F-712.MA1 and F-712.MA2 High-Precision Fiber Alignment System

Transcription

1 F-712.MA1 and F-712.MA2 High-Precision Fiber Alignment System Stacked Multi-Axis Systems for Fast Multi-Channel Photonics Alignment Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, Karlsruhe, Germany

2 Contents About this Document 4 Goal and Target Audience of this... 4 Symbols and Typographic Conventions... 4 Other Applicable Documents... 5 Safety 6 Intended Use... 6 Safety... 6 General Safety Instructions... 6 Organizational Measures... 7 Safety Instructions for P-616K001 NanoCube Nanopositioners... 7 Safety Instructions for M-122K025 Linear Stages... 9 System Overview 11 F-712.MA1 System Components F-712.MA2 System Components Details of the Mechanics Axis Definitions F-712.MA1 Coordinate Systems and Axis Identifiers F-712.MA2 Coordinate Systems and Axis Identifiers Scope of Delivery Optional Accessories Unpacking 17 Installation 17 Mounting the Mechanics Connecting the Mechanics to the Protective Earth Conductor Interconnecting the System Start-Up and Operation 30 Operating the System Safety Shutdown Discharging the NanoCube Nanopositioner Maintenance 32 Cleaning the Mechanics Performing a Maintenance Run of the M-122K025 Linear Stage Packing the F-712 Alignment System for Transport Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, Karlsruhe, Germany Page 2 / 45

3 Technical Data 34 Ambient Conditions and Classifications Maximum Ratings Specifications F-712.MA1 and F-712.MA2 Systems Requirements for the Photometer Used Details of E-712K236 / E-712K252 Controllers Details of P-616K001 NanoCube Nanopositioners Details of M-122K025 Linear Stages Dimensions F-712.MA1 and F-712.MA2 Systems P-616K001 NanoCube Nanopositioner Pin Assignments P-616K001 NanoCube Power Connection P-616K001 NanoCube Sensor Connection M-122K025 Motor Connection Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, Karlsruhe, Germany Page 3 / 45

4 About this Document Goal and Target Audience of this This user manual contains the necessary information for the intended use of the following F- 712 alignment systems: F-712.MA1 F-712.MA2 Single-sided alignment system with stacked M-122K025 XYZ linear stages and P-616K001 NanoCube nanopositioner, E- 712K252 digital controller with 4 analog inputs, firmware routines for ultrafast alignment tasks Double-sided alignment system with stacked M-122K025 XYZ linear stages and two P- 616K001 NanoCube nanopositioners, E-712K236 digital controller with 4 analog inputs, firmware routines for ultrafast alignment tasks Basic knowledge of control technology, drive technologies and suitable safety measures is assumed. Symbols and Typographic Conventions The following symbols and typographic conventions are used in this user manual: CAUTION Dangerous situation If not avoided, the dangerous situation will result in minor injury. Actions to take to avoid the situation. NOTICE Dangerous situation If not avoided, the dangerous situation will result in damage to the equipment. Actions to take to avoid the situation. Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, Karlsruhe, Germany Page 4 / 45

5 INFORMATION Information for easier handling, tricks, tips, etc. Symbol Meaning Action consisting of several steps whose sequential order must be observed Action consisting of one or several steps whose sequential order is irrelevant List item p. 5 Cross-reference to page 5 SVO? Command line or command from PI's General Command Set (GCS) (example: command to get the servo mode) RS-232 Operating element labeling on the product (example: socket of the RS- 232 interface) Device S/N Parameter name (example: parameter where the serial number is stored) Other Applicable Documents The latest versions of the relevant documents for your system are available for download on our website ( If documentation is missing or problems occur with downloading, contact your PI sales engineer or send us an (info@pi.ws). Access to the controller documentation is protected by a password. Protected documentation is only displayed on the website after entering the password. The password for the E-712 controller is included on the E-712 CD, see the Release News file in the Manuals directory. This document (F712T0002) provides safety precautions and information on installation and operation for F-712.MA1 and F-712.MA2 alignment systems with P-616K001 NanoCube and stacked M-122K025 XYZ linear stages. For fast multi-channel photonics alignment with F-712 systems, see the following document: Description Fast Multi-Channel Photonics Alignment Documents E712T0016 user manual The user manual describes the following: Fast optical alignment procedure with F-712 systems Adjustment of the closed-loop performance Commands and parameters provided by the included E- 712 controller Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, Karlsruhe, Germany Page 5 / 45

6 For general descriptions of the commands and functionality supported by the E-712K252 and E- 712K236 controllers, see the following documents: Description E-711/E-712 modular digital multi-channel controller system Documents PZ195E user manual E-712 commands PZ233E commands manual Safety Intended Use The F-712 alignment systems provide closed-loop travel in axes X, Y and Z for fiber alignment tasks. The included P-616K001 NanoCube nanopositioners and M-122K025 linear stages are equipped with incremental position sensors. Based on its design and realization, the system is intended to position fiber holders with a maximum mass of 30 g. The specifications (p. 34) are valid for horizontal orientation only. The F-712 alignment systems are laboratory devices as defined by DIN EN ; intended for indoor use and use in an environment that is free of dirt, oil, and lubricants. The intended use of the system is only possible if the included controller is applied. Safety General Safety Instructions The F-712 alignment system is built according to state-of-the-art technology and recognized safety standards. Improper use can result in personal injury and/or damage to the F-712 alignment system. Only use the F-712 alignment system for its intended purpose, and only use it if it is in a good working order. Read the user manual. Immediately eliminate any faults and malfunctions that are likely to affect safety. The operator is responsible for the correct installation and operation of the F-712 alignment system. Install the F-712 alignment system near the power source so that the power plug can be quickly and easily disconnected from the mains. Use the supplied components (power supply and power cord) to connect the F-712 alignment system to the power source. If one of the supplied components for connecting to the power source has to be replaced, use a sufficiently dimensioned component. Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, Karlsruhe, Germany Page 6 / 45

