More Precision. confocaldt // Confocal chromatic measuring system

Transcription

1 More Precision confocaldt // Confocal chromatic measuring system

2 Confocal chromatic hybrid sensors confocaldt IFS20 cable ø2.1 Hybrid sensors ø8mm with axial or radial (90 ) measuring direction strain relief Submicrometer resolution One-sided thickness measurement Distance measurement Extremely small spot size ~100 Passive design without electronic components 79 Mechanical tolerances ±0.1mm MR = measuring range SMR = start of measuring range Dimensions in mm. SMR ø8 MR 10 Sensor model Measuring range Start of measuring range approx. IFS 20-0, IFS 20-1,5 IFS 20- IFS µm 2.5mm 1.5mm mm 10mm 8.0mm 1.7mm 11mm Numerical aperture Light spot diameter 9µm 15µm 28µm 56µm Linearity (displacement and distance measurement) 0.µm 1.2µm µm µm Linearity (thickness measurement) 0.6µm 2.µm 6µm 0µm 16nm 60nm 100nm 250nm ±6 ±6 Resolution 1) Weight 25g ± Max. tilt 2) Protection class Temperature range Connection Shock Vibration ±16 IP6, front operated Operation Storage C C integral cable 2m; option up to 50m; bending radius: static 0mm; dynamic 0mm 15g, 6ms 2g / 10 Hz Hz FSO = Full Scale Output All data at constant ambient temperature (25±2 C) against optical flat; specifications can change when measuring different materials. 1) Average from 512 values 2) Maximum sensor tilt angle that produces a usable signal on a reflecting surface, near to the midrange

3 Mechanical tolerances ±0.1mm MR = measuring range SMR = start of measuring range Dimensions in mm ~110 strain relief cable ø SMR Sensor model IFS 20/90-1,5 Measuring range Start of measuring range approx. MR ø8 IFS 20/90- IFS 20/ mm mm 10mm.9mm 1) 12mm 1) 8.6mm 1) Numerical aperture Light spot diameter 15µm 28µm 56µm Linearity (displacement and distance measurement) 1.2µm µm µm Linearity (thickness measurement) 2.µm 6µm 0µm 60nm 100nm 250nm Resolution 2) Weight 25g ±16 Max. tilt ) Protection class Temperature range Connection Shock Vibration ±6 ±6 IP0 Operation Storage C C integral cable 2m; option up to 50m; bending radius: static 0mm; dynamic 0mm 15g, 6ms 2g / 10Hz Hz FSO = Full Scale Output All data at constant ambient temperature (25±2 C) against optical flat; specifications can change when measuring different materials. 1) Start of measuring range measured from sensor axis 2) Average from 512 values ) Maximum sensor tilt angle that produces a usable signal on a reflecting surface, near to the midrange

4 2 System design confocaldt System design The confocaldt system consists of: Sensor IFS20x Controller IFC2xx Fiber-optic cable IFS sensor Vacuum feed through (optional) EtherCAT, Ethernet RS22 Controller IFC22x IFC251 IFC261 IFC271 HS Power supply Analog output (option) Digital I/O Encoder (option)

5 25 Customer-specific modifications Application examples are often found where the standard versions of the sensors and the controller are performing at their limits. To facilitate such special tasks it is possible to customize the sensor design and to adjust the controller accordingly. Common requests for m odifications include changes in design, mounting options, customized cable lengths and modified measuring ranges. Possible modifications Sensors with connector Cable length Vacuum suitability until UHV Specific lengths Customer-specific mounting options Optical filter for ambient light compensation Housing material Measuring range / offset distance Vacuum setup C200-x / Vac C201-x IFS2xx / Vac Controller IFC2xx Vacuum feed through C / Vac (KF or CF flange) C / Vac (KF flange)

6 Accessories confocaldt Accessories: mounting adapter MA ± ø. 22 ø ø H M 5.5 Accessories: mounting adapter MA ± ø M5x0.8 M5x Accessories: mounting adapter MA200 IFS205/IFS206 (consisting of a mounting block and a mounting ring) Mounting block øx 1.5 MA 206- IFS206 ø2 0 6 ø ø MA IFS205-0, / -1 0 ø5 7 ø ø MA 205- IFS205- MA IFS ø5 Mounting ring 26 8 ø7 ø MA IFS / IFS205-0

7 27 Accessories Software IFD2n1-Tool Free demo software tool included Optical fiber Temperature range : -50 C to 90 C Bending radius: 0/0mm Accessories light source IFL222/LE Lamp module for IFC222 IFL2x1/LED Lamp module for IFC2x1 IFL251/LED(00) Lamp module for IFC251(00) Multimode core 50µm / 26µm Cladding 125µm Acrylate <250µm Cables for IFS202/IFS20 sensors CE202 cable with 2x E00/APC connectors CE202-x Extension for optical fiber (m, 10m,1m, 0m, 50m) CE202-x/PT Optical fiber with protection tube for mechanical stress (m, 10m, customer-specific length up to 50m) Strain relief PVDF: polyvinylidene fluoride Ø6 C200 cable with 2x FC/APC connectors C200-x Optical fiber (m, 5m, 10m, customer-specific length up to 50m) C200/PT-x Optical fiber with protection tube for mechanical stress (m, 5m, 10m, customer-specific length up to 50m) C200/PT-x-Vac Optical fiber with protection tube suitable for use in vacuum (m, 5m, 10m, customer-specific length up to 50m) Other accessories SC271-x/USB/IND SC271-x/IF08 PS EC271-/OE Connector cable IFC251/61/71, m, 10m, m Connector cable IFC251/61/71-IF08, m, 10m, m Power supply 2V / 2.5A Encoder cable, m 6 FC/APC standard connector ø9,5 ø2,5 Vacuum feed through C202/Vac/KF16 Vacuum feed through with optical fiber, 1 channel, vacuum side FC/APC non-vacuum side E00/APC, clamping flange KF 16 C205/Vac/1/KF16 Vacuum feed through on both sides FC/APC socket, 1 channel, clamping flange type KF 16 C205/Vac/1/CF16 Vacuum feed through on both sides FC/APC socket, 1 channel, flange type CF 16 C205/Vac/6/CF6 Vacuum feed through FC/APC socket, 6 channels, flange type CF 6 25,5,5 DIN connector ø6,8 ø2,5 Cable for IFS207 sensors C20-x Optical fiber with DIN connector and E00/APC (2m, 5m) 8,8 E00/APC standard connector Ø2 Cables for IFS205/IFS206 sensors C201 cable with FC/APC and E00/APC connectors C201-x Optical fiber (m, 5m, 10m, customer-specific length up to 50m) C201/PT-x Optical fiber with protection tube for mechanical stress (m, 5m, 10m, customer-specific length up to 50m) C201-x (01) Optical fiber core diameter 26µm (m, 5m, 15m) C201-x(10) Drag-chain suitable optical fiber (m, 5m, 10m) Coating/buffer PVC: polyvinyl chloride

8 Modifications reserved / Y E01118GKE High performance sensors made by Micro-Epsilon Sensors and systems for displacement and position Sensors and measurement devices for non-contact temperature measurement 2D/D profile sensors (laser scanner) Optical micrometers, fiber optic sensors and fiber optics Color recognition sensors, LED analyzers and color inline spectrometer Measurement and inspection systems MICRO-EPSILON USA 81 Brownleigh Dr. Raleigh, NC / USA Phone +1/919/ Fax +1/919/ me-usa@micro-epsilon.com