Displacement Sensors / Width-measuring Sensors

Transcription

1 Displacement Sensors / Width-measuring Sensors Laser Sensors Inductive Sensors Contact Sensors Smart Sensors Laser ZX-L Series B- D CMOS Laser Measuring ZS-L Series Sensor B-5 High-precision Visual Z Displacement Measurement B- System Profile Measuring System Z5 B-5 Welding Bead Sensor Z5 B-5 Multi-Dimensional Sensor Z55 B-57 Smart Sensors ZX-E Series B-6 Smart Sensor High precision contact type ZX-T Series B-77 B-

2 B-

3 Smart Laser Sensor ZX-L Unique Plug & Play Measurement Concept for Precise Measurement A multitude of "smart" functions packed in a small amplifier. Full line-up of heads for different detection methods and micron detection performance ZX-L Features The world's smallest and lightest laser sensor. It is the world's lightest. A body size similar to a photo- mm Reflective Models Throughbeam mm Models 5mm 5mm Emitter electric sensor permits space conservation and solves installation 9mm 9mm 5mm space problems. 5mm Naturally, we have also achieved a high-speed response on the same level as a photoelectric sensor. 7mm Receiver * High-speed sampling:.5 ms (response speed:. ms) Platform architecture as a optimum solution Platform architecture allows users to configure a variety range of sensor-heads to one amplifier. Plug & Play provides easy sensorhead replacement and easy maintenance. Diffuse Reflection Type Definite Reflection Type Through Beam Type ZX-L B-

4 Our line-up includes 8 reflective-type models and Through-beam-type models. Reflective Models Class visible-light laser Minute work is detected by a spot beam, and regular work is detected by a line beam. Smart adaptation to meet the needs of the application. Furthermore, the system seamlessly covers a measurement range of 8 mm to 5 mm. Spot Diameter Two, spot type 5 µm spot Line beam 5µm (mm) mm 75µm mm mm Distance range (Resolution) Three ranges (µm) (6µm) (µm) mm ± mm mm ± mm mm ± mm 6mm Amplifier Regular reflection type (displacement) CLASS Visible Light Laser 5mm The best for mirror plane object detection Distance range 55mm (Resolution:.5µm) One range mm±mm Spot Diameter Two spots model 75µm.8mm µm Through-beam Models Class visible-light laser High-precision positioning is accomplished with a mm dia. spot beam, and area detection is accomplished with a 5 mm width / mm width screen beam. Measurement width and distance range (Resolution: mm) -mm dia. spot model 5 mm width screen beam model mm dia. to.5 mm dia. 5mm mm width screen beam model mm mm width screen beam model mm to 5 mm 5 to mm to 5 mm to 5 mm to 5 mm ZX-LT ZX-LT5 ZX-LT ZX-LT Many useful functions are provided. Calculation settings that eliminate the need for a digital panel meter Patent pending A calculation unit can be inserted between two amplifiers to display the calculation results of two sensor units on one of the amplifiers. Settings are accomplished by simply entering the necessary parameters in one of the amplifiers. Includes a sensor life monitor. The laser diode (LD) life is detected automatically and the operator alerted. When LD deterioration is detected, the sub-display alerts you. This gives you time to take action before the LD dies. T=K-(A+B) Calculation unit B- Displacement sensors / Width-measuring Sensors

5 Top priority is given to easy operation. Sophisticated functions and high performance, with ease of use. This is a key feature of the ZX-L-Series. Through-beam Models Light Mode/% Mode Measurement width The interface comes from our EX-DA-N* Digital Fiber Amplifier. Feel how simple it is to operate. Decision output indicator Display three colors: High/Pass/Low Intuitional operation by the cross key Display light receiving Display measurement width Digital dual display A distance value and a threshold are displayed after power supply ON. *EX-DA-N Height of LED letters: 7 mm Obtain the resolution with ease Patent pending Simply perform detection of the work you wish to test, and you can check the resolution. The resolution is displayed so you can check how much fluctuation there is to the threshold setting and decide whether detection is possible with certitude. Multiple teaching functions. Positioning / -point / auto-matching Includes three types of teaching functions on the same level as a photoelectric sensor. Positioning teaching Ideal for high-precision positioning applications. Two-point teaching Ideal for detection of minute level differences between two points. Automatic teaching Ideal for applications where teaching is performed without stopping the work. Install in any direction. A side viewer attachment (optional) can be installed to enable various installations ZX-L Resolution Deviation to detect Side view attachment Reflective Models Light intensity mode for high-performance laser photoelectric detection Light intensity detection is possible using the minute spot of the laser beam. The sensor be used not only as a displacement meter, but also as a high-precision laser photoelectric sensor for detection of minute work with a background object and color difference. Select displacement mode or light intensity mode as appropriate for the application to establish the optimum function settings. Wide variety of easy-to-use functions. Scaling, display reverse, display off mode, ECO mode, change number of display digits, measurement processing (various timer functions and hold functions), threshold value settings, input/output settings, mutual interference (when using a computing unit), function lock, initial reset, zero reset, differential function, sensitivity selection, monitor focus, etc. Displacement Mode Light Mode Display distance Display light receiving Connector pin count ZX-L B-5

6 Application Height measurement of a minute object Face positioning Face swing/ eccentricity Sheet count Thickness of object with flutter Detection of warping / level difference Continuous measurement Detection of presence of thin object Gap detection Shape detection Features Connect to a computer for full use of sensor performance. Use the computer monitor screen for enhanced panel display. Easy processing of detection results such as waveform monitor and data logging results, which used to make system configuration more easy. Head Amplifier Waveform monitoring function Easy monitoring of waveforms, which was previously only possible with an oscilloscope. Plenty of easy-to-use functions, such as drag and drop threshold value setting. Waveform monitoring Interface unit Quality control as you desire. Data logging Log detection data and manage a status history for effective and efficient quality control and implementation of countermeasures for problems. * Screen images may in some cases differ from the actual product. Settings are supported by a list display Settings that are complicated if the amplifier panel must be used can be easily accomplished by referring to the Function menu. The settings can also be easily imported to and exported from a text editor. Export Import Summary of PC software specifications Digital numerical value monitoring Tolerance direct threshold value setting Various teaching settings Waveform monitoring Waveform collection Waveform observation/editing Waveform saving/reading Data logging Various collection condition settings Supports Microsoft Excel Configuration function Amplifier unit function settings (observation scaling, input scaling, etc.) Saving/reading of amplifier setting conditions **Microsoft Excel is either registered trademarks or trademarks of Microsoft Corporation in the United States and/or other countries. B-6 Displacement sensors / Width-measuring Sensors

7 Ordering Information Sensors Sensor head (reflection type) Optical method Beam shape Sensing distance Resolution * Model ± mm μm ZX-LD Spot beam ± mm 6 μm ZX-LD Diffuse-reflective ± mm μm ZX-LD ± mm μm ZX-LDL Line beam ± mm 6 μm ZX-LDL ± mm μm ZX-LDL Regular reflection type Spot beam ZX-LDV ± mm.5 μm Line beam ZX-LDVL * At average count of,96 times Sensor head (transmissive type) Optical method Measurement width Sensing distance Resolution * Model mm dia. to, mm ZX-LT ZX-L Through-beam 5 mm µm ZX-LT5 mm to 5 mm ZX-LT mm µm ZX-LT * At average count of 6 times Amplifier Units Shape Power supply Output specifications Model NPN output ZX-LDA-N DC PNP output ZX-LDA-N Note: Compatible with sensor head connection. Accessories (Order Separately) Computing unit Shape Model "Smart monitor" communication interface and Setup Tool for Personal Computer and PLC Shape Name Model Side view attachment ZX-CAL * *. Calculation Units are required to connect two or more sensors Shape Suitable sensor head Model ZX-LT ZX-LT5 ZX-XF + CD-ROM CD-ROM ZX-L-series Communication Interface Unit ZX-series Communication Interface Unit + ZX-L-series Sensor Setup and Logging Software ZX-L-series Sensor Setup and Logging Software ZX-SF ZX-SFWE V ZX-SWE V ZX-LT ZX-XF Extension cable for robot application Cable length Model Quantity m ZX-XCR m ZX-XCR pc. 8m ZX-XC8R 9m ZX-XC9R Two-sided connector cable (for extension) Cable length Model Quantity m ZX-XCA m ZX-XCA 8 m ZX-XC8A pc. 9 m * ZX-XC9A * Only for reflective types. ZX-L B-7

8 Rating/Performance Sensor head (reflection type) Item Model ZX-LD ZX-LD ZX-LD ZX-LDV ZX-LDL ZX-LDL ZX-LDL ZX-LDVL Optical method Light source (wave length) Measurement center distance Measurement range Diffuse reflection Regular reflection Diffuse reflection Visible-light semiconductor laser (wavelength 65 nm, mw or less, Class ) Note: When an object has a high reflectance, detection errors are possible outside the measurement range. Regular reflection mm mm mm mm mm mm mm mm ± mm ± mm ± mm ± mm ± mm ± mm ± mm ± mm Beam shape Spot Line Beam diameter * Resolution * Linearity * Temperature drift * Ambient illuminance Ambient temperature Ambient humidity Insulation resistance Dielectric strength Vibration resistance Shock resistance 5 mm dia. mm dia. mm dia. 75 mm dia. 75 μm x mm 5 μm x mm 5 μm x mm μm x.8 mm μm 6 μm μm.5 μm μm 6 μm μm.5 μm ±.% F.S. (entire range) ±.% F.S. (8 to mm) ±% F.S. ( to mm) ±.% F.S. (entire range) ±.% F.S./ C (±.% F.S./ C for ZX-LD/ZX-LDL) Incandescent lamp:, lux max. ±.% F.S. ( to 9 mm) ±.% F.S. (8 to mm) Operating: C to 5 C, Storage: -5 C to 6 C (with no icing or condensation) Operating/Storage: 5% to 85% RH (with no condensation) M Ω at 5 VDC, VAC at 5/6 Hz for minute to 5 Hz,.7 mm double amplitude for 8 minutes each in X, Y, and Z directions m/s, 6 directions, times each (up-down, left-right, forward-backward) IEC Standard Protective structure IEC 659 IP5 IP Connection method Junction connector (standard length: 5 mm) Weight (Packed state) Material Accessories IEC 659 IP5 ±% F.S. ( to mm) ±.% F.S. (entire range) IEC Standard IP Approx. 5 g Approx. 5 g Approx. 5 g Approx. 5 g Case: PBT (polybutylene terephthalate), Cover: Aluminum, Lens: Glass Case, Cover: Aluminum Lens: Glass Operation manual, laser warning labels (English characters) Case: PBT (polybutylene terephthalate), Cover: Aluminum, Lens: Glass Case, Cover: Aluminum Lens: Glass *. Beam diameter: This is the value of the measurement center distance (actual value), and is defined at /e (.5%) of the central light intensity. If there is stray light outside, the defined area and the area around the object has a higher reflectance than the object, *. Resolution: Indicates the amount of fluctuation (± δ) in the linear output when connected to the ZX-LDA. (The measured value when the average count of the ZX- LDA is set to,96 and our standard object (white ceramic) is used for the central distance.) This indicates the repeatability precision when the work is in a static state, and does indicate the distance precision. The resolution performance may not be satisfactory in a strong electromagnetic field. *. Linearity: This indicates the error with respect to the ideal straight line of the displacement output when measuring our standard object. *. Temperature characteristic: The value when the distance between the sensor and the object (our standard object) is fixed using an aluminum jig. (Measured at the measurement center distance.) B-8 Displacement sensors / Width-measuring Sensors

