March 5-8, 2017 Hilton Phoenix / Mesa Hotel Mesa, Arizona Archive Session 7

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March 5-8, 2017 Hilton Phoenix / Mesa Hotel Mesa, Arizona Archive Session 7 2017 BiTS Workshop Image: tonda / istock

Copyright Notice The presentation(s)/poster(s) in this publication comprise the Proceedings of the 2017 BiTS Workshop. The content reflects the opinion of the authors and their respective companies. They are reproduced here as they were presented at the 2017 BiTS Workshop. This version of the presentation or poster may differ from the version that was distributed in hardcopy & softcopy form at the 2017 BiTS Workshop. The inclusion of the presentations/posters in this publication does not constitute an endorsement by BiTS Workshop or the workshop s sponsors. There is NO copyright protection claimed on the presentation/poster content by BiTS Workshop. However, each presentation/poster is the work of the authors and their respective companies: as such, it is strongly encouraged that any use reflect proper acknowledgement to the appropriate source. Any questions regarding the use of any materials presented should be directed to the author(s) or their companies. The BiTS logo and are trademarks of BiTS Workshop. All rights reserved.

Session 7 Morten Jensen Session Chair BiTS Workshop 2017 Schedule Solutions Day Wednesday March 8-8:00 am Teaming Up "Applying FEA Simulation for Test Interface Unit" Jason Koh - Test Tooling Solutions Group "BI RHINO Handling Solution" Yaniv Raz- Intel Corporation "Optical Device Testing at Wafer Level and Package Devices" Carl Kasinski Aehr "Fan-in WLCSP Test Requirements" Mike Frazier - Mike Frazier

Applying FEA Simulation for Test Interface Unit Jason Koh Shiann Chern Test Tooling Solutions Group Conference Ready mm/dd/2014 BiTS Workshop March 5-8, 2017

Contents 1. ATE & Test Interface Unit (TIU) Stack Up 2. TIU Challenges 3. TIU products that involved for FEA Simulation 4. Benefits and Challenges in FEA Simulation 5. FEA Simulation Process Flow 6. Test Socket Analysis & Example 7. Conclusions Applying FEA Simulation for Test Interface Unit 5

Automatic Test Equipment (ATE) To allow the tester connect to devices under test. Test Interface Unit (TIU) Tester Automatic Test Equipment Generated and measured the electrical signals needed to determine if the device is functioning properly. Handler Defined parameters of the device must be tested. Test Program Material handling moves the semiconductor devices to the tester. Applying FEA Simulation for Test Interface Unit 6

Thermal Interface Unit Stack Up (Manual Test) Hand Socket Lid Device Under Test Test Socket Spring Probe Docking Plate / Support Plate Test Board Stiffener Applying FEA Simulation for Test Interface Unit 7

Thermal Interface Unit Challenges Challenges Narrow Pitch (<0.20mm) High pin count (4000++) High bandwidth, short pin requirement (Pin test height <2.0mm and below) High insertion force (TIU need to overcome100kgf) Time to market, Reliability and Cost Impacts Spring probe diameter become more challenging. High warpage and high stress concentration on test socket. Thinner socket design potential to cause high deformation on socket body during preload stage. Hand socket lid, package, test socket, PCB and stiffener have structure stiffness concern. Product development cycle, factor of safety, material selection Applying FEA Simulation for Test Interface Unit 8

How to Approach New Challenges? Design something that worked in the past and made it bigger/smaller. Use spreadsheets or hand calculations Build and test prototypes Trial and error method Or Utilize Finite Element Analysis method to solve your engineering problems Applying FEA Simulation for Test Interface Unit 9

TIU Products that involved for FEA Simulation Applying FEA Simulation for Test Interface Unit 10

Benefits of FEA Simulation Solve a wide variety of engineering problems Can handle very complex geometry Useful for problem with complicated restrains and loading Analyze the impact of different material properties Applying FEA Simulation for Test Interface Unit 11

Challenge in FEA Simulation Simulation building requires experience and judgment in order to construct a good finite element model Simulation results may be difficult to interpret The simulation results provide "approximate" solutions The simulation has "inherent" errors Mistakes by users can be fatal Applying FEA Simulation for Test Interface Unit 12

Typical FEA Process Flow Chart Define Problem, objective and target of analysis study & Simplify 3D Model Build simulation model Pre-Processing Generate the mesh Review the mesh Yes No Solution Post Processing Run solver Interpret results Meet Requirements Yes End Optimization Study No i) Redesign and optimize the model ii) Material or change parameter study Applying FEA Simulation for Test Interface Unit 13

