Datasheet. ELIIXA+ 16k/8k Cmos Multi-Line Monochrome Camera. Features. Description. Application. Contact us online at: e2v.

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Datasheet ELIIXA+ 16k/8k Cmos Multi-Line Monochrome Camera Features Cmos Sensor 4x 16384 Pixels, 5 x 5µm Multi-Line structure (1, 2 or 4 lines to adapt the sensitivity) Interface : Full CameraLink (4, 8 or 10 Channels), 85MHz each CoaXPress (4x Links) Line Rate : - Up to 50000 l/s In CameraLink - Up to 100000 l/s in CoaXPress Data Rate : - Up to 850 MB/s In CameraLink - Up to 1,6GB/s in CoaXPress Bit Depth : 8, 10 or 12bits Flat Field Correction Look Up Table Low Power Consumption : <16W Compliant with Standard Lenses of the Market Description e2v s next generation of line scan cameras are setting new, high standards for line rate and image quality. Thanks to e2v s recently developed multi line CMOS technology, the camera provides an unmatched 100 000 lines/s in a 16k pixel format and combines high response with an extremely low noise level; this delivers high signal to noise ratio even when short integration times are required or when illumination is limited. The 5μm pixel size is arranged in four active lines, ensuring optimal spatial resolution in both scanning and sensor directions with off-the-shelf lenses. An outstanding data rate in excess of 1.6 Gpixels per second, delivered via a new CoaXPress interface, allows for extremely high throughput and opens up an array of new possibilities for the next generation of inspection systems for demanding applications such as flat panel display, PCB and solar cell inspection. Application Flat Panel Display Inspection PCB Inspection Solar Cell Inspection Glass Inspection Print Inspection Contact us online at: e2v.com/imaging

Standard Conformity The ELIIXA+ cameras have been tested using the following equipment: Datasheet ELIIXA+ 16k/8k A shielded power supply cable A Camera Link data transfer cable ref. 14B26-SZLB-500-OLC (3M) A linear AC-DC power supply e2v recommends using the same configuration to ensure the compliance with the following standards. CE Conformity The ELIIXA+ cameras comply with the requirements of the EMC (European) directive 89/336/CEE (EN 50081-2, EN 61000-6-2). FCC Conformity The ELIIXA+ cameras further comply with Part 15 of the FCC rules, which states that: Operation is subject to the following two conditions: This device may not cause harmful interference, and This device must accept any interference received, including interference that may cause undesired operation This equipment has been tested and found to comply with the limits for Class A digital device, pursuant to part 15 of the FCC rules. These limits are designed to provide reasonable protection against harmful interference when the equipment is operated in a commercial environment. This equipment generates, uses and can radiate radio frequency energy and, if not installed and used in accordance with the instruction manual, may cause harmful interference to radio communications. Operation of this equipment in a residential area is likely to cause harmful interference in which case the user will be required to correct the interference at his own expense. Warning: Changes or modifications to this unit not expressly approved by the party responsible for compliance could void the user's authority to operate this equipment. 2

Key Specifications Datasheet ELIIXA+ 16k/8k Characteristics Value Unit Sensor Characteristics Resolution 4 x 16384 Pixels Pixel Size (square) 5 µm Max Line Rate CoaXPress 4x Links (8 or 10bits) CoaXPress 4x Links (12 bits) CameraLink 10xTaps Deca mode (8 bits) CameraLink 8xTaps Full mode (8 bits) CameraLink 4xTaps Medium mode (8 or 12 bits) 100 100 50 40 20 Radiometric Performances (at Maximum Pixel rate and Minimum Camera Gain) Bit Depth 8 10 (CoaXPress only) 12 Responsivity 450 LSB 12bits/(nJ/cm2) Response non linearity ( between 5 95% saturation) <1 % Maximum PRNU 3 % Dynamic Range 73 db Functionalities (Programmable via Control Interface) Sensor Modes Multi-lines 1, 2 and 4 (16k pixels) Binning 1 or 2 lines (8k pixels) Gain (Analog : In the ADC converter) Up to 12 db Offset -4096 to +4095 LSB Trigger Mode Mechanical and Electrical Interface khz khz khz khz khz Bits Bits Bits Timed (Free run) and triggered (Ext Trig, Ext ITC) modes Power Supply Single 12 to 24 V DC Power Consumption CameraLink CoaXPress Lens Mount M95 - Sensor Alignment ±100 µm Sensor Flatness ±35 µm General Features Operating Temperature 0 to 55 Front Face C Storage Temperature -40 to 70 C Regulatory CE, FCC and RoHs Compliant - <13 <16 - W W 3