9 Sensor head (transmissive type) Item Model ZX-LT ZX-LT5 ZX-LT ZX-LT Optical method Through-beam Light source (wave length) Visible-light semiconductor laser (wavelength 65 nm, mw or less, Class ) Measurement width mm dia. to.5 mm dia. 5 mm mm mm Sensing distance to 5 5 to mm, mm to 5 mm Min. sensing object 8 mm dia. Opaque objecject 8 to 5 μm Opaque ob- Opaque:.5 mm dia. Opaque:. mm dia. Opaque:. mm dia. Resolution * µm * --- µm * µm Temperature drift.%f.s./ C.%F.S./ C Ambient illuminance Incandescent lamp:, lux max. Incandescent lamp:, lux max. Ambient temperature Operating: C to 5 C, Storage: -5 C to 7 C (with no icing or condensation) Protective structure IEC 659 IP IP Cable length Can be extended to m with the special extension cable. Material Case: polyetherimide, case cover: polycarbonate, front cover: glass Zinc-die-cast Clamping torque. N²m max. Accessories Optical axis adjustment seal, sensor head - amplifier unit connector cable, operation manual Mounting bracket *. The amount of fluctuation (± δ) of the linear output when connected to an amplifier unit, converted to a detection span. *. When the average count is 6.5 µm when the count is. The value when the smallest detection object shades the vicinity of the center of the mm dia. detection span. *. When the average count is 6.5 µm when the count is. Amplifier Units Item Model ZX-LDA ZX-LDA Measurement period 5 μs Possible average count settings * ///8/6//6/8/56/5/,/,8/,96 times Temperature drift When reflective head is connected:.% F.S./ C, when transmissive head is connected:.% F.S./ C Linear output * to ma/f.s., maximum load resistance of Ω ± V (±5 V, to 5 V * ), output impedance of Ω. Decision output (HIGH/ PASS/LOW: outputs) * NPN open collector output, VDC 5 ma max., residual voltage. V or less PNP open collector output, V DC 5 ma max., residual voltage V or less Laser OFF input / zero reset input / timing input / reset When ON: supply voltage.5 V or less, when OFF: open circuit (maximum leakage current. ma or less) When ON: supply voltage.5 V or less, when OFF: open circuit (maximum leakage current. ma or less) Measurement value display, setting value and incident level and resolution display, scaling, display reverse, display off mode, ECO mode, change number of display digits, sample hold, peak hold, bottom hold, peak to peak hold, Functions self peak hold, self-bottom hold, intensity mode, zero reset, initial reset, on-delay timer, off-delay timer, one-shot timer, differential, sensitivity selection, keeping clamp change, threshold value settings, positioning teaching, twopoint teaching, automatic teaching, hiss width variable, timing input, reset input, monitor focus, (A-B) operation, (A+B) operation *, mutual interference *, laser degradation detection zero reset memory, function lock Indicator lamp Operation indicator lamp: high (orange), pass (green), low (yellow), 7-segment digital main display (red), 7-segment digital sub-display (yellow), laser ON (green), zero reset (green), enable display (green) Power supply voltage to VDC ±%, ripple (p-p) : % max. Current consumption ma or less (when sensor is connected) Ambient temperature Operating: C to 5 C, Storage: -5 C to 6 C (with no icing or condensation) Ambient humidity Operating/Storage: 5% to 85% RH (with no condensation) Insulation resistance M Ω at 5 VDC Dielectric strength, VAC at 5/6 Hz for minute Vibration resistance to 5 Hz,.7 mm double amplitude for 8 minutes each in X, Y, and Z directions Shock resistance m/s, 6 directions, times each (up-down, left-right, forward-backward) Protective structure --- Connection method Pre-wired models (standard length: m) Weight (Packed state) Approx. 5 g Material Case: PBT (polybutylene terephthalate), Cover: Polycarbonate Accessories Instruction manual *. The response speed of linear output (when the sensitivity is fixed) is calculated as (measurement period) x (average count setting + ). The response speed of decision output (when the sensitivity is fixed) is calculated as (measurement period) x (average count setting + ). *. Current/voltage can be switched using the switch on the bottom of the amplifier unit. *. Can be set with the monitor focus function. *. Computing unit is required. ZX-L ZX-L B-9

10 Characteristic data (typical) Angle characteristics (reflective type) The angle characteristics are a plot of the inclination of the measured object vs. errors occurring in linear output at the measurement center distance. ZX-LD ZX-LD ZX-LD Angular properties of vertical inclination Angular properties of vertical inclination Angular properties of vertical inclination Error (%F.S.) Positive inclination Negative inclination White ceramic SUS Black paper Error (%F.S.) Positive inclination Negative inclination White ceramic SUS Black paper Error (%F.S.) 5 5 White ceramic SUS Black paper Inclination angle ( ) Angle characteristics with respect to horizontal inclination Error (%F.S.) White ceramic SUS Black paper Inclination angle ( ) Angle characteristics with respect to horizontal inclination Error (%F.S.) Positive inclination Negative inclination White ceramic SUS Black paper -5 - Positive inclination -5 Negative inclination Inclination angle ( ) Angle characteristics with respect to horizontal inclination Error (%F.S.) 5 5 White ceramic SUS Black paper Positive inclination - Negative inclination Inclination angle ( ) Inclination angle ( ) - Positive inclination -5 Negative inclination Inclination angle ( ) ZX-LDL ZX-LDL ZX-LDL Angular properties of vertical inclination Angular properties of vertical inclination Angular properties of vertical inclination Error (%F.S.) Positive inclination Negative inclination White ceramic SUS Black paper Error (%F.S.) Positive inclination Negative inclination White ceramic SUS Black paper Error (%F.S.) White ceramic SUS Black paper Inclination angle ( ) Angle characteristics with respect to horizontal inclination Error (%F.S.) White ceramic SUS Black paper Inclination angle ( ) Angle characteristics with respect to horizontal inclination Error (%F.S.) Positive inclination Negative inclination White ceramic SUS Black paper - - Positive inclination - Negative inclination Inclination angle ( ) Angle characteristics with respect to horizontal inclination Error (%F.S.) 5 5 White ceramic SUS Black paper Positive inclination - Negative inclination Inclination angle ( ) Inclination angle ( ) - Positive inclination -5 Negative inclination Inclination angle ( ) B- Displacement sensors / Width-measuring Sensors

11 ZX-LDV Angular properties of vertical inclination Linearity error (%F.S.) Positive inclination Negative inclination White ceramic SUS Black paper ZX-LDVL Angular properties of vertical inclination Linearity error (%F.S.) Positive inclination Negative inclination White ceramic SUS Black paper ZX-L Inclination angle ( ) Angle characteristics with respect to horizontal inclination Linearity error (%F.S.) Positive inclination Negative inclination White ceramic SUS Black paper Inclination angle ( ) Angle characteristics with respect to horizontal inclination Linearity error (%F.S.) White ceramic SUS Black paper Inclination angle ( ) - - Positive inclination Negative inclination Inclination angle ( ) ZX-L B-

12 Linearity characteristics depending on material (reflective type) ZX-LD In case of a horizontal inclination Inclination angle Inclination angle - Inclination angle + Error (%F.S.) Angle: White ceramic SUS Black paper Error (%F.S.) White ceramic SUS Black paper Error (%F.S.) Angle: + White ceramic SUS Black paper Distance (mm) - Angle: ZX-LD In case of a horizontal inclination Inclination angle Inclination angle - Inclination angle + Error (%F.S.) Angle: White ceramic SUS Black paper Error (%F.S.) Angle: Distance (mm) White ceramic SUS Black paper Error (%F.S.) - - Angle: Distance (mm) White ceramic SUS Black paper Distance (mm) Distance (mm) ZX-LD In case of a of a horizontal inclination Inclination angle Inclination angle - Inclination angle + Error (%F.S.) 5 White ceramic SUS Black paper Error (%F.S.) 5 White ceramic SUS Black paper Error (%F.S.) 5 Distance (mm) Angle: Distance (mm) - - Angle: Distance (mm) - - Angle: + -5 ZX-LDL In case of a of a horizontal inclination Inclination angle Inclination angle - Inclination angle + Error (%F.S.) Angle: White ceramic SUS Black paper Error (%F.S.) White ceramic SUS Black paper Error (%F.S.) White ceramic SUS Black paper Angle: + Distance (mm) White ceramic SUS Black paper Angle: Distance (mm) Distance (mm) Distance (mm) B- Displacement sensors / Width-measuring Sensors

13 ZX-LDL In case of a of a horizontal inclination Inclination angle Inclination angle - Inclination angle + Error (%F.S.) Angle: White ceramic SUS Black paper Error (%F.S.) Angle: - White ceramic SUS Black paper Error (%F.S.) Angle: + White ceramic SUS Black paper Distance (mm) Distance (mm) ZX-LDL In case of a of a horizontal inclination Inclination angle Inclination angle - Inclination angle + Error (%F.S.) Angle: White ceramic SUS Black paper Error (%F.S.) Angle: - Error (%F.S.) - Angle: + Distance (mm) White ceramic SUS Black paper ZX-L Distance (mm) - White ceramic - SUS Black paper Distance (mm) ZX-LDV In case of a of a horizontal inclination Inclination angle Inclination angle - Inclination angle + Error (%F.S.)..8.6 White ceramic SUS Black paper Error (%F.S.)..8.6 White ceramic SUS Black paper Error (%F.S.) Distance (mm) White ceramic SUS Black paper.... Angle: -.. Angle: Angle: Distance (mm) Distance (mm) ZX-LDVL In case of of a a horizontal inclination Inclination angle Inclination angle - Inclination angle + Error (%F.S.)..8.6 White ceramic SUS Black paper Error (%F.S.)..8.6 White ceramic SUS Black paper Error (%F.S.) Distance (mm) White ceramic SUS Black paper.... Angle: -.. Angle: Angle: Distance (mm) Distance (mm) Distance (mm) ZX-L B-

