Standard Motorized Positioning Stage

STADARD MOTORIZED POSITIOIG STAGE 01 Standard Motorized Positioning Stage 01.0.0 AC Design 0-7119

Product Brief Figurations Product Figurations Standard Motorized inear-motion Stage Standard Motorized inear-motion Stage Brief Product Figurations X axis ( XY axis ) AX -A AX -F CXS -S CX(C) -S Z axis α axis θ axis AZV -F AXG -CSW AR -A3 Brief Product Figurations Aluminum alloy Stainless steel Stainless steel Brass alloy Aluminum alloy Guiding-Crossed-roller Guiding-inear ball Guiding-inear ball Guiding-Dovetail type Guiding-Ball bearing V grooved rail Gothic rail Gothic rail Dovetail Ball bearing -Ball screw -Ball screw -Ball screw -Warm & warm gear -Warm & warm gear (mm) (mm) (mm) (mm) (mm) (mm) (mm) 100 10-3 - - ø39 ø9 ø ø100 (mm) (mm) (mm) (mm) (mm) (mm) (mm) 1 0 30 1 0 30 0 30 0 30 30 7 100 1 00 30 7 100 1 00 300 6 8 10 ±1 ±10 ±7 3 oad capacity(kgf) oad capacity(kgf) oad capacity(kgf) oad capacity(kgf) oad capacity(kgf) oad capacity(kgf) oad capacity(kgf) 6 1 3 10 1 1 6 7 8 10 1 16 3 6 0 A1 Repeatability accuracy ±1 μm Repeatability accuracy ± μm Repeatability accuracy ±0.0 A Page Page Page Page C1~C C9~C1 C17~C C9~C Electrical Specification Page Electrical Specification Page Electrical Specification Page Electrical Specification Page D1~D D3 D D Page Page Page C6~C68 C69~C7 C73~C76 Electrical Specification Page Electrical Specification Page Electrical Specification Page D6~D7 D8 D9 8 9

Standard Motorized inear-motion Stage Brief Figurations Precautions Brief Product Figurations Precautions Brief Product Figurations A3 X axis ( XY axis ) - V-teeth eed screw Design Aluminum alloy (mm) 100 10 1 AX -A1V AX -F1V Guiding-Crossed-roller V grooved rail (mm) 0 30 oad capacity(kgf) 6 1 3 Page Stainless steel Guiding-inear ball -V-teeth lead screw 10 (mm) (mm) 1 oad capacity(kgf) 1 Page 1 Repeatability accuracy ± μm CXS -S1V CX(C) -S1V Gothic rail (mm) (mm) 0 30 0 30 0 30 oad capacity(kgf) 6 7 8 Page (mm) (mm) 7 100 7 100 7 100 oad capacity(kgf) 10 1 16 Page C77~C C8~C88 C93~C98 C10~C116 Electrical Specification Page Electrical Specification Page Electrical Specification Page Electrical Specification Page D10 D11 D1 D13 Unpacking Precautions Safety Precautions This product is precision products. There are precautions in specifications or other aspects. To use the product correctly, please be familiar with the precautions in advance. Before unpacking, check the appearance for damage, loose screws and loose components. If there are concerns about structure and appearance, please take photos as evidence and E-mail them to the responsible business unit. When the shipment arrives, make sure that the specifications and contents are consistent with the order, and check whether any peripheral parts are missing. For any questions, please contact the original business unit. Before placement and use, make sure that there is sufficient working space around to prevent the danger of falling and rolling. CAUTIO: Violation may result in personal injury or product damage. For installation and operation, please follow electrical safety instructions. Do not use in explosive atmosphere, flammable environment, corrosive environment, easily wet and humid environment or near flammable materials. Otherwise, there is risk of fire, electric shock and injury. CAUTIO: Violation may result in serious personal injury or product damage. In operation, please check if there is enough movement space around the motor and mechanism to prevent any part of the body and clothing accessories from entering the stage or coming close to the working range of stage or any danger of rolling, pinching or pulling. CAUTIO: Violation may result in personal injury or product damage. Turn off the power before maintenance to prevent danger of electric shock. CAUTIO: Violation may result in serious personal injury or product damage. When the product is used in the vertical direction of Z axis, please use safety device for prevention (natural slide or power interruption due to overload). CAUTIO: Violation may result in personal injury or product damage. CA:GMT +886768830 sales@gmtglobalinc.com DAGER! WARIG! WARIG! Precautions B1 10 11

Precautions Precautions Precautions Precautions Precautions B Installation Precautions Environment Precaution Installation Precautions When abnormal issue (such as abnormal sound, abnormal vibration) arises, please immediately stop the machine. CAUTIO: Violation may result in personal injury or product damage. Do not forcibly pull or bend any electric wires and follow the wiring diagram for correct wiring. CAUTIO: Violation may result in personal injury or product damage. When tightening screws, please torque wrench according to the specifications of screws. CAUTIO: Violation may cause loosening. Please do not allow mechanical setting over maximum speed to cause mechanical instability (avoiding extreme change of setting or parameters). CAUTIO: Violation may result in personal injury or product damage. When malfunction or damage arises, please do not continue the use. CAUTIO: Violation may result in personal injury or product damage. Make sure wiring and connection of electric equipment is secured. Make sure parameter setting is correct. CAUTIO: Violation may cause fire, electric shock, personal injury or product damage. Foreign object such as dust, metal powder entering screw or slide rail may reduce life and cause excess wear. If concerns exist, please implement dust prevention measures. If the product is used as mechanical processing standard, it may affect life, performance and precision. If the situation exists, please have installation on the base with reliable rigidity. The product is designed and planned according to the direction specified in the catalog. Please check with GMT if other direction is used. If the direction is other than horizontal direction, it will reduce life and increase probability of malfunction. Before installation of our product, please make sure that the installation surface has no unnecessary object, and use alcohol to clean and prevent loss of installation precision. Violation may cause the product installation precision unable to meet the catalog specification. Do not apply inappropriate force and strike to the product to prevent damage and loss of precision and warranty. Violation may cause product damage or precision unable to meet catalog specification. Installation Precaution Please do not turn off travel stroke ation sensor during use to deactivate the sensor. When turning the knob in the back of motor, please do not overuse the travel stroke. Violation may result in personal injury or product damage. During installation of peripheral mechanism on product upper board/ lower board, please keep the stage in horizontal position with fixation. (Make sure the platform installation flatness is within 0.01mm and the stage installation inclination angle is below 1 to prevent poor precision due to stage deformation.) Violation may result in personal injury or product damage. Do not remove any parts of the precision motorized stage arbitrarily to prevent loss of precision and warranty. If service is needed, please contact salesperson. Violation may cause product damage or precision unable to meet catalog specification. If screw hole does not fit or additional screw hole is needed, please contact salesperson; do not handle it by yourself to prevent loss of precision and warranty. Violation may cause product damage or precision unable to meet catalog specification. Accessories and parts of the product are not water-proof or dust-proof; please do not use the product directly in oil misty, dusty or humid environment. Violation may cause product damage or precision unable to meet catalog specification. Installation procedures: 1. Make sure that installation surface does not have any flash, dust or dent.. Please put the product on the installation surface. 3. Please adjust according to installation hole position (aiming screw hole).. It is suggested to use the screws in compliance with standard specifications.. Use torque wrench to tighten screw. Precautions for product use environment: Shipping temperaturet Shipping humidity Installation temperature Installation humidity Environment gas -10 ~ below 90%RH (non-condensing) 0 ~ below 0% ~ %RH (non-condensing) indoor (not contain corrosive gas, flammable gas, oil mist and dust) Precautions B3 1 13

System Configuration Diagram System Configuration Diagram Warranty Instructions & Troubleshooting Suggestions Warranty Instructions & Troubleshooting Suggestions System Configuration Diagram System Configuration Diagram Motorized stage Stepper motor driver Motor current Pulse signal Sensor location signal Motor current Sensor power D-SUB - 1Pin Female connector D-SUB - 1Pin Male connector Sensor power V of V Driver signal voltage V Warranty Instructions Within warranty period, if any of the following failures occurs, our company will be responsible for the repair. Warranty period is one year, starting from the time the product is delivered to the designated place. If anything below occurs, it will not be covered under warranty: 1 year 1. Failure that occurs when the product is not used in specified environment and method.. Failure that occurs when the product is modified or repaired without authorization. 3. Failure that occurs due to natural disaster or misuse.. Fault or damage after customer purchase due to fall or impact during shipping or movement.. Malfunction or damage due to connection to other machine. 6. Violation to the above instructions and precautions on the manual will cause malfunction or damage. Warranty Instructions & Troubleshooting Suggestions Sensor location signal B Signal input PC HMI PC power V HMI power V Power supply For detailed specifications, please read the description for the stage and connecting cable on page E1 ~ E. For selection of driver, please refer to the cross-reference table on page E3 for the motor/driver of the precision motorized stage or the GMT motor and driver catalog. The most preferred driver is recommended to be specified by GMT as considerations. For different needs, please choose the suitable driver based on real functional needs. Trouble Shooting Suggestions After the motor or mechanism is hit by external force, please check whether screw function affects stage. Please do not arbitrarily adjust left and right position and origin position to prevent machine collision and loss of warranty. imit switch must have secured wires and receptacles and be prevented from loosening. Do not arbitrarily loosen coupling and transmission structure to assure precision and warranty. When unusual noise or vibration occurs in the operation of machine, please turn off power before inspection. For Q&A regarding stage, please check GMT website. http:// Q&A Download B 1 1

Standard Motorized X axis inear-motion Stage Crossed-roller guiding Standard Motorized X axis inear-motion Stage Crossed-roller guiding AX-A series X axis Motor model Connector type A Aluminum alloy Ball screw Standard grade R Right wiring -phase stepper D D-SUB1 eft wiring X (VGA) AX - A R - D - C Axis & serial numbers Connecting cable (optional) Driver (optional) AX X axis *mm *mm m cable* 1 C Standard specified by GMT *mm m cable* 1 100 10 100*100mm 10*10mm * 1 (D-SUB 1 pin female connector + the other side with discrete wirings) C1 Mechanical specifications Precision specifications Rail Stage material/surface treatment Main unit weight Coupling Resolution (pulse) Full / Half Maximum speed (full step) Positioning precision Repeatability precision oad capacity Missed step Parallelism Dynamic straightness Dynamic parallelism Type/Shaft numbers Motor Brand/ Model Driver brand/model Stage side connector Connector Controller side connector Origin sensor imit sensor Sensor Power voltage Control output Output control AX-AR-D AX-AR-D AX-AR-D AX-A-D AX-A-D AX-A-D AX100-AR-D AX100-A-D AX10-AR-D AX10-A-D X mm X mm X mm 100X100 mm 10X10 mm 1 mm 0 mm 30 mm mm mm Ball screw Ø6 lead 1mm Ball screw Ø8 lead 1mm Crossed-roller guiding Aluminum alloy / Black anodized 0.37 Kg 0.6 Kg 1. Kg 1.6 Kg.6 Kg FAMMS1-3* FAMS16-* FAMMS16-* Standard grade R Right wiring (Inventory specification) / eft wiring μm /. μm 10 mm / sec 1 μm ±1 μm 6 Kgf 1 Kgf 3 Kgf Kgf μm 30 μm 6.6 μm 10 μm -phase stepper / 8 double shafts -phase stepper / double shafts GMT / MS-8D3A GMT / MS-D7A GMT/GTRG-D (Additional options) 1-pin male end connector D-SUB 1-pin female end connector D-SUB (optional) Photoelectric sensor EE-SX98 V±10% P open collector output under V 8mA Testing (sensing): output transistor OFF (closed) AX-AR-D Photo is AX-AR-D 16 17 C

Standard Motorized X axis inear-motion Stage Crossed-roller guiding Standard Motorized X axis inear-motion Stage Crossed-roller guiding AX-AR-D AX100-AR-D AX-AR-D AX10-AR-D C3 C 18 19

Standard Motorized XY axis inear-motion Stage Crossed-roller guiding Standard Motorized XY axis inear-motion Stage Crossed-roller guiding AY-A series XY axis Motor model Connector type A Aluminum alloy Ball screw Standard grade R Right wiring -phase stepper D D-SUB1 eft wiring X (VGA) AY - A R - D - C Axis & serial numbers Connecting cable (optional) Driver (optional) AY XY axis *mm *mm m cable* 1 C Standard specified by GMT *mm m cable* 1 100 10 100*100mm 10*10mm * 1 (D-SUB 1 pin female connector + the other side with discrete wirings) C Mechanical specifications Precision specifications Rail Stage material/surface treatment Main unit weight Coupling Resolution (pulse) Full / Half Maximum speed (full step) Positioning precision Repeatability precision oad capacity Missed step Parallelism Dynamic straightness Dynamic parallelism Type/Shaft numbers Motor Brand/ Model Driver brand/model Stage side connector Connector Controller side connector Origin sensor imit sensor Sensor Power voltage Control output Output control AY-AR-D AY-AR-D AY-AR-D AY-A-D AY-A-D AY-A-D AY100-AR-D AY100-A-D AY10-AR-D AY10-A-D X mm X mm X mm 100X100 mm 10X10 mm 1 mm 0 mm 30 mm mm mm Ball screw Ø6 lead 1mm Ball screw Ø8 lead 1mm Crossed-roller guiding Aluminum alloy / Black anodized 0.76 Kg 1.38 Kg. Kg 3.3 Kg. Kg FAMMS1-3* FAMS16-* FAMMS16-* Standard grade R Right wiring (Inventory specification) / eft wiring μm /. μm 10 mm / sec 1 μm ±1 μm.0 Kgf 19 Kgf 1 Kgf Kgf μm 30 μm 6.6 μm 10 μm -phase stepper / 8 double shafts -phase stepper / double shafts GMT / MS-8D3A GMT / MS-D7A GMT/GTRG-D (Additional options) 1-pin male end connector D-SUB 1-pin female end connector D-SUB (optional) Photoelectric sensor EE-SX98 V±10% P open collector output under V 8mA Testing (sensing): output transistor OFF (closed) AY-AR-CD Photo is AY-AR-CD 0 1 C6

Standard Motorized XY axis inear-motion Stage Crossed-roller guiding Standard Motorized XY axis inear-motion Stage Crossed-roller guiding AY-AR-CD AY100-AR-CD AY-AR-CD AY10-AR-CD C7 C8 3

Standard Motorized X axis inear-motion Stage inear ball guiding Standard Motorized X axis inear-motion Stage inear ball guiding AX-F series X axis Motor model Connector type A Steel Ball screw Standard grade R Right wiring -phase stepper D D-SUB1 eft wiring X (VGA) AX - F R - D - C Axis & serial numbers Connecting cable (optional) Driver (optional) AX X axis *mm *mm m cable* 1 C Standard specified by GMT *mm m cable* 1 * 1 (D-SUB 1 pin female connector + the other side with discrete wirings) C9 Mechanical specifications Precision specifications Rail Stage material/surface treatment Main unit weight Coupling Resolution (pulse) Full / Half Maximum speed (full step) Positioning precision Repeatability precision oad capacity Missed step Parallelism Dynamic straightness Dynamic parallelism Type/Shaft numbers Motor Brand/ Model Driver brand/model Stage side connector Connector Controller side connector Origin sensor imit sensor Sensor Power voltage Control output Output control AX-FR-D AX-FR-D AX-FR-D AX-F-D AX-F-D AX-F-D X mm X mm X mm 1 mm Ball screw Ø6 lead 1mm inear ball guiding 0. Kg Steel / ickel plating 0.7 Kg 1.0 Kg FAMC13-* Standard grade R Right wiring (Inventory specification) / eft wiring μm /. μm 1 mm / sec 1 μm ±1 μm 10 Kgf 1 Kgf 1 Kgf 0 μm 10 μm -phase stepper / 8 double shafts GMT / MS-8D3A GMT/GTRG-D (Additional options) 1-pin male end connector D-SUB 1-pin female end connector D-SUB (optional) Photoelectric sensor EE-SX98 V±10% P open collector output under V 8mA Testing (sensing): output transistor OFF (closed) AX-FR-D 3. 0 3. 3 Photo is AX-FR-D 3 3 10. -.x8 M3x0.x6-6x3. 3.x-Ø3.; Ø6x3. C10