Camera Description Image Sensor The Eliixa+ 16k sensor is composed of two pairs of sensitive lines. Each pair of lines use the same Analog to Digital Column converter (ADC Column). An appropriate (embedded) Time delay in the exposure between each line this allows to combine two successive exposures in order to double the sensitivity of a single line. This Time Delay Exposure is used only in the 4S multi-line modes (4 Lines) and also in the two binning modes, as described below. The 16384 Pixels of the whole sensor are divided in 4 blocks of 4096 pixels. Multi-Lines modes ADC Column Intermediate Blind Pixel Pixel Line A Pixel Line B Pixel Line C Pixel Line D Intermediate Blind Pixel ADC Column Multi-Lines Modes (16k Pixels Output) Mode 1S = B Mode 2S = B+C (FPGA) a b c d a b c d B B C Mode 4S = (A+B)+(C+D) a b c d A B C D Binning Modes (8k Pixels Output) : Not available on EV71YC4MCL1606-BA0 versions Mode 1SB = A a b c d A Mode 2SB = (A+B) a b c d A B 4

Camera Interface Mechanical Drawings Camera Link CoaxPress Z X 5 Y

Sensor Positioning Sensor alignment X 9 ±0,1 mm Y 50 ±0,1 mm Z -9,4 ±0,15 mm Planarity ±35 µm Rotation (X,Y plan) ±0,2 Tilt (versus lens mounting plane) ±35 µm Input/Output Connectors and LED (CameraLink) USB Connector For Firmware upgrade Power Connector : 12-24V DC Multi-Colored LED for Status and diagnostic CameraLink Connector CL1 CameraLink Connector CL2 6

Status LED Behaviour After less than 2 seconds of power establishment, the LED first lights up in ORANGE. Then after a Maximum of 30 seconds, the LED must turn in a following colour : Colour and state Green and continuous Green and blinking slowly Red and continuous Meaning OK Waiting for Ext Trig (Trig1 and/or Trig2) Camera out of order : Internal firmware error Power Connector Camera connector type: Hirose HR10A-7R-6PB (male) Cable connector type: Hirose HR10A-7P-6S (female) Signal Pin Signal Pin PWR 1 GND 4 PWR 2 GND 5 PWR 3 GND 6 Camera side description Power supply from 12 to 24v Power 13W max with an typical inrush current peak of 1,8A during power up Typical values Current consumption 12V 24V ELIIXA+ CL (normal) 1,06A 0,54A ELIIXA+ CL (Standby) 0,47A 0,25A Power up Time : Around 43s (Green Light) 2 Inrush current (A) 1.5 1 0.5 0 0.041 0.042 0.043 0.044 time (s) 7

Output Configuration (CameraLink) Datasheet ELIIXA+ 16k/8k Connector CL1 + CL2 Pixels per Channel Medium CameraLink Mode 4 Channels 8bits 4 x 85MHz 4 x 4096 4 Channels 12bits 4 x 85MHz 4 x 4096 Full CameraLink Mode 8 Channels 8bits 8 x 85MHz 8 x 2048 Full + CameraLink Mode (not available for EV71YC4MCL1605-BA0 versions) 10 Channels 8bits 10 x 85MHz 10 x 1638 Medium Mode 4x4096 Pixels at 85MHz each Channel (4x2048 pixels in Binning Mode 1SB or 2SB) 4 Taps Separate, from Left to Right Ch 1 Ch 2 Ch 3 Ch 4 FULL Mode 8x2048 Pixels at 85MHz each Channel (8x1024 pixels in Binning Mode 1SB or 2SB) 8 Taps Separate, from Left to Right Ch 1 Ch 2 Ch 3 Ch 4 Ch 5 Ch 6 Ch 7 Ch 8 FULL+ Mode 10x1638 Pixels at 85MHz each Channel (10x819 pixels in Binning Mode 1SB or 2SB) 10 Taps Separate, from Left to Right : (*) Not available for EV71YC4MCL1605-BA0 versions Ch 1 Ch 2 Ch 3 Ch 4 Ch 5 Ch 6 Ch 7 Ch 8 Ch 9 Ch 10 8

Input/Output Connectors and LED (CoaXPress) USB Connector For Firmware upgrade Trigger Connector Multi-Colored LED for Status and diagnostic CoaXPress Connectors 9

Status LED Behaviour Datasheet ELIIXA+ 16k/8k The Power LED behavior detail is the following : Colour and State Off Solid orange Fast flash green Shown for a minimum of 1s even if the link detection is faster Slow flash alternate red / green Slow pulse green Slow pulse orange Solid green whenever data transferred (i.e. blinks synchronously with data) 500ms red pulse In case of multiple errors, there shall be at least 200ms green before the next error is indicated Fast flash red Meaning No power System booting Link detection in progress Device / Host incompatible Device / Host connected, but no data being transferred Device / Host connected, waiting for event (e.g. trigger, exposure pulse) Device / Host connected, data being transferred Error during data transfer (e.g. CRC error, single bit error detected) System error (e.g. internal error) Power Over CoaXPress The ELIIXA+ CXP is compliant with the Power Over CoaXPress : There is no Power connector as the power is delivered through the Coaxial Connectors 1 and 2. In the Standard, the Power Over CoaXPress allows to deliver 13W (under 24V) per Channel. The ELIIXA+ CXP requires 18W then two connectors are required for the power : The two first are used for this purpose. If you want to Power ON the Camera you have to connect the Coaxial connector output 1 of the camera to the coaxial connector 1 of the Frame Grabber. Note 1 : Only the connector 1 position is mandatory. They other 3 connectors can be inverted but the camera still needs the 2 first connectors to get it power and be able to start up. Note 2 : Removing the 2 first connectors will shut down the Camera : You can reset the Camera by quickly (less than 1s) connect/disconnect the Connector CXP1 but after a longer shut down, you ll have to reboot the PC with the Camera full connected to the frame grabber in order to synchronize the discovery of each power line. Note 3 : With some frame grabber you have access to a specific command (from the Frame Grabber interface) for shutting down/up the power of the CoaxPress : This solution, with the complete reboot, is the better solution to ensure a complete power On of the Camera. 10