14 Spot diameter (reflective type) Spot beam type Line beam type Spot beam type L L L ZX-LD Cross-section of beam L mm mm 5 mm X (m) μm. μm 5 μm Y (m) 5 μm. μm 7 μm Y X Cross-section of beam Y ZX-LDL L mm mm 5 mm X (m), μm, μm, μm Y (m) μm 5. μm 5 μm X Cross-section of beam Y ZX-LDV L 8 mm mm mm X (m) 6. μm. μm μm Y (m) 5. μm. μm 9. μm X ZX-LD L 6 mm mm mm X (m) 9 μm μm μm Y (m) 6 μm 65. μm 65 μm ZX-LDL L 6 mm mm mm X (m), μm, μm, μm Y (m) μm μm μm Line beam type L ZX-LD L mm mm 5 mm X (m),5 μm 8 μm, μm Y (m) 5 μm μm 85 μm ZX-LDL L mm mm 5 mm X (m), μm, μm,5 μm Y (m) 75 μm μm 65 μm Cross-section of beam Y ZX-LDVL L 8 mm mm mm X (m),8 μm,8 μm,8 μm Y (m) 9. μm 6. μm μm X Detection object characteristics (transmissive type) ZX-LT ZX-LT ZX-LT (Using a. mm dia. pin gauge) (Using a.5 mm dia. pin gauge) (Using a.5 mm dia. pin gauge) Linear (analog) output (%F.S.) Emitter Receiver WD (Center of optical axis) Measurement point Y (mm) Linearity properties ZX-LT5 Linear output relative error (%F.S.) - WD=5mm WD=5mm WD=5mm Sensing distance: 5 mm Sensing object:. mm dia. Round rod Y WD=5mm WD=5mm WD=5mm Sensing distance: 5 mm Linear (analog) output (%F.S.) WD=mm WD=5mm WD=,mm WD=,5mm WD=,8mm Sensing distance: mm Sensing object:.5 mm dia. Round rod Y -6 Emitter Receiver WD (Center of optical axis) Measurement point Y (mm) Linear output (%F.S.) WD=5mm WD=5mm WD=5mm Sensing distance: 5 mm Sensing object:.5 mm dia. - Round rod Y -.5 Emitter Receiver WD (Center of optical axis).5 5 Measurement point Y (mm) - Emitter Receiver - WD - 5 Amount of light interruption (mm) B- Displacement sensors / Width-measuring Sensors

15 Diagram showing correlation between linear output and detection distance Current or voltage can be selected with the amplifier unit switch. ZX-LD/LDL (Current output) (Voltage output) Linear output (ma) Linear 6 output (V) Distance 8 (mm) Distance - (mm) - -6 ZX-L ZX-LD/LDL (Current output) Linear output (ma) (Voltage output) Linear output (V) Distance 8 (mm) Distance - (mm) - -6 ZX-LD/LDL (Current output) Linear output (ma) (Voltage output) Linear output (V) Distance 8 (mm) 5 6 Distance - (mm) - -6 ZX-LDV/LDVL (Current output) (Voltage output) Measurement range ( mm) Linear output (ma) Distance 8 (mm) Measurement range ( mm) Linear 6 output (V) Distance - (mm) - -6 ZX-L B-5

16 Input/output stage circuit schematic NPN type: ZX-LDA PNP type: ZX-LDA Brown to VDC Brown to VDC Internal circuit Load White HIGH output Green PASS output Gray LOW output Blue GND (V) Pink LD OFF input Purple Timing input Load Orange Zero-reset input Red Reset input Load to VDC Internal circuit White HIGH output Green PASS output Gray LOW output Blue GND (V) Load Load Load Pink LD OFF input Purple Timing input Orange Zero-reset input to VDC Red Reset input Current/Voltage output selector W Current output to ma Voltage output ±V Black Linear output Shield Linear GND Load Current output: W max. Voltage output: kw min. Current/Voltage output selector W Current output to ma Voltage output ±V Black Linear output Shield Linear GND Load Current output: W max. Voltage output: kw min. Connection Amplifier Units Brown White Green Gray Black Shield Pink Orange Purple Red to VDC GND (V) HIGH output PASS output LOW output Linear output Linear GND LD OFF input Zero-reset input Timing input Reset input Note:.In particular, when high resolution is necessary, provide a stable power source separate from other power systems..damage may result if not wired correctly. (In particular, do not allow the linear output to contact other wires.).green ( V) is for the power supply. The outer covering of the shield wire (linear GND) is used for linear output along with the black wire (linear output). Even if you will not be using the linear output, connect the linear GND to GND ( V). Blue B-6 Displacement sensors / Width-measuring Sensors

17 Nomenclature: Sensor head (reflection type) ZX-LD ZX-LD ZX-LD ZX-LDL ZX-LDL ZX-LDL ZX-LDV ZX-LDVL Amplifier Units ZX-LDA ZX-LDA Input cable (with connector) Display part Operation part Output cable Emitter and Receiver (optical filter) Display part Computing unit ZX-CAL- Connection part (with open/close cover) ZX-L Output cable (with connector) Display part Sensor head (transmissive type) ZX-LT ZX-LT5 ZX-LT Connection part Laser lit indicator (green) Light on when emitting Sensor head connector Emitter Emitter Emitter side Sensor head connector Receiver side Sensor head connector Receiver (optical filter) Receiver Communication interface ZX-SF Display ( ) () Amplifier Unit Connector () Communications Connector Interface Unit Amplifier Unit Smart Monitor V ZX-L B-7

18 Precautions Laser safety Warning Safety measures are required for laser devices both in Japan and abroad. Brief explanations of three cases are given below, including use in Japan and assembling in Japan and then exporting to other countries. Europe The ZX-L-Series Sensor Heads are Class and Class Laser Products according to EN 685- (IEC85-). (The outline is given in the following table.) Summary of user precautions Requirements subclause Laser safety iffucer. Classification Class Class M Class Class M Class R Class B Class Not required but recommended for applications that involve direct viewing of the laser beam Not required for visible emission Required for non-visible emission Required Remote interlock. Not required Connect to room or door circuits Key control. Not required Remove key when not in use Beam attenuator Emission indicator device Not required Not required Indi cates laser is energized for nonvisible wavelenghts When in use prevents inadvertent exposure Indicates laser is energized Warning signs.5 Not required Follow precautions on warning signs Beam path.6 Specular reflection.7 Eye protection.8 Protective clothing.9 Training. Not required No requirements No requirements No requirements No requirements Class M * as for Class B Class M * as for Class B Class M * as for Class R Not required No requirements No requirements Class M * as for Class B Class M * as for Class B Class M * as for Class R Terminate beam at end of useful length Prevent unintentional reflections Required if engineering and administrative procedures not practicable and MPE exceeded Sometimes required Specific requirements Required for all operator and maintenance personnel *. Class M laser products that failed condition of table. Not required for Class M laser products that failed condition of table. *. Class M laser products that failed condition of table. Not required for Class M laser products that failed condition of table. Note: This table is intended to provide a convenient summary of precautions. See text of this standard for complete precautions. B-8 Displacement sensors / Width-measuring Sensors

19 ZX-LD###/ZX-LDV# Classification of reflective-type sensor heads Classification of reflective-type sensor head of ZX-LT### Laser-related labeling The warning label at right is attached to the side of the sensor head. Class Class WARNING LASER RADIATION DO NOT STARE INTO BEAM CAUTION- LASER RADIATION WHEN OPEN MAXIMUM OUTPUT: mw PULSE DURATION: 5 WAVELENGTH: 65 nm CLASS LASER PRODUCT JIS C Appendix I 998 Handing Instructions The ZX-LD###/ZX-LDV# emits visible laser light. Do not look directly at the light. Terminate the light path of the laser beam before use. If a reflective mirror surface is in the light path, ensure that the reflected light path is enclosed in the beam. In cases where the light path must be open, ensure that it is kept away from eye-height. (U.S.A.) Exports of products equipped with this device to the U.S.A. are governed by the laser standards of the Food and Drug Administration of the U.S.A. The ZX-L-Series Laser Series is classified as Class I and Class II device according to FDA ( CFR.). Please inquire for detailed information on exporting to the U.S.A.. (Countries other than the U.S.A.) ZX-LD##/ZX-LDV@ reflective-type (displacement) sensor head: In countries other than Japan and the U.S.A., replace the warning label with the provided English label. For the ZX-LT### transmissive-type (displacement) sensor head, the warning label already includes English, thus replacement is not necessary. With respect to exports to Europe, a different standard exists, Europe EN685. Correct Use Design Object Some object materials and forms may not permit measurement, or may reduce the accuracy of measurement (transparent materials or materials with an extremely low reflectance; steeply inclined objects, etc.). Power Supply and Wiring Do not connect or disconnect the connector while powered. Damage may result. Allow the system to warm up for about minutes after turning on the power. Upon completed wiring, verify that the power source is wired correctly, that there are no incorrect connections that will cause load shorts, and that the load current is appropriate before turning on the power. Incorrect wiring may result in damage. When extending the cable, ensure that the overall length does not exceed m from both the sensor head and the amplifier unit. If you need to extend the cable from the sensor head, use the optional extension cable (ZX-XC#A). For wiring from the amplifier unit, use the same type of shielded cable. If the power line is subject to surges, connect a surge protector. If you are using a computing unit, connect the linear GND terminals of the amplifier units. Compatibility The sensor head and amplifier unit are compatible. A sensor head purchased later can also be used. Mutual Interference This sensor head allows the amplifier units to be used in conjunction by connecting a computing unit (ZX-CAL) between the amplifier units. Cleaning Do not use thinner, benzene, acetone, or kerosene, or similar chemicals. ZX-L ZX-L B-9

