 9 14. 6. 8. 7...8 9.6 6. 19 1 4.4 1 1.4 1 1.4 19 Four, R Four, R1 Indicator window Optical axis Two,. dia. holes 6. 0.7.1 0.6 0. 6. 0.8 6.9 7. 1. EE-SX67/67P EE-SX67A/67R EE-SX47/47P Terminal Arrangement (1) Vcc () L L* () OUT OUTPUT (4) GND (0 V) EE-SX67/67P EE-SX67A/67R EE-SX47/47P Terminal Arrangement (1) Vcc () L L* () OUT OUTPUT (4) GND (0 V) * Pin is not used for the EE-SX47. * Pin is not used for the EE-SX47. 1.7 6 6.4 1.6 6. 1.8. (6.6) 7 Two, R1 7 Two,. dia. holes 0.8 1.4 1.4 0.8 6. 1 Four, R1 0. 0.7 19 4. Four, R1.6. 6.. 6. 9 8.4.8. 1 4.4 1 Optical axis Indicator window 6. 9..8 4.9.8 6. 1 4 Optical axis 14.4 Indicator window.4 0. 0.7 60

EE-SX47/67 EE-SX674/674P EE-SX674A/674R EE-SX474/474P Terminal Arrangement (1) Vcc () L L* () OUT OUTPUT (4) GND (0 V) EE-SX67/67P Terminal Arrangement (1) Vcc () L L () OUT OUTPUT (4) GND (0 V) * Pin is not used for the EE-SX474. 16.7 Optical axis 4 Two, R1 7 Two,. dia. holes Indicator window 6. 6 7 10 1. 6.9.8 6. (.9) (9.) 6. 1 4.4 1 1.6 Optical axis.1 0. 0.7 0.6 0.8 0.1.6 1. 1 6. 6 (R) 0.7 19. 0.8 0. Sensing window.7 (R). 9. 8.4..8 6..4 1.4 1 4 1 16.7 Optical axis Indicator window EE-SX676/676P EE-SX677/677P Terminal Arrangement (1) Vcc () L L () OUT OUTPUT (4) GND (0 V) Terminal Arrangement (1) Vcc () L L () OUT OUTPUT (4) GND (0 V) 1.7 Optical axis 1.7 Optical axis. 7 1.4 Optical axis 1. 7 0.8 6. 0.8 1. 6. 7 Sensing window 1.4 7. Optical axis 9 Indicator window 9 9 9 Indicator window. 8.4 1.6 7 Sensing window 7 1.6. 8.4.. 6..8.. 6..8 1 4.4 Two,. dia. holes 0. 0.7 0.7 0. Two,. dia. holes 1 4.4 61

EE-SX47/67 EE-SX670-WR/670P-WR EE-SX671-WR/671P-WR Terminal Arrangement Terminal Arrangement Brown Vcc Pink L Blue GND (0 V) Black OUTPUT Brown Vcc Pink L Blue GND (0 V) Black OUTPUT R1 Optical axis R. 6. 19 Optical axis 6.9. 6.9 11. 6. 11 9 8.4. 19.4. dia. 1.4 Optical axis 0.8 1.8. Sensing window 6. R1 Indicator window 9 1. 1.4 1.4 18.7 Optical axis Robot cable of.8 dia., 4 cores, (0.1 mm with 0.8 mm dia. insulator); Standard length: 1 m 9 4.6 dia. Sensing window 0.8 6..8 6. Indicator window 4.6 dia..8 dia. Robot cable of.8 dia., 4 cores, (0.1 mm with 0.8 mm dia. insulator); Standard length: 1 m.6 19 7.. dia. EE-SX67-WR/67P-WR EE-SX67-WR/67P-WR Terminal Arrangement Brown Vcc Pink L Blue GND (0 V) Black OUTPUT Terminal Arrangement Brown Vcc Pink L Blue GND (0 V) Black OUTPUT 1.7 7 Optical axis 1.6 6. 1.8. Optical axis (6.6) 6. 1 10. Sensing window 6. 0.8 4.. R1.6 R1 6. 9 8.4. 1.4 Optical axis Indicator window R1 14.4 6..8 8.9 7 1.4. dia. Optical axis 9 dia. Indicator window Sensing window 0.8 4.6 dia. 19 6 Robot cable of.8 dia., 4 cores, (0.1 mm with 0.8 mm dia. insulator); Standard length: 1 m 4.6 dia. Robot cable of.8 dia., 4 cores, (0.1 mm with 0.8 mm dia. insulator); Standard length: 1 m 6

EE-SX47/67 EE-SX674-WR/674P-WR EE-SX67-WR/67P-WR Terminal Arrangement Brown Vcc Pink L Blue GND(0V) Black OUTPUT Terminal Arrangement Brown Vcc Pink L Blue GND(0V) Black OUTPUT. dia. 7 R1 Optical axis 10 7 6. 6 7 6.9 4 Optical axis.7 19. 0.8 Sensing window 1.4 Optical axis Indicator window 9 Indicator window (.9) 1.6 Robot cable of.8 dia., 4 cores, (0.1 mm with 0.8 mm dia. insulator); Standard length: 1 m Optical axis 9 6. 4.6 dia. Sensing window.8 0.8.6 1. (R) 6. (R).7 1 10. 6. 8.4. 4.6 dia. Robot cable of.8 dia., 4 cores, (0.1 mm with 0.8 mm dia. insulator); Standard length: 1 m 1.4 16.7 EE-SX676-WR/676P-WR EE-SX677-WR/677P-WR Terminal Arrangement Brown Vcc Pink L Blue GND(0V) Black OUTPUT Terminal Arrangement Brown Vcc Pink L Blue GND(0V) Black OUTPUT Optical axis. Optical axis 7 1.7 1.4 1. 7 6.4 Sensing window 1. 6.4 7 Sensing window 7 1.7 1.4. Optical axis Optical axis 8.4 9 6. 1 9 7 0.8 0.8 9 7 1 9 6. 8.4. Indicator window.. Indicator window. 4 4. dia.. 4.6 dia. Robot cable of.8 dia., 4 cores, (0.1 mm with 0.8 mm dia. insulator); Standard length: 1 m 4.6 dia. Robot cable of.8 dia., 4 cores, (0.1 mm with 0.8 mm dia. insulator); Standard length: 1 m 6

64 MEMO

Slot-type Photomicrosensor with Connector (Modulated) EE-SPX74/84 Photomicrosensor with light modulation for reduced external light interference and a connector for easy maintenance. Built-in connectors Select from four easy-to-use shapes for efficient space utilization. Connectors with locks for safety against vibration. Convenient mounting method using M screws. Wide operating voltage range: to 4 VDC Be sure to read Safety Precautions on page 68. Ordering Information Sensors Appearance Sensing method Sensing distance Output type Output configuration Infrared light Model EE-SPX740 EE-SPX840.6 mm (slot width) EE-SPX74 Through-beam type (with slot) NPN output EE-SPX84 EE-SPX74 EE-SPX84 mm (slot width) EE-SPX741 EE-SPX841 Accessories (Order Separately) Connector with Cable Type Cable length Model Connector 1 m EE-101 * Refer to Accessories for details. 6

EE-SPX74/84 Ratings and Specifications EE-SPX740, EE-SPX840 EE-SPX741 Models EE-SPX74, EE-SPX84 EE-SPX841 Item EE-SPX74, EE-SPX84 Sensing distance.6 mm (slot width) mm (slot width) Sensing object Opaque: 1 0.mm min. Opaque: 0.8 mm min. Differential distance Light source Indicator *1 Supply voltage Current consumption Control output Response frequency * Ambient illumination Ambient temperature range Ambient humidity range Vibration resistance Shock resistance Degree of protection Connecting method Weight Material Case Holder 0.0 mm max. GaAs infrared LED (pulse lighting) with a peak wavelength of 940 nm Light indicator (red) to 4 VDC ±10%, ripple (p-p): % max. Average: 1 ma max.; Peak: 0 ma max. NPN voltage output: Load power supply voltage: to 4 VDC Load current: 0 ma max. current: 0. ma max. 0 ma load current with a residual voltage of 1.0 V max. 10 ma load current with a residual voltage of 0.4 V max. 00 Hz min.,000 lx max. with incandescent light or sunlight on the surface of the receiver Operating: 10 to + C Storage: to +6 C Operating: % to 8% Storage: % to 9% Destruction: 10 to Hz, 1.-mm double amplitude for h each in X, Y, and Z directions Destruction: 00 m/s for times each in X, Y, and Z directions IEC IP0 Special connector Approx..4 g Polycarbonate *1. The indicator is a GaAlAs red LED (peak wavelength: 660 nm). *. The response frequency was measured by detecting the following rotating disk. mm mm Disk EE-SPX74/84 EE-SPX74/84 mm Disk EE-SPX741/841 Disk EE-SPX740/840 66

Engineering Data (Typical) EE-SPX74/84 Sensing Position Characteristics EE-SPX740/74/74 Tr ON Tr ON d Insertion direction Insertion direction Insertion direction d d Tr 0 1 4 6 Distance d (mm) EE-SPX741 Tr 0 1 4 6 Distance d (mm) Tr ON Tr ON Insertion direction d Insertion direction d Tr 0 1 4 6 Distance d (mm) Tr 0 1 4 6 Distance d (mm) 67