Standard Motorized X axis inear-motion Stage inear ball guiding Standard Motorized X axis inear-motion Stage inear ball guiding AX-FR-D AX-FR-D - 3.x8 Mx0.7x6 1 73. 93. 1 8-Mx0.7x6-8x.x-Ø.; Ø8x 0 3 106. 1. 1. Ø.;Ø8* C11 C1 6 7

Standard Motorized XY axis inear-motion Stage inear ball guiding Standard Motorized XY axis inear-motion Stage inear ball guiding AY-F series XY axis Motor model Connector type A Steel Ball screw Standard grade R Right wiring -phase stepper D D-SUB1 eft wiring X (VGA) AY - F R - D - C Axis & serial numbers Connecting cable (optional) Driver (optional) AY XY axis *mm *mm m cable* 1 C Standard specified by GMT *mm m cable* 1 * 1 (D-SUB 1 pin female connector + the other side with discrete wirings) C13 8 Mechanical specifications Precision specifications Rail Stage material/surface treatment Main unit weight Coupling Resolution (pulse) Full / Half Maximum speed (full step) Positioning precision Repeatability precision oad capacity Missed step Parallelism Dynamic straightness Dynamic parallelism Type/Shaft numbers Motor Brand/ Model Driver brand/model Stage side connector Connector Controller side connector Origin sensor imit sensor Sensor Power voltage Control output Output control AY-FR-D AY-FR-D AY-FR-D AY-F-D AY-F-D AY-F-D X mm X mm X mm 1 mm Ball screw Ø6 lead 1mm inear ball guiding Steel / ickel plating 0.8 Kg 1. Kg.0 Kg FAMC13-* Standard grade R Right wiring (Inventory specification) / eft wiring μm /. μm 1 mm / sec 1 μm ±1 μm 9 Kgf 11 Kgf 13 Kgf 0 μm 10 μm -phase stepper / 8 double shafts GMT / MS-8D3A GMT/GTRG-D (Additional options) 1-pin male end connector D-SUB 1-pin female end connector D-SUB (optional) Photoelectric sensor EE-SX98 V±10% P open collector output under V 8mA Testing (sensing): output transistor OFF (closed) AY-FR-D -.; 8x 117.6 10. 3 Photo is AY-FR-D -.x8 M3x0.x6 3 8. 6. 3 0 6. 8. 0 C1 9

8. Standard Motorized XY axis inear-motion Stage inear ball guiding Standard Motorized XY axis inear-motion Stage inear ball guiding AY-FR-D AY-FR-D 8. 6. 1. 6. 8. 137.6 0 1. -Mx0.7x6 17.6 1. -.; 8x 6. -Mx0.7x6 8. 0 -.; 8x 6. 0 0 C1 C16 30 31

Standard Motorized X axis inear-motion Stage inear ball guiding Standard Motorized X axis inear-motion Stage inear ball guiding CXS -S series X axis Motor model Connector type S Stainless Steel Ball screw Standard grade GMT Standard -phase stepper D D-SUB1 X (VGA) CXS 0 - S - D - C Axis & serial numbers Connecting cable (optional) Driver (optional) CXS X axis *mm 0 0mm 30 30mm m cable* 1 C Standard specified by GMT m cable* 1 * 1 (D-SUB 1 pin female connector + the other side with discrete wirings) C17 3 Mechanical specifications Precision specifications Rail Stage material/surface treatment Main unit weight Coupling Resolution (pulse) Full / Half Maximum speed (full step) Motor Connector Sensor Positioning precision Repeatability precision oad capacity Missed step Parallelism Dynamic straightness Dynamic parallelism Type/Shaft numbers Brand/ Model Driver brand/model Stage side connector Controller side connector Origin sensor imit sensor Power voltage Control output Output control * GMT Standard wiring is defined as the product photo, and not optional available. CXS0-S-D 0 mm X mm Ball screw Ø8 lead 1mm CXS30-S-D inear ball guiding Stainless Steel / ickel plating 0.7 Kg 0.7 Kg FAMCS10-* Standard grade GMT Standard* μm /. μm 0 mm / sec 1 μm ±1 μm 6 Kgf 1 μm 10 μm -phase stepper / 8 double shafts GMT / MS-8D3A GMT/GTRG-D (Additional options) 1-pin male end connector D-SUB 1-pin female end connector D-SUB (optional) Photoelectric sensor EE-SX98 V±10% P open collector output under V 8mA Testing (sensing): output transistor OFF (closed) 30 mm CXS -S-D 13 8.6 8-M3x. 30 0 0 Photo is CXS30-S-D 0 0 1 -Ø.;Ø8 Ø0 1. 8. 0 30 1 1 13. 1. C18 33

Standard Motorized X axis inear-motion Stage inear ball guiding Standard Motorized X axis inear-motion Stage inear ball guiding CXS -S series X axis Motor model Connector type S Stainless Steel Ball screw Standard grade GMT Standard -phase stepper D D-SUB1 X (VGA) CXS 0 - S - D - C Axis & serial numbers Connecting cable (optional) Driver (optional) CXS X axis *mm 0 0mm *mm 30 30mm m cable* 1 C Standard specified by GMT *mm mm m cable* 1 * 1 (D-SUB 1 pin female connector + the other side with discrete wirings) C19 Mechanical specifications Precision specifications Rail Stage material/surface treatment Main unit weight Resolution (pulse) Full / Half Maximum speed (full step) Motor Connector Sensor Coupling Positioning precision Repeatability precision oad capacity Missed step Parallelism Dynamic straightness Dynamic parallelism Type/Shaft numbers Brand/ Model Driver brand/model Stage side connector Controller side connector Origin sensor imit sensor Power voltage Control output Output control CXS0-S-D CXS30-S-D CXS-S-D X mm X mm 0 mm 30 mm mm Ball screw Ø8 lead 1mm inear ball guiding Stainless Steel / ickel plating 0.7 Kg 0.8 Kg 1.11 Kg FAMCS10-* Standard grade GMT Standard* μm /. μm 0 mm / sec 1 μm ±1 μm 7 Kgf 1 μm 10 μm -phase stepper / 8 double shafts GMT / MS-8D3A GMT/GTRG-D (Additional options) 1-pin male end connector D-SUB 1-pin female end connector D-SUB (optional) Photoelectric sensor EE-SX98 V±10% P open collector output under V 8mA Testing (sensing): output transistor OFF (closed) CXS -S-D 13 8.6 8-Mx. * GMT Standard wiring is defined as the product photo, and not optional available. Photo is CXS30-S-D 16 16 30 16 16 1 8-M3x. -Ø.;Ø8 1. Ø0 8. 0 30 1 131 8. 1 11 68. 1 19 101. C0 3 3

Standard Motorized X axis inear-motion Stage inear ball guiding Standard Motorized X axis inear-motion Stage inear ball guiding CXS -S series X axis Motor model Connector type S Stainless Steel Ball screw Standard grade GMT Standard -phase stepper D D-SUB1 X (VGA) CXS 0 - S - D - C Axis & serial numbers Connecting cable (optional) Driver (optional) CXS X axis *mm 0 0mm *mm 30 30mm m cable* 1 C Standard specified by GMT *100mm mm m cable* 1 * 1 (D-SUB 1 pin female connector + the other side with discrete wirings) C1 36 Mechanical specifications Precision specifications Rail Stage material/surface treatment Main unit weight Resolution (pulse) Full / Half Maximum speed (full step) Motor Connector Sensor Coupling Positioning precision Repeatability precision oad capacity Missed step Parallelism Dynamic straightness Dynamic parallelism Type/Shaft numbers Brand/ Model Driver brand/model Stage side connector Controller side connector Origin sensor imit sensor Power voltage Control output Output control * GMT Standard wiring is defined as the product photo, and not optional available. CXS0-S-D CXS30-S-D CXS-S-D X mm X100 mm 0 mm 30 mm mm Ball screw Ø8 lead 1mm inear ball guiding Stainless Steel / ickel plating 1.1 Kg 1. Kg 1.3 Kg FAMCS10-* Standard grade GMT Standard* μm /. μm 0 mm / sec 1 μm ±1 μm 8 Kgf 1 μm 10 μm -phase stepper / 8 double shafts GMT / MS-8D3A GMT/GTRG-D (Additional options) 1-pin male end connector D-SUB 1-pin female end connector D-SUB (optional) Photoelectric sensor EE-SX98 V±10% P open collector output under V 8mA Testing (sensing): output transistor OFF (closed) CXS -S-D 8.6 30 Photo is CXS30-S-D 13 1-Mx. 3 3 16 16 3 3 16 16 1 -M3x. -Ø.;Ø8 0 30 1 11 8. 1. Ø0 8. 1 161 68. 1 19 101. 100 C 37

Standard Motorized XY axis inear-motion Stage inear ball guiding Standard Motorized XY axis inear-motion Stage inear ball guiding CYS -S series XY axis Motor model Connector type S Stainless Steel Ball screw Standard grade GMT Standard -phase stepper D D-SUB1 X (VGA) CYS 0 - S - D - C Axis & serial numbers Connecting cable (optional) Driver (optional) CYS XY axis *mm 0 0mm 30 30mm m cable* 1 C Standard specified by GMT m cable* 1 * 1 (D-SUB 1 pin female connector + the other side with discrete wirings) C3 38 Mechanical specifications Precision specifications Rail Stage material/surface treatment Main unit weight Resolution (pulse) Full / Half Maximum speed (full step) Motor Connector Sensor Coupling Positioning precision Repeatability precision oad capacity Missed step Parallelism Dynamic straightness Dynamic parallelism Type/Shaft numbers Brand/ Model Driver brand/model Stage side connector Controller side connector Origin sensor imit sensor Power voltage Control output Output control * GMT Standard wiring is defined as the product photo, and not optional available. CYS0-S-D CYS30-S-D X mm 0 mm 30 mm Ball screw Ø8 lead 1mm inear ball guiding Stainless Steel / ickel plating 0.7 Kg 0.7 Kg FAMCS10-* Standard grade GMT Standard* μm /. μm 0 mm / sec 1 μm ±1 μm Kgf 1 μm 10 μm -phase stepper / 8 double shafts GMT / MS-8D3A GMT/GTRG-D (Additional options) 1-pin male end connector D-SUB 1-pin female end connector D-SUB (optional) Photoelectric sensor EE-SX98 V±10% P open collector output under V 8mA Testing (sensing): output transistor OFF (closed) CYS -S-D. 8. Photo is CYS30-S-D 8.6 13 8-M3x. 0 0 1 30 0 0 Ø0 1 -Ø.;Ø8 Ø0 1. 8. 0 30 1 1 13. 1. C 39

Standard Motorized XY axis inear-motion Stage inear ball guiding Standard Motorized XY axis inear-motion Stage inear ball guiding CYS -S series XY axis CYS -S-D Motor model Connector type S Stainless Steel Ball screw Standard grade GMT Standard -phase stepper D D-SUB1 X (VGA) CYS 0 - S - D - C Axis & serial numbers Connecting cable (optional) Driver (optional) CYS XY axis *mm 0 0mm *mm 30 30mm m cable* 1 C Standard specified by GMT *mm mm m cable* 1 * 1 (D-SUB 1 pin female connector + the other side with discrete wirings) C Mechanical specifications Precision specifications Rail Stage material/surface treatment Main unit weight Resolution (pulse) Full / Half Maximum speed (full step) Motor Connector Sensor Coupling Positioning precision Repeatability precision oad capacity Missed step Parallelism Dynamic straightness Dynamic parallelism Type/Shaft numbers Brand/ Model Driver brand/model Stage side connector Controller side connector Origin sensor imit sensor Power voltage Control output Output control CYS0-S-D CYS30-S-D CYS-S-D X mm X mm 0 mm 30 mm mm Ball screw Ø8 lead 1mm inear ball guiding Stainless Steel / ickel plating 0.7 Kg 0.8 Kg 1.11 Kg FAMCS10-* Standard grade GMT Standard* μm /. μm 0 mm / sec 1 μm ±1 μm 6 Kgf 1 μm 10 μm -phase stepper / 8 double shafts GMT / MS-8D3A GMT/GTRG-D (Additional options) 1-pin male end connector D-SUB 1-pin female end connector D-SUB (optional) Photoelectric sensor EE-SX98 V±10% P open collector output under V 8mA Testing (sensing): output transistor OFF (closed) CYS -S-D * GMT Standard wiring is defined as the product photo, and not optional available. Photo is CYS30-S-D 8.6 13. 8. 8-Mx. X 3/Y 1 16 16 30 X /Y 3 1 16 16 8-M3x. Ø0 -Ø.;Ø8 0 30 31 1 3 1 3 1 131 8. 11 68. 19 101. 1. Ø0 8. 3 C6 1

Standard Motorized XY axis inear-motion Stage inear ball guiding Standard Motorized XY axis inear-motion Stage inear ball guiding CYS -S series XY axis Motor model Connector type S Stainless Steel Ball screw Standard grade GMT Standard -phase stepper D D-SUB1 X (VGA) CYS 0 - S - D - C Axis & serial numbers Connecting cable (optional) Driver (optional) CYS XY axis *mm 0 0mm *mm 30 30mm m cable* 1 C Standard specified by GMT *100mm mm m cable* 1 * 1 (D-SUB 1 pin female connector + the other side with discrete wirings) C7 Mechanical specifications Precision specifications Rail Stage material/surface treatment Main unit weight Resolution (pulse) Full / Half Maximum speed (full step) Motor Connector Sensor Coupling Positioning precision Repeatability precision oad capacity Missed step Parallelism Dynamic straightness Dynamic parallelism Type/Shaft numbers Brand/ Model Driver brand/model Stage side connector Controller side connector Origin sensor imit sensor Power voltage Control output Output control * GMT Standard wiring is defined as the product photo, and not optional available. CYS0-S-D CYS30-S-D CYS-S-D X mm X100 mm 0 mm 30 mm mm Ball screw Ø8 lead 1mm inear ball guiding Stainless Steel / ickel plating 1.1 Kg 1. Kg 1.3 Kg FAMCS10-* Standard grade GMT Standard* μm /. μm 0 mm / sec 1 μm ±1 μm 7 Kgf 1 μm 10 μm -phase stepper / 8 double shafts GMT / MS-8D3A GMT/GTRG-D (Additional options) 1-pin male end connector D-SUB 1-pin female end connector D-SUB (optional) Photoelectric sensor EE-SX98 V±10% P open collector output under V 8mA Testing (sensing): output transistor OFF (closed) CYS -S-D Photo is CYS30-S-D 8.6 13. 8. 1-Mx. X 3/Y 3 3 1 16 16 30 X /Y 3 3 3 16 16 Ø0 3 3 0 30 31 1 3 1 3 1 11 8. 161 68. 19 101. 100 1 -M3x. -Ø.;Ø8 1. Ø0 8. 3 C8 3

Standard Motorized X axis inear-motion Stage Circular linear ball guiding Standard Motorized X axis inear-motion Stage Circular linear ball guiding CX /CXC -S series X axis Motor model Connector type S Stainless Steel Ball screw Standard grade GMT Standard -phase stepper D D-SUB1 X (VGA) CX 30 - S - D - C Axis & serial numbers Ball screw pitch Connecting cable (optional) Driver (optional) CX X axis (w/o cover) *mm 30 30mm 1mm CXC X axis (w/cover) 7 mm 7mm P mm m cable* 1 m cable* 1 C Standard specified by GMT 6 6m cable* 1 * 1 (D-SUB 1 pin female connector + the other side with discrete wirings) CX30-S-D- CXC30-S-D- CX30-S-D-P CXC30-S-D-P CX-S-D- CXC-S-D- CX-S-D-P CXC-S-D-P CX7-S-D- CXC7-S-D- CX7-S-D-P CXC7-S-D-P C9 Mechanical specifications Precision specifications Rail Stage material/surface treatment Main unit weight Coupling Resolution (pulse) Full / Half Maximum speed (full step) Positioning precision Repeatability precision oad capacity Missed step Parallelism Dynamic straightness Dynamic parallelism Type/Shaft numbers Motor Brand/ Model Driver brand/model Stage side connector Connector Controller side connector Origin sensor imit sensor Sensor Power voltage Control output Output control X mm 30 mm mm 7 mm Ball screw Ø8 lead 1mm Ball screw Ø8 lead mm Ball screw Ø8 lead 1mm Ball screw Ø8 lead mm Ball screw Ø8 lead 1mm Ball screw Ø8 lead mm Circular inear ball guiding Stainless Steel / ickel plating 0.97 Kg / C 1.06 Kg 1.1 Kg / C 1.17 Kg 1. Kg / C 1.9 Kg μm /. μm 0 mm / sec * GMT Standard wiring is defined as the product photo, and not optional available. 10 μm / μm mm / sec μm FAMCS10-* Standard grade GMT Standard* μm /. μm 0 mm / sec ±0. μm 10 Kgf 1 μm 1 μm 1 μm 10 μm 10 μm / μm mm / sec -phase stepper / 8 double shafts GMT / MS-8D3A GMT/GTRG-D (Additional options) 1-pin male end connector D-SUB 1-pin female end connector D-SUB (optional) Photoelectric sensor EE-SX98 V±10% P open collector output under V 8mA Testing (sensing): output transistor OFF (closed) μm /. μm 0 mm / sec 7 μm 10 μm / μm mm / sec Photos are CX100-S-D(UP) and CXC100-S-D(DOW). C30