20 Dimensions (Unit: mm) Sensors Sensor head (diffuse reflection type) ZX-LD ZX-LD ZX-LD ZX-LDL ZX-LDL ZX-LDL L * Two,. dia. mounting holes Center of Reference 7.5 measurement plane 7 A * Emitter 5 dia. axis.5 lens Receiver axis Range 9 indicator 8 dia. lens Connector Mounting Holes -M ±. 6±. 5 dia. 6 * ZX-LD (L) : L=, A= ZX-LD (L) : L=, A= ZX-LD (L) : L=, A=.8 Vinyl insulated round cable 5. dia. Standard length: 5 mm Sensor head (regular reflection type) ZX-LDV ZX-LDVL Vinyl insulated round cable 5. dia. Standard length: 5 mm.7 5-R.7 Connector Mounting Holes M Optical axis.5 Two,.5 dia. mounting holes Reference plane Receiver axis Emitter axis 5 dia. 7±. Center of measurement 6 dia lens dia lens B- Displacement sensors / Width-measuring Sensors

21 Sensor head (transmissive type) ZX-LT ZX-LT5 Vinyl insulated round cable (gray).6 dia. Standard length: 5 mm Two,. dia..8 Emitter 6 5 Receiver 9 Two,. dia..8 Vinyl insulated round cable (black).6 dia. Standard length: 5 mm Connector Laser lit indicator Center of optical axis Center of optical axis Connector 5 5 Mounting Holes Mounting Holes ZX-L 9±. 9±. -M -M Sensor head (transmissive type) ZX-LT Vinyl insulated round cable (gray).6 dia. Standard length: 5 mm Two,. dia..8 Emitter Receiver Two,. dia. 5.8 Vinyl insulated round cable (black).6 dia. Standard length: 5 mm Connector Laser lit indicator Center of optical axis Center of optical axis Connector Mounting Holes Mounting Holes ±. ±. -M -M Amplifier Units ZX-LDA ZX-LDA dia Vinyl insulated round cable 5. dia. Standard length: 5 mm Vinyl-insulated round cable of 5. dia. cross-sectional area:.9 mm²; insulation diameter:.7 mm Standard length: m.7 9. ZX-L B-

22 Sensor heads ZX-LT Emitter Receiver Two,.5 dia Two,.5 dia Vinyl insulated round cable, dia., Standard length:.5 m 68 Three, M x 5 + pan head screw 5 Three, M x 5 + pan head screw Vinyl insulated round cable, dia., Standard length:.5 m Connector Two, M, 5 depth: dia Lens (8 x 6) Two, M. Slit ( x ) 5 Two, M 5 6 Connector 8 Two, M, depth: dia. Sensor Head - Amplifier Connection Cable 5. dia dia.. dia. B- Displacement sensors / Width-measuring Sensors

23 Accessories (Order Separately) Computing unit ZX-CAL Operation indicator Connector Side view attachment ZX-XF Side view attachment ZX-XF Tow,. dia..6 Center of optical axis Tow,. dia. 5.6 Center of optical axis Seal ZX-L Communication interface unit for ZX ZX-SF Sensor signal indicator (BUSY) Sensor signal indicator (ERROR) Connector Power supply indicator External terminal signal (BUSY) External terminal signal (ERROR). 6.. (6) (6) (.).7 Connector Two-sided connector cable (for extension) ZX-XCA ( m) ZX-XCA ( m) ZX-XC8A (8 m) ZX-XC9A (9 m) 5 dia. 6 * poles (male) Vinyl insulated round cable 5. dia. cores conductor poles (female) * ZX-XCA:, ZX-XCA:, ZX-XC8A: 8, ZX-XC9A: 9, 5.5 dia. ZX-L B-

24 ALL DIMENSIONS SHOWN ARE IN MILLIMETERS. To convert millimeters into inches, multiply by.97. To convert grams into ounces, multiply by.57. Cat. No. Q5E-EN- In the interest of product improvement, specifications are subject to change without notice. B- Displacement sensors / Width-measuring Sensors

25 D CMOS Laser Measuring Sensor ZS-L Series The smart way to get higher performance and more flexibility for your process. ZS-L Series Features The scalable platform for more flexibility Connect and expand up to 9 controllers Connect Multi-calculation controller for advanced calculations like evenness or flatness Connect Data storage module for process-data logging Connect PC software for easy system set up and signal monitoring Sensor head with D-CMOS technology with high dynamic sensing range for measuring black rubber, plastic, shiny, glass and mirrow surfaces Advanced application settings Easy reconfiguration and teaching Measurement Tools: Hight measurement Step measurement Thickness measurement Flatness measurement Average measurement Excentricity Warpage/Evenness USB Monitor Record Control Operate ZS-L Series B-5

26 Ordering Information Sensors Sensor Heads Optical System Sensing distance Beam diameter Resolution * Diffuse reflection Regular reflection 5 ± 5 mm 9 x 6 µm.8 µm ZS-LD5 8 ± 5 mm 9 x 6 µm µm ZS-LD8 ± 5 mm 9 x µm 5 µm ZS-LD ± mm 9 x 5 µm.5 µm ZS-LDT ±.5 mm, x 5 µm. µm ZS-LDT *. This is the peak-to-peak displacement conversion value in the displacement output at the measuring center distance in high-precision mode when the number of samples to average is set to 8 and the measuring mode is set to the high-resolution mode. The standard workpiece is white aluminum ceramics in diffuse reflection mode and glass in the regular reflection mode. Sensor Controllers Shape Supply Voltage Control outputs Model Model NPN outputs ZS-LDC VDC PNP outputs ZS-LDC Multi Controllers Shape Supply Voltage Control outputs Model NPN outputs ZS-MDC VDC PNP outputs ZS-MDC Data Storage Units Shape Supply Voltage Control outputs Model NPN outputs ZS-DSU VDC PNP outputs ZS-DSU Accessories (Sold Separately) Controller Link Extension Cables for Sensor Heads Shape Model Cable length Model Qty m ZS-XCA ZS-XCN m ZS-XCA 5m ZS-XC5B *,* 8m ZS-XC8A Panel Mount Adapter Shape Model m ZS-XCB * *. Up to two ZS-XC@B Cables can be connected ( m max.). *. A Robot Cable (ZS-XC5BR) is also available. ZS-XPM For st Controller Logging Software Name Model ZS-XPM For expansion (from nd Controller on Smart Monitor Zero Professional Memory Card Model ZS-SWE Model RS-C Cable for Connecting to a Personal Computer Shape Model Qty F6-N6S(S) QM-N8S F6-N56S 6 MB 8 MB 56 MB ZS-XRS B-6 Displacement sensors / Width-measuring Sensors

27 Specifications Sensor Heads Item Model ZS-LDT ZS-LDT ZS-LD5 ZS-LD8 ZS-LD Applicable Controllers Optical system Regular reflection Diffuse reflection Regular reflection Diffuse reflection ZS-LDC Series Diffuse reflection Regular reflection Diffuse reflection Regular reflection Diffuse reflection Regular reflection Measuring center distance mm 6.mm mm mm 5mm 7mm 8mm 78mm mm mm Measuring range ± mm ± mm ±.5 mm ± mm ±5 mm ± mm ±5 mm ± mm ±5 mm ±8 mm Light source Visible semiconductor laser (wavelength: 65 nm, mw max., Class ) Beam diameter * 9 x 5 µm, x 5 µm 9 x 6 µm 9 x 6 µm 9 x µm Linearity * ±.% F.S. ±.5% F.S. Resolution *.5 µm. µm.8 µm µm 5 µm Temperature characteristic.% F.S./ C.% F.S./ C.% F.S./ C.% F.S./ C.% F.S./ C Sampling cycle *5 µs NEAR indicator Indicators FAR indicator Operating ambient illumination Ambient temperature Ambient humidity Degree of protection Materials Cable length Weight Accessories Lights near the measuring center distance, and nearer than the measuring center distance inside the measuring range. Flashes when the measurement target is outside of the measuring range or when the received light amount is insufficient. Lights near the measuring center distance, and further than the measuring center distance inside the measuring range. Flashes when the measurement target is outside of the measuring range or when the received light amount is insufficient. *. Defined as /e (.5 %) of the center optical intensity at the actual measurement center distance (effective value). The beam diameter is sometimes influenced by the ambient conditions of the workpiece, such as leaked light from the main beam. *. This is the error in the measured value with respect to an ideal straight line. The standard workpiece is white aluminum ceramics in diffuse reflection mode and glass in the regular reflection mode of the ZS-LDT/T/5. Linearity may change according to the workpiece. *. This is the peak-to-peak displacement conversion value in the displacement output at the measuring center distance in high-precision mode when the number of samples to average is set to 8 and the measuring mode is set to the high-resolution mode. The standard workpiece is white aluminum ceramics in diffuse reflection mode and glass in the regular reflection mode. *. This is the value obtained at the measuring center distance when the Sensor and workpiece are fixed by an aluminum jig. *5. This value is obtained when the measuring mode is set to the high-speed mode. Illumination on received light surface:, lx or less (incandescent light) Operating: to 5 C, Storage: 5 to 6 C (with no icing or condensation) Operating and storage: 5% to 85% (with no condensation) Cable length.5 m: IP66, cable length m: IP67 Case: Aluminum die-cast, Front cover: Glass.5m, m Approx. 5 g Laser labels ( each for JIS/EN, for FDA), Ferrite cores (), Insure Locks (), Instruction Sheet ZS-L Series Sensor Controllers ZS-LDC/LDC Sensor Controllers Model ZS-LDC ZS-LDC No. of samples to average,,, 8, 6,, 6, 8, 56, 5,, 8, or 96 Number of mounted Sensors per Sensor Controller External interface Functions Status indicators Segment display LCD Setting inputs Connection method Serial I/O: connector, Other: pre-wired (standard cable length: m) Serial I/O Outputs Inputs Power supply voltage USB. RS-C Judgement outputs Linear outputs Laser OFF, ZERO reset timing, RESET Main display Sub-display outputs: HIGH, PASS, and LOW NPN open-collector, VDC, 5 ma max., residual voltage:. V max. port, Full Speed ( Mbps), MINI-B port, 5, bps max. outputs: HIGH, PASS, and LOW PNP open-collector, 5 ma max., residual voltage:. V max. Selectable from types of output, voltage or current (selected by slide switch on base). Voltage output: to V, output impedance:. Current output: to ma, maximum load resistance:. ON: Short-circuited with V terminal or.5 V or less OFF: Open (leakage current:. ma max.) ON: Short-circuited to supply voltage or within.5 V of supply voltage OFF: Open (leakage current:. ma max.) Display: Measured value, threshold value, voltage/current, received light amount, and resolution Sensing: Mode, gain, measurement object, head installation Filter: Smooth, average, and differentiation Outputs: Scaling, various hold values, and zero reset I/O settings: Linear (focus/correction), judgements (hysteresis and timer), non-measurement, and bank (switching and clear) System: Save, initialization, measurement information display, communications settings, key lock, language, and data load HIGH (orange), PASS (green), LOW (orange), LDON (green), ZERO (orange), and ENABLE (green) 8-segment red LED, 6 digits 8-segment green LED, 6 digits 6 digits x rows, Color of characters: green, Resolution per character: 5 x 8 pixel matrix Setting keys Direction keys (UP, DOWN, LEFT, and RIGHT), SET key, ESC key, MENU key, and function keys ( to ) Slide switch Threshold switch ( states: High/Low), mode switch ( states: FUN, TEACH, and RUN).6 V to 6. VDC (including ripple) ZS-L Series B-7