EE-SPX74/84 I/O Circuit Diagrams NPN Output Model Output configuration Timing charts Output circuit EE-SPX740 EE-SPX741 EE-SPX74 EE-SPX74 EE-SPX840 EE-SPX841 EE-SPX84 EE-SPX84 Incident Interrupted Light indicator ON (red) Output ON transistor Load 1 Operates (relay) Releases H Output L Light indicator (red) Output transistor Load 1 (relay) Load Incident Interrupted ON ON Operates Releases H L Light indicator (red) Main circuit 1. to ma Load 1 OUT Load * Voltage output (when the sensor is connected to a transistor circuit) to 4 VDC Safety Precautions Refer to Warranty and Limitations of Liability. WARNING This product is not designed or rated for ensuring safety of persons either directly or indirectly. Do not use it for such purposes. Precautions for Correct Use Make sure that this product is used within the rated ambient environment conditions. Design Cable Extension When extending the cable, use an extension cable with conductors having a total cross-section area of 0.1 mm. The total cable length must be 4 m maximum. To use a cable length longer than 4 m, attach a capacitor with a capacitance of approximately 10 μf to the wires as shown below. The distance between the terminal and the capacitor must be within 4 m. (Use a capacitor with a dielectric strength that is at least twice the Sensor's power supply voltage.) OUT Make sure the total length of the power cable connected to the product is less than 10 m even if a capacitor is inserted. Effects of Inductive Noise to 4 VDC A capacitance of 10 μf min. 0 V 4 m max. Extension cable When there is inductive noise in the Sensor mounting frame (metal), the output of the Sensor may be affected. In this case, ensure that there is no electrical potential difference between the Sensor 0-V terminal and the Sensor mounting frame, or attach a 0.47 μf capacitor between the 0-V terminal and the frame. to 4 VDC Sensor 0 V Power supply Mounting frame 0.47 μf 68

EE-SPX74/84 Dimensions (Unit: mm) Tolerance class IT16 applies to dimensions in this datasheet unless otherwise specified. Sensors EE-SPX740 EE-SPX840 1.6 Indicator window (red).4 (1) 1.8.6 19 () (). Terminal Arrangement Optical axis (0.-mm wide) Optical axis (1-mm wide) 6.6. Two,. dia. holes (1) GND(0 V) () OUT OUTPUT 1. 1. () + Vcc 7 7.4 EE-SPX74 EE-SPX84 6.6 Optical axis (1-mm wide) 8.. (1) See note.. 1.6. Optical axis (0.-mm wide) dia. C0. Indicator window (red) R. () () R.. Note: The lug is used to prevent turning and to indicate the optical axis. When installing, make a fixed hole of.1 to. mm dia..6 6 7 1. 1.6 6. dia. hole 6. Terminal Arrangement (1) GND(0 V) () OUT OUTPUT () + Vcc EE-SPX74 EE-SPX84 6.6 Optical axis (1-mm wide) 8.. (1).. Optical axis (0.-mm wide) See note. 1.6. dia. C0. Indicator window (red) () () R. 7 Note: The lug is used to prevent turning and to indicate the optical axis. When installing, make a fixed hole of.1 to. mm dia. 6.6 1.6 1. 6 6.. dia. hole Terminal Arrangement (1) GND(0 V) () OUT OUTPUT () + Vcc 69

EE-SPX74/84 EE-SPX741 EE-SPX841.6 9 Four, R.. Indicator window (red) () () 0 7. 0 14.4. 1. 1.. (1) Two,. dia. holes 6. Optical axis (0.8-mm wide) Optical axis (-mm wide) 1. 1.6 7..9 6.6 Terminal Arrangement (1) GND (0 V) () OUT OUTPUT 6.9 14. 1.4 () + Vcc Accessories (Connector with Cable) EE-101..7 () XHP- (JST Mfg.) Vinyl-insulated round cable of.9 dia., with cores (0.1 mm with 0.9-dia. insulator); Standard length: 1 m Terminal Arrangement 9.8 () (1) Blue GND (0 V) (1) 7.7 0 1,000 16± 7±1 () Black OUTPUT () Brown Vcc 70

Slot-type Photomicrosensor with Cable EE-SPX-W Photomicrosensor with built-in amplifier and attached cable reduces external light interference. Light modulation effectively reduces external light interference. Wide operation voltage range: to 4 VDC Easy operation monitoring with bright light indicator. Be sure to read Safety Precautions on page 7. Ordering Information Infrared light Appearance Sensing method Sensing distance (slot width) Output type Output configuration Cable length Model.6 mm EE-SPX0-WA 1M EE-SPX40-WA 1M Through-beam type.6 mm.6 mm NPN output 1 m EE-SPX04-WA 1M EE-SPX404-WA 1M EE-SPX06-WA 1M EE-SPX406-WA 1M mm EE-SPX0-WA 1M* EE-SPX40-WA 1M* * These models (EE-SPX0/40-WA only) are not conformed to CE standards. 71

EE-SPX-W Ratings and Specifications Models EE-SPX0-WA, EE-SPX40-WA EE-SPX0-WA EE-SPX04-WA, EE-SPX404-WA EE-SPX40-WA Item EE-SPX06-WA, EE-SPX406-WA Sensing distance.6 mm (slot width) mm (slot width) Sensing object Opaque: 1 0. mm min. Opaque: 0.8 mm min. Differential distance Light source Indicator *1 Supply voltage Current consumption Control output Response frequency * Ambient illumination Ambient temperature range Ambient humidity range Vibration resistance Shock resistance Degree of protection 0.0 mm max. GaAs infrared LED (pulse lighting) with a peak wavelength of 940 nm Light indicator (red) to 4 VDC ±10%, ripple (p-p): % max. Average: 1 ma max.; Peak: 0 ma max. NPN voltage output: Load power supply voltage: to 4 VDC Load current: 80 ma max. current: 0. ma max. 80 ma load current with a residual voltage of 1.0 V max. 10 ma load current with a residual voltage of 0.4 V max. 00 Hz min.,000 lx max. with incandescent light or sunlight on the surface of the receiver Operating: 10 to + C Storage: to +6 C Operating: % to 8% Storage: % to 9% Destruction: 10 to Hz, 1.-mm double amplitude for h each in X, Y, and Z directions Destruction: 00 m/s for times each in X, Y, and Z directions IEC IP0 Connecting method Pre-wired (standard cable length: 1 m) Weight Material Case Holder 18. g Polycarbonate *1. The indicator is a GaP red LED (peak wavelength: 700 nm). *. The response frequency was measured by detecting the following rotating disk. mm mm Disk mm EE-SPX0-WA Disk EE-SPX0-WA Disk EE-SPX06-WA I/O Circuit Diagrams NPN Output Model Output configuration Timing charts Output circuit Incident Interrupted EE-SPX40-WA EE-SPX404-WA EE-SPX40-WA EE-SPX406-WA EE-SPX0-WA EE-SPX04-WA EE-SPX0-WA EE-SPX06-WA Light indicator ON (red) Output ON transistor Load 1 Operates (relay) Releases H Load L Incident Interrupted Light indicator ON (red) Output ON transistor Load 1 Operates (relay) Releases H Load L Light indicator (red) Brown 1. to ma Load 1 Main circuit Black Blue Load * Voltage output (when the sensor is connected to a transistor circuit) to 4 VDC 7

Engineering Data (Typical) EE-SPX-W Sensing Position Characteristics EE-SPX0-WA EE-SPX04-WA EE-SPX06-WA EE-SPX0-WA EE-SPX04-WA EE-SPX06-WA Tr ON Tr ON d d d Tr 0 1 4 6 Distance d (mm) EE-SPX0-WA Tr 0 1 4 6 Distance d (mm) EE-SPX0-WA Tr ON Tr ON EE-SPX0-WA d d Tr 0 1 4 6 Distance d (mm) Tr 0 1 4 6 Distance d (mm) Safety Precautions Refer to Warranty and Limitations of Liability. WARNING This product is not designed or rated for ensuring safety of persons either directly or indirectly. Do not use it for such purposes. Precautions for Correct Use Make sure that this product is used within the rated ambient environment conditions. Wiring When extending the cable, use an extension cable with conductors having a total cross-section area of 0. mm. The total cable length must be m maximum. To use a cable length longer than m, attach a capacitor with a capacitance of approximately 10 μf to the wires as shown below. The distance between the terminal and the capacitor must be within m. (Use a capacitor with a dielectric strength that is at least twice the Sensor's power supply voltage.) + A capacitance of 10 μf min. m max. to 4 VDC Make sure the total length of the power cable connected to the product is less than 10 m even if a capacitor is inserted. 0 V + Extension cable 7

EE-SPX-W Dimensions (Unit: mm) Tolerance class IT16 applies to dimensions in this datasheet unless otherwise specified. EE-SPX0-WA EE-SPX40-WA Optical axis Optical axis (0.-mm wide) (1-mm wide) 6.6 Indicator window 1.6 R. 7 dia. See note... 6 7 dia. C0. 1.6 R.. dia. hole 6. 1. 8 1,000 * Vinyl-insulated round cable of. dia., cores, (0.14 mm with 1.0-dia. insulator); Standard length: 1 m Note: The lug is used to prevent turning and to indicate the optical axis. When installing, make a fixed hole of.1 to. mm dia. EE-SPX04-WA EE-SPX404-WA Optical axis See note. (0.-mm wide).. dia. Optical axis (1-mm wide) C0. R. 1.6 7 dia. R. 6 7 6.6 6 1.6 Indicator window. dia. hole 6. 1. 8 1,000 * Vinyl-insulated round cable of. dia., cores, (0.14 mm with 1.0-dia. insulator); Standard length: 1 m Note: The lug is used to prevent turning and to indicate the optical axis. When installing, make a fixed hole of.1 to. mm dia. EE-SPX06-WA EE-SPX406-WA 7 1. max. Indicator window 6 8 Optical axis (0.-mm wide) 1. 1,000 Indicator window Optical axis (1-mm wide) 1.8 19.6 7.4 6.6 Two,. dia. holes 1.6 * Vinyl-insulated round cable of. dia., cores, (0.14 mm with 1.0-dia. insulator); Standard length: 1 m EE-SPX0-WA EE-SPX40-WA.6 9. Four, R Indicator window 0 14.4 7 dia. 0 7. Two,. dia. 6. Optical axis window ( 0.8) 1. 1.7 7. 6.9 8 14. 1,000 * Vinyl-insulated round cable of. dia., cores, (0.14 mm with 1.0-dia. insulator); Standard length: 1 m 74