Standard Motorized X axis inear-motion Stage Circular linear ball guiding Standard Motorized X axis inear-motion Stage Circular linear ball guiding CX -S-D CXC -S-D 0 0 1 0 0 1 13 8.6 30 3. 33. 1. 0 0 Ø0 8-M3x. 3. Px Ø3.;Ø6 Px 1. Ø0 8.6 13 6-M3x. 37 Ø3.;Ø6 C31 C3 30 110 197. 1 0 7 1 P 10 1 17.. 3 3 /A /A 30 110 197. 1 0 7 1 P 10 1 17.. 3 3 /A /A 6 7

Standard Motorized X axis inear-motion Stage Circular linear ball guiding Standard Motorized X axis inear-motion Stage Circular linear ball guiding CX /CXC -S series X axis Motor model Connector type S Stainless Steel Ball screw Standard grade GMT Standard -phase stepper D D-SUB1 X (VGA) CX 100 - S - D - C Axis & serial numbers Ball screw pitch Connecting cable (optional) Driver (optional) CX X axis (w/o cover) *mm 100 100mm 1mm CXC X axis (w/cover) 1 00 1mm 00mm P mm m cable* 1 m cable* 1 C Standard specified by GMT 6 6m cable* 1 * 1 (D-SUB 1 pin female connector + the other side with discrete wirings) Model umber CX100-S-D- CX100-S-D-P CX1-S-D- CXC100-S-D- CXC100-S-D-P CXC1-S-D- CX1-S-D-P CXC1-S-D-P CX00-S-D- CXC00-S-D- CX00-S-D-P CXC00-S-D-P C33 8 Mechanical specifications Precision specifications X mm 100 mm 1 mm 00 mm Ball screw Ø8 lead 1mm Ball screw Ø8 lead mm Ball screw Ø8 lead 1mm Ball screw Ø8 lead mm Ball screw Ø8 lead 1mm Ball screw Ø8 lead mm Rail Circular inear ball guiding Stage material/surface treatment Stainless Steel / ickel plating Main unit weight 1.3 Kg / C 1.39 Kg 1. Kg / C 1.8 Kg 1.76 Kg / C.0 Kg Coupling FAMCS10-* Standard grade GMT Standard* Resolution (pulse) Full / Half μm /. μm 10 μm / μm μm /. μm 10 μm / μm μm /. μm 10 μm / μm Maximum speed (full step) 0 mm / sec mm / sec 0 mm / sec mm / sec 0 mm / sec mm / sec Positioning precision 1 μm 0 μm Repeatability precision ±1 μm oad capacity 10 Kgf Missed step Parallelism 1 μm Dynamic straightness μm Dynamic parallelism 1 μm Motor Type/Shaft numbers -phase stepper / 8 double shafts Brand/ Model GMT / MS-8DA Driver brand/model GMT/GTRG-D (Additional options) Connector Stage side connector 1-pin male end connector D-SUB Controller side connector 1-pin female end connector D-SUB (optional) Origin sensor imit sensor Photoelectric sensor EE-SX13 Sensor Origin approximation sensor /A Power voltage V±10% Control output Output control P open collector output under V 8mA Testing (sensing) output transistor OFF (closed) * GMT Standard wiring is defined as the product photo, and not optional available. Photos are CX100-S-D(UP) and CXC100-S-D(DOW). C3 9

Standard Motorized X axis inear-motion Stage Circular linear ball guiding Standard Motorized X axis inear-motion Stage Circular linear ball guiding CX -S-D CXC -S-D 0 0 1 0 0 1 13 8.6 30 3. 33. 0 0 Ø0 8-M3x. 3. Ø0 8.6 13 6-M3x. 37 Px Ø3.;Ø6 1. Px Ø3.;Ø6 1. C3 C36 100 1 00 1 P 1 68 /A 0 318 16 368 6 /A 100 1 00 1 P 1 68 /A 0 318 16 368 6 /A 1

Standard Motorized X axis inear-motion Stage Circular linear ball guiding Standard Motorized X axis inear-motion Stage Circular linear ball guiding CX /CXC -S series X axis Motor model Connector type S Stainless Steel Ball screw Standard grade GMT Standard -phase stepper D D-SUB1 X (VGA) CX 30 - S - D - - C Axis & serial numbers Ball screw pitch Connecting cable (optional) Driver (optional) CX X axis (w/o cover) *mm 30 30mm 1mm CXC X axis (w/cover) mm P mm m cable* 1 C Standard specified by GMT 7 7mm m cable* 1 100 100mm 6 6m cable* 1 * 1 (D-SUB 1 pin female connector + the other side with discrete wirings) Model umber CX30-S-D- CX30-S-D-P CXC30-S-D- CXC30-S-D-P CX-S-D- CXC-S-D- CX-S-D-P CXC-S-D-P CX7-S-D- CXC7-S-D- CX7-S-D-P CX100-S-D- CX100--S-D-P CXC7-S-D-P CXC100-S-D- CXC100--S-D-P C37 X mm 30 mm mm 7 mm 100 mm Ball screw Ø8 lead 1mm Ball screw Ø8 lead mm Ball screw Ø8 lead 1mm Ball screw Ø8 lead mm Ball screw Ø8 lead 1mm Ball screw Ø8 lead mm Ball screw Ø8 lead 1mm Ball screw Ø8 lead mm Rail Circular inear ball guiding Stage material/surface treatment Stainless Steel / ickel plating Main unit weight 1.1 Kg / C 1.9 Kg 1.19 Kg / C 1.33 Kg 1.3 Kg / C 1. Kg 1.7 Kg / C 1.61 Kg Coupling FAMCS10-* Standard grade GMT Standard* Resolution (pulse) Full / Half μm /. μm 10 μm / μm μm /. μm 10 μm / μm μm /. μm 10 μm / μm μm /. μm 10 μm / μm Maximum speed (full step) 0 mm / sec mm / sec 0 mm / sec mm / sec 0 mm / sec mm / sec 0 mm / sec mm / sec Positioning precision 10 μm 1 μm Repeatability precision ±1 μm oad capacity 1 Kgf Missed step Parallelism 0 μm Dynamic straightness Dynamic parallelism 10 μm Motor Type/Shaft numbers -phase stepper / 8 double shafts Brand/ Model GMT / MS-8D3A Driver brand/model GMT/GTRG-D (Additional options) Connector Stage side connector 1-pin male end connector D-SUB Controller side connector 1-pin female end connector D-SUB (optional) Origin sensor imit sensor Photoelectric sensor EE-SX13 Sensor Origin approximation sensor /A Power voltage V±10% Control output P open collector output under V 8mA Output control Testing (sensing) output transistor OFF (closed) * GMT Standard wiring is defined as the product photo, and not optional available. Mechanical specifications Precision specifications Photos are CX100-S-D(UP) and CXC100-S-D(DOW). C38 3

Standard Motorized X axis inear-motion Stage Circular linear ball guiding Standard Motorized X axis inear-motion Stage Circular linear ball guiding CX -S-D CXC -S-D 1 13 8.6 37 3. Ø0 6-Mx. Px Ø.;Ø8 1. C39 C 30 10 09 1 1 9 1 7 100 1 P 16 190 98. 3 3 /A /A 30 10 09 1 1 9 1 7 100 1 P 16 190 98. 3 3 /A /A

Standard Motorized X axis inear-motion Stage Circular linear ball guiding Standard Motorized X axis inear-motion Stage Circular linear ball guiding CX /CXC -S series X axis Motor model Connector type S Stainless Steel Ball screw Standard grade GMT Standard -phase stepper D D-SUB1 X (VGA) CX 1 - S - D - P C Axis & serial numbers Ball screw pitch Connecting cable (optional) Driver (optional) CX X axis (w/o cover) *mm 1 1mm P mm CXC X axis (w/cover) 00 00mm m cable* 1 C Standard specified by GMT mm m cable* 1 300 300mm * 1 (D-SUB 1 pin female connector + the other side with discrete wirings) CX1-S-D-P CX00-S-D-P CX-S-D-P CX300-S-D-P CXC1-S-D-P CXC00-S-D-P CXC-S-D-P CXC300-S-D-P C1 6 Mechanical specifications Precision specifications Rail Stage material/surface treatment Main unit weight Coupling Resolution (pulse) Full / Half Maximum speed (full step) Motor Connector Sensor Positioning precision Repeatability precision oad capacity Missed step Parallelism Dynamic straightness Dynamic parallelism Type/Shaft numbers Brand/ Model Driver brand/model Stage side connector Controller side connector Origin sensor imit sensor Power voltage Control output Output control * GMT Standard wiring is defined as the product photo, and not optional available. X mm 1 mm 00 mm mm 300 mm Ball screw Ø8 lead mm Circular inear ball guiding Stainless Steel / ickel plating 1.8 Kg / C 1.9 Kg Kg / C.1 Kg.3 Kg / C. Kg.6 Kg / C.7 Kg FAMCS10-* Standard grade GMT Standard* 10 μm / μm mm / sec 0 μm 30 μm ±1 μm 1 Kgf 0 μm μm 10 μm -phase stepper / 8 double shafts GMT / MS-8DA GMT/GTRG-D (Additional options) 1-pin male end connector D-SUB 1-pin female end connector D-SUB (optional) Photoelectric sensor EE-SX98 V±10% P open collector output under V 8mA Testing (sensing): output transistor OFF (closed) Photos are CX100-S-D(UP) and CXC100-S-D(DOW). C 7

Standard Motorized X axis inear-motion Stage Circular linear ball guiding Standard Motorized X axis inear-motion Stage Circular linear ball guiding CX -S-D CXC -S-D 1 13 8.6 37 3. Ø0 6-Mx. Px Ø.;Ø8 1. C3 C 1 00 300 1 P 90 38. 398. /A 3 8. /A 390 98. 7 /A 1 00 300 1 P 90 38. 398. /A 3 8. /A 390 98. 7 /A 8 9

Standard Motorized X axis inear-motion Stage Circular linear ball guiding Standard Motorized X axis inear-motion Stage Circular linear ball guiding CX /CXC -S series X axis Motor model Connector type S Stainless Steel Ball screw Standard grade GMT Standard -phase stepper D D-SUB1 X (VGA) CX 30 - S - D - C Axis & serial numbers Ball screw pitch Connecting cable (optional) Driver (optional) CX X axis (w/o cover) *mm 30 30mm 1mm CXC X axis (w/cover) mm P mm m cable* 1 C Standard specified by GMT 7 7mm m cable* 1 100 100mm * 1 (D-SUB 1 pin female connector + the other side with discrete wirings) Model umber CX30-S-D- CX30-S-D-P CXC30-S-D- CXC30-S-D-P CX-S-D- CXC-S-D- CX-S-D-P CXC-S-D-P CX7-S-D- CXC7-S-D- CX7-S-D-P CX100-S-D- CX100--S-D-P CXC7-S-D-P CXC100-S-D- CXC100--S-D-P C Mechanical specifications Precision specifications X mm 30 mm mm 7 mm 100 mm Ball screw Ø8 lead 1mm Ball screw Ø8 lead mm Ball screw Ø8 lead 1mm Ball screw Ø8 lead mm Ball screw Ø8 lead 1mm Ball screw Ø8 lead mm Ball screw Ø8 lead 1mm Ball screw Ø8 lead mm Rail Circular inear ball guiding Stage material/surface treatment Stainless Steel / ickel plating Main unit weight 1. Kg / C 1.79 Kg 1.68 Kg / C 1.86 Kg 1.8 Kg / C.03 Kg.0 Kg / C. Kg Coupling FAMCS10-* Standard grade GMT Standard* Resolution (pulse) Full / Half μm /. μm 10 μm / μm μm /. μm 10 μm / μm μm /. μm 10 μm / μm μm /. μm 10 μm / μm Maximum speed (full step) 0 mm / sec mm / sec 0 mm / sec mm / sec 0 mm / sec mm / sec 0 mm / sec mm / sec Positioning precision 10 μm 1 μm Repeatability precision ±1 μm oad capacity 16 Kgf Missed step Parallelism 0 μm Dynamic straightness Dynamic parallelism 10 μm Motor Type/Shaft numbers -phase stepper / 8 double shafts Brand/ Model GMT / MS-8D3A Driver brand/model GMT/GTRG-D (Additional options) Connector Stage side connector 1-pin male end connector D-SUB Controller side connector 1-pin female end connector D-SUB (optional) Origin sensor imit sensor Photoelectric sensor EE-SX13 Sensor Origin approximation sensor /A Power voltage V±10% Control output P open collector output under V 8mA Output control Testing (sensing) output transistor OFF (closed) * GMT Standard wiring is defined as the product photo, and not optional available. Photos are CX100-S-D(UP) and CXC100-S-D(DOW). C6 61

Standard Motorized X axis inear-motion Stage Circular linear ball guiding Standard Motorized X axis inear-motion Stage Circular linear ball guiding CX -S-D CXC -S-D 3 3 1 3. Px 1. 8.6 13 6-Mx. 37 Ø.;Ø8 C7 C8 1 P 1 P 30 1 9 1 7 100 1 18 10 7. 7. 317. 3 3 3 3 1 3 30 1 9 1 7 100 1 18 10 7. 7. 317. 3 3 3 3 1 3 6 63

Standard Motorized X axis inear-motion Stage Circular linear ball guiding Standard Motorized X axis inear-motion Stage Circular linear ball guiding CX /CXC -S series X axis Motor model Connector type S Stainless Steel Ball screw Standard grade GMT Standard -phase stepper D D-SUB1 X (VGA) CX 1 - S - D - P C Axis & serial numbers Ball screw pitch Connecting cable (optional) Driver (optional) CX X axis (w/o cover) *mm 1 1mm P mm CXC X axis (w/cover) 00 00mm m cable* 1 C Standard specified by GMT mm m cable* 1 300 300mm * 1 (D-SUB 1 pin female connector + the other side with discrete wirings) CX1-S-D-P CX00-S-D-P CX-S-D-P CX300-S-D-P CXC1-S-D-P CXC00-S-D-P CXC-S-D-P CXC300-S-D-P C9 6 Mechanical specifications Precision specifications Rail Stage material/surface treatment Main unit weight Resolution (pulse) Full / Half Maximum speed (full step) Motor Connector Sensor Coupling Positioning precision Repeatability precision oad capacity Missed step Parallelism Dynamic straightness Dynamic parallelism Type/Shaft numbers Brand/ Model Driver brand/model Stage side connector Controller side connector Origin sensor imit sensor Power voltage Control output Output control * GMT Standard wiring is defined as the product photo, and not optional available. X mm 1 mm 00 mm mm 300 mm Ball screw Ø8 lead mm Circular inear ball guiding Stainless Steel / ickel plating.3 Kg / C. Kg.6 Kg / C.78 Kg.9 Kg / C 3.08 Kg 3. Kg / C 3.38 Kg FAMCS10-* Standard grade GMT Standard* 10 μm / μm mm / sec 0 μm 30 μm ±1 μm 16 Kgf 0 μm μm 10 μm -phase stepper / 8 double shafts GMT / MS-8DA GMT/GTRG-D (Additional options) 1-pin male end connector D-SUB 1-pin female end connector D-SUB (optional) Photoelectric sensor EE-SX98 V±10% P open collector output under V 8mA Testing (sensing): output transistor OFF (closed) Photos are CX100-S-D(UP) and CXC100-S-D(DOW). C 6