28 Sensor Controllers Model ZS-LDC ZS-LDC Current consumption.5 A max. (when Sensor Head is connected) Ambient temperature Operating: to 5 C, Storage: 5 to 6 C (with no icing or condensation) Ambient humidity Operating and storage: 5% to 85% (with no condensation) Materials Case: Polycarbonate (PC) Weight Approx. 8 g (excluding packing materials and accessories) Accessories Ferrite core (), Instruction Sheet ZS-MDC/MDC Multi-Controllers Basic specifications are the same as those for the Sensor Controllers. The following points, however, are different. () Sensor Heads cannot be connected. () A maximum 9 of Controllers can be connected. Control Link Units are required to connect Controllers. () Processing functions between Controllers: Math functions Data Storage Units Sensor Controllers Model ZS-DSU ZS-DSU Number of mounted Sensor Heads Cannot be connected Number of connectable Controllers Controllers max. (ZS-MDC: Controller, ZS-LDC: 9 Controllers max.) * Connectable Controllers External interface Data resolution *. Control Link Units are required to connect Controllers. ZS-LDC@@, ZS-MDC@@ Connection method Serial I/O: connector, Other: pre-wired (standard cable length: m) Serial I/O Outputs Inputs USB. RS-C Logging trigger functions Functions Other functions Status indicators Segment display LCD Setting inputs Power supply voltage Current consumption Ambient temperature Ambient humidity Materials Weight Accessories Controller Link Unit Connection Using the ZS-XCN Data Storage Unit outputs: HIGH, PASS, and LOW NPN open-collector, VDC, 5 ma max., residual voltage:. V max. ON: Short-circuited with V terminal or.5 V or less OFF: Open (leakage current:. ma max.) Controller Link Unit port, Full Speed ( Mbps), MINI-B port, 5, bps max. bits Multi-Controller outputs: HIGH, PASS, and LOW PNP open-collector, 5 ma max., residual voltage:. V max. ON: Short-circuited to supply voltage or within.5 V of supply voltage OFF: Open (leakage current:. ma max.) Start and stop triggers can be set separately; external triggers, data triggers (self-triggers), and time triggers External banks, alarm outputs, saved data format customization, and clock OUT (orange), PWR (green), ACCESS (orange), and ERR (red) 8-segment green LEDs, 6 digits 6 digits x rows, Color of characters: green, Resolution per character: 5 x 8 pixel matrix Setting keys Direction keys (UP, DOWN, LEFT, and RIGHT), SET key, ESC key, MENU key, and function keys ( to ) Slide switch Threshold switch ( states: High/Low), mode switch ( states: FUN, TEACH, and RUN).6 V to 6. VDC (including ripple).5 A max. Operating: to 5 C, Storage: 5 to 6 C (with no icing or condensation) Operating and storage: 5% to 85% (with no condensation) Case: Polycarbonate (PC) Approx. 8 g (excluding packing materials and accessories) Sensor Controllers Ferrite core () Instruction Sheet, Tools for Data Storage Unit: CSV File Converter for Data Storage Unit, Smart Analyzer Macro Edition (Excel macros for analysis of collected data) B-8 Displacement sensors / Width-measuring Sensors

29 Dimensions Unit: mm Sensor Heads ZS-LD5/LD8/LD Sensor Controllers ZS-LDC/LDC 5. 5 L (Note ) 65 Two,.5 mm dia. mounting holes. Measuring center Emitter Emission axis Reception axis Receiver A (Note ) Reference surface Range indicator 56±. -M 56±. Mounting hole dimensions ZS-L Series Note Connector ZS-LD5: L = 5, A = 5º ZS-LD8: L = 8, A = 5º ZS-LD: L =, A = 8º Vinyl insulated round cable, 6. mm dia. Standard length:.5 m ZS-LDT/LDT..7 dia. 8.9 ZS-MDC/MDC Multi-Controllers 5 L (Note ) 65 Two,.5 mm dia. mounting holes 5. Measuring center Reference surface ± Emitter Emission axis Reception axis Receiver Range indicator 56±. -M Mounting hole dimensions 9. A (Note ) Note Connector ZS-LDT: L =, A = 5º ZS-LDT: L = 8, A = 5º Vinyl insulated round cable, 6. mm dia. Standard length:.5 m. 8.9 Panel Mount Adapters ZS-XPM/XPM (Dimension for Panel Mounting).7 dia. Data Storage Unit ZS-DSU/DSU (6 X n) + 6 X n Panel 9 DIN track Panel cutout dimensions n: Number of gang-mounted Controllers ( to ) 6± 9 () Panel Mount Adapter Panel () (7.5) (Note ) Note : Dimensions are shown for a panel thickness of. mm (6 X n) dia. 8.9 ZS-L Series B-9

30 Safety Precautions for Using Laser Equipment Laser Label Indications Attach the following warning label to the side of the ZS-L-series Sensor Head. READ AND UNDERSTAND THIS DOCUMENT Please read and understand this document before using the products. Please consult your OMRON representative if you have any questions or comments. WARRANTY OMRON's exclusive warranty is that the products are free from defects in materials and workmanship for a period of one year (or other period if specified) from date of sale by OMRON. OMRON MAKES NO WARRANTY OR REPRESENTATION, EX- PRESS OR IMPLIED, REGARDING NONINFRINGEMENT, MER- CHANTABILITY, OR FITNESS FOR PARTICULAR PURPOSE OF THE PRODUCTS. ANY BUYER OR USER ACKNOWLEDGES THAT THE BUYER OR USER ALONE HAS DETERMINED THAT THE PRODUCTS WILL SUITABLY MEET THE REQUIREMENTS OF THEIR INTENDED USE. OMRON DISCLAIMS ALL OTHER WARRANTIES, EXPRESS OR IMPLIED. LIMITATIONS OF LIABILITY OMRON SHALL NOT BE RESPONSIBLE FOR SPECIAL, INDI- RECT, OR CONSEQUENTIAL DAMAGES, LOSS OF PROFITS OR COMMERCIAL LOSS IN ANY WAY CONNECTED WITH THE PRODUCTS, WHETHER SUCH CLAIM IS BASED ON CONTRACT, WARRANTY, NEGLIGENCE, OR STRICT LIABILITY. In no event shall responsibility of OMRON for any act exceed the individual price of the product on which liability is asserted. IN NO EVENT SHALL OMRON BE RESPONSIBLE FOR WARRAN- TY, REPAIR, OR OTHER CLAIMS REGARDING THE PRODUCTS UNLESS OMRON's ANALYSIS CONFIRMS THAT THE PRODUCTS WERE PROPERLY HANDLED, STORED, INSTALLED, AND MAIN- TAINED AND NOT SUBJECT TO CONTAMINATION, ABUSE, MIS- USE, OR INAPPROPRIATE MODIFICATION OR REPAIR. SUITABILITY FOR USE THE PRODUCTS CONTAINED IN THIS DOCUMENT ARE NOT SAFETY RATED. THEY ARE NOT DESIGNED OR RATED FOR EN- SURING SAFETY OF PERSONS, AND SHOULD NOT BE RELIED UPON AS A SAFETY COMPONENT OR PROTECTIVE DEVICE FOR SUCH PURPOSES. Please refer to separate catalogs for OM- RON's safety rated products. OMRON shall not be responsible for conformity with any standards, codes, or regulations that apply to the combination of products in the customer's application or use of the product. At the customer's request, OMRON will provide applicable third party certification documents identifying ratings and limitations of use that apply to the products. This information by itself is not sufficient for a complete determination of the suitability of the products in combination with the end product, machine, system, or other application or use. The following are some examples of applications for which particular attention must be given. This is not intended to be an exhaustive list of all possible uses of the products, nor is it intended to imply that the uses listed may be suitable for the products: Outdoor use, uses involving potential chemical contamination or electrical interference, or conditions or uses not described in this document. Nuclear energy control systems, combustion systems, railroad systems, aviation systems, medical equipment, amusement machines, vehicles, safety equipment, and installations subject to separate industry or government regulations. Systems, machines, and equipment that could present a risk to life or property. Please know and observe all prohibitions of use applicable to the products. NEVER USE THE PRODUCTS FOR AN APPLICATION INVOLVING SERIOUS RISK TO LIFE OR PROPERTY WITHOUT ENSURING THAT THE SYSTEM AS A WHOLE HAS BEEN DESIGNED TO AD- DRESS THE RISKS, AND THAT THE OMRON PRODUCT IS PROP- ERLY RATED AND INSTALLED FOR THE INTENDED USE WITHIN THE OVERALL EQUIPMENT OR SYSTEM. PERFORMANCE DATA Performance data given in this document is provided as a guide for the user in determining suitability and does not constitute a warranty. It may represent the result of OMRON's test conditions, and the users must correlate it to actual application requirements. Actual performance is subject to the OMRON Warranty and Limitations of Liability. CHANGE IN SPECIFICATIONS Product specifications and accessories may be changed at any time based on improvements and other reasons. It is our practice to change model numbers when published ratings or features are changed, or when significant construction changes are made. However, some specifications of the product may be changed without any notice. When in doubt, special model numbers may be assigned to fix or establish key specifications for your application on your request. Please consult with your OMRON representative at any time to confirm actual specifications of purchased products. DIMENSIONS AND WEIGHTS Dimensions and weights are nominal and are not to be used for manufacturing purposes, even when tolerances are shown. ERRORS AND OMISSIONS The information in this document has been carefully checked and is believed to be accurate; however, no responsibility is assumed for clerical, typographical, or proofreading errors, or omissions. PROGRAMMABLE PRODUCTS OMRON shall not be responsible for the user's programming of a programmable product, or any consequence thereof. COPYRIGHT AND COPY PERMISSION This document shall not be copied for sales or promotions without permission. This document is protected by copyright and is intended solely for use in conjunction with the product. Please notify us before copying or reproducing this document in any manner, for any other purpose. If copying or transmitting this document to another, please copy or transmit it in its entirety. ALL DIMENSIONS SHOWN ARE IN MILLIMETERS. To convert millimeters into inches, multiply by.97. To convert grams into ounces, multiply by.57. Cat. No. Z5-E-A-X In the interest of product improvement, specifications are subject to change without notice. B- Displacement sensors / Width-measuring Sensors