Broad Slot-type Photomicrosensor EE-SPX0N/40N A Wide Slot Width of 1 mm and Superior Resistance to Light Interference and Noise. Noise resistance equivalent to photomicrosensors with built-in amplifiers. Resistance to common noise at least 0 times that of previous models. Resistance to inverter noise at least 10 times that of previous models. Reverse polarity protection built in. Be sure to read Safety Precautions on page 77. Ordering Information Sensors Infrared light Appearance Sensing method Sensing distance (slot width) Output type Output configuration Model EE-SPX0N Through-beam type (with slot) 1 mm (slot width) NPN output EE-SPX40N Accessories (Order Separately) Connector * Refer to Accessories for details. Type Cable length Model EE-1001 EE-1009 Connector with Cable Connector with Robot Cable 1 m EE-1006 EE-1010 m EE-1006 EE-1010 1 m EE-1010-R m EE-1010-R NPN/PNP Conversion Connector 0.46 m (total length) EE-00 7

EE-SPX0N/40N Ratings and Specifications Item Models EE-SPX0N, EE-SPX40N Sensing distance 1 mm (slot width) Sensing object Differential distance Light source Indicator Supply voltage Current consumption Control output Protection circuits Response frequency * Ambient illumination Ambient temperature range Ambient humidity range Vibration resistance Shock resistance Degree of protection Connecting method Weight Material Opaque:. 0. mm min. 0.0 mm max. Infrared LED (pulse lighting) with a peak wavelength of 940 nm Light indicator (red) 1 to 4 VDC ±10%, ripple (p-p): % max. 1 ma max. NPN voltage output: Load power supply voltage: 1 to 4 VDC Load current: 80 ma max. current: 0. ma max. 80 ma load current with a residual voltage of.0 V max. 10 ma load current with a residual voltage of 1.0 V max. Power supply reverse polarity protection, Output reverse polarity protection 100 Hz min.,000 lx max. with incandescent light or sunlight on the surface of the receiver. Operating: 10 to + C Storage: to +6 C Operating: % to 8% Storage: % to 9% Destruction: 10 to Hz, 1.-mm double amplitude for h each in X, Y, and Z directions Destruction: 00 m/s for times each in X, Y, and Z directions IEC IP0 Special connector (soldering not possible) Approx. 4 g Polycarbonate * The response frequency was measured by detecting the following rotating disk. mm mm Disk mm Engineering Data (Typical) Sensing Position Characteristics EE-SPX0N Tr ON Tr ON d d Tr 0 1 4 6 Distance d (mm) Tr 0 1 4 6 Distance d (mm) 76

I/O Circuit Diagrams EE-SPX0N/40N NPN Output Model Output configuration Timing charts Output circuit EE-SPX40N EE-SPX0N Light indicator (red) Output transistor Load 1 (relay) Load Light indicator (red) Output transistor Load 1 (relay) Load Incident Interrupted ON ON Operates Releases H L Incident Interrupted ON ON Operates Releases H L Light indicator (red) Main circuit 1. to ma Load 1 OUT lc Load * Voltage output (when the sensor is connected to a transistor circuit) 1 to 4 VDC Safety Precautions Refer to Warranty and Limitations of Liability. WARNING This product is not designed or rated for ensuring safety of persons either directly or indirectly. Do not use it for such purposes. Precautions for Correct Use Make sure that this product is used within the rated ambient environment conditions. Wiring Connection is made using a connector. Do not solder to the pins (leads). The pins (leads) are soldered to the internal board of the Sensor. Therefore, direct soldering of the pins (leads) may result in an internal disconnection causing malfunction. When extending the cable, use an extension cable with conductors having a total cross-section area of 0. mm. The total cable length must be m maximum. To use a cable length longer than m, attach a capacitor with a capacitance of approximately 10 μf to the wires as shown below. The distance between the terminal and the capacitor must be within m. (Use a capacitor with a dielectric strength that is at least twice the Sensor's power supply voltage.) OUT 1 to 4 VDC A capacitance of + 10 μf min. 0 V m max. Extension cable Make sure the total length of the power cable connected to the product is less than 10 m even if a capacitor is inserted. 77

EE-SPX0N/40N Dimensions (Unit: mm) Tolerance class IT16 applies to dimensions in this datasheet unless otherwise specified. Sensors EE-SPX0N, EE-SPX40N 6 7.4 1 10 Indicator window Four, R1.6 19 6 Sensing window (0..) -.7 1.08 1 19..4. 0. 0.7 Terminal Arrangement (1) + Vcc () OUT OUTPUT () GND (0 V) Accessories (Order Separately) *Refer to Accessories for details. 78

Long-distance Through-beam Photomicrosensor EE-SPW11/411 Through-beam Photomicrosensor with a sensing distance as long as 1 m. Easy operation monitoring with bright light indicator. Wide operating voltage range: to 4 VDC Light modulation effectively reduces external light interference. Easy-to-wire connector assures ease of maintenance. Be sure to read Safety Precautions on page 81. Ordering Information Sensors Infrared light Appearance Sensing method Sensing distance Output type Output configuration Model Through-beam type 1m NPN output EE-SPW11 EE-SPW411 * Both an EE-1006L Connector with Cable for the Emitter and an EE-1006D Connector with Cable for the Receiver are included with the Photomicrosensor. Refer to Accessories when using non-standard connectors, including Robot Cables and PNP Adapters. 79

EE-SPW11/411 Ratings and Specifications Item Models EE-SPW11, EE-SPW411 Sensing distance Sensing object 1 m Directional angle to 0 Light source Indicator *1 Supply voltage Current consumption Control output Response frequency * Ambient illumination Ambient temperature range Ambient humidity range Vibration resistance Shock resistance Degree of protection Connecting method Weight (packaged) Material Accessories Case Lens Opaque: mm dia. min. GaAs infrared LED (pulse lighting) with a peak wavelength of 940 nm Light indicator (red) ( %) to 4 (+10%) VDC, ripple (p-p): % max. Emitter: 0 ma max., Receiver: 0 ma max. NPN open collector: Load power supply voltage: to 4 VDC Load current: 100 ma max. current: 0. ma max. 100 ma load current with a residual voltage of 0.8 V max. 10 ma load current with a residual voltage of 0.4 V max. 100 Hz min.,000 lx max. with incandescent light on the surface of the receiver Operating: 10 to + C Storage: to +6 C Operating: % to 8% Storage: % to 9% Destruction: 00 to,000 Hz (peak acceleration: 100 m/s ) 1.-mm double amplitude for h (4-min periods) each in X, Y, and Z directions Destruction: 00 m/s for times each in X, Y, and Z directions IEC IP60 Special connector (soldering not possible) Approx. 8.8 g Polybutylene phthalate (PBT) Polycarbonate EE-1006L/D Connectors with Cables, Instruction Manual *1. The indicator is a GaP red LED (peak wavelength: 700 nm). *. The response frequency was measured by detecting the following rotating disk. mm 1 m mm mm Optical axis Engineering Data (Typical) Receiver Output Excess Gain Vs. Sensing Distance Characteristics Parallel Movement Characteristics Receiver output excess gain (multiple) 1,000 00 00 100 0 0 10 1 Distance Y (mm) 140 10 100 80 60 40 Distance Y 0 0. 0.4 0.6 0.8 1.0 1. 1.4 1.6 1.8 Distance between sensors (m) 0 0 Distance X 0. 0.4 0.6 0.8 1 1. 1.4 1.6 1.8 Distance X (m) 80

EE-SPW11/411 I/O Circuit Diagrams NPN Output Model Output configuration Timing charts Output circuit Incident Interrupted EE-SPW411 EE-SPW11 Light indicator (red) Output transistor Load 1 (relay) Light indicator (red) Output transistor Load 1 (relay) ON ON Operates Releases Incident Interrupted ON ON Operates Releases Light indicator (red) Main circuit OUT Load to 4 VDC Safety Precautions Refer to Warranty and Limitations of Liability. WARNING This product is not designed or rated for ensuring safety of persons either directly or indirectly. Do not use it for such purposes. Precautions for Correct Use Make sure that this product is used within the rated ambient environment conditions. Wiring Connection is made using a connector. Do not solder to the pins (leads). When extending the cable, use an extension cable with conductors having a total cross-section area of 0. mm. The total cable length must be less than 10 m. Axis Adjustment (1)Tentatively mount the emitter and receiver so that the center of each lens is in a single line. Side view Top view ()Turn ON the emitter and receiver after making sure that they have been wired correctly. When power is turned ON, the light indicator on the receiver will light. Make sure that the light indicator is when an object intercepts the optical axis and that the light indicator lights again when the object is removed. ()Fix the position of the receiver (or emitter) securely, move the emitter (or receiver) horizontally and vertically to check the range in which the operation indicator is lit. Then locate the emitter (or receiver) in the center of the range and fix the position securely. 81

EE-SPW11/411 Dimensions (Unit: mm) Tolerance class IT16 applies to dimensions in this datasheet unless otherwise specified. Sensors EE-SPW11 EE-SPW411 Emitter (EE-SPWL@11) Receiver (EE-SPWD@11).4 19 Two,. dia. holes.4 19 Two,. dia. holes 8 8 7 6. 0.6 1.1 14.1. 19 1.4 0.6 19 7.4 Indicator window 1. dia. 1.4 7.4 dia. Sensing window Two,.8 dia. holes 6. (1) () () 0.7 (1) () ().4 0..4 Terminal Arrangement (1) + Vcc () --- Vacant () GND (0 V) 7 14.1 1.1. Terminal Arrangement (1) + Vcc Sensing window Two,.8 dia. holes () OUT OUTPUT () GND (0 V) 0. 0.7 Accessories (Included) Connector with Cable for Emitter EE-1006L 11.8.4 0.6 (1) () () (4) 16. 0,000 (1) Brown + (4) Blue. Vinyl-insulated round cable of 4 dia., cores, (0. mm with 1.1-dia. insulator) Connector with Cable for Receiver EE-1006D 11.8.4 0.6 (1) () () (4) 16. 0,000 (1) Brown + () Black OUT (4) Blue. Vinyl-insulated round cable of 4 dia., cores, (0. mm with 1.1-dia. insulator) Note: These cables can also be ordered separately. *Refer to Accessories for details. 8