Standard Motorized X axis inear-motion Stage Circular linear ball guiding Standard Motorized X axis inear-motion Stage Circular linear ball guiding CX -S-D CXC -S-D 3 3 1 3. 8.6 13 6-Mx. 37 Px Ø.;Ø8 1. C1 C 1 P 1 P 1 00 300 310 367. 17. 3 67. 10 17. /A 3 3 /A 3 3 1 00 300 310 367. 17. 3 67. 10 17. /A 3 3 /A 3 3 66 67

Standard Motorized XY axis inear-motion Stage Circular linear ball guiding Standard Motorized XY axis inear-motion Stage Circular linear ball guiding CY /CYC -S series XY axis Motor model Connector type S Stainless Steel Ball screw Standard grade GMT Standard -phase stepper D D-SUB1 X (VGA) CY 30 - S - D - C Axis & serial numbers Ball screw pitch Connecting cable (optional) Driver (optional) CY XY axis (w/o cover) *mm 30 30mm 1mm CYC XY axis (w/cover) mm P mm m cable* 1 C Standard specified by GMT 7 7mm m cable* 1 * 1 (D-SUB 1 pin female connector + the other side with discrete wirings) Model umber CY30-S-D- CYC30-S-D- CY30-S-D-P CYC30-S-D-P CY-S-D- CYC-S-D- CY-S-D-P CYC-S-D-P CY7-S-D- CYC7-S-D- CY7-S-D-P CYC7-S-D-P C3 68 Mechanical specifications Precision specifications X mm 30 mm mm 7 mm Ball screw Ø8 lead 1mm Ball screw Ø8 lead mm Ball screw Ø8 lead 1mm Ball screw Ø8 lead mm Ball screw Ø8 lead 1mm Ball screw Ø8 lead mm Rail Circular inear ball guiding Stage material/surface treatment Stainless Steel / ickel plating Main unit weight 1.9 Kg / C.1 Kg. Kg / C.3 Kg.8 Kg / C.8 Kg Coupling FAMCS10-* Standard grade GMT Standard* Resolution (pulse) Full / Half μm /. μm 10 μm / μm μm /. μm 10 μm / μm μm /. μm 10 μm / μm Maximum speed (full step) 0 mm / sec mm / sec 0 mm / sec mm / sec 0 mm / sec mm / sec Positioning precision μm 1 μm Repeatability precision ±1 μm oad capacity 10 Kgf Missed step Parallelism 1 μm Dynamic straightness Dynamic parallelism 10 μm Motor Type/Shaft numbers -phase stepper / 8 double shafts Brand/ Model GMT / MS-8D3A Driver brand/model GMT/GTRG-D (Additional options) Connector Stage side connector 1-pin male end connector D-SUB Controller side connector 1-pin female end connector D-SUB (optional) Origin sensor imit sensor Photoelectric sensor EE-SX13 Sensor Origin approximation sensor /A Power voltage V±10% Control output Output control P open collector output under V 8mA Testing (sensing) output transistor OFF (closed) * GMT Standard wiring is defined as the product photo, and not optional available. Photos are CY30-S-D(UP) and CYC30-S-D(DOW). C 69

Standard Motorized XY axis inear-motion Stage Circular linear ball guiding Standard Motorized XY axis inear-motion Stage Circular linear ball guiding CY -S-D CYC -S-D 8.6 13 1 0 0 1 8-M3x. Ø0 8.6 13 7 0 1 0 1 6-M3x. Ø0. Ø0. Ø0 63. 3. Px Ø3.;Ø6 1. 33. 7 Px Ø3.;Ø6 1. 3. C C6 30 110 197. 1 0 7 1 P 10 1 17.. 3 /A 3 /A 30 110 197. 1 0 7 1 P 10 1 17.. 3 /A 3 /A 71

Standard Motorized XY axis inear-motion Stage Circular linear ball guiding Standard Motorized XY axis inear-motion Stage Circular linear ball guiding CY /CYC -S series XY axis Motor model Connector type S Stainless Steel Ball screw Standard grade GMT Standard -phase stepper D D-SUB1 X (VGA) CY 30 - S - D - C Axis & serial numbers Ball screw pitch Connecting cable (optional) Driver (optional) CY XY axis (w/o cover) *mm 30 30mm 1mm CYC XY axis (w/cover) mm P mm m cable* 1 C Standard specified by GMT 7 7mm m cable* 1 * 1 (D-SUB 1 pin female connector + the other side with discrete wirings) C7 7 Mechanical specifications Precision specifications Rail Stage material/surface treatment Main unit weight Resolution (pulse) Full / Half Maximum speed (full step) Motor Connector Sensor Coupling Positioning precision Repeatability precision oad capacity Missed step Parallelism Dynamic straightness Dynamic parallelism Type/Shaft numbers Brand/ Model Driver brand/model Stage side connector Controller side connector Origin sensor imit sensor Power voltage Control output Output control CY30-S-D- CYC30-S-D- X mm 30 mm mm 7 mm Ball screw Ø8 lead 1mm Ball screw Ø8 lead mm Ball screw Ø8 lead 1mm Ball screw Ø8 lead mm Ball screw Ø8 lead 1mm Ball screw Ø8 lead mm. Kg / C.8 Kg.38 Kg / C.66 Kg.6 Kg / C.88 Kg FAMCS10-* Standard grade GMT Standard* 10 μm / μm μm /. μm 10 μm / μm μm /. μm mm / sec 0 mm / sec mm / sec 0 mm / sec 10 μm 1 μm ±1 μm 1 Kgf 0 μm 10 μm μm /. μm 0 mm / sec * GMT Standard wiring is defined as the product photo, and not optional available. CY30-S-D-P CYC30-S-D-P CY-S-D- CYC-S-D- CY-S-D-P CYC-S-D-P Circular inear ball guiding Stainless Steel / ickel plating -phase stepper / 8 double shafts GMT / MS-8D3A GMT/GTRG-D (Additional options) 1-pin male end connector D-SUB 1-pin female end connector D-SUB (optional) Photoelectric sensor EE-SX98 V±10% P open collector output under V 8mA Testing (sensing): output transistor OFF (closed) CY7-S-D- CYC7-S-D- CY7-S-D-P CYC7-S-D-P 10 μm / μm mm / sec Photos are CY7-S-D(UP) and CYC7-S-D(DOW). C8 73

Standard Motorized XY axis inear-motion Stage Circular linear ball guiding Standard Motorized XY axis inear-motion Stage Circular linear ball guiding CY -S-D CYC -S-D 8.6 13 7 1 1 6-Mx. Ø0. Ø0 7 Px Ø.;Ø8 1. 3. C9 C 1 P 30 10 09 1 7 1 16 9 1 3 /A 1 P 30 10 09 1 7 1 16 9 1 3 /A 7 7

Standard Motorized XY axis inear-motion Stage Circular linear ball guiding Standard Motorized XY axis inear-motion Stage Circular linear ball guiding CY /CYC -S series Y axis Motor model Connector type S Stainless Steel Ball screw Standard grade GMT Standard -phase stepper D D-SUB1 X (VGA) CY 30 - S - D - C Axis & serial numbers Ball screw pitch Connecting cable (optional) Driver (optional) CY XY axis (w/o cover) *mm 30 30mm 1mm CYC XY axis (w/cover) mm P mm m cable* 1 C Standard specified by GMT 7 7mm m cable* 1 * 1 (D-SUB 1 pin female connector + the other side with discrete wirings) Model umber CY30-S-D- CYC30-S-D- CY30-S-D-P CYC30-S-D-P CY-S-D- CYC-S-D- CY-S-D-P CYC-S-D-P CY7-S-D- CYC7-S-D- CY7-S-D-P CYC7-S-D-P C61 76 Mechanical specifications Precision specifications X mm 30 mm mm 7 mm Ball screw Ø8 lead 1mm Ball screw Ø8 lead mm Ball screw Ø8 lead 1mm Ball screw Ø8 lead mm Ball screw Ø8 lead 1mm Ball screw Ø8 lead mm Rail Circular inear ball guiding Stage material/surface treatment Stainless Steel / ickel plating Main unit weight 3 Kg / C 3.8 Kg 3.36 Kg / C 3.7 Kg 3.68 Kg / C.06 Kg Coupling FAMCS10-* Standard grade GMT Standard* Resolution (pulse) Full / Half μm /. μm 10 μm / μm μm /. μm 10 μm / μm μm /. μm 10 μm / μm Maximum speed (full step) 0 mm / sec mm / sec 0 mm / sec mm / sec 0 mm / sec mm / sec Positioning precision μm 1 μm Repeatability precision ±1 μm oad capacity 1 Kgf Missed step Parallelism 0 μm Dynamic straightness Dynamic parallelism 10 μm Motor Type/Shaft numbers -phase stepper / 8 double shafts Brand/ Model GMT / MS-8D3A Driver brand/model GMT/GTRG-D (Additional options) Connector Stage side connector 1-pin male end connector D-SUB Controller side connector 1-pin female end connector D-SUB (optional) Origin sensor imit sensor Photoelectric sensor EE-SX13 Sensor Origin approximation sensor /A Power voltage V±10% Control output Output control P open collector output under V 8mA Testing (sensing) output transistor OFF (closed) * GMT Standard wiring is defined as the product photo, and not optional available. Photos are CY7-S-D(UP) and CYC7-S-D(DOW). C6 77

Standard Motorized XY axis inear-motion Stage Circular linear ball guiding Standard Motorized XY axis inear-motion Stage Circular linear ball guiding CY -S-D CYC -S-D 8.6 13 7 1 3 3 1 6-Mx. Ø0. Ø0 7 Px Ø.;Ø8 1. 3. C63 C6 1 P 30 1 9 1 7 1 18 7. 7. 3 3 3 3 1 P 30 1 9 1 7 1 18 7. 7. 3 3 3 3 78 79

Standard Motorized Z axis Elevator Stage inear ball guiding Standard Motorized Z axis Elevator Stage inear ball guiding AZV-F series Z axis Motor model Connector type S Steel Belt & Ball screw Standard grade GMT Standard -phase stepper D D-SUB1 X (VGA) AZV 06 - F 8 - D - C Axis & serial numbers Connecting cable (optional) Driver (optional) AZV Z axis *mm *mm *mm 06 08 10 06mm 08mm 10mm m cable* 1 m cable* 1 C Standard specified by GMT AZV06-F8-D -Mx0.7through * 1 (D-SUB 1 pin female connector + the other side with discrete wirings) 3 6.9 AZV06-F8-D AZV08-F8-D AZV10-F8-D C6 Mechanical specifications Precision specifications Rail Stage material/surface treatment Main unit weight Coupling Resolution (pulse) Full / Half Maximum speed (full step) Motor Connector Sensor Positioning precision Repeatability precision oad capacity Missed step Parallelism Dynamic straightness Dynamic parallelism Type/Shaft numbers Brand/ Model Driver brand/model Stage side connector Controller side connector Origin sensor imit sensor Power voltage Control output Output control * GMT Standard wiring is defined as the product photo, and not optional available. X mm X mm X mm 6 mm 8 mm 10 mm Belt & Ball screw Ø8 lead 1mm inear ball guiding Steel / ickel plating 0.6 Kg 1.0 Kg 1. Kg / A Standard grade GMT Standard* μm /. μm. μm / 1. μm 1 mm / sec 6 mm / sec 30 μm ± μm 3 Kgf Kgf μm μm μm 0 μm -phase stepper / 8 double shafts GMT / MS-8D3A GMT/GTRG-D (Additional options) 1-pin male end connector D-SUB 1-pin female end connector D-SUB (optional) Photoelectric sensor EE-SX98 V±10% P open collector output under V 8mA Testing (sensing): output transistor OFF (closed) Photo is AZV08-F8-D 11 3 3 3-6x1 3.xthrough C66 81

Standard Motorized Z axis Elevator Stage inear ball guiding Standard Motorized Z axis Elevator Stage inear ball guiding AZV08-F8-D AZV10-F8-D -Mx0.7through 3-Mx0.7through 73.8 93.8 C67 3-.xthrough Ø.xthrough C68 8. 8 Photo is AZV08-F8-D 8. Photo is AZV08-F8-D 83

Standard Motorized α axis Goniometer Stage Standard Motorized α axis Goniometer Stage AXG6 series α axis / Guiding Motor model Connector type CSW Brass alloy / Dovetail guiding 3 Warm & warm gear Standard grade R Right wiring eft wiring X -phase stepper D D-SUB1 (VGA) AXG 6 - CSW - 3 R - D - C Axis & serial numbers Connecting cable (optional) Driver (optional) AXG α axis *mm 3 3mm mm m cable* 1 C Standard specified by GMT mm m cable* 1 * 1 (D-SUB 1 pin female connector + the other side with discrete wirings) AXG6-3CSW-3R-D C69 8 Mechanical specifications Precision specifications Rail Stage material/surface treatment Main unit weight Coupling Resolution (pulse) Full / Half Maximum speed (full step) Positioning precision Repeatability precision oad capacity Missed step Parallelism Dynamic straightness Dynamic parallelism Type/Shaft numbers Motor Brand/ Model Driver brand/model Stage side connector Connector Controller side connector Origin sensor imit sensor Sensor Power voltage Control output Output control AXG6-3CSW-3R-D AXG6-3CSW-3-D AXG6-CSW-3R-D AXG6-CSW-3-D x mm ±1 ±10 ±7 Warm & warm gear (ratio1 / 188) Warm & warm gear (ratio1 / 76) Warm & warm gear (ratio1 / 36) Dovetail slide Brass alloy / Black fluororesin 0.8 Kg FAMM16-* Standard grade R Right wiring (Inventory specification) / eft wiring 0.009 / 0.007 0.006 / 0.003 0.00 / 0.00 1 / sec 7. / sec 7 / sec 0. ±0.0 6 Kgf 0.1 μm ±0. mm 0.0 mm -phase stepper / 8 double shafts GMT / MS-3D36A GMT/GTRG-D (Additional options) 1-pin male end connector D-SUB 1-pin female end connector D-SUB (optional) Photoelectric sensor EE-SX98 V±10% P open collector output under V 8mA Testing (sensing): output transistor OFF (closed) AXG6-CSW-3R-D AXG6-CSW-3-D 3 0 10. Photo is AXG6-CSW-3R-D - 3.3x6 Mx0.7x 3.x Rotation Center -.x M3x0.x3 19. C 8

Standard Motorized α axis Goniometer Stage Standard Motorized α axis Goniometer Stage AXG6-CSW-3R-D - 3.3x6 Mx0.7x -.x M3x0.x3 AXG6-CSW-3R-D - 3.3x6 Mx0.7x -.x M3x0.x3 3.x 3.x Rotation Center Rotation Center 0 C71 C7 0 86 Photo is AXG6-CSW-3R-D. 10. 19. Photo is AXG6-CSW-3R-D. 10. 19. 87

