panasonic.net/id/pidsx/global CCD The sensor can be used for various applications with its binary data output with four different sensing modes.

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1123 PHOTO PHOTO PARTICUR Type Edge Sensor SERIES Related Information General terms and conditions... F-3 About laser beam... P.1593~ guide... P.1021~ General precautions... P.1595 Conforming to FDA regulations (-601 only) MEASURE panasonic.net/id/pidsx/global Easy measurement of outer diameter This product is classified as a Class 1 Product in IEC / JIS standards and a Class II Product in FDA regulations. Do not look at the laser beam though optical system such as a lens. BASIC PERFORMANCE High accuracy measurement A red semiconductor laser is used as the emitting device and CCD is used as the receiving device. An ideally parallel optical beam is emitted enabling high accuracy measurement. Red semiconductor laser CCD Safety countermeasures not required Safety counter measures, such as protective gear, etc., are not required since -600 uses a Class 1 laser as per IEC standards, and -601 uses a Class II laser as per FDA regulations. FUNCTIONS Various applications The sensor can be used for various applications with its binary data output with four different sensing modes. 1Width measurement / Dark mode The first dark region from the lower side of the measurement region is measured. 2Width measurement / Light mode The first light region from the lower side of the measurement region is measured. 3Edge measurement / Dark mode The first dark edge from the lower side of the measurement region is sensed and the width from the dark edge to the upper side of the measurement region is measured. 4Edge measurement / Light mode The first light edge from the lower side of the measurement region is sensed and the width from the light edge to the upper side of the measurement region is measured. Stable sensing Shading correction function which compensates for receiver sensitivity variation and generates a uniform sensitivity distribution has been incorporated. Stable sensing over extended time periods is possible. VARIETIES FDA regulation conforming FDA regulation (Class II) conforming model -601 is available.

Type Edge Sensor SERIES 1124 APPLICATIONS Sensing inclination or notch of wafer Judging height of small objects Measuring pipe s outer diameter Wafer Notch ORDER GUIDE PARTICUR Sensor heads Appearance Distance between emitter and receiver Sensing width Min. sensing object Model No. Applicable standards 40 mm 1.575 in (fixed) 15 mm 0.591 in φ0.5 mm φ0.020 in -600-601 IEC / JIS FDA / IEC / JIS Appearance Model No. Output Make sure to use the sensor head and the controller as a set. -C60 NPN open-collector transistor Designation Model No. Description DIN rail adapter MS-DIN-IDC Adapter for mounting the controller on a 35 mm 1.378 in width DIN rail DIN rail adapter MS-DIN-IDC 2-M4 (length 12 mm 0.472 in) screws with washers 2 pcs. attached with DIN rail adapter. DIN rail adapter MS-DIN-IDC 35 mm 1.378 in width DIN rail Stopper (At the back side)