Pre-wired Photomicrosensor with Amplifier and Cable EE-SPW1/41 Compact, Thin-profile Photomicrosensor with special amplifier. Slim amplifier (0 7. 1 mm) can be handled like a cable. Provided with two operation indicators, enabling monitoring from the amplifier housing and sensor head. Simple wiring with a -conductor cable. Wide operating voltage range: 1 to 4 VDC Be sure to read Safety Precautions on page 86. Ordering Information Sensing method Sensing distance Output type Through-beam type 00 mm NPN output Output configuration Cable length from emitter to Cable length amplifier Model 0. m EE-SPW1 m 1 m EE-SPW1-A 0. m EE-SPW41 1 m EE-SPW41-A 8

EE-SPW1/41 Ratings and Specifications Item Models EE-SPW1, EE-SPW41 EE-SPW1-A, EE-SPW41-A Sensing distance 00 mm *1 Sensing object Opaque: mm dia. min. * Directional angle 10 to 40 Light source Indicator Supply voltage Current consumption Control output Response time Ambient illumination Ambient temperature range *1. Refer to Receiver Output Vs. Sensing Distance Characteristics on the next page. *. Detection of objects up to 0. mm wide is possible by using slit installation. GaAs infrared LED (pulse lighting) with a peak wavelength of 940 nm Light indicator (Red LEDs, one each on Sensor and Amplifier) 1 to 4 VDC ±10%, ripple (p-p): % max. Average: 0 ma max. NPN open collector, Load power supply voltage: 1 to 4 VDC, Load current: 100 ma max., current: 0. ma max. Residual voltage: 1 V max (at a 100-mA load current) 1 ms max. for both detection and reset,000 lx max. (incandescent light); 10,000 lx max. (sunlight) on the receiver 0 to + C Ambient humidity range % to 8% Vibration resistance Shock resistance 00 m/s Degree of protection Destruction: 10 to Hz, 1.-mm double amplitude for h each in X, Y, and Z directions IEC IP64 Connecting method Pre-wired (standard cable length: m) Cable length from emitter (receiver) to amplifier Weight (Packaged) Material Accessories Case Lens 0. m 1 m 76 g ABS resin Acrylate resin Slits: 0. mm, 1 mm, 0. mm, 1 mm (one each) Sems screws with spring washers and flat washers: Six M.6 1 Instruction Manual 84

Engineering Data (Typical) EE-SPW1/41 Receiver Output vs. Distance Mutual Interference Parallel Movement Characteristics Characteristics EE-SPW1/41 EE-SPW1/41 EE-SPW1/41 Optical output (mv) 1,000 00 00 100 0 0 Vcc = 1 V Distance X (mm) 60 0 40 0 Vcc = 4 V Operating range 0. Direction of slit Distance Y (mm) 60 0 40 0 X Y Vcc = 4 V No slit 10 Operating level Slit ( 0. mm) 1 0 100 00 00 400 00 600 Sensing Angle Characteristics EE-SPW1/41 Distance (mm) 0 10 Slit ( 0. mm) Interference range 0 0 100 10 00 0 00 Distance Y (mm) Sensing Distance vs. Input Voltage EE-SPW1/41 E R X E R Y Slit ( 1 mm) 0 10 Slit ( 0. mm) 0 100 00 00 400 00 Distance X (mm) Sensing distance (mm) 00 0 00 10 Vcc =1 V θ Sensing distance Sensing distance (mm) 800 700 600 00 400 100 00 00 0 100 0 0 0 10 0 10 0 0 Angle θ ( ) 0 10 1 14 16 18 0 4 Voltage (V) I/O Circuit Diagrams NPN Output Model Output configuration Timing charts Output circuit EE-SPW41(-A) EE-SPW1(-A) Light indicator (red) Output transistor Light indicator (red) Output transistor Incident Interrupted ON ON Incident Interrupted ON ON Light indicator (red) Main circuit Brown Black OUT Blue Load 1 to 4 VDC Sensing Distance with slit installed Infrared light Slit type Sensing distance Sensing object None 00 mm Opaque: mm dia. min. 1 mm or 1 mm 00 mm Opaque: Greater than the slit 0. mm or 0. mm 100 mm Opaque: Greater than the slit 8

EE-SPW1/41 Safety Precautions Refer to Warranty and Limitations of Liability. This product is not designed or rated for ensuring safety of persons either directly or indirectly. Do not use it for such purposes. Precautions for Correct Use Make sure that this product is used within the rated ambient environment conditions. Wiring Connections The length of the standard cable is 10 m max. (including the cable attachment, AWG4 min.). When extending the Sensor wires, use a wire greater than AWG in diameter and a cable shorter than 100 m. If the cable length exceeds 10 m, the supply voltage applied at the Sensor terminal will decrease as the impedance of the extended cable increases and the low level output voltage at the cable end will increase. Therefore, take voltage fluctuation into account when extending the Sensor cable. Mounting WARNING Tighten the mounting screws to a torque of 0.4 N m max. Adjustment Aperture Stickers Two kinds of reticles are attached, the 0.-mm and the 1.0-mm width types (total of 4 stickers with slit widths A to D as shown in the following diagram). Use these when the sensing object is mm or smaller or when mutual interference must be reduced. For each slit of the same type, attach a sticker to the sensing surface of the emitter and receiver. 8.8 mm H 4.6 mm L Square hole Size L (mm) Size H (mm) Slit A 0. Slit B 1 Slit C 0. Slit D 1 Note: These are pressure sensitive adhesive-type stickers. Peel off the seal and stick it on the lens. Optical Axis Adjustment (1)Set the Sensor so that the center of the lens in the emitter and receiver form one line. ()Having checked that the Sensor is correctly wired, turn ON the power. The operation indicator on the amplifier of the emitter will light. Check to make sure the light goes ON and when an opaque object is moved in and out between the emitter and receiver. ()Move the emitter (or receiver) up and down, left and right and secure the emitter (or receiver) in the center of the range of the operation indicator. Secure the receiver (or emitter) in the same way after adjustment is complete. Dimensions EE-SPW1 EE-SPW1-A EE-SPW41 EE-SPW41-A (Unit: mm) Tolerance class IT16 applies to dimensions in this datasheet unless otherwise specified..8 1 Optical axis Receiver 6 Vinyl-insulated round cable of.4. dia. L * 1. Vinyl-insulated round cable of. dia., cores, (0.14 mm with 1.0-dia. insulator); Standard length: m (14.),000 Emitter Two,.1 dia. hole 7..7 Optical axis (.) (.7) Indicator window.4 dia. oil-resistant type (0) 40 9 7. 1 * L = 00 mm (EE-SPW1, EE-SPW41) L = 1,000 mm (EE-SPW1-A, EE-SPW41-A) 10.7 (.). Indicator window (Emitter only). dia. hole Two, R1.6. (7.) 86

Slot-type Reflective Photomicrosensor EE-SPX01/401 EE-SPY0/40 Photomicrosensor with light modulation is not influenced by external light. Voltage-output models with wide operating voltage range ( to 4 VDC). Fitted with an easy-to-adjust optical axis mark. Easy adjustment and optical axis monitoring with a light indicator. Be sure to read Safety Precautions on page 91. Ordering Information Sensors Appearance Sensing method Sensing distance Output type Output configuration Model Infrared light Through-beam type (with slot).6 mm (slot width) EE-SPX01 EE-SPX401 Horizontal type Reflective type mm NPN output EE-SPY01 EE-SPY401 Vertical type EE-SPY0 Reflective type mm EE-SPY40 Accessories (Order Separately) Type Cable length Model Remarks EE-100 Connector Connector with Cable 1 m EE-100 NPN/PNP Conversion Connector 0.46 m (total length) EE-001 Connector Hold-down Clip EE-100A For EE-100 only. * Refer to Accessories for details. 87

EE-SPX01/401 EE-SPY0/40 Ratings and Specifications Item Sensing distance Sensing method Through-beam type (with slot) Reflective type EE-SPY01, EE-SPY401 EE-SPX01, EE-SPX401 Models EE-SPY0, EE-SPY40.6 mm (slot width) *1. Operation may not be possible near the Sensor. *. The indicator is a GaP red LED (peak wavelength: 700 nm). *. The response frequency was measured by detecting the following rotating disk. mm (Reflection factor: 90%; white paper 1 1 mm) *1 Sensing object Opaque: 1 0. mm min. --- Differential distance Light source Indicator * Supply voltage Current consumption 0.0 mm max. GaAs infrared LED with a peak wavelength of 940 nm Light indicator (red) to 4 VDC ±10%, ripple (p-p): % max. Average: 1 ma max., Peak: 0 ma max. NPN voltage output: Load power supply voltage: to 4 VDC Load current: 80 ma max. Control output current: 0. ma max. 80 ma load current with a residual voltage of 1.0 V max. 10 ma load current with a residual voltage of 0.4 V max. Response frequency * 00 Hz min. 100 Hz min. Ambient illumination Ambient temperature range Ambient humidity range Vibration resistance Shock resistance Degree of protection Connecting method Weight 0. mm max. (with a sensing distance of mm, horizontally),000 lx max. with incandescent light or sunlight on the surface of the receiver Operating: 10 to + C Storage: to +6 C (with no icing) Operating: % to 8% Storage: % to 9% (with no condensation) Destruction: 10 to Hz, 1.-mm double amplitude for h each in X, Y, and Z directions Destruction: 00 m/s for times each in X, Y, and Z directions IEC IP0 Special connector (soldering not possible) Approx..6 g Material Case Polycarbonate EE-SPX01 EE-SPX401 Disk EE-SPY0@ EE-SPY40@ 00 mm dia. 1 mm 1 mm 1 mm mm mm mm Disk Disk 88