Standard Motorized θ axis Rotation Stage Bearing guiding Standard Motorized θ axis Rotation Stage Bearing guiding AR series θ axis Motor model Connector type A Aluminum alloy 3 Warm & warm gear Standard grade GMT Standard -phase stepper D D-SUB1 X (VGA) AR 39 - A 3 - D - C Axis & serial numbers Connecting cable (optional) Driver (optional) AR θ axis 39 ø39mm 9 ø9mm m cable* 1 C Standard specified by GMT ømm m cable* 1 100 ø100mm * 1 (D-SUB 1 pin female connector + the other side with discrete wirings) AR39-A3-D AR9-A3-D AR-A3-D AR100-A3-D C73 88 Mechanical specifications Precision specifications ø39 mm ø9 mm ø mm ø100 mm 3 Warm & warm gear (ratio 1 / 10) Warm & warm gear (ratio 1 / 1) Warm & warm gear (ratio 1 / 1) Rail Deep groove ball bearing Crossed-roller bearing Stage material/surface treatment Aluminum alloy / Black anodized Main unit weight 0. Kg 0.6 Kg 0.8 Kg 1. Kg Coupling FSMMS1-*6 FSMMS1-* FSMMS1-* Standard grade GMT Standard* Resolution (pulse) Full / Half 0.01 / 0.007 0.01 / 0.00 0.01 / 0.006 Maximum speed (full step) / sec 1 / sec / sec Positioning precision 0.1 Repeatability precision ±0.0 oad capacity Kgf 0 Kgf Missed step Parallelism 0.1 μm Dynamic straightness Dynamic parallelism 30 μm Motor Type/Shaft numbers -phase stepper / 8 double shafts -phase stepper / 3 double shafts Brand/ Model GMT / MS-8D3A GMT / MS-3D36A Driver brand/model GMT/GTRG-D (Additional options) Connector Stage side connector 1-pin male end connector D-SUB Controller side connector 1-pin female end connector D-SUB (optional) Sensor Origin sensor imit sensor Power voltage Control output Photoelectric sensor EE-SX98 V±10% P open collector output under V 8mA Output control Testing (sensing): output transistor OFF (closed) * GMT Standard wiring is defined as the product photo, and not optional available. AR39-A3-D 3-3.through 6x3.3. Photo is AR100-A3-D 9. 3 30 39 3 P.C.D= 3 9 -.x M3x0.x3 63. C7 89

Standard Motorized θ axis Rotation Stage Bearing guiding Standard Motorized θ axis Rotation Stage Bearing guiding AR9-A3-D 3-.through - 3.3x6 Mx0.7x AR100-A3-D 79 30 9 30 P.C.D= 10 100 3-6.6through 6 30 10 AR-A3-D - 3.3x Mx0.7x 1 3-.through P.C.D= 90 1 100 10 100 8-3.3x7 Mx0.7x6 17-3.3x10 Mx0.7x8 C7 C76 3 6 1 90 91

Standard Motorized X axis inear-motion Stage Crossed-roller guiding Standard Motorized X axis inear-motion Stage Crossed-roller guiding AX-A series Motor model Connector type A Aluminum alloy 1 V-Teeth lead screw V Standard grade R Right wiring -phase stepper D D-SUB1 eft wiring X AX - A 1 V R - D - C Axis & serial numbers Connecting cable (optional) Driver (optional) (VGA) X axis AX X axis *mm *mm m cable* 1 C Standard specified by GMT *mm m cable* 1 100 10 100*100mm 10*10mm * 1 (D-SUB 1 pin female connector + the other side with discrete wirings) AX-A1VR-D AX-A1VR-D AX-A1VR-D AX-A1V-D AX-A1V-D AX-A1V-D AX100-A1VR-D AX100-A1V-D AX10-A1VR-D AX10-A1V-D C77 9 Mechanical specifications Precision specifications Rail Stage material/surface treatment Main unit weight Coupling Resolution (pulse) Full / Half Maximum speed (full step) Positioning precision Repeatability precision oad capacity Missed step Parallelism Dynamic straightness Dynamic parallelism Type/Shaft numbers Motor Brand/ Model Driver brand/model Stage side connector Connector Controller side connector Origin sensor imit sensor Sensor Power voltage Control output Output control X mm X mm X mm 100X100 mm 10X10 mm 1 mm 0 mm 30 mm mm mm V-Teeth lead screw Ø6 lead 1mm V-Teeth lead screw Ø8 lead 1mm Crossed-roller guiding Aluminum alloy / Black anodized 0.37 Kg 0.6 Kg 1. Kg 1.6 Kg.6 Kg FAMMS1-3* FAMS16-* FAMMS16-* V Standard grade R Right wiring (Inventory specification) / eft wiring μm /. μm mm / sec μm ± μm 6 Kgf 1 Kgf 3 Kgf Kgf μm 30 μm 6.6 μm 1 μm -phase stepper / 8 double shafts -phase stepper / double shafts GMT / MS-8D3A GMT / MS-D7A GMT / DS-0A (Additional options) GMT / DS-03A (Additional options) 1-pin male end connector D-SUB 1-pin female end connector D-SUB (optional) Photoelectric sensor EE-SX98 V±10% P open collector output under V 8mA Testing (sensing): output transistor OFF (closed) AX-A1VR-D Photo is AX-A1VR-D C78 93

Standard Motorized X axis inear-motion Stage Crossed-roller guiding Standard Motorized X axis inear-motion Stage Crossed-roller guiding AX-A1VR-D AX100-A1VR-D AX-A1VR-D AX10-A1VR-D C79 C 9 9

Standard Motorized XY axis inear-motion Stage Crossed-roller guiding Standard Motorized XY axis inear-motion Stage Crossed-roller guiding AY-A series Motor model Connector type A Aluminum alloy 1 V-Teeth lead screw V Standard grade R Right wiring -phase stepper D D-SUB1 eft wiring X AY - A 1 V R - D - C Axis & serial numbers Connecting cable (optional) Driver (optional) (VGA) XY axis AY XY axis *mm *mm m cable* 1 C Standard specified by GMT *mm m cable* 1 100 10 100*100mm 10*10mm * 1 (D-SUB 1 pin female connector + the other side with discrete wirings) AY-A1VR-D AY-A1VR-D AY-A1VR-D AY-A1V-D AY-A1V-D AY-A1V-D AY100-A1VR-D AY100-A1V-D AY10-A1VR-D AY10-A1V-D C81 96 Mechanical specifications Precision specifications Rail Stage material/surface treatment Main unit weight Coupling Resolution (pulse) Full / Half Maximum speed (full step) Positioning precision Repeatability precision oad capacity Missed step Parallelism Dynamic straightness Dynamic parallelism Type/Shaft numbers Motor Brand/ Model Driver brand/model Stage side connector Connector Controller side connector Origin sensor imit sensor Sensor Power voltage Control output Output control X mm X mm X mm 100X100 mm 10X10 mm 1 mm 0 mm 30 mm mm mm V-Teeth lead screw Ø6 lead 1mm V-Teeth lead screw Ø8 lead 1mm Crossed-roller guiding Aluminum alloy / Black anodized 0.76 Kg 1.38 Kg. Kg 3.3 Kg. Kg FAMMS1-3* FAMS16-* FAMMS16-* V Standard grade R Right wiring (Inventory specification) / eft wiring μm /. μm mm / sec μm ± μm Kgf 19 Kgf 1 Kgf Kgf μm 30 μm 6.6 μm 1 μm -phase stepper / 8 double shafts -phase stepper / double shafts GMT / MS-8D3A GMT / MS-D7A GMT / DS-0A (Additional options) GMT / DS-03A (Additional options) 1-pin male end connector D-SUB 1-pin female end connector D-SUB (optional) Photoelectric sensor EE-SX98 V±10% P open collector output under V 8mA Testing (sensing): output transistor OFF (closed) AY-A1VR-D Photo is AY-A1VR-D C8 97

Standard Motorized XY axis inear-motion Stage Crossed-roller guiding Standard Motorized XY axis inear-motion Stage Crossed-roller guiding AY-A1VR-D AY100-A1VR-D AY-A1VR-D AY10-A1VR-D C83 C8 98 99

Standard Motorized X axis inear-motion Stage inear ball guiding Standard Motorized X axis inear-motion Stage inear ball guiding AX-F series Motor model Connector type A Steel 1 V-Teeth lead screw V Standard grade R Right wiring -phase stepper D D-SUB1 eft wiring X AX - F 1 V R - D - C Axis & serial numbers Connecting cable (optional) Driver (optional) (VGA) X axis AX X axis *mm *mm m cable* 1 C Standard specified by GMT *mm m cable* 1 * 1 (D-SUB 1 pin female connector + the other side with discrete wirings) AX-F1VR-D AX-F1VR-D AX-F1VR-D AX-F1VR-D AX-F1V-D AX-F1V-D AX-F1V-D -.x8 M3x0.x6 C8 100 Mechanical specifications Precision specifications Rail Stage material/surface treatment Main unit weight Coupling Resolution (pulse) Full / Half Maximum speed (full step) Positioning precision Repeatability precision oad capacity Missed step Parallelism Dynamic straightness Dynamic parallelism Type/Shaft numbers Motor Brand/ Model Driver brand/model Stage side connector Connector Controller side connector Origin sensor imit sensor Sensor Power voltage Control output Output control X mm X mm X mm 1 mm V-Teeth lead screw Ø6 lead 1mm inear ball guiding 0. Kg Steel / ickel plating 0.7 Kg 1.0 Kg FAMC13-* V Standard grade R Right wiring (Inventory specification) / eft wiring μm /. μm 6 mm / sec μm ± μm 10 Kgf 1 Kgf 1 Kgf μm 0 μm μm 10 μm -phase stepper / 8 double shafts GMT / MS-8D3A GMT / DS-0A (Additional options) 1-pin male end connector D-SUB 1-pin female end connector D-SUB (optional) Photoelectric sensor EE-SX98 V±10% P open collector output under V 8mA Testing (sensing): output transistor OFF (closed) 3. 0 3. 3 Photo is AX-F1VR-D 3 3-6x3. 3.xthrough 10. C86 101

Standard Motorized X axis inear-motion Stage inear ball guiding Standard Motorized X axis inear-motion Stage inear ball guiding AX-F1VR-D - 3.x8 Mx0.7x6 AX-F1VR-D 73. - 8x.xthrough 3 1 93. 1 8-Mx0.7x6 1. C87 0 106. C88 10 Photo is AX-F1VR-D. 1. Ø.;Ø8* Photo is AX-F1VR-D 103

Standard Motorized XY axis inear-motion Stage inear ball guiding Standard Motorized XY axis inear-motion Stage inear ball guiding AY-F series Motor model Connector type A Steel 1 V-Teeth lead screw V Standard grade R Right wiring -phase stepper D D-SUB1 eft wiring X AY - F 1 V R - D - C Axis & serial numbers Connecting cable (optional) Driver (optional) (VGA) XY axis AY XY axis *mm *mm m cable* 1 C Standard specified by GMT *mm m cable* 1 * 1 (D-SUB 1 pin female connector + the other side with discrete wirings) AY-F1VR-D AY-F1VR-D AY-F1VR-D AY-F1V-D AY-F1V-D AY-F1V-D AY-F1VR-D C89 10 Mechanical specifications Precision specifications Rail Stage material/surface treatment Main unit weight Coupling Resolution (pulse) Full / Half Maximum speed (full step) Positioning precision Repeatability precision oad capacity Missed step Parallelism Dynamic straightness Dynamic parallelism Type/Shaft numbers Motor Brand/ Model Driver brand/model Stage side connector Connector Controller side connector Origin sensor imit sensor Sensor Power voltage Control output Output control X mm X mm X mm 1 mm V-Teeth lead screw Ø6 lead 1mm inear ball guiding Steel / ickel plating 0.8 Kg 1. Kg Kg FAMC13-* V Standard grade R Right wiring (Inventory specification) / eft wiring μm /. μm 6 mm / sec μm ± μm 9 Kgf 11 Kgf 13 Kgf μm 0 μm μm 10 μm -phase stepper / 8 double shafts GMT / MS-8D3A GMT / DS-0A (Additional options) 1-pin male end connector D-SUB 1-pin female end connector D-SUB (optional) Photoelectric sensor EE-SX98 V±10% P open collector output under V 8mA Testing (sensing): output transistor OFF (closed) -.; 8x 117.6 10. 3 Photo is AY-F1VR-D -.x8 M3x0.x6 3 8. 6. 3 0 6. 8. 0 C90 10

Standard Motorized XY axis inear-motion Stage inear ball guiding Standard Motorized XY axis inear-motion Stage inear ball guiding AY-F1VR-D AY-F1VR-D 8. 6. 1. 6. 8. 8. 0 137.6 1. -.; 8x 6. -Mx0.7x6 17.6 6. -Mx0.7x6 8. 1. 0 -.; 8x C91 0 0 C9 106 Photo is AY-F1VR-D Photo is AY-F1VR-D 107

Standard Motorized X axis inear-motion Stage inear ball guiding Standard Motorized X axis inear-motion Stage inear ball guiding CXS -S series X axis Motor model Connector type S Stainless Steel 1 V-Teeth lead screw V Standard grade GMT Standard -phase stepper D D-SUB1 X (VGA) CXS 0 - S 1 V - D - C Axis & serial numbers Connecting cable (optional) Driver (optional) CXS X axis *mm 0 0mm 30 30mm m cable* 1 C Standard specified by GMT m cable* 1 * 1 (D-SUB 1 pin female connector + the other side with discrete wirings) CXS -S1V-D C93 108 Mechanical specifications Precision specifications Rail Stage material/surface treatment Main unit weight Resolution (pulse) Full / Half Maximum speed (full step) Motor Connector Sensor Coupling Positioning precision Repeatability precision oad capacity Missed step Parallelism Dynamic straightness Dynamic parallelism Type/Shaft numbers Brand/ Model Driver brand/model Stage side connector Controller side connector Origin sensor imit sensor Power voltage Control output Output control * GMT Standard wiring is defined as the product photo, and not optional available. CYS0-S1V-D CYS30-S1V-D X mm 0 mm 30 mm V-Teeth lead screw Ø8 lead 1mm inear ball guiding Stainless Steel / ickel plating 0.7 Kg 0.7 Kg FAMCS10-* V Standard grade GMT Standard* μm /. μm 10 mm / sec μm ± μm 6 Kgf 1 μm 10 μm -phase stepper / 8 double shafts GMT / MS-8D3A GMT / DS-0A (Additional options) 1-pin male end connector D-SUB 1-pin female end connector D-SUB (optional) Photoelectric sensor EE-SX98 V±10% P open collector output under V 8mA Testing (sensing): output transistor OFF (closed) 13 8.6 8-M3x. 30 0 0 Photo is CXS30-S1V-D 0 0 1 -Ø.;Ø8 1. Ø0 8. 0 30 1 1 13. 1. C9 109

Standard Motorized X axis inear-motion Stage inear ball guiding Standard Motorized X axis inear-motion Stage inear ball guiding CXS -S series X axis Motor model Connector type S Stainless Steel 1 V-Teeth lead screw V Standard grade GMT Standard -phase stepper D D-SUB1 X (VGA) CXS 0 - S 1 V - D - C Axis & serial numbers Connecting cable (optional) Driver (optional) CXS X axis *mm 0 0mm *mm 30 30mm m cable* 1 C Standard specified by GMT *mm mm m cable* 1 * 1 (D-SUB 1 pin female connector + the other side with discrete wirings) CXS -S1V-D CXS0-S1V-D CXS30-S1V-D CXS-S1V-D C9 Mechanical specifications Precision specifications Rail Stage material/surface treatment Main unit weight Resolution (pulse) Full / Half Maximum speed (full step) Motor Connector Sensor Coupling Positioning precision Repeatability precision oad capacity Missed step Parallelism Dynamic straightness Dynamic parallelism Type/Shaft numbers Brand/ Model Driver brand/model Stage side connector Controller side connector Origin sensor imit sensor Power voltage Control output Output control X mm X mm 0 mm 30 mm mm V-Teeth lead screw Ø8 lead 1mm inear ball guiding Stainless Steel / ickel plating 0.7 Kg 0.8 Kg 1.11 Kg FAMCS10-* V Standard grade GMT Standard* μm /. μm 10 mm / sec μm ± μm 7 Kgf 1 μm 10 μm -phase stepper / 8 double shafts GMT / MS-8D3A GMT/GTRG-D (Additional options) 1-pin male end connector D-SUB 1-pin female end connector D-SUB (optional) Photoelectric sensor EE-SX98 V±10% P open collector output under V 8mA Testing (sensing): output transistor OFF (closed) 13 8.6 8-Mx. * GMT Standard wiring is defined as the product photo, and not optional available. Photo is CXS0-S1V-D 16 16 30 16 16 1 8-M3x. -Ø.;Ø8 1. Ø0 8. 0 30 1 131 8. 1 11 68. 1 19 101. C96 110 111