31 High-precision Visual Displacement Measurement System Z -Dimensional CCD is Built in. A New Type of Displacement Sensor Utilizing the Best and Most Up-to-date Image Processing Technologies. Z Features Stable measurement of a transparent object or a glass. A wide variety of sensor heads for enhanced detection possibilities. OMRON's Z makes the notion that displacement sensors cannot perform stable measurement of a transparent object or a glass a thing of the past. The newly-developed -dimensional CCD (S-CCD) incorporated in the Z, combined with upgraded performance of the controller, provides enhanced stability and accuracy in measurement of a transparent object. The latest algorithm employed by the Z enables optimal sensitivity even if there is a big difference between the amount of reflected light from the surface and that from the bottom of a glass. Enhanced measurement area and a variety of high-resolution, long-distance sensor heads greatly expand the range of applications. The Z is just another example of OMRON's ongoing challenge to the limits of sensing possibilities. Z-S6 Super Long-range Model Detection distance of 6 ± 5 mm Z-S Long-range Model Detection distance of ± mm Z-S5T High-precision Model Detection distance of 5 ± 5 mm Z-ST Super-precision Model Detection distance of ± mm Z B-

32 The innovative -dimensional CCD (S-CCD) is the key to the sensing performance. The -dimensional CCD enables stable, high-speed measurement. CCD makes a difference in measurement of a transparent object. A conventional displacement sensor using a -dimensional CCD cannot deal with flutter influence to the output. Therefore, the sensor requires increased number of measurements for signal averaging, which leads to slow response time. The S-CCD with a -dimensional CCD has solved this disadvantage, by splitting the measurement point into 6 lines for measurement in finer detail. The value per each pixel is then averaged to produce a reliable output, free from flutter influence caused by the object's surface condition. Stable detection and high-speed processing is thus possible with the Z. PSD sensor A PSD sensor using diffuse reflection is virtually prevented from performing measurement due to insufficient reflection distribution from the surface. A sensor using the mirror reflection method, on the other hand, receives reflective light from the bottom or background of the object, which causes an error in determining the target position, impeding accurate measurement. CCD sensor A CCD using the mirror reflection method is a solution. It can extract only the light reflected off the surface of the target. Accurate measurement of a transparent object is possible without being affected by reflected light from the bottom or background of the object. PSD output (position of the reflected light output from PSD) Reflected light from the bottom PSD Reflected light from the surface Reflected light from the bottom CCD Light gain Light gain Position Reflected light from the surface Position Receiver lens Transparent object Receiver lens Detecting reflect light from the surface Transparent object B- Displacement sensors / Width-measuring Sensors

33 Monitoring as the object is being measured. Measurement data can be recorded and played back. Easy-to-see color display is another great feature of the Z (when connected to a color monitor). Monitoring at each key stage including test and adjustment, operation, or maintenance greatly facilitates efficient, error-free measurement. Real-time monitoring Digital monitor Image monitor Trend monitor Z The measured value is displayed. The use of two colors: green for "Pass" judgement, and red for "High/Low," enhances visual recognition of the measurement result. Test mode Displays the position of measurement point as well as intensity of the reflected light. Conveniently checks whether optimum measurement is taking place. Monitoring during recording and playback Conditions during Test mode can be recorded and played back Continuous measurement values during a certain period of time are shown in chronological order. Changes in the measured values of a moving or rotating object can be checked at a glance. NG (High/Low) judgement status is recorded and played back. Any desired number of measurement data can be stored for testing with a workpiece. Test measurement data obtained off-line can be saved for reference for actual in-line measurement. Up to in-line NG data (information including reflected light condition and measurement data) can be recorded for workpiece analysis as well as for troubleshooting. Z B-

34 Interactive menus provide a variety of measurement functions. Application menu Settings for measurement methods are easily performed using the menu. Just follow the guidance of the monitor screen. Surface displacement Spot displacement Maximum height Groove/indentation Level difference Level difference ( sensors) Thickness ( sensors) Transparent object thickness Expert menu Expert menu is available for more advanced measurement. Detailed setting conditions can be conveniently programmed using the menu. Enhanced hold functions widen the scope of application. With discrete hold functions equipped within the controller, the Z provides a variety of trigger (measurement timing) functions, making otherwise difficult applications a reality with ease. Hold functions Sampling hold Peak hold (bottom) Peak to peak hold Displacement amount Displacement amount Displacement amount Displacement amount Bottom value Peak value Displacement amount Displacement amount Peak to peak Direction/Time Direction/Time Direction/Time Measurement trigger Average hold Measurement trigger Length hold Measurement trigger Displacement amount Average value Displacement amount Length Average displacement amount Displacement amount Direction/ Time Direction/Time Measurement trigger Measurement trigger Selectable trigger function Displacement amount Sampling Peak Peak to peak Measurement trigger can be set to the controller for desired measurement timing. Displacement amount Optional trigger function Direction/ Time Measurement trigger B- Displacement sensors / Width-measuring Sensors

35 Application Measuring the thickness of transparent film Measurement of electrode position in the display module Z Measuring the thickness of sheet Measurement of warping in transparent plastic Inspecting the surface uniformity of a hard disk Shape measurement for welding robot control Measuring tire or black rubber thickness Grinding measurement of a whetstone Z B-5

36 System configuration Power Supply Synchronization Sensor Console Z-KP (cable length: m) Linear Sensor Controller KAS Controller Z-VCEV Z-VC5EV Programmable Controller Sensor Extension Cable Z9-SCR (cable length:.5 m, m, 6 m, 8 m, m or 8 m) Monitor Cable F5-VM (cable length: m) Monitor BNC Jack (Provided with F5-VM) Sensor Z-ST Z-S5T Z-S Z-S6 (Up to Sensors can be connected.) Liquid Crystal Monitor F5-M5L (pin input) Ordering Information Name Item Model Remarks Sensor Z-ST Z-S5T Z-S Z-S6 Controller Z-VCEV NPN input/output Z-VC5EV PNP input/output Console Z-KP Liquid Crystal Monitor F5-M5L Sensor Extension Cable Z9-SCR (See note) Cable length:.5 m, m, 6 m, 8 m, m or 8 m Monitor Cable F5-VM Note: Specify the required cable length when ordering. B-6 Displacement sensors / Width-measuring Sensors

37 Rating/performance Sensor: Z-ST/Z-S5T/Z-S/Z-S6 Model Z-ST Z-S5T Z-S Z-S6 Diffuse reflection Mirror reflection Diffuse reflection Mirror reflection Diffuse reflection Mirror reflection Diffuse reflection only Measurement mode Distance to measurement center ±5. mm mm (with beam cover attached: 6 mm) ±5 mm ± mm ± mm ±9 mm ±6 mm Measurement range ± mm ±5 mm ± mm ± mm ±6 mm Light source Beam dimensions (See note.) Linearity Resolution Sampling period (See note.) LED indicators NEAR indicator FAR indicator Temperature characteristic (See note.) Environment resistance Degree of protection Ambient operating illumination Ambient temperature Ambient humidity Vibration resistance Visible-light semiconductor laser (Wavelength: 65 nm, mw max., Class ) µm µm ( µm*) TYP. (distance to measurement center) * Measurement region ±.5 %F.S. (See note.). µm (See notes 5 and 6.) 5 µs ±.5 %F.S. (See note.) Visible-light semiconductor laser (Wavelength: 67 nm, mw max., Class ) µm µm TYP. (distance to measurement center) ±. %F.S. (See note.). µm (See notes 7 and 9.) 6 µm µm TYP. (distance to measurement center) µm (See notes 7 and 8.) ±5 mm (F.S.7 mm) Visible-light semiconductor laser (Wavelength: 658 nm, 5 mw max., Class B). mm 6 (.*) mm (at 5 mm) * Measurement region ±.7 %F.S. (5 to 75 mm) ±. %F.S. (75 to 95 mm) (See note.) 8 µm (at 5 mm) µm (at 6 mm) (See notes 7 and 8.) Lights if the workpiece is close to the measurement center or is on the near side of the measurement center and inside the measurement region. Flashes if the workpiece is outside the measurement region or if the density is excessive or insufficient. Lights if the workpiece is close to the measurement center or is on the far side of the measurement center and inside the measurement region. Flashes if the workpiece is outside the measurement region or if the density is excessive or insufficient. ±. %F.S./ C IEC IP6 IEC IP67 IEC IP66 Illumination at light-receiving surface:, lx max., incandescent light Operating: to +5 C, Storage: -5 to +6 C (with no icing or condensation) Operating and storage: 5 % to 85 % (with no condensation) to 5 Hz (double amplitude:.5 mm) for 8 min. each in X, Y, and Z directions Materials Unit: Die-cast aluminum; Cable sheathing: Heat-resistant chlorinated vinyl Connector: Zinc alloy and brass Cable length m 5 cm Minimum bending radius Weight Accessories 68 mm Approx. 6 g (Unit: Approx. 5 g) ferrite cores, laser warning labels (English) Approx. 8 g (Unit: Approx. 6 g) Approx. 8 g (Unit: Approx. 7 g) Note:. Defined at /e (.5 %) of the density at the light center. Light may, however, be present outside this range and if the reflection factor of the light around the workpiece is high compared to the workpiece, measurement may be affected.. Error with respect to the theoretical line representing the displacement output for measurement of OMRON standard SUS blocks. The linearity varies with the type of workpiece. Z Z B-7