Engineering Data (Typical) EE-SPX01/401 EE-SPY0/40 Operating Range Characteristics EE-SPY01, EE-SPY401 EE-SPY01, EE-SPY401 Distance Y (mm) 1 11 10 9 8 7 Sensing object: White paper (1 1 mm ) reflection factor: 90% Operates Releases Distance Y (mm) 1 11 10 9 8 7 Sensing object: White paper (1 1 mm ) reflection factor: 90% Operates Releases Y 6 4 Y 6 4 X X 1 1 0 4 1 0 1 4 0 4 1 0 1 4 EE-SPY0, EE-SPY40 Distance X (mm) EE-SPY0, EE-SPY40 Distance X (mm) Distance Y (mm) 1 11 10 9 8 Sensing object: White paper (1 1 mm ) reflection factor: 90% Distance Y (mm) 1 11 10 9 8 Sensing object: White paper (1 1 mm ) reflection factor: 90% 7 7 6 4 X Y 6 4 X Y 1 1 0 4 1 0 1 4 0 4 1 0 1 4 Distance X (mm) Sensing Position Characteristics EE-SPX01 (Z Direction) EE-SPX01 (Y Direction) Distance X (mm) Tr ON Dark ON Tr ON Dark ON Z Y Tr 0 1 4 6 7 8 Z (mm) Tr 0 1 4 6 7 8 Y (mm) 89

EE-SPX01/401 EE-SPY0/40 Receiver Output Excess Gain vs. Sensing Distance Characteristics EE-SPY@@@ Sensing Distance vs. Object Area Characteristics EE-SPY@@@ Receiver output excess gain (multiple) 6 4 1 Operating level Vcc = 4 V Length of cable = 0. m Thickness of cable = 0. mm Sensing object: White paper (1 1 mm ) (reflection factor: 90%) Sensing distance (mm) 1 10 Sensing object: white paper (reflection factor: 90%) l l 0 1 4 6 7 8 9 10 11 1 1 14 1 16 Distance d (mm) Sensing Angle vs. Sensing Distance Characteristics EE-SPY@@@ 0 1 7 10 0 0 0 Sensing area l (mm ) Dependency on Cable Length for Operation Distance/Release Distance EE-SPY@@@ Relative sensing distance d (%) 110 100 90 80 70 60 0 40 0 0 10 0 Sensing object: White paper (1 1 mm ) (reflection factor: 90%) d +θ θ Vcc = 4 V Length of cable = 0. m Thickness of cable = 0. mm EE-SPY01 EE-SPY0 d +θ θ 40 0 0 10 0 10 0 0 40 Angle θ ( ) Operating distance/release distance (mm) 0 18 16 14 1 Sensing object: White paper (1 1 mm ) (reflection factor: 90%) Ta = C Vcc = 4. V RL = 4.7 kω Lead: AWG4 (A) (B) 10 C: 10 μf Attach externally 8 6 (A): Using direct cable extension. (B): Using an externally attached 4 capacitance of 10 μf. Operates Releases 0 0.1 0. 0. 0.7 1.0 7 10 Length of cable (m) 90

I/O Circuit Diagrams EE-SPX01/401 EE-SPY0/40 NPN Output Model Output configuration Timing charts Output circuit EE-SPX401 EE-SPY401 EE-SPY40 EE-SPX01 EE-SPY01 EE-SPY0 Incident Interrupted Light indicator ON (red) Output ON transistor Load 1 Operates (relay) Releases H Load L Incident Interrupted Light indicator ON (red) Output ON transistor Load 1 Operates (relay) Releases H Load L Light indicator (red) Main circuit 1. to ma OUT Ic Load 1 Load * Voltage output (when the sensor is connected to a transistor circuit) to 4 VDC Safety Precautions Refer to Warranty and Limitations of Liability. WARNING This product is not designed or rated for ensuring safety of persons either directly or indirectly. Do not use it for such purposes Precautions for Correct Use Make sure that this product is used within the rated ambient environment conditions. Mounting The sensing distance for the EE-SPY Reflective-type Photomicrosensor with built-in amplifier varies from 8 to 0 mm depending on the product (90% reflective white paper). Do not place glossy objects in the background of the sensing object. Wiring Connection is made using a connector. Do not solder to the pins (leads). When extending the cable, use an extension cable with conductors having a total cross-section area of 0. mm. The total cable length must be m maximum. To use a cable length longer than m, attach a capacitor with a capacitance of approximately 10 μf to the wires as shown below. The distance between the terminal and the capacitor must be within m. (Use a capacitor with a dielectric strength that is at least twice the Sensor's power supply voltage.) OUT to 4 VDC + A capacitor of 10 μf min. 0 V m max. Extension cable Make sure the total length of the power cable connected to the product is less than 10 m even if a capacitor is inserted. 91

EE-SPX01/401 EE-SPY0/40 Dimensions (Unit: mm) Tolerance class IT16 applies to dimensions in this datasheet unless otherwise specified. Sensors EE-SPX01 EE-SPX401 6 0 14 7.6 Sensing window (1 0.) Terminal Arrangement 9 (1) Vcc 4 18 Indicator window (red) Two,. dia. () OUT OUTPUT () GND (0 V) 6 7. () () (1). 1. -0.6 4. EE-SPY01 EE-SPY401 6 0 14 7 0 14 6 8 Sensing face 4 Indicator window (red) Two,. dia. Terminal Arrangement (1) Vcc () OUT OUTPUT () GND (0 V) 7. () () (1). 1. -0.6 4. EE-SPY0 EE-SPY40 6 0 14 7. 4 8 Sensing face Terminal Arrangement (1) Vcc 0 Indicator window (red) Two,. dia. () OUT OUTPUT () GND (0 V) 6 7. () () (1). 1. -0.6 4. Accessories (Order Separately) *Refer to Accessories for details. 9

Light Convergent Reflective Photomicrosensor EE-SPY1/41 Accurately detects objects placed in front of shiny Background. A shiny background can be used as long as the distance between the sensor and the background is 0 mm or more. Detects minute objects such as a 0.0-mm-dia. pure copper wire. Small dispersion in sensing distance. Light modulation effectively reduces external light interference. Wide operating voltage range: to 4 VDC Be sure to read Safety Precautions on page 96. Ordering Information Sensors Horizontal type Vertical type Appearance Sensing method Sensing distance Output type Convergent reflective type to mm NPN output Output configuration Infrared light Model EE-SPY11 EE-SPY411 EE-SPY1 EE-SPY41 Accessories (Order Separately) Connector Type Cable length Model EE-1001 EE-1009 Connector with Cable 1 m EE-1006 EE-1010 m EE-1006 EE-1010 Connector with Robot Cable * Refer to Accessories for details. 1 m EE-1010-R m EE-1010-R NPN/PNP Conversion Connector 0.46 m (total length) EE-00 9

EE-SPY1/41 Ratings and Specifications Item Models EE-SPY11, EE-SPY411, EE-SPY1, EE-SPY41 Sensing distance Minimum sensing object Distance to background *1 Differential distance Light source Indicator * Supply voltage Current consumption Control output Response frequency * Ambient illumination Ambient temperature range Ambient humidity range Vibration resistance Shock resistance Degree of protection Connecting method Weight Material Case Holder to mm (Reflection factor: 90%; white paper 1 1 mm) Pure copper wire (0.0 mm dia.) 0 mm max. (glass with aluminum deposition) 0. mm (with a sensing distance of mm, horizontally) GaAs infrared LED with a peak wavelength of 940 nm Light indicator (red) to 4 VDC ±10%, ripple (p-p): % max. Average: 1 ma max., Peak: 0 ma max. NPN voltage output: Load power supply voltage: to 4 VDC Load current: 80 ma max. current: 0. ma max. 80 ma load current with a residual voltage of 1.0 V max. 10 ma load current with a residual voltage of 0.4 V max. 100 Hz min.,000 lx max. with incandescent light or sunlight on the surface of the receiver Operating: 10 to + C Storage: to +6 C Operating: % to 8% Storage: % to 9% Destruction: 10 to 0 Hz, 1.-mm double amplitude for h each in X, Y, and Z directions Destruction: 00m/s for times each in X, Y, and Z directions IEC IP0 Special connector (soldering not possible) Approx..6 g Polycarbonate Polybutylene phthalate (PBT) *1. Sensing object 0 mm Background object (glass with aluminum deposition) Distance to background *. The indicator is a GaP red LED (peak wavelength: 700 nm). *. The response frequency was measured by detecting the following rotating disk. 00 mm dia. 1 mm Disk EE-SPY11/411 1 mm 1 mm EE-SPY1/41 Disk I/O Circuit Diagrams NPN Output Model Output configuration Timing charts Output circuit EE-SPY411 EE-SPY41 EE-SPY11 EE-SPY1 Incident Interrupted Light indicator ON (red) Output ON transistor Load 1 Operates (relay) Releases H Load L Incident Interrupted Light indicator ON (red) Output ON transistor Load 1 Operates (relay) Releases H Load L Light indicator (red) Main circuit 1. to ma OUT Load 1 Load * Voltage output (when the sensor is connected to a transistor circuit) lc to 4VDC 94