Standard Motorized X axis inear-motion Stage inear ball guiding Standard Motorized X axis inear-motion Stage inear ball guiding CXS -S series X axis Motor model Connector type S Stainless Steel 1 V-Teeth lead screw V Standard grade GMT Standard -phase stepper D D-SUB1 X (VGA) CXS 0 - S 1 V - D - C Axis & serial numbers Connecting cable (optional) Driver (optional) CXS X axis *mm 0 0mm *mm 30 30mm m cable* 1 C Standard specified by GMT *100mm mm m cable* 1 * 1 (D-SUB 1 pin female connector + the other side with discrete wirings) CXS -S1V-D C97 11 Mechanical specifications Precision specifications Rail Stage material/surface treatment Main unit weight Resolution (pulse) Full / Half Maximum speed (full step) Motor Connector Sensor Coupling Positioning precision Repeatability precision oad capacity Missed step Parallelism Dynamic straightness Dynamic parallelism Type/Shaft numbers Brand/ Model Driver brand/model Stage side connector Controller side connector Origin sensor imit sensor Power voltage Control output Output control * GMT Standard wiring is defined as the product photo, and not optional available. CXS0-S1V-D CXS30-S1V-D CXS-S1V-D X mm X100 mm 0 mm 30 mm mm V-Teeth lead screw Ø8 lead 1mm inear ball guiding Stainless Steel / ickel plating 1.1 Kg 1. Kg 1.3 Kg FAMCS10-* V Standard grade GMT Standard* μm /. μm 10 mm / sec μm ± μm 8 Kgf 1 μm 10 μm -phase stepper / 8 double shafts GMT / MS-8D3A GMT / DS-0A (Additional options) 1-pin male end connector D-SUB 1-pin female end connector D-SUB (optional) Photoelectric sensor EE-SX98 V±10% P open collector output under V 8mA Testing (sensing): output transistor OFF (closed) 8.6 30 Photo is CXS30-S1V-D 13 1-Mx. 3 3 16 16 3 3 16 16 1 -M3x. -Ø.;Ø8 1. Ø0 8. 0 30 1 11 8. 1 161 68. 1 19 101. 100 C98 113

Standard Motorized XY axis inear-motion Stage inear ball guiding Standard Motorized XY axis inear-motion Stage inear ball guiding CYS -S series XY axis Motor model Connector type S Stainless Steel 1 V-Teeth lead screw V Standard grade GMT Standard -phase stepper D D-SUB1 X (VGA) CYS 0 - S 1 V - D - C Axis & serial numbers Connecting cable (optional) Driver (optional) CYS XY axis *mm 0 0mm 30 30mm m cable* 1 C Standard specified by GMT m cable* 1 * 1 (D-SUB 1 pin female connector + the other side with discrete wirings) CYS -S1V-D CYS0-S1V-D CYS30-S1V-D 8-M3x. 0 0 1 C99 11 Mechanical specifications Precision specifications Rail Stage material/surface treatment Main unit weight Resolution (pulse) Full / Half Maximum speed (full step) Motor Connector Sensor Coupling Positioning precision Repeatability precision oad capacity Missed step Parallelism Dynamic straightness Dynamic parallelism Type/Shaft numbers Brand/ Model Driver brand/model Stage side connector Controller side connector Origin sensor imit sensor Power voltage Control output Output control * GMT Standard wiring is defined as the product photo, and not optional available. X mm 0 mm 30 mm V-Teeth lead screw Ø8 lead 1mm inear ball guiding Stainless Steel / ickel plating 1.1 Kg 1. Kg FAMCS10-* V Standard grade GMT Standard* μm /. μm 10 mm / sec μm ± μm Kgf 1 μm 10 μm -phase stepper / 8 double shafts GMT / MS-8D3A GMT / DS-0A (Additional options) 1-pin male end connector D-SUB 1-pin female end connector D-SUB (optional) Photoelectric sensor EE-SX98 V±10% P open collector output under V 8mA Testing (sensing): output transistor OFF (closed) 8.6 13. 8. Photo is CYS30-S1V-D 0 0 1 30 Ø0 -Ø.;Ø8 Ø0 1. 8. 0 30 1 1 13. 1. C100 11

Standard Motorized XY axis inear-motion Stage inear ball guiding Standard Motorized XY axis inear-motion Stage inear ball guiding CYS -S series XY axis Motor model Connector type S Stainless Steel 1 V-Teeth lead screw V Standard grade GMT Standard -phase stepper D D-SUB1 X (VGA) CYS 0 - S 1 V - D - C Axis & serial numbers Connecting cable (optional) Driver (optional) CYS XY axis *mm 0 0mm *mm 30 30mm m cable* 1 C Standard specified by GMT *mm mm m cable* 1 * 1 (D-SUB 1 pin female connector + the other side with discrete wirings) CYS -S1V-D 8-Mx. X-axis /Y-axis 3 16 16 1 8-M3x. C101 Mechanical specifications Precision specifications Rail Stage material/surface treatment Main unit weight Resolution (pulse) Full / Half Maximum speed (full step) Motor Connector Sensor Coupling Positioning precision Repeatability precision oad capacity Missed step Parallelism Dynamic straightness Dynamic parallelism Type/Shaft numbers Brand/ Model Driver brand/model Stage side connector Controller side connector Origin sensor imit sensor Power voltage Control output Output control CYS0-S1V-D CYS30-S1V-D CYS-S1V-D X mm X mm 0 mm 30 mm mm V-Teeth lead screw Ø8 lead 1mm inear ball guiding Stainless Steel / ickel plating 1. Kg 1.6 Kg. Kg FAMCS10-* V Standard grade GMT Standard* μm /. μm 10 mm / sec μm ± μm 6 Kgf 1 μm 10 μm -phase stepper / 8 double shafts GMT / MS-8D3A GMT / DS-0A (Additional options) 1-pin male end connector D-SUB 1-pin female end connector D-SUB (optional) Photoelectric sensor EE-SX98 V±10% P open collector output under V 8mA Testing (sensing): output transistor OFF (closed) * GMT Standard wiring is defined as the product photo, and not optional available. Photo is CYS30-S1V-D 8.6 13. 8. X-axis 3/Y-axis 16 16 1 30 Ø0 -Ø.;Ø8 1. Ø0 8. 0 30 1 3 1 3 1 131 8. 11 68. 19 101. 3 C10 116 117

Standard Motorized XY axis inear-motion Stage inear ball guiding Standard Motorized XY axis inear-motion Stage inear ball guiding CYS -S series XY axis Motor model Connector type S Stainless Steel 1 V-Teeth lead screw V Standard grade GMT Standard -phase stepper D D-SUB1 X (VGA) CYS 0 - S 1 V - D - C Axis & serial numbers Connecting cable (optional) Driver (optional) CYS XY axis *mm 0 0mm *mm 30 30mm m cable* 1 C Standard specified by GMT *100mm mm m cable* 1 * 1 (D-SUB 1 pin female connector + the other side with discrete wirings) C103 118 Mechanical specifications Precision specifications Rail Stage material/surface treatment Main unit weight Resolution (pulse) Full / Half Maximum speed (full step) Motor Connector Sensor Coupling Positioning precision Repeatability precision oad capacity Missed step Parallelism Dynamic straightness Dynamic parallelism Type/Shaft numbers Brand/ Model Driver brand/model Stage side connector Controller side connector Origin sensor imit sensor Power voltage Control output Output control * GMT Standard wiring is defined as the product photo, and not optional available. CYS0-S1V-D CYS30-S1V-D CYS-S1V-D X mm X100 mm 0 mm 30 mm mm V-Teeth lead screw Ø8 lead 1mm inear ball guiding Stainless Steel / ickel plating.3 Kg. Kg.7 Kg FAMCS10-* V Standard grade GMT Standard* μm /. μm 10 mm / sec μm ± μm 6 Kgf 1 μm 10 μm -phase stepper / 8 double shafts GMT / MS-8D3A GMT / DS-0A (Additional options) 1-pin male end connector D-SUB 1-pin female end connector D-SUB (optional) Photoelectric sensor EE-SX98 V±10% P open collector output under V 8mA Testing (sensing): output transistor OFF (closed) CYS -S1V-D 8.6 Photo is CYS30-S1V-D 13. 8. 1-Mx. X-axis 3/Y-axis 3 3 1 16 16 30 X-axis /Y-axis 3 3 3 16 16 Ø0 3 3 1 -M3x. -Ø.;Ø8 1. Ø0 8. 0 30 1 3 1 3 1 11 8. 161 68. 19 101. 100 3 C10 119

Standard Motorized X axis inear-motion Stage Circular linear ball guiding Standard Motorized X axis inear-motion Stage Circular linear ball guiding CX / CXC -S series X axis Motor model Connector type S Stainless Steel 1 V-Teeth lead screw V Standard grade GMT Standard -phase stepper D D-SUB1 X (VGA) CX - S 1 V - D - C Axis & serial numbers Ball screw pitch Connecting cable (optional) Driver (optional) CX X axis (w/o cover) *mm mm 1mm CXC X axis (w/cover) 7 100 7mm 100mm P mm m cable* 1 m cable* 1 C Standard specified by GMT * 1 (D-SUB 1 pin female connector + the other side with discrete wirings) CX-S1V-D- CXC-S1V-D- CX-S1V-D-P CXC-S1V-D-P CX7-S1V-D- CXC7-S1V-D- CX7-S1V-D-P CXC7-S1V-D-P CX100-S1V-D- CXC100-S1V-D- CX100-S1V-D-P CXC100-S1V-D-P C10 10 Mechanical specifications Precision specifications X mm mm 7 mm 100 mm V-Teeth lead screw Ø8 lead 1mm V-Teeth lead screw Ø8 lead mm V-Teeth lead screw Ø8 lead 1mm V-Teeth lead screw Ø8 lead mm V-Teeth lead screw Ø8 lead 1mm V-Teeth lead screw Ø8 lead mm Rail Circular inear ball guiding Stage material/surface treatment Stainless Steel / ickel plating Main unit weight 1.1 Kg / C 1.17 Kg 1. Kg / C 1.9 Kg 1.3 Kg / C 1.39 Kg Coupling FAMCS10-* V Standard grade GMT Standard* Resolution (pulse) Full / Half μm /. μm 10 μm / μm μm /. μm 10 μm / μm μm /. μm 10 μm / μm Maximum speed (full step) 10 mm / sec 0 mm / sec 10 mm / sec 0 mm / sec 10 mm / sec 0 mm / sec Positioning precision μm Repeatability precision ± μm oad capacity 10 Kgf Missed step Parallelism 1 μm Dynamic straightness Dynamic parallelism 10 μm Motor Type/Shaft numbers -phase stepper / 8 double shafts Brand/ Model GMT / MS-8D3A Driver brand/model GMT / DS-0A (Additional options) Connector Stage side connector 1-pin male end connector D-SUB Controller side connector 1-pin female end connector D-SUB (optional) Origin sensor imit sensor Photoelectric sensor EE-SX13 Sensor Power voltage V±10% Control output P open collector output under V 8mA Output control Testing (sensing): output transistor OFF (closed) * GMT Standard wiring is defined as the product photo, and not optional available. Photos are CX100-S1V-D(UP) and CXC100-S1V-D(DOW). C106 11

Standard Motorized X axis inear-motion Stage Circular linear ball guiding Standard Motorized X axis inear-motion Stage Circular linear ball guiding CX -S1V-D CXC -S1V-D 0 0 1 0 0 1 13 8.6 30 3. 33. 0 0 Ø0 8-M3x. 3. Px Ø3.;Ø6 1. Px 1. Ø0 8.6 13 6-M3x. 37 Ø3.;Ø6 C107 C108 10 17. 3 /A 7 100 1 P 1 1. 68 3 /A /A 7 100 1 P 10 17. 3 /A 1 1. 68 3 /A /A 1 13

Standard Motorized X axis inear-motion Stage Circular linear ball guiding Standard Motorized X axis inear-motion Stage Circular linear ball guiding CX / CXC -S series X axis Motor model Connector type S Stainless Steel 1 V-Teeth lead screw V Standard grade GMT Standard -phase stepper D D-SUB1 X (VGA) CX - S 1 V - D - C Axis & serial numbers Ball screw pitch Connecting cable (optional) Driver (optional) CX X axis (w/o cover) *mm mm 1mm CXC X axis (w/cover) 7 7mm P mm m cable* 1 C Standard specified by GMT 100 100mm m cable* 1 * 1 (D-SUB 1 pin female connector + the other side with discrete wirings) CX-S1V-D- CXC-S1V-D- CX-S1V-D-P CXC-S1V-D-P CX7-S1V-D- CXC7-S1V-D- CX7-S1V-D-P CX100-S1V-D- CXC7-S1V-D-P CXC100-S1V-D- CX100-S1V-D-P CXC100-S1V-D-P C109 1 Mechanical specifications Precision specifications X mm mm 7 mm 100 mm V-Teeth lead screw Ø8 lead 1mm V-Teeth lead screw Ø8 lead mm V-Teeth lead screw Ø8 lead 1mm V-Teeth lead screw Ø8 lead mm V-Teeth lead screw Ø8 lead 1mm V-Teeth lead screw Ø8 lead mm Rail Circular inear ball guiding Stage material/surface treatment Stainless Steel / ickel Plating Main unit weight 1.19 Kg / C 1.33 Kg 1.3 Kg / C 1. Kg 1.7 Kg / C 1.61 Kg Coupling FAMCS10-* V Standard grade GMT Standard* Resolution (pulse) Full / Half μm /. μm 10 μm / μm μm /. μm 10 μm / μm μm /. μm 10 μm / μm Maximum speed (full step) 10 mm / sec 0 mm / sec 10 mm / sec 0 mm / sec 10 mm / sec 0 mm / sec Positioning precision μm Repeatability precision ± μm oad capacity 1 Kgf Missed step Parallelism 0 μm Dynamic straightness Dynamic parallelism 10 μm Motor Type/Shaft numbers -phase stepper / 8 double shafts Brand/ Model GMT / MS-8D3A Driver brand/model GMT / DS-0A (Additional options) Connector Stage side connector 1-pin male end connector D-SUB Controller side connector 1-pin female end connector D-SUB (optional) Origin sensor imit sensor Photoelectric sensor EE-SX98 Sensor Power voltage V±10% Control output P open collector output under V 8mA Output control Testing (sensing): output transistor OFF (closed) * GMT Standard wiring is defined as the product photo, and not optional available. Photos are CX100-S1V-D(UP) and CXC100-S1V-D(DOW). C110 1

Standard Motorized X axis inear-motion Stage Circular linear ball guiding Standard Motorized X axis inear-motion Stage Circular linear ball guiding CX -S1V-D CXC -S1V-D 1 13 8.6 3. Px 37 Ø0 6-Mx. Ø.;Ø8 1. C111 C11 1 9 1 7 100 1 P 16 190 98. 3 3 /A /A 1 9 1 7 100 1 P 16 190 98. 3 3 /A /A 16 17

Standard Motorized X axis inear-motion Stage Circular linear ball guiding Standard Motorized X axis inear-motion Stage Circular linear ball guiding CX / CXC -S series X axis Motor model Connector type S Stainless Steel 1 V-Teeth lead screw V Standard grade GMT Standard -phase stepper D D-SUB1 X (VGA) CX - S 1 V - D - C Axis & serial numbers Ball screw pitch Connecting cable (optional) Driver (optional) CX X axis (w/o cover) *mm mm 1mm CXC X axis (w/cover) 7 7mm P mm m cable* 1 C Standard specified by GMT 100 100mm m cable* 1 * 1 (D-SUB 1 pin female connector + the other side with discrete wirings) CX-S1V-D- CXC-S1V-D- CX-S1V-D-P CXC-S1V-D-P CX7-S1V-D- CXC7-S1V-D- CX7-S1V-D-P CXC7-S1V-D-P CX100-S1V-D- CXC100-S1V-D- CX100-S1V-D-P CXC100-S1V-D-P C113 18 Mechanical specifications Precision specifications X mm mm 7 mm 100 mm V-Teeth lead screw Ø8 lead 1mm V-Teeth lead screw Ø8 lead mm V-Teeth lead screw Ø8 lead 1mm V-Teeth lead screw Ø8 lead mm V-Teeth lead screw Ø8 lead 1mm V-Teeth lead screw Ø8 lead mm Rail Circular inear ball guiding Stage material/surface treatment Stainless Steel / ickel plating Main unit weight 1.68 Kg / C 1.86 Kg 1.8 Kg / C.03 Kg.0 Kg / C. Kg Coupling FAMCS10-* V Standard grade GMT Standard* Resolution (pulse) Full / Half μm /. μm 10 μm / μm μm /. μm 10 μm / μm μm /. μm 10 μm / μm Maximum speed (full step) 10 mm / sec 0 mm / sec 10 mm / sec 0 mm / sec 10 mm / sec 0 mm / sec Positioning precision μm Repeatability precision ± μm oad capacity 16 Kgf Missed step Parallelism 0 μm Dynamic straightness Dynamic parallelism 10 μm Motor Type/Shaft numbers -phase stepper / 8 double shafts Brand/ Model GMT / MS-8D3A Driver brand/model GMT / DS-0A (Additional options) Connector Stage side connector 1-pin male end connector D-SUB Controller side connector 1-pin female end connector D-SUB (optional) Origin sensor imit sensor Photoelectric sensor EE-SX13 Sensor Origin approximation sensor /A Power voltage V±10% Control output Output control * GMT Standard wiring is defined as the product photo, and not optional available. P open collector output under V 8mA Testing (sensing) output transistor OFF (closed) Photos are CX100-S1V-D(UP) and CXC100-S1V-D(DOW). C11 19