38 .Error with respect to the theoretical line representing the displacement output for measurement of OMRON standard quartz glass. The linearity varies with the type of workpiece..error with respect to the theoretical line representing the displacement output for measurement of OMRON standard white alumina ceramics. The linearity varies with the type of workpiece. ex. Z-S mm Digital output 8 mm ±. % max. Distance 8 mm mm 5.Displacement conversion value for peak-to-peak of displacement output. These figures are for measurement of OMRON standard quartz glass (mirror reflection mode) or OMRON standard SUS blocks (diffuse reflection) at the measurement center. In magnetic fields, it may not be possible to maintain resolution performance characteristics. 6.These figures are for when the Sensor is connected to the Z-VCEV/VC5EV, the average number of measurements is 56, and M command RS- C output is used. 7.Displacement conversion value for peak-to-peak of displacement output (for measurement of OMRON standard white alumina ceramic at the measurement center). In strong magnetic fields, it may not be possible to maintain resolution performance characteristics. 8.With the Z-VCEV/VC5EV, at an average number of measurements of 6. 9.With the Z-VCEV/VC5EV, at an average number of measurements of 5..Value for measurement with line (high speed) set in CCD Mode..Value for measurement with the space between the Sensor and the workpiece (Z-S5T/S/S6: white alumina ceramic; Z-ST: quartz glass) secured with an aluminum jig. B-8 Displacement sensors / Width-measuring Sensors

39 Controller: Z-VCEV/Z-VC5EV Item mode VISUAL mode NON-VISUAL mode Performance specifications Number of Sensors that can be mounted Number of scenes 6 Image memory function NG images: scenes max.; Surrounding images: scenes max.; Workpiece display images: scenes max. Processing method Gray center of gravity, edge centering Edge centering Pre-image processing Noise removal, smoothing None Averaging/filtering Light intensity tracking function Applications Region specification Two region measurement modes Average number of times ( stages, to 96 times), HPF (high pass filter) Automatic (The light intensity tracking range can be specified.) Fixed (Select from stages.) Select from the following 8 types: Surface displacement, spot displacement, maximum height, groove/indentation, level difference, transparent workpiece thickness, level difference ( Sensors), or thickness ( Sensors). Region specification of line beam and displacement direction is possible. Average number of times (SLOW: 6 times; FAST: time) Automatic (The light intensity tracking range can not be specified.) Fixed (Select either HIGH or LOW.) Absolute coordinate mode and relative coordinate mode Hold functions Sampling, peak, bottom, peak-to-peak, average, and length Two Sensor measurement modes Simultaneous measurement and alternate measurement Measurement data outputs per scene output Equations Results output The following operations are possible for outputs to : K+A, K-A, K+(A+B), K+(A-B), and K-(A+B) A and B: Specified measurement points K: Freed constant Judgement output (HIGH, PASS, LOW, ERROR) RS-C output Terminal block output Measurement value output (measurement value) RS-C output Terminal block output Analog output Analog output Z Terminal block input points: TRIGGER, HOLD-RESET, LD-OFF, ALL-ZERO, ZERO, ZERO, RESET, and DI to DI output points: DO to DO LD-OFF Input/Output Type Z-VCEV: NPN Z-VC5EV: PNP Monitor interface channel (for pin jack or overscan monitor) Analog output resolution The full scale for output can be divided into a maximum of gradations. Resolution (See note.) *.5 mv (±5 V),. µa ( to ma) Note: For measurement at an average number of times of 6 with an OMRON KAS Linear Sensor Controller connected. Z B-9

40 Item mode VISUAL mode NON-VISUAL mode General specifications Monitor Supply voltage Current consumption Insulation resistance Dielectric strength Leakage current Noise resistance Vibration resistance Shock resistance Ambient temperature Ambient humidity Ambient environment Ground Degree of protection Case material.6 to 6. VDC (including ripple) A max. (with Sensors connected) MΩ min. between all DC external terminals and GR terminal ( VDC Megger, with internal surge absorber removed) VAC, 5/6 Hz between all DC external terminals and GR terminal (with internal surge absorber removed) ma max. 5 Vp-p; Pulse width:. µs/ µs; Rising edge: -ns pulse to 5 Hz (double amplitude:. mm) for 8 min. each in X, Y, and Z directions m/s, times each in 6 directions Operating: to +5 C, Storage: -5 to +6 C (with no icing or condensation) Operating and storage: 5 % to 85 % (with no condensation) No corrosive gases Ground the Z s ground terminal to less than Ω IEC659 IP (in-panel) Controller: ABS Weight (including packaging) Approx. g (Unit: Approx. 7 g) Accessories manuals, resistor (5 Ω, / W) Monitor Liquid Crystal Monitor Item Model F5-M5L Size 5.5 inches Type Resolution TFT color liquid crystal dots Input signal NTSC composite video (. V / 75 Ω) Supply voltage Current consumption Ambient temperature Ambient humidity. to 6. VDC Approx. 7 ma Operating: C to +5 C, Storage: -5 C to +65 C (with no icing or condensation) Operating and storage: 5 to 85 %RH (with no condensation) Weight (including packaging) Approx. 87 g (Unit: Approx. 6 g) Accessories Operation manual, mounting brackets B- Displacement sensors / Width-measuring Sensors

41 Laser Safety The Z-ST, Z-Z5T and Z-S Sensor Heads are Class Laser Products according to EN685- (IEC685- ) and Class II Laser Product according to FDA ( CFR.) (see note). The Z-S6 Sensor Head is a Class B and Class IIIB Laser Product, respectively. The Z Series is meant to be built into final system equipment. Pay special attention to the following precautions for the safe use of the product: Note: Europe: Class and Class B of EN685-: 99 = IEC685-: 99 U.S.A.: Class II and Class IIIB of FDA ( CFR.) Z-ST Z-S5T Z-S Z-S6 Wavelength 65 nm 67 nm 658 nm Peak power mw max. 5 mw max. Class B Maximum pulse duration 7 ms 7.5 ms Period.5 to ms.5 to 5 ms ()Use this product as specified in the operation manual. Otherwise, you may be exposed to hazardous laser radiation. ()The Z series radiates laser beams in the visible light range. Do not expose your eyes directly to the laser radiation. Ensure that the laser beam path is terminated during use. If a mirror or shiny surface is positioned in the laser beam path, ensure that the reflected beam path is also terminated. If the Unit must be used without terminating the laser beam path, position the laser beam path so that it is not at eye level. ()To avoid exposure to hazardous laser radiation, do not displace nor remove the protective housing during operation, maintenance, and any other servicing. ()The user should return the product to OMRON for all repair and servicing. (5)As for countries other than those of Europe and the U.S.A., observe the regulations and standards specified by each country. Z Precautions Warming up After turning on the power, wait about minutes before using the equipment. The circuits are not stable after turning on the power, and thus measured values tend to gradually drift. Z B-

42 Dimensions (Unit: mm) Sensor Z-ST Optical axis 6. Reference plane Receiver axis Measurement center 6 () Two,.5-dia. holes Operation indicators 7 dia. Receiver Light Monitor Emitter Emission axis Reference plane 8. Vinyl-insulated round cable 6.8 dia. Standard length: m Connector Z-S5T Reference plane 8 Optical axis Three,.5-dia. holes Emission axis Measurement center Receiver axis Operation indicators 8.5 dia. (5) Reference plane Vinyl-insulated round cable 6.8 dia. Standard length: m Connector Z-S Reference plane 8 Optical axis 6 8 Three,.5-dia. holes Measurement center Emission axis Operation indicators 8.5 dia. 5 Receiver axis (5) Reference plane Vinyl-insulated round cable 6.8 dia. Standard length: m Connector B- Displacement sensors / Width-measuring Sensors

43 POWER SYNC Z-S6 Optical axis 65 ±. Three, M holes 6 Receiver axis Measurement center Emission axis 9 5 R Reference plane R ±. (.5:) Operation indicators 8 dia Z 7 Reference plane Vinyl insulated round cable 6.8 dia. Standard length: 5 mm 5 (5) Connector Controller Z-VCEV Z-VC5EV.6 95 Indicators Connector.5 dia (66.5) 85 Four,.5-dia. holes Console Z-KP LCD monitor F5-M5L Mounting plate thickness:.6 to.8 (6 max.) 5.5 (5) (55) Mounting bracket ESC TRIG ENT 87 () 85 (5.5) 5 min. Monitor cable (F5-VM) dia. SHIFT Z-KP CONSOLE 7. Tolerance: ± mm The dimensions in parentheses are reference values. Panel opening dimensions mm mm Z B-

44 ALL DIMENSIONS SHOWN ARE IN MILLIMETERS. To convert millimeters into inches, multiply by.97. To convert grams into ounces, multiply by.57. Cat. No. QE-EN- In the interest of product improvement, specifications are subject to change without notice. B- Displacement sensors / Width-measuring Sensors

45 Profile Measuring System Z5 High-Precision Sensor that Measures and Displays an Object's Profile. Z5 Features OMRON's original line beam method provides a complete solution to profile measurement problems. Conventional non-contact measurement of the profile of an object commonly uses a displacement sensor to measure the height of the object, by moving the object or the sensor. However, this system has several disadvantages, such as lower measurement accuracy resulting from object or sensor movement as well as high system construction cost. By utilizing a unique wide beam method and -dimensional CCD, OMRON's Z5 eliminates these problems. Through its capability of measuring a diversely-shaped objects in a stable manner, the Z5 can meet a variety of application needs. Laser Projector lens SW-CCD Receiver lens Detected image Principle of line beam method A wide beam is applied to the object to be measured. A -dimensional CCD receives the reflected light to measure the -dimensional profile of the object. Application Measurement of connector pin configuration Height measurement for creamsoldered joint on PCB Rivet height measurement Door gap measurement Z5 B-5

46 Features Measures the shape of object instantly. A complete solution to the disadvantages of conventional measurement systems. Measurement by displacement sensor Accurate and stable measurement. OMRON's original -dimensional SW-CCD and multiple light intensity control system enable stable measurement of objects with round shape and other surface conditions. Sensor Head Workpiece Displacement sensor Personal computer/plc Judgment/ measurement Output There is nothing for a conventional measurement system but to make the best of it, or we have to give up measurement. A variety of measurement items. Various measurement items, such as level difference, width, and edge position, can be selected depending on the specific application. Permitting simultaneous measurement of up to 8 items, the Z5 is applicable to various measurement purposes. -point level difference (Step: pts) Moving Problems to be resolved Object or sensor needs to be moved. Personal computer or other device is required for measurement data processing. When you use Z5, --- Increased system construction cost Measurement accuracy deterioration caused by movement of object or sensor and data processing. Measurement takes a long time. Width Measurement by Z5 model Sophisticated and high accuracy inline inspection Sensor Head Judgment/ measurement Output Edge position Workpiece Monitor Enjoy the following advantages from Z5! Moving the object or sensor is no longer necessary. Various data processing and calculation functions are performed automatically. Lower system construction cost Higher measurement accuracy Shorter measurement time Four types of monitor screens Measurement data can be displayed on types of monitor screens. These screens enable analysis and evaluation of measurement data from various viewpoints. Profile monitor Time-series change of profile (data on cross section height) can be checked on a D gray scale image. Image monitor Both measurement data and profile image can be checked at the same time. Digital monitor Two or more measurement data can be checked at the same time. Trend monitor Time-series change of measurement data can be checked. B-6 Displacement sensors / Width-measuring Sensors