Engineering Data (Typical) EE-SPY1/41 Operating Range Characteristics EE-SPY11/411 EE-SPY11/411 Distance Y (mm) 7 6 Sensing object: White paper (1 1 mm ) (reflection factor: 90%) Releases Operates Distance Y (mm) 7 6 Sensing object: White paper (1 1 mm ) (reflection factor: 90%) Releases Operates 4 4 X Y X Y 1 1 0 4 1 0 1 4 EE-SPY1/41 Distance X (mm) 0 4 1 0 1 4 Distance X (mm) EE-SPY1/41 Distance Y (mm) 7 6 Sensing object: White paper (1 1 mm ) (reflection factor: 90%) Releases Operates Distance Y (mm) 7 6 Sensing object: White paper (1 1 mm ) (reflection factor: 90%) Releases Operates 4 4 X Y X Y 1 1 0 4 1 0 1 4 Distance X (mm) 0 4 1 0 1 4 Distance X (mm) Sensing Distance vs. Object Area Sensing Angle vs. Sensing Distance Receiver Output vs. Sensing Distance Characteristics Characteristics Characteristics EE-SPY@@@ EE-SPY1/41 EE-SPY@@@ Relative sensing distance d (%) 00 00 00 100 80 0 0 Sensing object: White paper (1 1 mm ) (reflection factor: 90%) Relative sensing distance d (%) 10 100 80 60 40 θ 0 +θ Sensing object: White paper (1 1 mm ) (reflection factor: 90%) d Receiver output Vp (mv) 0 4 40 0 0 1 Sensing object: White paper (1 1 mm ) (reflection factor: 90%) 0 10 Operating level 10 1 10 0 0 100 Size (mm) 0 60 40 0 0 0 40 60 Angle θ ( ) 0 4 6 8 10 1 Sensing distance d (mm) 9

EE-SPY1/41 Safety Precautions Refer to Warranty and Limitations of Liability. WARNING This product is not designed or rated for ensuring safety of persons either directly or indirectly. Do not use it for such purposes. Precautions for Correct Use Make sure that this product is used within the rated ambient environment conditions. Wiring Connection is made using a connector. Do not solder to the pins (leads). When extending the cable, use an extension cable with conductors having a total cross-section area of 0. mm. The total cable length must be m maximum. To use a cable length longer than m, attach a capacitor with a capacitance of approximately 10 μf to the wires as shown below. The distance between the terminal and the capacitor must be within m. (Use a capacitor with a dielectric strength that is at least twice the Sensor's power supply voltage.) OUT to 4 DCV A capacitor of 10 μf min. 0 V Extension cable m max. Make sure the total length of the power cable connected to the product is less than 10 m even if a capacitor is inserted. Dimensions Sensors EE-SPY11 EE-SPY411 (Unit: mm) Tolerance class IT16 applies to dimensions in this datasheet unless otherwise specified. 6 19 Four, R1.6 8. 0 Four, R1 0 19 7.6 14 Sensing face (back) (10 x ) 0..8 16.8 Four, R.1. 1.7 18.7 Terminal Arrangement (1) + Vcc () OUT OUTPUT () GND (0 V) 6. (1) ()() Indicator window (red). 0. 0.7 EE-SPY1 EE-SPY41 6 19 Four, R1.6 8. 0 0 Four, R1 Sensing face (10 ) 8 0. 19 7.6 14.8 16.8 Four, R.1. 1.7 Terminal Arrangement (1) + Vcc () OUT OUTPUT () GND (0 V) 6. (1) ()() Indicator window (red) Accessories (Order Separately) *Refer to Accessories for details.. 0. 0.7 96

Reflective Photomicrosensor with Sensitivity Adjuster (Non-modulated) EE-SY671/67 Photomicrosensor with sensitivity adjuster. Easy adjustment with a built-in sensitivity adjuster. Easy optical axis monitoring with a bright light indicator. Compact design incorporating a built-in amplifier and special IC enables direct switching capacity of up to 100 ma. Wide operating voltage range: to 4 VDC Connection possible with a range of ICs, relays, and Programmable Controllers (PLCs). Be sure to read Safety Precautions on page 100. Ordering Information Sensors Appearance Sensing method Sensing distance Output type Output configuration Infrared light Model Horizontal type EE-SY671 Reflective type 1 to mm NPN output or (Selectable) * Vertical type EE-SY67 * The / (selectable) models are normally used as dark-on models. To use them as light-on models, short-circuit the L terminal and positive (+) terminal. An EE-1001-1 Connector with the terminals already short-circuited is also available. Accessories (Order Separately) Connector * Refer to Accessories for details. Type Cable length Model Remarks EE-1001 EE-1001-1 L terminal and positive (+) terminal are already short-circuited. EE-1009 Connector with Cable 1 m EE-1006 EE-1010 m EE-1006 EE-1010 Connector with Robot Cable 1 m EE-1010-R m EE-1010-R 97

EE-SY671/67 Ratings and Specifications Item Models EE-SY671, EE-SY67 Sensing distance Sensing object Differential distance Light source Indicator *1 Supply voltage Current consumption Control output Response frequency * Ambient illumination * Ambient temperature range Ambient humidity range Vibration resistance Shock resistance Degree of protection Connecting method Weight Material Accessories Case Emitter/ receiver 1 to mm (Reflection factor: 90%; white paper 1 1 mm) Transparent or opaque: 1 1 mm min. 0. max. (with a sensing distance of mm, horizontally) GaAs infrared LED with a peak wavelength of 940 nm Light indicator (red) to 4 VDC ±10%, ripple (p-p): 10% max. 40 ma max. NPN open collector: Load power supply voltage: to 4 VDC Load current: 100 ma max. current: 0. ma max. 100 ma load current with a residual voltage of 0.8 V max. 40 ma load current with a residual voltage of 0.4 V max. 0 Hz min. (Average: 00 Hz) 1,00 lx max. with fluorescent light on the surface of the receiver Operating: to + C Storage: 0 to +80 C Operating: % to 8% Storage: % to 9% Destruction: 0 to,000 Hz (peak acceleration: 100 m/s ) 1.-mm double amplitude for h (4-min periods) each in X, Y, and Z directions Destruction: 00m/s for times each in X, Y, and Z directions IEC IP0 Special connector (direct soldering possible) Approx.. g (including screwdriver for adjustment) Polybutylene phthalate (PBT) Polycarbonate Screwdriver for adjustment *1. The indicator is a GaP red LED (peak wavelength: 690 nm). *. The response frequency was measured by detecting the following rotating disk. 00 mm dia. 1 mm Disk 1 mm 1 mm EE-SY671 Disk EE-SY67 *. The ambient illuminance is measured on the surface of the receiver. 98

Engineering Data (Typical) EE-SY671/67 Operating Range Characteristics (Max. Sensitivity) EE-SY67@ EE-SY67@ Distance Y (mm) 0 18 16 14 Sensing object: White paper (1 1 mm ) (reflection factor: 90%) X Y X Y Distance Y (mm) 0 18 16 14 Sensing object: White paper (1 1 mm ) (reflection factor: 90%) Y X X Y 1 1 10 10 8 8 6 6 4 Operates 0 6 Releases 4 1 0 1 4 6 Distance X (mm) Sensing Distance vs. Object Area Characteristics 4 Operates 0 6 Releases 4 1 0 1 4 6 Distance X (mm) Sensing Distance vs. Sensitivity Volume Sensing distance (mm) 0 1 Sensing object: White paper (1 1 mm ) (reflection factor: 90%) l l With max. sensitivity Sensing distance (mm) 0 0 Aluminum plate Paper (reflection factor: 90%) 10 1 Straw paper Paper (reflection factor: 10%) 10 Black backlight 0 1 7 10 0 0 0 0 0 1 4 6 7 8 9 10 Sensing area l (mm ) min. Sensing adjuster scale max. I/O Circuit Diagrams NPN Output Model Output configuration Timing charts Terminal connections Output circuit EE-SY671 EE-SY67 Light indicator (red) Output transistor Load 1 (relay) Light indicator (red) Output transistor Load 1 (relay) Incident Interrupted ON ON Operates Releases Incident Interrupted ON ON Operates Releases Short-circuited between L terminal and positive terminal Open between L terminal and positive terminal Light indicator (red) Main circuit OUT Load 1 to 4 VDC 99

EE-SY671/67 Safety Precautions Refer to Warranty and Limitations of Liability. This product is not designed or rated for ensuring safety of persons either directly or indirectly. Do not use it for such purposes. Precautions for Correct Use Make sure that this product is used within the rated ambient environment conditions. Wiring Soldering When direct soldering to the terminal, use the following guidelines. Soldering Conditions Item Temperature Permissible time Soldering iron 0 C max. WARNING s max. Remarks The portion between the base of the terminals and the position 1. mm from the terminal base must not be soldered. The terminal base uses a polycarbonate resin, which could be deformed by excessive soldering heat, resulting in damage to the product s functionality. Sensitivity Adjustment Use the special screwdriver (sold together) for sensitivity adjustment. When an excessive force is applied to sensitivity adjuster, it may be damaged. The shaft of the sensitivity adjuster is charged. Connect a DC power supply incorporating an insulated transformer to the photomicrosensor. Do not connect a DC power supply incorporating an autotransformer or the user may receive an electric shock when adjusting the sensitivity. Power source Power source Autotransformer Insulated transformer + + Sensor Sensor Cable Extension When extending the cable, use an extension cable with conductors having a total cross-section area of 0. mm. The total cable length must be less than 10 m. Installation The photomicrosensor is built into the device being used and so is not equipped to deal with interference from an external light source. When using the sensor in an area exposed to an incandescent lamp, install so as to minimize the effects of external light sources. 100