Standard Motorized X axis inear-motion Stage Circular linear ball guiding Standard Motorized X axis inear-motion Stage Circular linear ball guiding CX -S1V-D CXC -S1V-D 3 3 1 3. 8.6 13 6-Mx. 37 Px Ø.;Ø8 1. C11 C116 7 100 1 P 1 18 10 7. 7. 97. 1 1 1 3 3 3 7 100 1 P 1 18 10 7. 7. 97. 1 1 1 3 3 3 130 131

Standard Motorized XY axis inear-motion Stage Circular linear ball guiding Standard Motorized XY axis inear-motion Stage Circular linear ball guiding CY / CYC -S series XY axis Motor model Connector type S Stainless Steel 1 V-Teeth lead screw V Standard grade GMT Standard -phase stepper D D-SUB1 X (VGA) CY - S 1 V - D - C Axis & serial numbers Ball screw pitch Connecting cable (optional) Driver (optional) CY XY axis (w/o cover) *mm mm 1mm CYC XY axis (w/cover) 7 7mm P mm m cable* 1 C Standard specified by GMT m cable* 1 * 1 (D-SUB 1 pin female connector + the other side with discrete wirings) C117 13 Mechanical specifications Precision specifications Model umber CY-S1V-CD- CY-S1V-CD-P CY7-S1V-CD- CY7-S1V-CD-P CYC-S1V-CD- CYC-S1V-CD-P CYC7-S1V-CD- CYC7-S1V-CD-P X mm mm 7 mm V-Teeth lead screw Ø8 lead 1mm V-Teeth lead screw Ø8 lead mm V-Teeth lead screw Ø8 lead 1mm V-Teeth lead screw Ø8 lead mm Rail Circular inear ball guiding Stage material/surface treatment Stainless Steel / ickel plating Main unit weight. Kg / C.3 Kg.8 Kg / C.8 Kg Coupling FAMCS10-S-* V Standard grade GMT Standard* Resolution (pulse) Full / Half μm /. μm 10 μm / μm μm /. μm 10 μm / μm Maximum speed (full step) 10 mm / sec 0 mm / sec 10 mm / sec 0 mm / sec Positioning precision μm Repeatability precision ± μm oad capacity 10 Kgf Missed step Parallelism 1 μm Dynamic straightness Dynamic parallelism 10 μm Motor Type/Shaft numbers -phase steppinger / 8 double shafts Brand/ Model GMT / MS-8D3A Driver brand/model GMT/GTRG-D (Additional options) Connector Stage side connector 1-pin male end connector D-SUB Controller side connector 1-pin female end connector D-SUB (optional) Origin sensor imit sensor Photoelectric sensor EE-SX13 Sensor Origin approximation sensor /A Power voltage V±10% Control output P open collector output under V 8mA Output control Testing (sensing) output transistor OFF (closed) * GMT Standard wiring is defined as the product photo, and not optional available. Photos are CY7-S1V-D(UP) and CYC7-S1V-D(DOW). C118 133

Standard Motorized XY axis inear-motion Stage Circular linear ball guiding Standard Motorized XY axis inear-motion Stage Circular linear ball guiding CY -S1V-D CYC -S1V-D 8.6 13 1 0 0 1 8-M3x. Ø0 8.6 13 7 0 1 0 1 6-M3x. Ø0. Ø0. Ø0 63. 3. Px Ø3.;Ø6 1. 33. 7 Px Ø3.;Ø6 1. 3. C119 C10 7 1 P 10 1 17.. 3 /A 3 /A 7 1 P 10 1 17.. 3 /A 3 /A 13 13

Standard Motorized XY axis inear-motion Stage Circular linear ball guiding Standard Motorized XY axis inear-motion Stage Circular linear ball guiding CY / CYC -S series XY axis Motor model Connector type S Stainless Steel 1 V-Teeth lead screw V Standard grade GMT Standard -phase stepper D D-SUB1 X (VGA) CY - S 1 V - D - C Axis & serial numbers Ball screw pitch Connecting cable (optional) Driver (optional) CY X axis (w/o cover) *mm mm 1mm CYC X axis (w/cover) 7 7mm P mm m cable* 1 C Standard specified by GMT m cable* 1 * 1 (D-SUB 1 pin female connector + the other side with discrete wirings) C11 136 Mechanical specifications Precision specifications Rail Stage material/surface treatment Main unit weight Resolution (pulse) Full / Half Maximum speed (full step) Motor Connector Sensor Coupling Positioning precision Repeatability precision oad capacity Missed step Parallelism Dynamic straightness Dynamic parallelism Type/Shaft numbers Brand/ Model Driver brand/model Stage side connector Controller side connector Origin sensor imit sensor Power voltage Control output Output control CY-S1V-D- CY-S1V-D-P CY7-S1V-D- CY7-S1V-D-P CYC-S1V-D- CYC-S1V-D-P CYC7-S1V-D- CYC7-S1V-D-P X mm mm 7 mm V-Teeth lead screw Ø8 lead 1mm V-Teeth lead screw Ø8 lead mm V-Teeth lead screw Ø8 lead 1mm V-Teeth lead screw Ø8 lead mm Circular inear ball guiding Stainless Steel / ickel plating.38kg / C.66 Kg.6 Kg / C.88 Kg FAMCS10-* Standard grade GMT Standard* μm /. μm 10 μm / μm μm /. μm 10 μm / μm 10 mm / sec 0 mm / sec 10 mm / sec 0 mm / sec μm ± μm 1 Kgf 0 μm 10 μm -phase stepper / 8 double shafts GMT / MS-8D3A GMT / DS-0A (Additional options) 1-pin male end connector D-SUB 1-pin female end connector D-SUB (optional) Photoelectric sensor EE-SX98 V±10% P open collector output under V 8mA Testing (sensing): output transistor OFF (closed) * GMT Standard wiring is defined as the product photo, and not optional available. Photos are CY7-S1V-D(UP) and CYC7-S1V-D(DOW). C1 137

Standard Motorized XY axis inear-motion Stage Circular linear ball guiding Standard Motorized XY axis inear-motion Stage Circular linear ball guiding CY -S1V-D CYC -S1V-D 8.6 13 7 1 1 6-Mx. Ø0. Ø0 7 Px Ø.;Ø8 1. 3. C13 C1 7 1 P 1 16 9 1 3 /A 7 1 P 1 16 9 1 3 /A 138 139

Standard Motorized XY axis inear-motion Stage Circular linear ball guiding Standard Motorized XY axis inear-motion Stage Circular linear ball guiding CY / CYC -S series XY axis Motor model Connector type S Stainless Steel 1 V-Teeth lead screw V Standard grade GMT Standard -phase stepper D D-SUB1 X (VGA) CY - S 1 V - D - C Axis & serial numbers Ball screw pitch Connecting cable (optional) Driver (optional) CY XY axis (w/o cover) *mm mm 1mm CYC XY axis (w/cover) 7 7mm P mm m cable* 1 C Standard specified by GMT m cable* 1 * 1 (D-SUB 1 pin female connector + the other side with discrete wirings) C1 1 Mechanical specifications Precision specifications Model umber CY-S1V-CD- CY-S1V-CD-P CY7-S1V-CD- CY7-S1V-CD-P CYC-S1V-CD- CYC-S1V-CD-P CYC7-S1V-CD- CYC7-S1V-CD-P X mm mm 7 mm V-Teeth lead screw Ø8 lead 1mm V-Teeth lead screw Ø8 lead mm V-Teeth lead screw Ø8 lead 1mm V-Teeth lead screw Ø8 lead mm Rail Circular inear ball guiding Stage material/surface treatment Stainless Steel / ickel plating Main unit weight 3.36 Kg / C 3.7 Kg 3.68 Kg / C.06 Kg Coupling FAMC-S10-S-* V Standard grade GMT Standard* Resolution (pulse) Full / Half μm /. μm 10 μm / μm μm /. μm 10 μm / μm Maximum speed (full step) 10 mm / sec 0 mm / sec 10 mm / sec 0 mm / sec Positioning precision μm Repeatability precision ± μm oad capacity 1 Kgf Missed step Parallelism 0 μm Dynamic straightness Dynamic parallelism 10 μm Motor Type/Shaft numbers -phase stepper / 8 double shafts Brand/ Model GMT / MS-8D3A Driver brand/model GMT / DS-0A (Additional options) Connector Stage side connector 1-pin male end connector D-SUB Controller side connector 1-pin female end connector D-SUB (optional) Origin sensor imit sensor Photoelectric sensor EE-SX13 Sensor Origin approximation sensor /A Power voltage V±10% Control output P open collector output under V 8mA Output control Testing (sensing) output transistor OFF (closed) * GMT Standard wiring is defined as the product photo, and not optional available. Photos are CY7-S1V-D(UP) and CYC7-S1V-D(DOW). C16 11

Standard Motorized XY axis inear-motion Stage Circular linear ball guiding Standard Motorized XY axis inear-motion Stage Circular linear ball guiding CY -S1V-D CYC -S1V-D 8.6 13 7 1 3 3 1 6-Mx. Ø0. Ø0 Px 1. 7 Ø.;Ø8 3. C17 C18 7 1 P 1 18 7. 7. 3 3 /A /A 7 1 P 1 18 7. 7. 3 3 /A /A 1 13

Standard Motorized Stage 6-axis assembly application explanation (axis & stroke) Standard Motorized Stage 6-axis assembly application explanation (axis & stroke) AXG6-CSW (α axis stroke : ±7 ) (Repeatability accuracy : ±0.0 ) AZV08-F (Z axis stroke : 8mm) (Repeatability accuracy : ±μm) 30 Electrical Specifications AXG6-CSW (α axis stroke : ±7 ) C19 AR9-A3 (θ=3 ) (Repeatability accuracy : ±0.0 ) AY-F (XY axis stroke : 1mm) (Single movement accuracy : 1μm) (Repeatability accuracy : ±1μm) (Repeatability accuracy : ±0.0 ) 1

Male end connector PI layout & definition Wiring diagram Motor lead A Male end connector PI layout & definition Wiring diagram Motor lead A Models & AX-A AY-A Motor lead Ā Motor lead B Motor lead B CWS output CCWS output Power input(dc+v) Stage travel stroke ORG1 output Power input(dc 0V) Ground Models &100&10 AX-A AY-A Motor lead Ā Motor lead B Motor lead B CWS output CCWS output Motor rotary ORG output Power input(dc+v) Stage travel stroke ORG1 output Power input(dc 0V) Ground Sequence diagram Sequence diagram block block CCW block block CCW CCW ORG sensor ORG sensor CCW CW CW CW D1 Motor reversed side Mechanical CW Origin plane Origin reverse plane CCW Mechanical Motor side CW Motor reversed side Mechanical CW Origin plane Origin reverse plane CCW Mechanical Motor side D 16 17

Male end connector PI layout & definition Wiring diagram Motor lead A Male end connector PI layout & definition Wiring diagram Motor lead A Models AX-F AY-F Motor lead Ā Motor lead B Motor lead B CWS output CCWS output Power input(dc+v) Stage travel stroke ORG1 output Power input(dc 0V) Ground Models CXS CYS Motor lead Ā Motor lead B Motor lead B CWS output CCWS output Power input(dc+v) Stage travel stroke ORG1 output Power input(dc 0V) Ground Sequence diagram Sequence diagram block block block block CCW CCW CCW CCW ORG sensor ORG sensor ORG sensor ORG sensor CW CW D3 CW Motor reversed side Motor side CW Motor reversed side Motor side D Mechanical CW Origin plane Origin reverse plane CCW Mechanical Mechanical CW Origin plane Origin reverse plane CCW Mechanical 18 19

Male end connector PI layout & definition Wiring diagram Motor lead A Male end connector PI layout & definition Wiring diagram Motor lead A Models CX CY CXC CYC Motor lead Ā Motor lead B Motor lead B CWS output CCWS output Motor rotary ORG output Power input(dc+v) Stage travel stroke ORG1 output Power input(dc 0V) Ground Models 06 AZV Motor lead Ā Motor lead B Motor lead B CWS output CCWS output Power input(dc+v) Power input(dc 0V) Ground Sequence diagram Sequence diagram block block block block CCW CCW CCW CCW CW D CW CW CW ower Upper D6 Motor reversed side Mechanical CW Origin plane Origin reverse plane CCW Mechanical Motor side Mechanical CW Origin plane Origin reverse plane CCW Mechanical 1 11

Male end connector PI layout & definition Wiring diagram Motor lead A Male end connector PI layout & definition Wiring diagram Motor lead A Models 08&10 AZV Motor lead Ā Motor lead B Motor lead B CWS output CCWS output Models AXG Motor lead Ā Motor lead B Motor lead B CWS output CCWS output Power input(dc+v) Power input(dc+v) Stage travel stroke ORG1 output Stage travel stroke ORG1 output Power input(dc 0V) Power input(dc 0V) Ground Ground Sequence diagram Sequence diagram block block block block CCW CCW CCW CCW ORG sensor ORG sensor ORG sensor ORG sensor CW CW D7 CW Motor reversed side Motor side CW Motor reversed side Motor side D8 Mechanical CW Origin plane Origin reverse plane CCW Mechanical Mechanical CW Origin plane Origin reverse plane CCW Mechanical 1 13

Male end connector PI layout & definition Wiring diagram Motor lead A Male end connector PI layout & definition Wiring diagram Motor lead A Models 39&9&&100 AR Motor lead Ā Motor lead B Motor lead B Power input(dc+v) Stage travel stroke ORG1 output Power input(dc 0V) Ground Models AX-A AY-A Motor lead Ā Motor lead B Motor lead B CWS output CCWS output Power input(dc+v) Stage travel stroke ORG1 output Power input(dc 0V) Ground Sequence diagram Sequence diagram block block CCW ORG sensor ORG sensor ORG sensor CCW ORG sensor Motor reversed side Motor side D9 Origin plane Origin reverse plane CW Motor reversed side CW Motor side D10 Mechanical CW Origin plane Origin reverse plane CCW Mechanical 1 1

Male end connector PI layout & definition For V-Teeth lead screw Design Models AX-F AY-F Wiring diagram Motor lead A Motor lead Ā Motor lead B Motor lead B CWS output CCWS output Power input(dc+v) Stage travel stroke ORG1 output Male end connector PI layout & definition For V-Teeth lead screw Design Models CXS CYS Wiring diagram Motor lead A Motor lead Ā Motor lead B Motor lead B CWS output CCWS output Power input(dc+v) Stage travel stroke ORG1 output Power input(dc 0V) Ground Power input(dc 0V) Ground Sequence diagram Sequence diagram block block block block CCW CCW CCW CCW ORG sensor ORG sensor ORG sensor ORG sensor CW CW D11 CW Motor reversed side Motor side CW Motor reversed side Motor side D1 Mechanical CW Origin plane Origin reverse plane CCW Mechanical Mechanical CW Origin plane Origin reverse plane CCW Mechanical 16 17

