Calibration or m 633 633 nm 0.5 MHz 2 95% No LS/L/001 633 633 nm 0.016 fm 2 95% No LS/L/003 474 474 THz 12 khz 2 95% No LS/L/003 543 633 nm 0.0016 fm 2 95% No LS/L/003 553 474 THz 1.2 khz 2 95% No LS/L/003 steel ceramic tungsten carbide steel, reference and test the same ceramic, reference and test the same Q[29, 0.67L ], L in mm, s nm to 73 nm Q[29, 0.60L ], L in mm, s nm to 67 nm Q[29, 0.47L ], L in mm, s nm to 55 nm Q[36, 1.0L ], L in mm, s nm to 107 nm Q[36, 0.9L ], L in mm, s nm to 97 nm LS/GB/001 LS/GB/001 LS/GB/001 LS/GB/002 LS/GB/002 The BIPM key comparison database, May 2017 1/5
Calibration or Gass scale: line spacing L Gass scale: line spacing L glass scale: line spacing, L Stage micrometer: line spacing L Grid plate: grid point coordinates L 1-D grating: pitch P 2-D grating: pitch P External cylinder (plug, pin, wire) micro-cmm Optical comparison, Ultra QV CMM m 0 130 mm 0 400 mm 400 560 mm 1 10 mm 1 400 mm 50 50000 nm 50 50000 nm tungsten carbide, reference and test the same Q[36, 0.7L ], L in mm, s nm to 79 nm 0.0022L, SQRT(0.0008L )] 0.0018L, SQRT(0.0005L )] Q[0.524, 0.0025L, SQRT(0.002L)], L in mm 0.0018L, SQRT(0.0005L )] Q[0.51, 0.0025L, SQRT(0.002L )], L in mm Q(0.06, 1.2E- 03P ), P in nm Q(0.06, 1.2E- 03P ), P in nm LS/GB/002 LS/S/002 LS/S/002 2 95% No LS/S/002 LS/S/002 LS/GP/001 1 150 mm 0.6 2 95% No D034 P/001 P/002 The BIPM key comparison database, May 2017 2/5
Calibration or Internal cylinder (ring) Sphere (ball) sphere (ball): Cross calibration by Optical polygon: face using autocollimator circle dividers angle and indexing table s Instruments artifacts Autocollimator: error of indicated angle autocollimator: error of indicated angle block: included angle Optical flat: flatness, F Optical flat: flatness, F Optical parallel: flatness, F m 5 150 mm 0.5 2 95% No D006 3 50 mm 0.6 2 95% No D039 Stylus profilometer 0.1 30 mm 0.5 2 95% No LS/BD/001 Small angle generator Reference autocollimator and small angle generator Autocollimator and indexing table interferometer 0 360 0.5 " 2 95% No LS/AG/0 0 30 ' 0.4 " 2 95% No LS/AG/002 0 ±150 " 0.08 " 2 95% No LS/AG/002 A 0 90 or ' or " 0.7 " 2 95% No LS/AG/001 0.02 5 Interferometry 0.1 0.2 Interferometry 0.1 0.2 150 mm 0.032 2 95% No LS/GPI/001 150 mm 0.1 2 95% No D029 30 mm 0.1 2 95% No D028 The BIPM key comparison database, May 2017 3/5
Calibration or texture texture Parallelism, P External cylinder (plug, ring, wire) Internal cylinder (ring) Direct probing using electrical comparator m 0.2 0.4 30 mm 0.1 2 95% No D028 Stylus 0.1 2 size 1 mm to 150 mm 0.2 2 95% No D039 Stylus 0.1 2 size 5 mm to 150 mm 0.2 2 95% No D039 Sphere (ball) Stylus 0.1 2 size 5 mm to 50 mm 0.2 2 95% No D039 Sphere(Hemisphere) : roundness R external cylinder (plug, ring, wire): roundness R internal cylinder (ring): roundness R sphere (ball): roundness R (groove) depth (step height) standard (eg. ISO 5436-1 Type A), h Roughness standard: ISO roughness parameters (eg. Ra ) Multi-step, work piece on spindle roundness 0 2 size 5 mm to 100 mm 0 2 size 1 mm to 150 mm 0 2 size 5 mm to 150 mm 0 2 size 5 mm to 50 mm 0.005 5 Stylus 0.1 10 Lateral travelling range 0 mm to 50 mm Q[7, 33R ]; R in Q(1.5, h ), h in Q(36, 30Ra ), Ra in D058 D034A D006A D039A P/001 D9 The BIPM key comparison database, May 2017 4/5
Calibration or Type A2): step parameters: Ra/Rq R parameters: Rz/Rt R parameters: RSm confocal microscope White light interferometer m 0.05 1000 Q[0.02, 0.01h ], h in μm 2 95% No LS/ 0.005 50 Q[3,4h ], h in μm LS/SH/002 stylus 0.005 500 Q[4,2h ], h in μm stylus 0.1 50 stylus 0.01 50 stylus stylus 10 500 Q[20,2h ], h in μm Q[9, 18R ], R in Q[27, 18R ], R in Q[87, 4.4RSm ], RSm in The BIPM key comparison database, May 2017 5/5