EE-SY671/67 Sensitivity Adjustment with Background Object Point A Point B Setting Check Sensing conditions Adjuster indicator Background object A Background object B Background object Black paper with small reflection factor C B C Adjustment Procedure 1. Set the sensitivity of the photomicrosensor to minimum, place the sensing object in the sensing position, turn the sensitivity adjuster clockwise slowly until the light indicator is lit (point A). Sensitivity Adjustment with No Background Object. Remove the sensing object, at which time the light indicator will be. Further turn the sensitivity adjuster clockwise slowly until the light indicator is lit again (point B). The operation indicator will not light again if the background object does not reflect light, in which case refer to Sensitivity Adjustment with No Background Object.. Set the sensitivity adjuster at the center (point C) between point A and B. Points A and B will be very close if the sensor is influenced by excessive light reflected by the background object, in which case take the following preventive measures. (1) Separate the sensor and the background object by a distance of 0 mm min. () Cover the surface of the background object with a material with a small reflection factor, such as black sponge. Point A Point B Check 4. After setting the sensitivity adjuster to point C, check if the light indicator is lit on placing the sensing object at the sensing position and not lit on removing the sensing object. Sensing conditions Adjuster indicator A A C B C Adjustment Procedure 1. Set the sensitivity of the photomicrosensor to minimum, place the sensing object at the sensing position, turn the sensitivity adjuster clockwise slowly until the light indicator is lit (point A).. Set the sensitivity adjuster at the center (point C) between points A and B (the point where the sensitivity is maximum).. After setting the sensitivity adjuster to point C, check if the light indicator is not lit on removing the sensing object. 101

EE-SY671/67 Dimensions (Unit: mm) Tolerance class IT16 applies to dimensions in this datasheet unless otherwise specified. Sensors EE-SY671 EE-SY67 19 Two,. dia. holes 19 Two,. dia. holes 0..4 19 1.4 1. Sensing window (back) (1. 4.1) Sensitivity adjuster 6.9 6..4 19 1.4 Sensing window (1..1) Sensitivity adjuster 6.9 6. 16.7 14.1 () (1.4) 8.. 4.1 Two,.8 dia. holes 1. () (1.) 16.7 8. Two,.8 dia. holes. 1. 6. Indicator window (1)()()(4).4 0. 0.7 0.6 6. Indicator window (1)()()(4).4 0. 0.7 0.6 Terminal Arrangement (1) + Vcc () L L () OUT OUTPUT (4) GND (0 V) Terminal Arrangement (1) + Vcc () L L () OUT OUTPUT (4) GND (0 V) Accessories (Order Separately) *Refer to Accessories for details. 10

Retroreflective Photomicrosensor with Lens EE-SPZ-A Photomicrosensor with light modulation for reduced external light interference. Easy adjustment and optical axis monitoring with a light indicator. Wide operating voltage range: to 4 VDC Supports connection with Programmable Controllers (PLCs). Easy-to-wire connectors assure easy maintenance. Be sure to read Safety Precautions on page 10. Ordering Information Sensors Infrared light Appearance Sensing method Sensing distance Output type Output configuration Model Retroreflective type 00 mm NPN output EE-SPZ01-A EE-SPZ401-A Accessories (Order Separately) Type Cable length Model Remarks Connector EE-100 Connector with Cable 1 m EE-100 NPN/PNP Conversion Connector 0.46 m (total length) EE-001 Connector Hold-down Clip EE-100A For EE-100 only. Reflector E9-R1 * Refer to Accessories for details. * Refer to the E9-L/F9-L/E9-S/E9-R Datasheet for information on Reflectors. 10

EE-SPZ-A Ratings and Specifications Item Models EE-SPZ01-A, EE-SPZ401-A Sensing distance *1 Light source Indicator * Supply voltage Current consumption Control output Response frequency * Ambient illumination Ambient temperature range Ambient humidity range Vibration resistance Shock resistance Degree of protection Connecting method Weight (packaged) Material Case Lens 00 mm (using E9-R1 reflector) GaAs infrared LED (pulse lighting) with a peak wavelength of 940 nm Light indicator (red) to 4 VDC ±10%, ripple (p-p): % max. Average: 1 ma max., Peak: 0 ma max. NPN voltage output Load power supply voltage: to 4 VDC Load current: 80 ma max. current: 0. ma max. 80 ma load current with a residual voltage of 1.0 V max. 10 ma load current with a residual voltage of 0.4 V max. 100 Hz min.,000 lx max. with incandescent light or sunlight on the surface of the receiver Operating: 10 to + C Storage: to +6 C Operating: % to 8% Storage: % to 9% Destruction: 10 to Hz, 1.-mm double amplitude for h each in X, Y, and Z directions Destruction: 00 m/s for times each in X, Y, and Z directions IEC IP0 Special connector (soldering not possible) Approx. g Polycarbonate *1. Operation may not be possible near the sensor. *. The indicator is a GaP red LED (peak wavelength: 700 nm). *. The response frequency was measured by detecting the following rotating disk. 00 mm dia. 60 mm 60 mm 40 mm Reflector Disk Engineering Data (Typical) Receiver Output Excess Gain vs. Sensing Distance Characteristics EE-SPZ01-A + E9-R1 Reflector EE-SPZ401-A Receiver output (mv) 0 18 16 14 1 Ta = C Vcc = V Reflector E9-R1 10 8 6 4 White paper (reflection factor: 90%) Operating level 0 0 100 10 00 0 00 0 400 Distance d (mm) 104

I/O Circuits EE-SPZ-A NPN Output Model Output configuration Timing charts Output circuit EE-SPZ401-A EE-SPZ01-A Incident Interrupted Light indicator ON (red) Output ON transistor Load 1 Operates (relay) Releases H Load L Incident Interrupted Light indicator ON (red) Output ON transistor Load 1 Operates (relay) Releases H Load L Light indicator (red) Main circuit 1. to ma OUT Ic Load 1 Load Voltage output (when the sensor is connected to a transistor circuit) to 4 VDC Safety Precautions Refer to Warranty and Limitations of Liability. WARNING This product is not designed or rated for ensuring safety of persons either directly or indirectly. Do not use it for such purposes. Make sure that this product is used within the rated ambient environment conditions. Wiring Precautions for Correct Use Connection is made using a connector. Do not solder to the pins (leads). When extending the cable, use an extension cable with conductors having a total cross-section area of 0. mm. The total cable length must be m maximum. To use a cable length longer than m, attach a capacitor with a capacitance of approximately 10 μf to the wires as shown below. The distance between the terminal and the capacitor must be within m. (Use a capacitor with a dielectric strength that is at least twice the Sensor's power supply voltage.) OUT to 4 VDC + A capacitor of 10 μf min. m max. Extension cable Make sure the total length of the power cable connected to the product is less than 10 m even if a capacitor is inserted. 0 V 10

EE-SPZ-A Dimensions (Unit: mm) Tolerance class IT16 applies to dimensions in this datasheet unless otherwise specified. Sensors EE-SPZ01-A EE-SPZ401-A 4 Two,. dia. holes Indicator window (red) 6 7..4 4.6 () () (1) 1.. -@0.6 14 0 6 Terminal Arrangement (1) Vcc () OUT OUTPUT () GND (0 V).4 dia. 6.7 4.4 7.4 *Refer to Accessories for details. * Refer to the E9-L/F9-L/E9-S/E9-R Datasheet for information on Reflectors. 106

Pipe-mounting Liquid Level Photomicrosensor with Built-in Amplifier EE-SPX61 Liquid Level Photomicrosensor with operation mode and sensitivity selectors for easy application. Operation mode selector allows modes to be switched easily. Sensitivity selector is suitable for any 6- to 1-mm-diameter transparent or semi-transparent pipe with a wall thickness of 1 mm. Uses a clean (with no powder parting agent) cable. Operating voltage range: 1 to 4 VDC Be sure to read Safety Precautions on page 109. Ordering Information Appearance Sensing method Output type Output configuration Cable length Model Through-beam type NPN output or (selectable) 1 m EE-SPX61 1M 107

EE-SPX61 Ratings and Specifications Item Models EE-SPX61 Applicable pipe Sensing object Light source Indicator Supply voltage Current consumption Control output Ambient illumination Ambient temperature range Ambient humidity range Vibration resistance Shock resistance Degree of protection Any 6- to 1-mm-diameter pipe with a wall thickness of 1 mm that is made of FEP or any other material as transparent as FEP. Liquids in pipes (High-viscosity liquids or liquids with floating materials may not be detected.) GaAs infrared LED with a peak wavelength of 940 nm Light indicator GaP (Red LED: Peak wavelength of 700 nm) 1 to 4 VDC ±10%, ripple (p-p): % max. Average: 0 ma max., Peak: 80 ma max. NPN open collector: Load power supply voltage: to 4 VDC Load current: 100 ma max. current: 0. ma max. 100 ma load current with a residual voltage of 0.8 V max. 40 ma load current with a residual voltage of 0.4 V max.,000 lx max. with incandescent light or sunlight on the surface of the receiver Operating: 10 to + C Storage: to +6 C (with no icing or condensation) Operating: % to 8% Storage: % to 9% (with no condensation) Destruction: 10 to 00 Hz, 1.0-mm single amplitude or 10 m/s in X, Y, and Z directions times and for 11 min each Destruction: 00 m/s for times each in X, Y, and Z directions IEC 609 IP0 Connecting method Pre-wired (Standard length: 1 m) Weight (packed state) Material Accessories Case Cover Approx. g Polycarbonate Support belt (), slip protection tube (), Instruction Manual I/O Circuit Diagrams NPN Output Model Output configuration Timing charts Operation mode selector Output circuit Incident (with no liquid) Interrupted (with liquid) EE-SPX61 Light indicator (red) Output transistor Load (relay) ON ON Operates Releases Incident (with no liquid) Interrupted (with liquid) Light indicator ON (red) Output ON transistor Load Operates (relay) Releases D ON (DARK ON) L ON (LIGHT ON) Light indicator (red) Main circuit (Brown) OUT (Black) (Blue) Load 1 to 4 VDC 108