7 Organizational Measures User manual Always keep this user manual available with the F-712 alignment system. The latest versions of the user manuals are available for download on our website. Add all information from the manufacturer to the user manual, for example supplements or Technical Notes. If you give the F-712 alignment system to other users, also include this user manual as well as other relevant information provided by the manufacturer. Only use the device on the basis of the complete user manual. Missing information due to an incomplete user manual can result in minor injury and damage to equipment. Only install and operate the F-712 alignment system after you have read and understood this user manual. Personnel qualification The F-712 alignment system may only be installed, started up, operated, maintained, and cleaned by authorized and appropriately qualified personnel. Safety Instructions for P-616K001 NanoCube Nanopositioners CAUTION Dangerous voltage and residual charge in piezo actuators! The NanoCube nanopositioner is driven by piezo actuators. Temperature changes and compressive stresses can induce charges in piezo actuators. After being disconnected from the electronics, piezo actuators can also stay charged for several hours. Touching or shortcircuiting the contacts in the connector of the nanopositioner r can lead to minor injuries. In addition, the piezo actuators can be destroyed by an abrupt contraction. Only disassemble/assemble the NanoCube nanopositioner according to the instructions in this manual. Discharge the piezo actuators of the NanoCube nanopositioner before installation, removal or transport: Connect the NanoCube nanopositioner to the switched-off PI controller, which is equipped with an internal discharge resistor. Do not pull the connector out of the electronics during operation. CAUTION Risk of electric shock if the protective earth conductor is not connected! If a protective earth conductor is not or not properly connected, dangerous touch voltages can occur on the NanoCube nanopositioner in the case of malfunction or failure of the system. If touch voltages exist, touching the NanoCube nanopositioner can result in minor injuries from electric shock. Connect the NanoCube nanopositioner to a protective earth conductor (p. 25) before start-up. Do not remove the protective earth conductor during operation. If the protective earth conductor has to be temporarily removed (e.g., in the case of modifications), reconnect the NanoCube nanopositioner to the protective earth conductor before starting it up again. Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, Karlsruhe, Germany Page 7 / 45

8 NOTICE Impermissible mechanical load! An impermissible mechanical load can damage the NanoCube nanopositioner. Only send the NanoCube nanopositioner in the original packaging. Only hold the NanoCube nanopositioner by the black parts of its base body. Avoid tensile forces on the cable exit of the NanoCube nanopositioner and do not bend the cable. NOTICE Damage due to incorrectly tightened screws! Incorrectly tightened screws can cause damage. Observe the torque range given for the screws used during installation. NOTICE Operating voltage too high or incorrectly connected! Operating voltages that are too high or incorrectly connected can cause damage to the NanoCube nanopositioner. Only operate NanoCube nanopositioners with controllers/drivers and original accessories from PI. Do not exceed the operating voltage range for which the NanoCube nanopositioner is specified. Only operate the NanoCube nanopositioner when the operating voltage (power connector) is properly connected. NOTICE Destruction of the piezo actuators by electric flashovers! The use of the NanoCube nanopositioner in environments that increase the electrical conductivity can lead to the destruction of the piezo actuator by electric flashovers. Electric flashovers can be caused by moisture, high humidity, liquids and conductive materials such as metal dust. In addition, electric flashovers can also occur in certain air pressure ranges due to the increased conductivity of the air. Avoid operating the NanoCube nanopositioner in environments that can increase the electric conductivity. Only operate the NanoCube nanopositioner within the permissible ambient conditions and classifications (p. 34). Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, Karlsruhe, Germany Page 8 / 45

9 NOTICE Reduced lifetime of the piezo actuators due to permanently high voltage! The permanent application of a high static voltage to piezo actuators leads to a considerable reduction in the lifetime of the piezo ceramics of the NanoCube nanopositioner. When the NanoCube nanopositioner is not used but the controller remains switched on to ensure temperature stability, discharge the NanoCube nanopositioner (p. 31). NOTICE Uncontrolled oscillation! Oscillations can cause irreparable damage to the NanoCube nanopositioner. Oscillations are indicated by a humming and can result from the following causes: A change in the load and/or dynamics requires the servo-control parameters to be adjusted. The NanoCube nanopositioner is operated near its resonant frequency. If you notice oscillations: In closed-loop operation, immediately switch off the servo mode. In open-loop operation, immediately stop the NanoCube nanopositioner. Safety Instructions for M-122K025 Linear Stages NOTICE Operating voltage too high or incorrectly connected! Operating voltages that are too high or incorrectly connected can cause damage to the M- 122K025 linear stage. Do not exceed the operating voltage range for which the M-122K025 linear stage is specified. Only operate the M-122K025 linear stage when the operating voltage is properly connected, see Pin Assignment (p. 45). NOTICE Damage or considerable wear due to high accelerations! High accelerations can cause damage to or considerable wear on the mechanical system. Stop the motion immediately if a controller malfunction occurs. Ensure that the end of the travel range is approached at low velocity. Determine the maximum velocity for your application. Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, Karlsruhe, Germany Page 9 / 45