Example Test Socket Warpage Problem Statement: i) Pin counts increase, stress and displacement on the test socket stiffness becomes a major concern. ii) Stable electrical performance of spring probe, bottom plunger of spring probe is always compressed when test socket is mounted on test board. Displacement, Y Bottom plunger of spring probe is compressed Top Plate Bottom Plate Test Board Top Plate warpage by preload of spring probe on test board Applying FEA Simulation for Test Interface Unit 14

Inputs for Analysis Target i) Less than 0.15mm for Top Plate coplanarity ii) Material stress for factor of safety (FOS) at least or more than 2.0 Input i) 3piece design, consist of Guide Plate (GP), Top Plate (TP) and Bottom Plate (BP) ii) Spring Probe Preload 13gf iii) Total 4352 pins counts iv) Total preload acting on TP = 4352 * 0.013 kgf = 56.576kgf Type of Analysis Linear Static FEA Applying FEA Simulation for Test Interface Unit 15

CAD Modelling for FEA Guideline for 3D CAD Simplification i) Remove outside corner chamfer and fillet. ii) Remove small holes, slot and step cut outside the load path. iii) Remove decorative and indication features iv) Use of quarter of CAD model, if load and support are symmetry. CAD Model Simulation Model Applying FEA Simulation for Test Interface Unit 16

Build Simulation Model i) Assign Materials Linear static FEA material property required are, Elastic Modulus, (E) Poisson s Ratio, (v) Shear Modulus, (G) G = E / (2(1+v)) Yield Strength (or Ultimate Strength) Aluminium Vespel Applying FEA Simulation for Test Interface Unit 17

Build Simulation Model ii) Apply Boundary Conditions & Loads The choices of boundary conditions & external loadings have a direct impact on the overall accuracy of the model. Over-constrained model will cause stiff model due to apply incorrect boundary conditions. Elastic Stiffness Bolt Connector Symmetry Spring probe preload Applying FEA Simulation for Test Interface Unit 18

Build Finite Element Mesh Generate & Review the Mesh Modelling Accuracy of the solution is primarily dependent on the quality of the mesh. Check the mesh quality (Aspect Ratio, Distortion Element) Apply mesh control on critical area Mesh View Applying FEA Simulation for Test Interface Unit 19

FEA Solver Run Solver Factors when choose the proper solver DOF over 1,000k Multiple Cores, More RAM, More Disk Space Single parts or less assembly parts Assembly with lots of contact set Analysis with No Penetration contacts Mixed-mesh models Models of parts with widely different material properties Direct Sparse Iterative Applying FEA Simulation for Test Interface Unit 20

Analyzing the Simulation Results View Displacement Magnitude or Animation Shape of deformation make sense? Yes View Stress Plot No Review Boundary Conditions & Loads Quality and stress magnitude acceptable? Yes Output is expected No Review Mesh Density & Quality of Mesh Applying FEA Simulation for Test Interface Unit 21

Physical & Virtual Correlation Measurement Area Probe Point from Simulation A good correlation between simulation and measured deformed of test socket. Applying FEA Simulation for Test Interface Unit 22

Meet Requirement? Target 0.150mm for TP coplanarity Maximum displacement from simulation 0.328mm Unstable electrical spring probe performance cause by high warpage TP material stiffness is not enough Thin TP thickness cannot withstand high pin force Improvement study is required Applying FEA Simulation for Test Interface Unit 23

Optimization Study List down all influence factor cause TP warpage i) Total spring probe force ii) Test socket design iii) Total spring probe length iv) Material selection Verify the design feasibility study No Drop the idea Yes Build the simulation model and run solver Compile data and compare design performance Focus on spring probe length and different material selection. Applying FEA Simulation for Test Interface Unit 24

Optimization Study Pin length (DOE1 -> DOE 2 -> DOE3) High stiffness material applied on socket body (DOE 3 -> DOE4-> DOE5) Maximum Y-Displacement Applying FEA Simulation for Test Interface Unit 25

Optimization Study Simulation model failed to meet target DOE1 DOE2 DOE3 Simulation model meet target DOE4 DOE5 Applying FEA Simulation for Test Interface Unit 26

Conclusions FEA simulation help engineers filter out potential risk and gain a much broader picture for better decisions making. Training is required and the opportunity to practice extensively. Comparing simulation results with physical data if possible. Finite Element Analysis make a good engineer great, and make a bad engineer dangerous. Garbage in = Garbage Out - magic box dilemma Applying FEA Simulation for Test Interface Unit 27