Operation The EE-SPX61 detects the level of liquid by detecting the difference in refractive index between the air and liquid. Emitter Emitter Without liquid With liquid Pipe Pipe Receiver Receiver 1. If there is no liquid in the pipe, the emitted beam will reach the receiver after it is refracted by the pipe. (Light incident.). If there is liquid in the pipe, the emitted beam will pass through the liquid and not reach the receiver. (Light interrupted.) EE-SPX61 Sensitivity selector (available only with EE-SPX61) If the diameter of the pipe is close to 6 mm, some of the emitted beam may reach the receiver because the angle of refraction is small, thus making the stable operation of the EE-SPX61 difficult. In such cases, set the sensitivity selector to Low and check that EE-SPX61 operation is stable. If there are floating materials on the surface on the liquid, some of the emitted beam may reach the receiver after it is reflected by the floating materials, thus making the stable operation of the EE-SPX61 difficult. In such cases, set the sensitivity selector to Low to stabilize operation. For normal use, set the sensitivity selector to High to account for reduced sensitivity caused by deterioration of the emitter due to age and stains on the pipe. Safety Precautions Refer to Warranty and Limitations of Liability. This product is not designed or rated for ensuring safety of persons either directly or indirectly. Do not use it for such purposes. Precautions for Correct Use Make sure that this product is used within the rated ambient environment conditions. Nomenclature EE-SPX61 Mounting Operation selector WARNING Sensitivity selector Light indicator (red) Cable The EE-SPX61 may not operate correctly if it is attached to an unsuitable pipe (e.g., opaque pipe). Always use the supporting belts and slip protection tubes that are provided with the EE-SPX61 when attaching the EE-SPX61 to a pipe, as shown in the following illustration, and make sure that the pipe is in the center of the sensor slot and not separated from the pedestal. When tightening the supporting belts, make sure that the pipe will not be deformed. having a total cross-section area of 0.1 mm. The total cable length must be m maximum. Adjustment The EE-SPX61 requires 10 ms to be in stable operation after power is supplied. If separate power supplies are used for the EE-SPX61 and load, be sure to supply power to the EE-SPX61 before supplying power to the load. Make sure that smoke, air bubbles, or water droplets are not able to form either inside or outside the pipe. Otherwise, a malfunction may occur. Do not impose any force exceeding N on the operation mode selector or sensitivity selector. Others Operating Environment Do not use the EE-SPX61 outdoors. Do not use the EE-SPX61 in places where water, oil, or chemical may be sprayed onto the EE-SPX61. The exterior coverings of the EE-SPX61 are made of polycarbonate. Keep the coverings away from any alkaline, aromatic hydrocarbon, or aliphatic chloride hydrocarbon solvents, all of which will damage the coverings. Do not use the EE-SPX61 in places where the EE-SPX61 is subject to direct sunlight, corrosive gas or salt air. Slip protection tubes Supporting belts When attaching the EE-SPX61 to a pipe with a supporting belt, make sure that the pipe will not be deformed. Wiring Pipe Sensor Pedestal Do not impose any excessive force on the cable. Do not pull the cable with any tractive force exceeding 0 N. When extending the cable, use an extension cable with conductors 109

EE-SPX61 Dimensions (Unit: mm) Tolerance class IT16 applies to dimensions in this datasheet unless otherwise specified. EE-SPX61 Optical axis 16 14.4 8. Pedestal 6 1 Sensing window (1.8 0.8) Optical axis 17. 1 1.6 1.4 9. 1.8 6.6 dia. Sensitivity selector.1 8.1 Indicator window. 4.9 4. Operation selector Cable Vinyl-insulated round cable of. dia., cores, (0.1 mm with 1.0-dia. insulator); Standard length: 1 m 110

Wafer-carrier Mounting Photomicrosensors EE-SPY801/80 Photomicrosensors for detecting wafer-carrier mounting. The mounting position is set with a pedestal. The contact surface with the wafer carrier uses a special chemical-resistant fluororesin. The unique optical system enables stable detection of almost all wafer-carriers. Light modulation effectively reduces external light interference. Utilizes talc-free clean cables. Be sure to read Safety Precautions on page 11. Ordering Information Sensors Infrared light Appearance Sensing method Sensing distance Output configuration Cable length Model EE-SPY801 M Reflective type 0 to mm Turns ON when wafer carrier is present. m EE-SPY80 M Accessories (Order Separately) Item Model EE9-C01 Pedestal EE9-C0 Note: There are no sensor functions provided. 111

EE-SPY801/80 Ratings and Specifications Item Models EE- SPY801/80 Sensing distance (Standard sensing object) Sensing object Operation indicator Light source Supply voltage Current consumption Control output Response time Ambient illumination Ambient temperature range Ambient humidity range Vibration resistance Shock resistance Degree of protection 0 to mm (White paper: 1 1 mm, reflection factor: 90%) 0 to mm (Black paper: 1 1 mm, reflection factor: 10%) Transparent or opaque wafer carriers Lit orange when object is detected. GaAs infrared LED with a peak wavelength of 940 nm 1 to 4 VDC ±10%, ripple (p-p): % max. 0 ma max. NPN open collector: Load power supply voltage: to 4 VDC Load current: 100 ma max. current: 0. ma max. 100 ma load current with a residual voltage of 0.8 V max. 40 ma load current with a residual voltage of 0.4 V max. ms max.,000 lx max. with incandescent light or sunlight on the surface of the receiver Operating: 10 to + C Storage: to +6 C (with no icing) Operating: % to 8% Storage: % to 9% (with no condensation) Destruction: 1 to 00 Hz, 1.0-mm single amplitude or 10 m/s each in X, Y, and Z directions times and for 11 min. each Destruction: 00 m/s for times each in X, Y, and Z directions IEC IP0 Connecting method Pre-wired (Standard length: m) Weight (packaged) Material Accessories Case Base plate Sensor: Approx. 4 g; Accessory (Pedestal): Approx. 9 g Ethylene tetrafluoro ethylene (ETFE) Polybutylene phthalate (PBT) Instruction Manual I/O Circuit Diagrams Model Output configuration Timing charts Output circuit EE-SPY801 EE-SPY80 Turns ON when wafer carrier is present. With wafer carrier Without wafer carrier ON ON Operates Releases Operation indicator (orange) Output transistor Load (etc., relay) Operation indicator (orange) Main circuit + (Brown) OUT (Black) (Blue) Load 1 to 4 VDC 11

Standard Usage This sensor is designed to detect wafer-carrier mountings. The bottom of the wafer carrier has a ribbed construction for the leg section, as shown in the following diagram. The EE-SPY801/80 detects the wafer-carrier mounting using a reflective optical sensor that detects the leg section of the wafer-carrier. EE-SPY801/80 Install a Sensor (or Pedestal) at each of the four corners indicated by a circle in the following diagram. A D Wafer carrier side view (details omitted) Wafer carrier side view (details omitted) (Top view) (Side view) Sensor Sensor B C Wafer carrier leg section A and C B and D EE-SPY801 or EE9-C01 EE-SPY80 or EE9-C0 Safety Precautions Refer to Warranty and Limitations of Liability. WARNING This product is not designed or rated for ensuring safety of persons either directly or indirectly. Do not use it for such purposes. Precautions for Correct Use Make sure that this product is used within the rated ambient environment conditions. Wiring When extending the cable, use an extension cable with conductors having a total cross-section area of 0.1 mm (AWG6 equivalent). The total cable length must be m maximum. To use a cable length longer than m, attach a capacitor with a capacitance of approximately 10 μf to the wires as shown below. The distance between the terminal and the capacitor must be within m. Mounting Mount the Photomicrosensors securely on a flat surface, and tighten the mounting screws using a tightening force of 0.0 N m max. (Using a spring washer is recommended to prevent the screws from becoming loose.) Adjustment The EE-SPY801/80 requires 10 ms to be in stable operation after power is supplied. If separate power supplies are used for the EE-SPY801/80 and load, be sure to supply power to the EE-SPY801/80 before supplying power to the load. Operating Environment Do not use the EE-SPY801/80 in locations subject to salty air or corrosive gases, such as hydrogen chloride gas. 11

EE-SPY801/80 Dimensions (Unit: mm) Tolerance class IT16 applies to dimensions in this datasheet unless otherwise specified. Sensors EE-SPY801 Indicator window (orange) EE-SPY80 Indicator window (orange) +1. 0. +1. 0. 6 Sensing window Vinyl-insulated round cable of. dia., cores, (0.1 mm with 1.0-dia. insulator); Standard length: m 0 +1. 0 8 7.4 8 11. 1 1 1 1. 11 0 +1. 0 8 7.4 8 6 Sensing window Vinyl-insulated round cable of. dia., cores, (0.1 mm with 1.0-dia. insulator); Standard length: m Two, M4 (depth: 6) Two, M4 (depth: 6) Accessories (Order Separately) Pedestal EE9-C01 +1. 0. Pedestal EE9-C0 +1. 0. 0 +1. 0 11 11 0 +1. 0 6 1 1 6 1 1 Two, M4 (depth: 6) Two, M4 (depth: 6) 114

Pushbutton-type Photomicrosensor EE-SA701/801 Using a pushbutton enables accurately detecting difficult-to-detect objects. Conforms to standards for semiconductor FOUP cassettes to enable accurately detecting FOUP cassettes without being affected by the material, color, or reflectance of the bottoms of the cassettes. Thin design enables mounting in a wider range of applications, e.g., on transfer arms. Increased visibility with 4-direction indicator. Optical detection of actuator operation provides a long life (mechanical life: million operations min.). Models available with PNP or NPN output. Models are available with very flexible robot cable. Be sure to read Safety Precautions on page 119. Ordering Information List of Models Appearance Sensing distance Sensing method Operation mode Cable length NPN output Model PNP output (See note.) 0 to. mm (pressed position) (See note 1.) Pushbutton 1 m EE-SA801A 1M EE-SA801R 1M ON with no load EE-SA801A-R 1M EE-SA801R-R 1M 1 m (robot cable) with no load EE-SA701-R 1M EE-SA701P-R 1M Note: 1. Distance from the top surface of the housing to the top of the actuator.. Output reverses between. and 4. mm. 11