10 NOTICE Failure of the M-122K025 linear stage! Frequent motions over a limited travel range can cause the lubricant to be unevenly distributed in the drive train. The unevenly distribution of the lubricant can lead to failure of the M-122K025 linear stage. A maintenance run over the entire travel range will evenly spread the lubricant again. Carry out a maintenance run over the entire travel range at regular intervals. The more often motions are carried out over a limited travel range, the shorter the time between the maintenance runs has to be. Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, Karlsruhe, Germany Page 10 / 45

11 System Overview Systems with alignable sender and receiver are referred to as double-sided system, while systems with only one alignable side are referred to as single-sided system. F-712.MA1 System Components Single-sided alignment system Controller for coarse and fines axes Cables Mechanics Stack (sender or receiver) Coarse axes: Linear stages with DC motor (3x), assembled via Z- and X-adapters Nanopositioner adapter Fine axes: NanoCube nanopositioner Fiber holder Component Item No. Quantity Controller for coarse and fine axes E-712K252 1 Coarse axes: Linear stages with DC motor, assembled via Z- and X- adapters M-122K025 3 Fine axes: NanoCube nanopositioner P-616K001 1 Nanopositioner adapter (for mounting the NanoCube on the stacked linear stages) M122E Fiber holder* (e.g. F603E0040) 0 * Not included in the scope of delivery Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, Karlsruhe, Germany Page 11 / 45

12 F-712.MA2 System Components Double-sided alignment system Controller for coarse and fines axes of both receiver and sender Cables Mechanics Stack receiver side Coarse axes: Linear stages with DC motor (3x), assembled via Z- and X-adapters Stack sender side Coarse axes: Linear stages with DC motor (3x), assembled via Z- and X-adapters Nanopositioner adapter Nanopositioner adapter Fine axes: NanoCube nanopositioner Fine axes: NanoCube nanopositioner Fiber holder Fiber holder Component Item No. Quantity Controller for coarse and fine axes of both sender and receiver E-712K236 1 Coarse axes: Linear stages with DC motor, assembled via Z- and X- adapters M-122K025 6 Fine axes: NanoCube nanopositioner P-616K001 2 Nanopositioner adapter (for mounting the NanoCube on the stacked linear stages) M122E Fiber holder* (e.g. F603E0040) 0 * Not included in the scope of delivery Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, Karlsruhe, Germany Page 12 / 45

13 Details of the Mechanics Figure 1: One stack of an F-712.MA1 or F-712.MA2 alignment system 1 NanoCube Nanopositioner, affixed to the coarse X-stage via the nanopositioner adapter 2 XYZ-assembly of the coarse axes (three linear stages with DC motor, stacked via Z- and X-adapters) Figure 2: Adapter details 1 Nanopositioner adapter (shown without NanoCube nanopositioner) 2 Z-adapter of the XYZ-assembly Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, Karlsruhe, Germany Page 13 / 45

14 Axis Definitions INFORMATION The axis units are set as follows: NanoCube nanopositioner for X, Y, Z directions (fine axes): µm Linear stages with DC motors for X, Y, Z directions (coarse axes): mm F-712.MA1 Coordinate Systems and Axis Identifiers The coordinate systems shown below are enabled by default for F-712.MA1 systems. Figure 3: F-712.MA1: Orientation of the coordinate systems (right-hand rule) Axis identifier in the controller Axis name* in the controller 1 SPX 2 SPY 3 SPZ Connected to E-712K252** Module 1: E-711.SA3 Module 2: E-711.AL41 4 SMX Module 4: E-711.C82, Ch 1 5 SMY Module 4: E-711.C82, Ch 2 6 SMZ Module 5: E-711.C82, Ch 1 Notes Fine axes Coarse axes *The axis name can be changed via the Axis Name parameter of the E-712K252 controller. **The modules of the E-712K252 controller are labeled with their module number. Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, Karlsruhe, Germany Page 14 / 45

15 F-712.MA2 Coordinate Systems and Axis Identifiers The coordinate systems shown below are enabled by default for F-712.MA2 systems. Figure 4: Axis identifier in the controller F-712.MA2: Orientation of the coordinate systems (right-hand rule) Axis name* in the controller 1 SPX 2 SPY 3 SPZ 4 RPX 5 RPY 6 RPZ Connected to E-712K236** Module 1: E-711.SA6, Ch 1 to 3 Module 2: E-711.AL41 Module 1: E-711.SA6, Ch 4 to 6 Module 3: E-711.AL41 7 SMX Module 4: E-711.C82, Ch 1 8 SMY Module 4: E-711.C82, Ch 2 9 SMZ Module 5: E-711.C82, Ch 1 10 RMX Module 5: E-711.C82, Ch 2 11 RMY Module 6: E-711.C82, Ch 1 12 RMZ Module 6: E-711.C82, Ch 2 Notes Fine axes of sender Fine axes of receiver Coarse axes of sender Coarse axes of receiver *The axis name can be changed via the Axis Name parameter of the E-712K236 controller. **The modules of the E-712K236 controller are labeled with their module number. Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, Karlsruhe, Germany Page 15 / 45