1125 Type Edge Sensor SERIES SPECIFICATIONS PARTICUR Sensor heads Model No. Item -600-601 CE marking directive compliance EMC Directive, RoHS Directive Applicable controller -C60 Distance between emitter and receiver 40 mm 1.575 in (fixed) Sensing width 15 mm 0.591 in (beam width: 20 mm 0.787 in) Min. sensing object ø0.5 mm ø0.020 in Resolution 11 µm 0.433 mil Scan time 0.6 ms approx. Red semiconductor laser Class 1 Red semiconductor laser Class II (IEC / JIS standards) (FDA regulations) Emitting element Power indicator emission indicator Ambient temperature Ambient humidity Enclosure earthing Material Cable Weight Accessories Note: Where measurement conditions have not been specified precisely, the conditions used were an ambient temperature of +20 C +68 F. I/O CIRCUIT AND WIRING DIAGRAMS (LER) I/O circuit diagram Max. output: 0.2 mw, Peak emission wavelength: 670 nm 0.026 mil Max. output: 0.2 mw, Peak emission wavelength: 670 nm 0.026 mil (IEC / JIS standards: Class 1) Red LED (lights up when the power is ON) Green LED (Lights up during laser emission) 0 to +40 C +32 to +104 F (No dew condensation allowed) Storage: 10 to +60 C +14 to +140 F 35 to 85 % RH, Storage: 35 to 85 % RH Capacitor earth Emitter enclosure: Die-cast zinc Receiver enclosure: Aluminum, Base: Aluminum Top cover: PPO, Front protection cover: Glass 6-core (0.22 mm 2 4, 0.18 mm 2 2) cabtyre cable, 1 m 3.281 ft long (with connector on one end) Net weight: 420 g approx. M4 (length 12 mm 0.472 in) hexagon-socket-head bolt: 2 pcs. M4 (length 12 mm 0.472 in) hexagon-socket-head bolt: 2 pcs. attenuator: 1 pc. Model No. Item CE marking directive compliance Applicable sensor heads Sensing modes Measuring accuracy Supply voltage Current consumption Inputs (REQ, SHD) Outputs (ACK, D0 to D10) Output operation Response time Power REQ ACK Measurement display Display resolution Indicators Ambient temperature Ambient humidity Material Weight Accessory I/O Terminal Arrangement -C60 EMC Directive, RoHS Directive -600, -601 Width measurement, edge measurement Width measurement: ±44 µm ±1.732 mil Edge measurement: ±22 µm ±0.866 mil 24 V DC ±10 % Ripple P-P 10 % or less 250 ma or less (including sensor head) Signal conditions: Low...0 to 1 V High...5 to 30 V, or open Applied voltage: 30 V DC or less NPN open-collector transistor Maximum sink current: 20 ma Applied voltage: 30 V DC or less (between output and 0 V) Residual voltage: 1 V or less (at 20 ma sink current) ACK: ON during data output, D0 to D10: pixel binary output 1.2 ms or less Red LED (lights up when the power is ON) Red LED (lights up when the REQ input is Low) Red LED (lights up when the ACK output is ON) 4 digit LED (letter height 8 mm 0.315 in) 10 µm 0.394 mil 0 to +40 C +32 to +104 F (No dew condensation allowed) Storage: 10 to +60 C +14 to +140 F 35 to 85 % RH, Storage: 35 to 85 % RH Enclosure: ABS, Front panel: ABS Display panel: Polycarbonate, Terminal cover: Polycarbonate Net weight: 230 g approx. Connector: 1 pc. Note: Where measurement conditions have not been specified precisely, the conditions used were an ambient temperature of +20 C +68 F. Main circuit 5 V D1 Tr Internal circuit D2 +V Output(ACK, D0 to D10)( Note) Load 20 ma max. Input *1 (REQ, SHD) 0 V Users circuit Symbols D1: Reverse supply polarity protection diode D2: Reverse current protection diode Tr : NPN output transistor + - Note: Insulate all unused wires individually to avoid miscontact. *1 Non-voltage contact or NPN open-collector transistor or Input (REQ, SHD) Low : 0 to 1 V High: 5 to 30 V, or open 24 V DC ±10 % Pin No. Attached connector Solder side Symbol I/O Description Pin No. Symbol I/O Description 1 REQ Input Data output request 14 D4 Output Data (2 4 ) 2 ACK Output Data being output 15 D5 Output Data (2 5 ) 3 SHD Input Shading correction 16 D6 Output Data (2 6 ) 4 ー ー Not connected 17 D7 Output Data (2 7 ) 5 ー ー Not connected 18 D8 Output Data (2 8 ) 6 ー ー Not connected 19 D9 Output Data (2 9 ) 7 ー ー Not connected 20 D10 Output Data (2 10 ) 8 G ー 0 V 21 ー ー Not connected 9 G ー 0 V 22 ー ー Not connected 10 D0 Output Data (2 0 ) 23 ー ー Not connected 11 D1 Output Data (2 1 ) 24 G ー 0 V 12 D2 Output Data (2 2 ) 25 G ー 0 V 13 D3 Output Data (2 3 )

Type Edge Sensor SERIES 1126 PRECAUTIONS FOR PROPER Refer to p.1595 for general precautions and p.1593~ for information about laser beam. This catalog is a guide to select a suitable product. Be sure to read instruction manual attached to the product prior to its use. Never use this product as a sensing device for personnel protection. In case of using sensing devices for personnel protection, use products which meet laws and standards, such as OSHA, ANSI or IEC etc., for personnel protection applicable in each region or country. Safety standards for laser beam products A laser beam can harm human being s eyes, skin, etc., because of its high energy density. IEC has classified laser products according to the degree of hazard and the stipulated safety requirements. The series is classified as Class 1 laser. Classification by IEC 60825-1 Classification Class 1 This product is classified as a Class 1 Product in IEC / JIS standards and a Class II Product in FDA regulations. Do not look at the laser beam though optical system such as a lens. The following label is attached to the product. Handle the product according to the instruction given on the warning label. The English warning label based on FDA regulations is pasted on the FDA regulations conforming type. This product has been designed to meet the specifications when a sensor is used along with the optional exclusive controller. If a controller other than the exclusive controller is used, not only the specifications may not be met, but it may also be a cause for malfunction or break down. Hence, please ensure to use this product along with the optional exclusive controller. Before using this product, please allow a warming up time of 3 min. approx. after the power supply is switched on. Never disassemble the sensor head. Description s that are safe under reasonably foreseeable conditions of operation, including the use of optical instruments for intrabeam viewing. Note: -601 conforms to FDA Class II. Note: Refer to p.1594 for information about for the classification in FDA regulations. Conditions in use for CE conformity The series is CE compliant and complies with EMC directives. EN 61000-6-2 is the applicable standard that covers immunities relating to use of this product, but in order to comply with this standard, the following conditions must be satisfied. Conditions This controller should be connected less than 10 m 32.808 ft from the power supply. The signal line to connect with this controller should be less than 30 m 98.425 ft. Mounting Mount the sensor head using the attached 2 pcs. M4 (length 12 mm 0.472 in) hexagon-socket-head bolts, with a tightening torque of 1.2 N m or less. M4 (length 12 mm 0.472 in) hexagon-socket-head bolts (Accessory) Mounting hole dimensions 2-M4 tapped holes 20±0.2 mm 0.787±0.008 in Mount the controller using 2 pcs. M4 pan head screws, with a tightening torque of 1.2 N m or less. Please arrange separately. Plain washer (small dia. round type) Spring washer M4 pan head screw Mounting hole dimensions 2-M4 tapped holes 161±0.4 mm 6.339±0.016 in PARTICUR Safe use of laser products For the purpose of preventing users from suffering injuries by laser products, IEC 60825-1 (Safety of laser products). Please check the standards before use. (Refer to p.1593~ for information about laser beam.)