Standard motorized stage and connecting cable Standard motorized stage and connecting cable Male end connector PI layout & definition For V-Teeth lead screw Design Models CX CY CXC CYC Wiring diagram Motor lead A Motor lead Ā Motor lead B Motor lead B CWS output CCWS output Motor rotary ORG output Power input(dc+v) Stage travel stroke ORG1 output Power input(dc 0V) Ground Designated stage connector D-SUB-1Pin male end For full-series motorized stage has been integrated D-SUB connector as default designed connector. Standard connecting cable is corresponding connection type for stage side which is including single-sided connector in m long with discrete 1 wires as common accessory stocked for optional purchasing. D-SUB standard connecting cable, D-SUB TO HRS converting cable, D-SUB TO JC converting cable are all optional accessories (sold separately). If you use HRS/JC originally, you can choose D-SUB TO HRS/D-SUB TO JC converting cable for conversion. When standard connecting cable is used, please make insulation treatment on the unused wires at the discrete wire end. Standard motorized stage and connecting cable Connecting cable length over 6 m may cause abnormal operation. Minimum bendable radius of connecting cable is times the cable diameter. Sequence diagram D-SUB Standard connecting cable 000±30 ; 00±30 ; 00±30 1±10 Model: AW1CA- ; AW1CA- ; AW1CA-6 Unit: mm D13 block CCW CW Motor reversed side Mechanical CW Origin plane Origin reverse plane CCW Mechanical block CCW CW Motor side Connecting Cable Stage side is D-SUB female end Motor leada Motor leadb Motor leadc Motor leadd Motor leade CWS output CCWS output Motor rotary ORG output Power input(+) Stage travel stroke ORG1 output Power input(-) Ground 1 3 6 7 8 9 10 11 1 13 1 1 Green line/black spot Green line/red spot Pink line/black spot Pink line/red spot Blue line/black spot Blue line/red spot White line/black spot White line/red spot Gray line/black spot Gray line/red spot Yellow line/black spot Yellow line/red spot 1 3 6 7 8 9 10 11 1 13 1 1 Control side single-sided discrete wire 1 wires Control side corresponding connection points E1 18 19

Standard motorized stage and converting cable Standard Motorized stage and -phase stepper motor/driver Cross-reference table Standard motorized stage and converting cable Standard motorized stage and converting cable E Connecting Cable Connecting Cable Model: AWC-0.1 Stage side D-SUB female end Motor leada Motor leadb Motor leadc Motor leadd Motor leade CWS output CCWS output Motor rotary ORG output Power input(+) Stage travel stroke ORG1 output Power input(-) Ground Model: AWCG0-0.1 Stage side D-SUB female end Motor leada Motor leadb Motor leadc Motor leadd Motor leade CWS output CCWS output Motor rotary ORG output Power input(+) Stage travel stroke ORG1 output Power input(-) Ground D-SUB TO JC converting cable 1 3 6 7 8 9 10 11 1 13 1 1 1±10 Green line/black spot Green line/red spot Pink line/black spot Pink line/red spot Blue line/black spot Blue line/red spot White line/black spot White line/red spot Gray line/black spot Gray line/red spot Yellow line/black spot Yellow line/red spot 1 3 6 8 11 10 1 1 16 9 1 13 7 D-SUB TO HRS converting cable 1 3 6 7 8 9 10 11 1 13 1 1 1±10 Green line/black spot Green line/red spot Pink line/black spot Pink line/red spot Blue line/black spot Blue line/red spot White line/black spot White line/red spot Gray line/black spot Gray line/red spot Yellow line/black spot Yellow line/red spot 3 6 7 8 9 10 11 1 Unit: mm Control side JC male end Motor leada Motor leadb Motor leadc Motor leadd Motor leade CWS output CCWS output Motor rotary ORG output Power input(+) Stage travel stroke ORG1 output Power input(-) Ground Unit: mm Control side JC male end 1 Motor leada Motor leadb Motor leadc Motor leadd Motor leade CWS output CCWS output Motor rotary ORG output Power input(+) Stage travel stroke ORG1 output Power input(-) Ground Standard model equipped Motor type / Shaft type Motor manufacturer Motor model Rated current Size Step angle Excitation maximum static torque Rotor inertia (Kg*m²) Driver model (optional) Driver model (optional) Motor type / Shaft type (Taiwan brand) -phase stepper motor/double shaft GMT MS-8D3A MS-8DA MS-3D36A MS-D7A 0.67A 0.67A 1.0A 1.68A 8x31.3 8x 3x36 x7 1.8 0.06-m 0.09-m 0.1-m 0.-m 0.9x10-0.1x10-1.x10-6.8x10 - GMT GTRG-D DS-0A DS-03A -phase stepper motor/double shaft Motor manufacturer TAMAGAWA SAYO TAMAGAWA Motor model TS36111E TS3611E3 SH337-1U10 TS361713E8 Rated current 1.A 1.A 1.A 1.A Size 8x33 8x7. 3x37 x7 Step angle 1.8 Excitation maximum static torque 0.0-m 0.09-m 0.1-m 0.3-m Rotor inertia (Kg*m²) 0.008x10-0.018x10-10.0x10-0.068x10 - Driver Manufacture (optional) GMT Driver model (optional) GTR-M AR39-A3E AR9-A3E AR-A3E AX-F AX-F AX-F CXS0-S CXS30-S CXS0-S CXS30-S CXS-S CXS0-S CXS30-S CXS-S CX30-S CX-S CX7-S CX30-S CX-S CX7-S CX30-S CX-S CX7-S AZ06-F AZ08-F AZ10-F AX-A AX-A AX-F1V AX-F1V AX-F1V CXS0-S1V CXS30-S1V CXS0-S1V CXS30-S1V CXS-S1V CXS0-S1V CXS30-S1V CXS-S1V CX-S1V CX7-S1V CX-S1V CX7-S1V CX-S1V CX7-S1V CX100-S CX1-S CX00-S CX100-S CX1-S CX00-S CX-S CX300-S CX100-S CX1-S CX00-S CX-S CX300-S CX100-S CX100-S CX100-S -phase stepper motor is the specification selected in standard grade, and Japanese stepping motor is listed as reference only. The most preferred driver is recommended to be specified by GMT as considerations. 1 161 Recommended Applicable platform(only list single-axle model) Standard type V-Teeth lead screw Design AR100-A3E AXG6-3CSW AXG6-CSW AXG6-CSW AX-A AX100-A AX10-A Standard Motorized stage and -phase stepper motor/driver Cross-reference table E3

Standard Motorized stage and -phase stepper motor/driver Cross-reference table Standard Motorized inear-motion stage Testing method (X axis, Y axis) Standard Motorized stage and -phase stepper motor/driver Cross-reference table Recommended Recommended Recommended Motor type / Shaft type -phase stepper motor/double shaft Motor manufacturer TAMAGAWA Motor model TS3666713E7 TS3666711E3 Rated current 0.7A 1.A Size X7 X33 Step angle /A /A /A 0.7 Excitation maximum static torque 0. -m 0.13 -m Rotor inertia (Kg*m²) 0.068 10-0.03 10 - Driver Manufacture (optional) Driver model (optional) GMT GTRM Motor type / Shaft type Motor manufacturer TAMAGAWA -phase stepper motor/double shaft SAYO TAMAGAWA Motor model TS36111E TS3611E3 SH337-1U10 TS361713E8 TS361711E1 Rated current 1.A 1.A 1.A 0.9A Size 8X33 8X7. 3X37 X7 X33 Step angle Excitation maximum static torque 0.0 -m 0.09 -m 1.8 0.1-m 0.3 -m 0.16 -m Rotor inertia (Kg*m²) 0.008 10-0.018 10-0.0 10-0.068 10-0.03 10 - Driver Manufacture (optional) Driver model (optional) GMT GTRM Motor type / Shaft type -phase stepper motor/double shaft Motor manufacturer SAYO SAYO SAYO SAYO Motor model SH81-31 SH8-31 103H10-010 103H0-010 Rated current 1A 1.A Size 8X3 8X1. X8 X3 Stepping angle 1.8 /A 1.8 Excitation maximum static torque 0.07 -m 0.1 -m 0.37 -m 0. -m Rotor inertia (Kg*m²) 0.01 10-0.0 10-0.07 10-0.03 10 - Driver Manufacture (optional) GMT GMT Driver model (optional) GTRM GTRM -phase stepper motor of Japanese brand is alternative specification suggested for standard grade motorized stage optional reference only. The most preferred driver is recommended to be specified by GMT as considerations. For different needs, please choose the suitable driver based on real functional needs. The motorized stage performance might not meet specified on the catalogue. aser interferometer aser aser Reference mirror inear stage Detection mirror Testing equipment: laser interferometer, Zeiss coordinate measuring machine. In testing, fix the stage bottom board and move the stage workbench. Positioning precision (unit: μm) Within predetermined testing range, from the starting position, move and position in a specific direction and measure the difference between actual value and target value. Use the maximum difference as positioning precision. Repeatability positioning precision (unit: ±μm) Use laser interferometer or Zeiss coordinate measuring machine (CMM) to repeat measurement for seven times. With half of the obtained maximum error from the error based on one direction to any point stop, measure in the middle point of movement distance and in the directions of two ends and obtain the maximum difference as the repeatability positioning precision. Standard Motorized inear-motion stage Testing method (X axis, Y axis) E aser Missed step (lost stroke at reverse rotation) (unit: μm) Within predetermined testing range, from the origin, make movement positioning for any point from positive direction command, measure actual movement value; make negative direction command (same pulse number) for movement positioning and measure actual movement value; make positive direction (same pulse number) command for movement positioning and measure actual movement value. Make positive direction and negation direction movement seven times and measure the individual actual movement values. The average will be the missed step. E 16 163

Standard Motorized inear-motion stage Testing method (X axis, Y axis) Standard Motorized inear-motion stage Testing method (X axis, Y axis) Standard Motorized inear-motion stage Testing method (X axis, Y axis) Micrometer inear stage Testing equipment: micrometer. In testing, fix stage and move meter. Parallelism (unit: μm) Put the stage on granite workbench. Use micrometer or Zeiss coordinate measuring machine (CMM) for measurement. At the middle of stage work area, use the measured maximum difference as the parallelism. Micrometer inear stage Standard testing gauge block inear stage Micrometer Dynamic straightness (unit: μm) Testing equipment: micrometer. In testing, fix the stage bottom board and move the stage workbench. Within predetermined testing range, from the starting position of stage, move in a specific direction and use standard gauge block as basis to measure the difference between actual value and target value for horizontal straightness and vertical straightness. Use the maximum difference a Dynamic straightness. Standard Motorized inear-motion stage Testing method (X axis, Y axis) Testing equipment: micrometer. In testing, fix stage and move stage workbench. E6 E7 Dynamic parallelism (unit: μm) Put the stage on granite workbench. Set micrometer on the workbench and measure on granite. The measured maximum difference is the Dynamic parallelism. 16 16

Standard Motorized inear-motion stage Testing method (Z axis) Standard Motorized inear-motion stage Testing method (Z axis) Standard Motorized inear-motion stage Testing method (Z axis) aser interferometer aser Reference mirror Elevator stage Detection mirror Testing equipment: laser interferometer, Zeiss coordinate measuring machine. In testing, fix the stage bottom board and move the stage workbench. One-way remove positioning precision (unit: μm) Within predetermined testing range, from the starting position, move and position in a specific direction and measure the difference between actual value and target value. Use the maximum difference as positioning precision. Micrometer Elevator stage Parallelism (unit: μm) Testing equipment: micrometer. In testing, fix stage and move meter. Put the stage on granite workbench. Use micrometer or Zeiss coordinate measuring machine (CMM) for measurement. At the middle of stage work area, use the measured maximum difference as the parallelism. Micrometer Standard Motorized inear-motion stage Testing method (Z axis) aser Repeated remove positioning precision (unit: μm) Use laser interferometer or Zeiss coordinate measuring machine (CMM) to repeat measurement for seven times. With half of the obtained maximum error from the error based on one direction to any point stop, measure in the middle point of movement distance and in the directions of two ends and obtain the maximum difference as the repeated positioning precision. Elevator stage E8 aser Missed step (lost stroke at reverse rotation) (unit: μm) Within predetermined testing range, from the origin, make movement positioning for any point from positive direction command, measure actual movement value; make negative direction command (same pulse number) for movement positioning and measure actual movement value; make positive direction (same pulse number) command for movement positioning and measure actual movement value. Make positive direction and negation direction movement seven times and measure the individual actual movement values. The average will be the missed step. Dynamic parallelism (unit: μm) Testing equipment: micrometer. In testing, fix the stage bottom board and move the stage workbench. Within predetermined testing range, from a stage starting position, move in a specific direction and measure the difference between actual value and target value. Use the maximum difference as Dynamic parallelism. E9 166 167

Standard Motorized inear-motion stage Testing method (Z axis) Standard Motorized Goniometer stage Testing method (α axis) Standard Motorized inear-motion stage Testing method (Z axis) Micrometer Elevator stage Testing equipment: micrometer. In testing, fix stage and move stage workbench. Dynamic vertical (unit: μm) Put the stage on granite workbench. Set micrometer on the workbench and measure on the standard gauge block. The measured maximum difference is the Dynamic vertical. CCD CCD Goniometer stage CCD image detection Testing equipment: CCD image detection system, Zeiss coordinate measuring machine. In testing, fix the stage bottom board and move the stage workbench. Positioning precision (unit: ) Within predetermined testing range, from the starting position, move and position in a specific direction and measure the difference between actual value and target value. Use the maximum difference as positioning precision. Repeated remove positioning precision (unit: ± ) Standard Motorized Goniometer stage Testing method ( αaxis) According to baseline, set testing standard angle for movement. In clockwise (counterclockwise) direction, fix the angle for positioning and repeat seven measurements. In the same direction, use the half of the maximum difference from any stop point as Repeatability positioning precision value. CCD Missed step (lost stroke at reverse rotation) (unit: ) Select clockwise rotation for angle positioning and set the position x1. Continue counterclockwise rotation for angle positioning and set the position E10 y1. Set arbitrary position for seven measurements. Measure in the middle of movement distance and in the direction of two ends. The obtained maximum is the missed step. E11 Missed step calculation: max (x1+x+x3 +x7) (y1+y+y3 +y7) 7 7 168 169

Standard Motorized Goniometer stage Testing method (α axis) Standard Motorized Rotation stage Testing method (θ axis) Standard Motorized Goniometer stage Testing method ( αaxis) Height of rotation center Rotation center difference within specified range Standard circle for testing Rotation range Height of rotation center (unit: mm) Testing equipment: altimeter, Zeiss coordinate measuring machine. In testing, fix stage and move meter. Within predetermined testing range, from a starting position, move in a specific direction and measure and check if the distance from bench to circle center falls within target value, which is the height of rotation center. CCD Rotation stage CCD image detection Testing equipment: CCD image detection system. In testing, fix the stage bottom board and move the stage workbench. One-way remove positioning precision (unit: ) According to baseline, set standard angle position for movement plane and fix and position rotation angle in clockwise (counterclockwise) direction. Measure the difference between actual value and target value in 3 rotation. The obtained maximum is the positioning precision. Standard Motorized Rotation stage Testing method ( θaxis) CCD Repeatability positioning precision (unit: ± ) E1 Rotation range Testing equipment: altimeter, Zeiss coordinate measuring machine. In testing, fix the stage bottom board and move the stage workbench. CCD Use any angle in clockwise (counterclockwise) direction as standard, measure deviation for stop angle for seven times. With half of the obtained maximum error, in the middle of movement distance and the direction of two ends, obtain the maximum value as the Repeatability positioning precision. Missed step (lost stroke at reverse rotation) (unit: ) Select clockwise rotation for angle positioning and set the position x1. Continue counterclockwise rotation for angle positioning and set the position y1. Set arbitrary position for seven measurements. Measure in the middle of movement distance and in the direction of two ends. The obtained maximum is the missed step. E13 Rotation center deflection precision (unit: mm) Missed step calculation: Within predetermined testing range, from a starting position, move in a specific direction and measure and check if the actual circle center falls within target value, which is the rotation center deflection precision. max (x1+x+x3 +x7) (y1+y+y3 +y7) 7 7 1 171