16 Scope of Delivery Item No. Quantity Description F-712.MA1 F-712.MA2 E-712K Controller for coarse and fine axes, incl. cables E-712K236-1 Controller for coarse and fine axes, incl. cables E-712.CD 1 1 CD with software and documentation for E-712 P-616K NanoCube nanopositioner F712B Stack consisting of: Three M-122K025 linear stages with DC motor Z- and X-adapter for assembly of the linear stages Nanopositioner adapter K040B DC motor cable, D-Sub 15 m/f, 4 m E-711.I1B 1 1 Analog input cable for E-712 controller, BNC to Lemo, 1.5 m Screw set for protective earth Screws ISO M3x Screw set: 4 x ISO 4762 M6x25, 1 x Hex key AF 5 User documentation Optional Accessories Item No. C-887.MC* F603Exxxx F-712.NF1 Description F712T0002 user manual for the alignment system (this document), and further documents, see Other Applicable Documents (p. 5) Manual control unit, USB connector, 3 m cable Customized fiber holder including adapter for optics 4 mm, 2.5 mm, 1.25 mm, 0.44 mm Power meter for infrared light ( nm), including power supply and adapter cables * The manual control unit has to be plugged into a USB port of the host PC and used in PIMikroMove as an HID device. The display is not addressed by the host PC, only the positioning knobs can be used. Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, Karlsruhe, Germany Page 16 / 45

17 Unpacking NOTICE Impermissible mechanical load! An impermissible mechanical load can damage the NanoCube nanopositioner and the stacked XYZ-assembly of the coarse axes (M-122K025 linear stages). Only send the NanoCube nanopositioner and the stacked XYZ-assembly in their original packaging. Only hold the NanoCube nanopositioner by the black parts of its base body. Avoid tensile forces on the cable exit of the NanoCube nanopositioner and do not bend the cable. Unpacking the F-712 alignment system 1. Unpack the components of the F-712 alignment system with care. 2. Compare the contents against the items covered by the contract and against the packing list. If parts are incorrectly supplied or missing, contact PI immediately. 3. Inspect the contents for signs of damage. If you notice signs of damage, contact PI immediately. 4. Keep all packaging materials in case the F-712 alignment system needs to be transported again later. Installation Mounting the Mechanics INFORMATION F-712.MA2: The steps for mounting the stacks on receiver side and sender side are identical. INFORMATION Depending on the fiber holder used, it may be necessary to replace the metal cap of the NanoCube nanopositioner by the fiber holder. Therefore, the corresponding step of the procedure described below is optional. Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, Karlsruhe, Germany Page 17 / 45

18 Requirements You have read and understood the safety instructions (p. 6). The NanoCube nanopositioner and the M-122K025 linear stages are not connected to the controller. You have provided a suitable surface: There are four holes (F-712.MA1) / eight holes (F-712.MA2) to affix the mechanics with screws M6x25. For the required position and depth of the holes, see "Dimensions" (p. 39). The flatness of the surface is 5 µm. For applications with large temperature changes: The surface should have the same thermal expansion properties as the F-712 mechanics (e.g., surface made of aluminum). You have accounted for the space required to route cables without bending and according to regulations. For F-712.MA2 in addition: The position and orientation of the two stacks must be adapted to the required distance and orientation of the fiber holders within your application. Standard orientation: The two stacks of the double-sided system face each other, while the reveiver stack is rotated 180 and the X axes of sender and receiver are collinear; see also the figure below. Figure 5: Standard orientation of sender and receiver stacks; bottom view 1 Z-adapter of the XYZ-assembly 2 NanoCube nanopositioner 3 Drive component of the NanoCube nanopositioner Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, Karlsruhe, Germany Page 18 / 45

19 INFORMATION Factory settings of the controller in F-712 alignment systems: If a double-sided system is installed in the standard orientation, all X axes of both stacks (i.e. sender and receiver side) have the same direction and orientation, as well as all Y axes, and all Z axes. For example, x fine and x coarse of the sender side move in the same direction when commanded to move in positive direction. See Axis Definitions (p. 14) for the default coordinate system settings. Tools and accessories Suitable fiber holder (not included in the scope of delivery): For F-712.MA1: 1 pc. For F-712.MA2: 2 pcs. PI provides suitable fiber holders as optional accessories (p. 16), e.g., the F603E0040 fiber holder whose installation is described below. If you use a custom fiber holder: See the dimensional drawings of the NanoCube nanopositioner (p. 41; with or without the metal cap) for the required mounting interfaces. Screws of the following type: Screw type Quantity F-712.MA1 ISO M3x25 (in the scope of delivery) 2 4 ISO 4762 M6x25 (in the scope of delivery) 4 8 M2* 6 12 F-712.MA2 * Length depends on the fiber holder used. The maximum screw-in depth in the Nanocube nanopositioner must not be exceeded (p. 42). If suitable, the JCIS #0 type 1 M2x4 screws of the NanoCube nanopositioner may be reused. Torx screwdriver T10 Hex key AF 5 (in the scope of delivery) Suitable screwdriver for the M2 screws Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, Karlsruhe, Germany Page 19 / 45