1127 Type Edge Sensor SERIES PRECAUTIONS FOR PROPER Refer to p.1595 for general precautions and p.1593~ for information about laser beam. PARTICUR Wiring Make sure that the power supply is off while wiring. Verify that the supply voltage variation is within the rating. Make sure to use an isolation transformer for the power supply. It an auto-transformer (single winding transformer) is used, this product or the power supply may get damaged. In this sensor head, capacitor earth is used to enhance the noise characteristics. In case there is a high frequency noise generating equipment, such as, an ultrasonic welding machine, etc., near the sensor head and if the mounting base is electrically conducting (metallic, etc.), then insulate the sensor head from the mounting base. In case noise generating equipment (switching regulator, inverter motor, etc.) is used in the vicinity of the sensor head or the controller, connect the frame ground (F.G.) terminal of the equipment to an actual ground. In case a surge is generated in the used power supply, connect a surge absorber to the supply and absorb the surge. Do not run the wires together with high-voltage lines or power lines or put them in the same raceway. This can cause malfunction due to induction. In order to reduce noise, make the wiring as short as possible. s This product is not a measuring instrument. Hence, the company does not offer any calibration services. Do not allow any water, oil, fingerprints, etc., which may refract light, or dust, dirt, etc., which may block light, to stick to the emitting / receiving surfaces of the sensor head. In case they are present, wipe them with a clean, soft cloth or lens paper. Avoid dust, dirt, and steam. Take care that the sensor head and the controller does not come in direct contact with water, oil, grease, or organic solvents, such as, thinner, etc. Take care that the sensor head and the controller are not directly exposed to fluorescent light from a rapid-starter lamp or a high frequency lighting device, as it may affect the sensing performance.

Type Edge Sensor SERIES 1128 DIMENSIONS (Unit: mm in) The CAD data can be downloaded from our website. -600-601 Sensor head 32 1.260 16 0.630 ( axis) 15 0.591 50 (Sensing width) 1.969 (30)(1.181) ( axis) 0.5 0.020 40 1.575 2-φ4.5 φ0.177 mounting holes 30 1.181 29 1.142 20 0.787 40 1.575 14 0.551 30.2 1.189 22.6 0.890 75 2.953 Reference mounting plane 145.5 5.728 Power indicator (Red) (Note) 2-φ8 φ0.315 spot facing, 6 0.236 deep (mounting holes) 5 0.197 46 27.7 1.811 1.091 Connector attached φ5.7 φ0.224 cable, 1 m 3.281 ft long Connector PARTICUR Two M4 (length 12 mm 0.472 in) hexagon-socket-head bolts are attached. Note: In -601, this is the laser emission indicator (green). -C60 MS-DIN-IDC DIN rail adapter (Optional) 2-φ4.5 φ0.177 mounting holes 74 2.913 35 1.378 ACK indicator (Red) REQ indicator (Red) Power indicator (Red) 35 1.378 M4 screw mounting bracket mm POWER REQ ACK 68.5 2.697 161 6.339 170 6.693 172 161 6.772 6.339 174.5 6.870 35 1.378 80 3.150 (6.5) (0.256) 120 + 24VDC - FG N7B26 (2.5) (0.098) 12 0.472 12 0.472 5 0.197 Suitable for 35 mm 1.378 in width DIN rail Two M4 (length 12 mm 0.472 in) screws with washers are attached.