Trigger Connector Camera connector type: Cable connector type: Hirose HR10A-7R-5SB or compliant Hirose HR10A-7P-5P (male) or compliant, Provided with the Camera 4 1 5 2 3 Receptacle viewed from camera back Signal Pi n LVDS IN1+ / TTL IN1 1 LVDS IN1-2 LVDS IN2+ / TTL IN2 3 LVDS IN2-4 GND 5 5 IN1/IN2 are connected respectively to Line0/Line1 and allow to get external line triggers or the forward/reverse Live indication. On the Connector side, the 120Ω termination is validated only if the input is switched in LVDS or RS422. The electrical schematic is detailed below : 11

Optical Interface M95 x 1 Integrated mount Standard M95 Extension ring M95x1, 4mm deep 5mm Camera front face 9.4mm Camera front face Active area = 81.92mm 100 mm 12

QIOPTICS (LINOS) Nominal Magnification Magnification Range M95 Focus tube Reference Lens Reference Part number Inspec.x. L 5.6/105 0,33 X 0,25 0,45 X 2408-012-000-41 0703-085-000-20 Inspec.x. L 5.6/105 0,5 X 0,4 0,65 X 2408-012-000-41 0703-084-000-20 Inspec.x. L 5.6/105 0,87 X 0,6 0,9 X 2408-012-000-43 0703-083-000-20 Inspec.x. L 5.6/105 1 X 0,85 1,2 X 2408-012-000-43 0703-082-000-20 Inspec.x. L 4/105 3 X 2,8 3,3 X 2408-012-000-46 0703-104-000-20 Inspec.x. L 4/105 3,5 X 3,3 3,7 X 2408-012-000-44 0703-095-000-21 Inspec.x. L 3.5/105 5 X 4,8 5,2 X 2408-012-000-45 0703-102-000-20 SCHNEIDER KREUZNACH Nominal Magnification Magnification Range Working Distance (at nom. Mag.) Reference Part number SR 5.6/120-0058 1 X 0,88 1,13 X 212 mm 1002647 SR 5.6/120-0059 0,75 X 0,63 0,88 X 252 mm 1002648 SR 5.6/120-0060 0,5 X 0,38 0,63 X 333 mm 1002650 SR 5.6/120-0061 0,33 X 0,26 0,38 X 453 mm 1004611 Accessories V mount 25mm macro-extension tube 20179 V mount to Leica adapter Necessary to 20054 Unifoc 76 combine the whole lens system 13048 Adapter M58x0.75 M95x1 1062891 MYUTRON Extension tube M95x1, 25mm To be combined to 1062892 Extension tube M95x1, 50mm reach the appropriate 1062893 Extension tube M95x1, 100mm magnification 1062894 Nominal Magnification Working Distance XLS03-E x0,3 477mm M95 Custom Mount available XLS53-E x0,5 324mm Aperture ( ) : 4.7 XLS75-E x0,75 246mm XLS010-E x1 197mm XLS014-E x1,4 170mm XLS203-E x2 146mm 13

EDMUND OPTICS Datasheet ELIIXA+ 16k/8k Nominal Magnification Working Distance (at nom. Mag.) Reference Part number TechSpec F4 1 X 151 mm NT68-222 TechSpec F4 1,33 X 158,5 mm NT68-223 TechSpec F4 2,0 X 129 mm NT68-224 TechSpec F4 3,0 X 110 mm NT68-225 Accessories Large Format Tip/Tilt Bolt Pattern Adapter, 2X NT69-235 Large Format Focusing Module Large Format Adapter Set NAVITAR Raptar Pro 4/86 1 X Extension Tubes on request NIKON NT69-240 NT69-241 1-17494 NAVITAR Rayfact F4 0,05 X 0,5 X 1820,4mm 230,3mm Rayfact ML90mm F4 Raptar Pro 4/86 Magnification : 1 X Extension Tubes on request 1-17494 Camera Models Camera Part Number EV71YC4MCL1605-BA1 EV71YC4MCP1605-BA0 Details 16k Pixels CameraLink (Binning + 10Taps mode) 16k Pixels CoaXPress 14