20 Mounting the Mechanics Proceed as follows to mount a stack of an F-712.MA1 or F-712.MA2 alignment system: 1. With 2 screws ISO14580 M3x25, mount the NanoCube nanopositioner onto the nanopositioner adapter as shown in the following figures. Do not exceed a torque of 1.3 Nm. Figure 6: Relevant mounting holes Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, Karlsruhe, Germany Page 20 / 45

21 Figure 7: Placing the NanoCube nanopositioner onto the nanocube adapter Figure 8: Mounting the NanoCube nanopositioner Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, Karlsruhe, Germany Page 21 / 45

22 2. Optional (depends on the fiber holder used): Carefully remove the metal cap from the drive component of the NanoCube nanopositioner: a. Carefully remove the screws from the metal cap using a Phillips head screwdriver. Keep the screws in a safe place. Figure 9: Removing the screws of the metal cap. b. Carefully remove the metal cap from the drive component. Keep the metal cap in a safe place. Figure 10: 1 Metal cap 2 Drive component Lifting the metal cap from the drive component. Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, Karlsruhe, Germany Page 22 / 45

23 3. Place the fiber holder onto the metal cap or (if the metal cap has been removed) onto the drive component so that the relevant mounting holes overlap. Figure 11: Here: Placing the fiber holder onto the drive component. 4. Mount the fiber holder using suitable M2 screws: Do not exceed a torque of 0.4 Nm. Do not exceed the maximum screw-in depth: 2.5 mm if the fiber holder is affixed to the metal cap (see also p. 41) 2 mm if the metal cap has been removed in step 4 (see also p. 42) Figure 12: Here: Mounting the fiber holder directly onto the drive component. Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, Karlsruhe, Germany Page 23 / 45

24 5. With 4 screws ISO 4762 M6x25, mount the complete stack onto a surface. Do not exceed a torque of 10 Nm. Figure 13: Mounting the stack onto a surface; relevant slot holes. 6. For F-712.MA2: Repeat steps 1 to 5 for the second stack of the double-sided system. Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, Karlsruhe, Germany Page 24 / 45

25 Connecting the Mechanics to the Protective Earth Conductor INFORMATION Observe the applicable standards for mounting the protective earth conductors. F-712.HA2: In a double-sided system, connect both stacks to the protective earth conductor. The NanoCube nanopositioner has an M4 hole for mounting the protective earth conductor. This hole is marked with the symbol for the protective earth conductor. Figure 14: Position of the protective earth connection Requirements You have read and understood the safety precautions (p.6). The NanoCube nanopositioner and the M-122K025 linear stages are not connected to the controller. Tools and accessories Suitable protective earth conductors: Cross-sectional area of the cable 0.75 mm2 Supplied M4 protective earth screw set for connecting the protective earth conductor Suitable screwdriver Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, Karlsruhe, Germany Page 25 / 45

26 Connecting the system to the protective earth conductor Figure 15: Recommended mounting of the protective earth conductor (profile view) 1 Base body of the NanoCube nanopositioner 2 Flat washer 3 Safety washer 4 Screw 5 Cable lug 6 Protective earth conductor 1. If necessary, fasten a suitable cable lug to the protective earth conductor. 2. Fasten the cable lug of the protective earth conductor to the M4 screw on the protective earth connection of the NanoCube nanopositioner as shown in the profile view. 3. Tighten the M4 screw with a torque of 1.2 Nm to 1.5 Nm. 4. Make sure that the contact resistance at all connection points relevant for mounting the protective earth conductor is <0.1 Ω at 25 A. 5. F-712.MA2: Repeat steps 1 to 4 for the second stack. Interconnecting the System INFORMATION All cables of the mechanics must be connected before the system is powered up. Otherwise, the mechanics will not work properly. Make sure that the mechanics is interconnected completely before powering up the controllers. Secure the connections with the integrated screws against accidental disconnection. When connecting the cables, respect the labeling on the devices and connectors. INFORMATION The measured intensity values of the optical signal are fed into the controller of the F-712 system as analog input signal; see p. 36 for details. Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, Karlsruhe, Germany Page 26 / 45

27 Figure 16: F-712.MA1 system only: Front panel of the E-712K252 controller Figure 17: F-712.MA2 system only: Front panel of the E-712K236 controller Requirements You have read and understood the safety instructions (p. 6). You have read and understood the controller documentation (p. 5). The NanoCube nanopositioner and the M-122K025 linear stages are completely mounted (p. 17) and connected to the protective earth conductor (p. 25). Tools and accessories E-711.I1B analog input cable for E-712 controller, BNC to Lemo, 1.5 m; in the scope of delivery Optical fibers for sender and receiver side; not included in the scope of delivery Suitable photometer to convert the optical signal into an analog signal; not included in the scope of delivery. For suitable photometer devices and the requirements of the F- 712 systems, see Optional Accessories (p. 16), Requirements for the Photometer Used (p. 35), and Details of E-712K252 / E-712K236 Controllers (p. 36). Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, Karlsruhe, Germany Page 27 / 45

28 Interconnecting the System 1. Ensure that the power switch of the controller is in OFF position. 2. Connect the mechanics to the controller. Observe the connection diagram that matches your system (F-712.MA1 or F-712.MA2), see figures below. 3. Connect the optical fibers for sender and receiver side to the fiber holders (not shown in the figures below). 4. Connect the signal to be measured to the controller: a) Connect the fiber from the receiver side of the system to the input connector of the photometer device (not shown in the figures below). b) Connect the analog output signal of the photometer device to the controller via the E-711.I1B analog input cable. Usually, the In 1 socket of the E-711.IA4 analog interface module in the controller is used. 5. Connect the controller to a power source and to a PC according to the instructions in the controller documentation (p. 5). Figure 18: F-712.MA1 cabling scheme Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, Karlsruhe, Germany Page 28 / 45

29 Figure 19: F-712.MA2 cabling scheme Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, Karlsruhe, Germany Page 29 / 45

30 Start-Up and Operation Operating the System NOTICE Damage from collisions! Collisions between the mechanics (stack, fiber holder with fiber) and the environment can damage the mechanics, the fiber and the environment. Make sure that no collisions between the mechanics, the fiber and the environment are possible in the workspace of the system. Define the order of the reference moves for the axes so that collisions are avoided. INFORMATION With the F-712.MA1 and F-712.MA2 systems, all axes are equipped with incremental sensors. With incremental sensors, the encoder signals used for position feedback provide only relative motion information. Hence the controller cannot know the absolute position of an axis upon startup. This is why a reference move is required before absolute target positions can be commanded and reached. With the coarse axes (M-122K025 linear stages), use the FRF command to perform the reference move. If you work with PIMikroMove, click Ref. switch in the Start up axes step of the Start Up Controller window. With the fine axes (P-616K001), do not use the FRF command to perform the reference move. The reference move with P-616K001 has to be performed by an AutoZero procedure using the ATZ command. If you work with PIMikroMove, click Auto Zero in the Start up axes step of the Start Up Controller window. Read the safety instructions above and on p. 6. For general information on start-up and operation of the coarse axes (M-122K025 linear stages) and fine axes (P-616K001 NanoCube nanopositioner), see the controller documentation (p. 5). To avoid collisions, perform the reference moves of the axes in a suitable order. If necessary, move referenced axes to a position where the reference moves of other axes can be performed safely. For Fast Multi-Channel Photonics Alignment, follow the instructions in the E712T0016 user manual. Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, Karlsruhe, Germany Page 30 / 45

31 Safety Shutdown The F-712 alignment system provides safety shutdown functionality: The controller observes several items and compares their current states with certain abort criteria. See the E-712 user manual (PZ195E) for further details, including the following: Behaviour of the system if any of the abort criteria is true How to get back to normal operation Possible abort criteria Note that one abort criterion is that the position error for the axis is out of a given range of tolerance. Before delivery, PI enables the safety shutdown functionality with this criterion for the coarse axes (M-122K025 linear stages). This way, the controller will switch off the motor in the event of an axis malfunction, e.g., if the axis is blocked. Discharging the NanoCube Nanopositioner The NanoCube nanopositioner must be discharged in the following cases: Before installation If the NanoCube nanopositioner is not used but the controller remains switched on to ensure temperature stability Before demounting (e.g., before cleaning and transporting the NanoCube nanopositioner and for modifications) Discharging a NanoCube nanopositioner that is connected to the controller In closed-loop operation: 1. Switch off the servo mode on the controller. 2. Set the piezo voltage to 0 V on the controller. In open-loop operation: Set the piezo voltage to 0 V on the controller. Discharging a NanoCube nanopositioner that is not connected to the controller Connect the NanoCube nanopositioner to the switched-off controller. Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, Karlsruhe, Germany Page 31 / 45

32 Maintenance NOTICE Damage due to improper maintenance! The NanoCube nanopositioner is maintenance-free and achieves its positioning accuracy as a result of the optimum alignment of mechanical components and piezo actuators. Only disassemble/assemble the NanoCube nanopositioner according to the instructions in this manual. NOTICE Damage due to improper maintenance! Improper maintenance can lead to misalignment and failure of the M-122K025 linear stages. Only loosen screws according to the instructions in this manual. Cleaning the Mechanics Requirements You have discharged the piezo actuators of the NanoCube nanopositioners. You have ensured that the power switch of the controller is in OFF position, and then disconnected all cables of the mechanics from the controller. Cleaning the Mechanics Do not do any ultrasonic cleaning. Do not use any aggressive solvents. When necessary, clean the surfaces of the mechanics with a cloth slightly dampened with a mild cleanser or disinfectant (e. g. isopropyl alcohol). Performing a Maintenance Run of the M-122K025 Linear Stage Depending on the operational conditions and the period of use of the M-122K025 linear stages, the following maintenance measures are required. Maintenance run The maintenance run serves to distribute the existing lubricant. If you operate the M-122K025 linear stage continuously on a small travel range (<20% of the entire travel range), perform a maintenance run every 2000 motion cycles or every week across the entire travel range. The more often motions are carried out over a limited travel range, the shorter the time between the maintenance runs has to be. Lubrication Under laboratory conditions, the M-122K025 linear stage needs extra lubrication in exceptional cases only. For continuous industrial use the lubrication intervals must be defined individually. Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, Karlsruhe, Germany Page 32 / 45

33 Packing the F-712 Alignment System for Transport NOTICE Impermissible mechanical load! An impermissible mechanical load can damage the NanoCube nanopositioner and the stacked XYZ-assembly of the coarse axes (M-122K025 linear stages). Only send the NanoCube nanopositioner and the stacked XYZ-assembly in their original packaging. Only hold the NanoCube nanopositioner by the black parts of its base body. Avoid tensile forces on the cable exit of the NanoCube nanopositioner and do not bend the cable. Tools and accessories Original packaging Torx screwdriver T10 Hex key AF 5 (in the scope of delivery) Suitable screwdrivers for screws M2 and M4 Packing the F-712 alignment system Proceed as follows to pack the components of one stack (if present, repeat the steps for the second stack): 1. Move all coarse axes (M-122K025 linear stages) to their mid-position (12.5 mm). 2. Uninstall and pack the NanoCube nanopositioner: a) Discharge the NanoCube nanopositioner (p. 31). b) Switch the controller off. c) Remove the cables of the NanoCube nanopositioner from the controller. d) Remove the protective earth conductor from the NanoCube nanopositioner (reverse the process desribed on p. 25). e) Carefully remove the fiber holder from the NanoCube nanopositioner. If the metal cap of the NanoCube nanopositioner was replaced by the fiber holder, reattach the metal cap (reverse the process described in steps 4, 3, and 2 of the mounting instructions (p. 17)). f) Remove the NanoCube nanopositioner from the nanopositioner adapter (reverse the process described in step 1 of the mounting instructions (p. 17)). g) Pack the NanoCube nanopositioner in its original packaging. 3. Pack the coarse axes as stacked XYZ-assembly (including the nanopositioner adapter): a) Remove the cables from the controller. b) Remove the stacked XYZ-assembly from the surface (reverse the process described in step 5 of the mounting instructions (p. 17)). c) Pack the stacked XYZ-assembly in its original packaging (special packaging with adapted foam inserts). 4. Pack the controller and cables in their original packaging. Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, Karlsruhe, Germany Page 33 / 45

34 Technical Data Ambient Conditions and Classifications The following ambient conditions must be observed for the F-712 systems: Area of application Maximum altitude Air pressure For indoor use only 2000 m 1100 hpa to 0.1 hpa (corresponds to roughly 825 Torr to Torr) Relative humidity Highest relative humidity 80 % for temperatures up to 31 C Decreasing linearly to 50 % relative humidity at 40 C Operating temperature Mechanics: 20 C to 65 C Electronics: 5 C to 40 C Storage temperature 0 C to 65 C Transport temperature 20 C to 65 C Overvoltage category Protection class Degree of pollution 1 Degree of protection according to IEC II I IP20 Maximum Ratings The M-122K025 linear stages are designed for the following operating data: Maximum operating voltage Maximum operating frequency (unloaded) Maximum power consumption 12 V DC 2.25 W The P-616K001 NanoCube nanopositioner is designed for the following operating data: Maximum operating voltage Maximum operating frequency (unloaded) Maximum power consumption / axis -20 to +120 V 240 Hz / X axis 240 Hz / Y axis 240 Hz / Z axis 4.3 W / X axis 4.3 W / Y axis 4.3 W / Z axis For the maximum ratings of the controller, see the controller documentation listed on p. 5. Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, Karlsruhe, Germany Page 34 / 45

35 Specifications F-712.MA1 and F-712.MA2 Systems Motion and Positioning Coarse Positioning Active axes F-712.MA1 / F-712.MA2 X, Y, Z Travel range in X, Y, Z 25, 25, 25 mm Minimum incremental motion 3 µm Max. velocity 20 mm/s Sensor type Guiding Drive type Fine Positioning Active axes Rotary encoder Crossed roller guides DC motor X, Y, Z Closed-loop travel in X, Y, Z 100 µm Min. incremental motion, open-loop 0.3 nm Min. incremental motion, closed-loop 2.5 nm Linearity error, for the entire travel range** 2 % Repeatability (bidirectional) 10% travel range 2 nm Sensor type Drive type Alignment Alignment time area scan 100 µm x 100 µm (max. deviation of peak intensity 0.02 db)*** Alignment time gradient search, randomized with ±5 µm (repeatability < 0.01 db)*** Miscellaneous Incremental PICMA <0.5 / <1 <0.5 / <1 s Cable length 3 / 4.5 m Technical data specified at 20 ±3 C Unit Requirements for the Photometer Used Value Unit Output signal Analog output, ideally converted from linear to logarithmic Output voltage range, max. -5 to 5 V Bandwidth, min. 1 khz Noise level, max. -60 dbm Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, Karlsruhe, Germany Page 35 / 45

36 Details of E-712K236 / E-712K252 Controllers Usable analog input channels: Connection Channel identifiers Input voltage range Resolution ADC Bandwidth Input impedance Connector E-712K236, E-712K252 In 1 to In 4 sockets of the E-711.IA4 analog interface module Four channels. For possible identifiers, see Fast Alignment Input Channels Group in the E712T0016 user manual. ±10 V differential 18 bit 25 khz 250 ohm LEMO EPG NLN For detailed specifications of the E-712 controllers, see the controller documentation listed on p. 5. Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, Karlsruhe, Germany Page 36 / 45

37 Details of P-616K001 NanoCube Nanopositioners Motion and Positioning Active axes P-616K001 X, Y, Z Open-loop travel, -20 to 120 V 120 / axis µm Closed-loop travel 100 / axis µm Min. incremental motion, closed-loop 2.5 nm Linearity error, for the entire travel range 2 % Bidirectional repeatability 2 nm Sensor Sensor type Mechanical properties Optical incremental sensors Stiffness 0.5 N/µm Unloaded resonant frequency X / Y / Z Resonant frequency with 38 g load X / Y / Z Resonant frequency with 100 g load X / Y / Z Unit 700 Hz 380 Hz 250 Hz Push force capacity (any orientation) 15 N Holding force; passive (any orientation) 15 N Maximum permissible torque for XYZ motion platform 0.4 Nm Drive Properties Drive type PICMA P Electrical capacitance 1.5 / axis µf Dynamic operating current coefficient 1.9 µa/(hz x µm) Miscellaneous Operating temperature range -20 to 80 C Material Aluminum, steel Dimensions mm Moved mass kg Mass without cable 0.13 kg Mass with cable 0.32 kg Cable length 3 m Sensor / driver connection Recommended controllers / amplifiers Technical data specified at 20 ±3 C Sensor: HD Sub-D 26 (f) Driver: Sub-D 25W3 (m) E-712K236, E-712K252 Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, Karlsruhe, Germany Page 37 / 45

38 Details of M-122K025 Linear Stages M-122K025 Unit Tolerance Motion and positioning Travel range 25 mm Integrated sensor Rotary encoder Sensor resolution 2048 cts/rev Design resolution µm Minimum incremental motion 3 µm Backlash 1 µm Unidirectional repeatability 0.15 µm Pitch ±150 µrad Yaw ±150 µrad Velocity 20 mm/s max. Reference point switch repeatability 1 µm Mechanical Properties Drive screw Ball screw Stiffness in motion direction 0.25 N/µm Load capacity 50 N max. Push / pull force 20 N max. Lateral force 25 N max. Drive Properties Motor type DC motor Operating voltage -12 to 12 V DC Motor power 2.25 W Thread pitch 0.5 mm Reference and limit switches Hall effect Miscellaneous Operating temperature range -20 to 65 C Material Aluminum, steel Mass 0.22 kg Technical data specified at 20 ±3 C Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, Karlsruhe, Germany Page 38 / 45

39 Dimensions Values in mm. Decimal places are separated by a comma. F-712.MA1 and F-712.MA2 Systems The coordinate systems shown below are enabled by default for F-712.MA1 and F-712.MA2 systems. Figure 20: F-712.MA1 dimensions Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, Karlsruhe, Germany Page 39 / 45

40 Figure 21: F-712.MA2 dimensions Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, Karlsruhe, Germany Page 40 / 45

41 P-616K001 NanoCube Nanopositioner Metal Cap Installed Figure 22: P-616K001 dimensions, with metal cap Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, Karlsruhe, Germany Page 41 / 45

42 Metal Cap Removed Figure 23: P-616K001 dimensions, without metal cap Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, Karlsruhe, Germany Page 42 / 45

43 Pin Assignments P-616K001 NanoCube Power Connection D-Sub 25W3 (m) Pin Signal* Function* Coax inner lines: A1 - - A2 - - A3 - - Standard pins: 1, Bidirectional ID Chip 4 GND ID Chip GND 5 to Input Piezo Ch Input Piezo Ch Input Piezo Ch to Input Piezo Ch 3-20 Input Piezo Ch 2-21 Input Piezo Ch * - stands for not connected Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, Karlsruhe, Germany Page 43 / 45

44 P-616K001 NanoCube Sensor Connection HD D-Sub 26 (f) Pin Signal* Function* 1 Output Ch 1 sin+ 2 Output Ch 1 cos Output Ch 2 sin+ 5 Output Ch 2 cos Output Ch 3 sin+ 8 Output Ch 3 cos Output Ch 1 sin- 11 Output Ch 1 cos Output Ch 2 sin- 14 Output Ch 2 cos Output Ch 3 sin- 17 Output Ch 3 cos- 18 to Input 5 V 26 GND GND * - stands for not connected Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, Karlsruhe, Germany Page 44 / 45

45 M-122K025 Motor Connection D-Sub 15 (m) connector Pin Signal Direction Function 1 n.c. not connected 9 MOT (-) input motor connection (-) 2 MOT (+) input motor connection (+) 10 PGND input ground (power) 3 n.c. not connected 11 n.c. not connected 4 +5V input +5 V input for encoder and logic 12 NLIM output negative limit signal (active high), TTL 5 PLIM output positive limit signal (active high), TTL 13 REFS output position reference signal, TTL 6 GND ground (logic) 14 A (+) output encoder signal A 7 A (-) output encoder signal A-dash 15 B (+) output encoder signal B 8 B (-) output encoder signal B-dash Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, Karlsruhe, Germany Page 45 / 45