47 System configuration Power Supply Synchronization Sensor Console Z-KP (cable length: m) Z5 Linear Sensor Controller KAS Controller Z5-MCE Z5-MC5E Programmable Controller Sensor Extension Cable Z9-SCR (cable length:.5 m, m, 6 m, 8 m or m) Monitor Cable F5-VM (cable length: m) Monitor BNC Jack (Provided with F5-VM) Sensor Z5-SWT (cable length: m) Z5-SW6 (cable length:.5 m) Z5-SW7(cable length: m) (Up to Sensors can be connected.) Liquid Crystal Monitor F5-M5L (pin input) Ordering Information Name Item Model Remarks Z5-SWT Cable length: m Sensor Z5-SW6 Cable length:.5 m Z5-SW7 Cable length: m Controller Z5-MCE NPN input/output Z5-MC5E PNP input/output Console Z-KP Liquid Crystal Monitor F5-M5L Sensor Extension Cable Z9-SCR (See note) Cable length:.5 m, m, 6 m, 8 m or m Monitor Cable F5-VM Cable length: m Note: Specify the required cable length when ordering. Z5 B-7

48 Rating/Performance Sensor Z5-SWT/-SW6/-SW7 Model Z5-SWT Z5-SW6 Z5-SW7 Diffuse reflection Mirror reflection Diffuse reflection Mirror reflection Diffuse reflection Mirror reflection Measurement mode Item Distance to measurement center 5. mm mm (with beam cover attached: 6 mm) 5 mm mm mm 9 mm Measurement range ±.8 mm ±5 mm ± mm ± mm ±6 mm Light source Beam dimensions (See note ) Linearity Visible-light semiconductor laser (See note ) (Wavelength 65 nm, mw max., Class ) Reference distance: µm mm TYP. (Measurement region: mm) ±. %F.S. (See note ) ±. %F.S. (See note ) Visible-light semiconductor laser (Wavelength 658 nm, 5 mw max., Class B) Reference distance: µm mm TYP. (Measurement region: 6 mm) ±. %F.S. (See note ) Reference distance: 6 µm 5 mm TYP. (Measurement region: 7 mm) Resolution.5 µm (See notes 5 and 6). µm (See notes 7 and 8) µm (See notes 7 and 8) Sampling cycle LED indicators (LASER indicator) 9.9 ms Lit while laser is ON. Temperature characteristic (See note 9). %F.S./ C Degree of protection IEC IP6 IEC IP66 5.Displacement conversion value for peak-to-peak of displacement output. These figures are for measurement of OMRON standard quartz glass (mirror reflec- Environment resistance Ambient operating illumination Illumination at light-receiving surface:, lx max., incandescent light Ambient temperature Operating: to +5 C, Storage: -5 to +6 C (with no icing or condensation) Ambient humidity Vibration resistance Operating and storage: 5 to 85 % RH (with no condensation) to 5 Hz (single amplitude:.5 mm) for 8 min. each in X, Y, and Z directions Unit: Die-cast aluminum Materials Cable sheathing: Heat-resistant chlorinated vinyl Connector: zinc alloy and brass Cable length m.5 m m Minimum bending radius 68 mm Weight (including packaging) Accessories Approx. 6 g (Unit: Approx. 5 g) Approx. 7 g (Unit: Approx. 6 g) ferrite cores, laser warning labels (English) Approx. 8 g (Unit: Approx. 6 g) Note:.Defined at /e (.5%) of the density at the light center. Light may, however, be present outside this range and if the reflection factor of the light around the workpiece is high compared to the workpiece, measurement may be affected..error with respect to the theoretical line representing the displacement output for measurement of OMRON standard quartz glass. The linearity varies with the type of workpiece..error with respect to the theoretical line representing the displacement output for measurement of OMRON standard SUS blocks. The linearity varies with the type of workpiece..error with respect to the theoretical line representing the displacement output for measurement of OMRON standard white alumina ceramics. The linearity varies with the type of workpiece. Z5-SW7 mm Digital output 8 mm ±. % max. 8 mm mm Distance B-8 Displacement sensors / Width-measuring Sensors

49 tion mode) or OMRON standard SUS blocks (diffuse reflection mode) at the measurement center. In strong magnetic fields, it may not be possible to maintain resolution performance characteristics. 6. These figures are for when the Sensor is connected to the Z5-MCE/MC5E, the average number of measurements is 6. Measurement data are sent to PC via RS-C cable for calculation of their average values. 7. Displacement conversion value for peak-to-peak of displacement output (for measurement of OMRON standard white alumina ceramic at the measurement center). In strong magnetic fields, it may not be possible to maintain resolution performance characteristics. 8. With the Z5-MCE/MC5E, at an average number of measurements of 6. Measurement data are sent to PC via RS-C cable for calculation of their average values. 9. Value for measurement with the space between the Sensor and the workpiece (white alumina ceramic) secured with an aluminum jig..higher power laser type (Class B) is also available. For further information, please contact us. Z5 Z5 B-9

50 Controller Z5-MCE/MC5E Model Z5-MCE Z5-MC5E Item Input/Output Type NPN PNP Number of Sensors that can be mounted Number of scenes 6 Performance specifications General specifications Light intensity tracking function Automatic (The light intensity tracking range can be specified)/fixed (Select from stages)/ Multiple (The light intensity range can be specified) Select from the following 8 types: Measurement item Height, Step: pts, Step: pts, Edge position, With, Edge center, Peak/Bottom, Define Region specification Region specification of line beam and displacement direction is possible. Number of data to be stored 8 points max. Trigger function Free/External /External /Auto Judgment output RS-C output Terminal block output Results output Measurement value output (measurement value) RS-C output Analog output Terminal block Monitor interface Analog output resolution Power supply voltage Current consumption Insulation resistance Dielectric strength Leakage current Noise resistance Vibration resistance Shock resistance Ambient temperature Ambient humidity Ambient environment input points: TRIGGER, LD-OFF, RESET, D to D7 output points: DO to DO9, GATE CH (for pin jack or overscan monitor) The full scale for output can be divided into a maximum of, gradations. Resolution (See note):.5 mv (±5 V),. μa ( to ma).6 to 6. VDC A max. (with Sensors connected) MΩ min. between all DC external terminals and GR terminal ( VDC megger) (with internal surge absorber removed) VAC, 5/6 Hz between all DC external terminals and GR terminal (with internal surge absorber removed) ma max. 5 Vp-p; pulse width:. μs/ μs, Rising edge: -ns pulse to 5 Hz (double amplitude:. mm) for 8 min. each in X, Y, and Z directions m/s, times each in 6 directions Operating: to +5 C, Storage: -5 to +6 C (with no icing or condensation) Operating and storage: 5 to 85 %RH (with no condensation) No corrosive gases Ground Ground the Z5's ground terminal to less than Ω. Degree of protection Material IEC IP (in-panel) Unit: ABS Weight (including packaging) Approx. g (Unit: Approx. 7 g) Accessories manuals, resistor (5 Ω, / W) Note: For measurement at an average number of times of 6 with an OMRON KAS Linear Sensor Controller connected. B-5 Displacement sensors / Width-measuring Sensors

51 Monitor Monitor Liquid Crystal Monitor Item Model F5-M5L Panel size 5.5 inches Panel type TFT color liquid crystal Resolution dots Input signal NTSC composite video (. V/75 Ω) Power supply voltage. to 6. VDC Current consumption Approx. 7 ma Ambient temperature Operating: to +5 C, Storage: -5 to +65 C (with no icing or condensation) Ambient humidity Operating and storage: 5 to 85 %RH (with no condensation) Weight (including packaging) Approx. 87 g (Unit: Approx. 6 g) Accessories Operation manual, mounting brackets Z5 Laser Safety The Z5-SWT Sensor Head is a Class Laser Product according to EN685- (IEC685-) and Class II Laser Product according to FDA ( CFR.) (see note). The Z5-SW6 and Z5-SW7 Sensor Heads are Class B and Class IIIB Laser Products, respectively. The Z5 Series is meant to be built into final system equipment. Pay special attention to the following precautions for the safe use of the product: Note: Europe: Class and Class B of EN685-: 99 = IEC685-: 99 U.S.A.: Class II and Class IIIB of FDA ( CFR.) Z5-SWT Z5-SW6/Z5-SW7 Wavelength 65 nm 658 nm Maximum pulse duration ms 7.5 ms Cycle.5 to ms.5 to 5 ms Peak power mw max. 5 mw max. Class B ()Use this product as specified in the operation manual. Otherwise, you may be exposed to hazardous laser radiation. ()The Z5 series radiates laser beams in the visible light range. Do not expose your eyes directly to the laser radiation. Ensure that the laser beam path is terminated during use. If a mirror or shiny surface is positioned in the laser beam path, ensure that the reflected beam path is also terminated. If the Unit must be used without terminating the laser beam path, position the laser beam path so that it is not at eye level. ()To avoid exposure to hazardous laser radiation, do not displace nor remove the protective housing during operation, maintenance, and any other servicing. ()The user should return the product to OMRON for all repair and servicing. (5)As for countries other than those of Europe and the U.S.A., observe the regulations and standards specified by each country. Dimensions (Unit: mm) Sensor Z5-SWT Optical axis 6. Reference plane Reception axis Measurement center 6 () Two,.5-dia. holes Operation indicators 7 dia. Receiver Light.5 Monitor Emitter Emission axis Reference plane 8. Vinyl-insulated round cable 6.8 dia. Standard length: m Connector Z5 B-5

52 POWER SYNC Z5-SW6 Reference plane 8 Optical axis 6 dia. 5 Measurement center Emission axis Three,.5-dia. holes Operation indicators 8 dia Emitter 5 6. Reception axis (5) 9.5 Receiver Reference plane (5) Vinyl-insulated round cable 6.8 dia. Standard length:.5 m Connector Sensor Z5-SW7 Liquid Crystal Monitor F5-M5L Reference plane Mounting plate thickness:.6 to.8 8 (6 max.) Optical axis 6 Mounting bracket 9. 6 dia. Emitter Measurement center Emission axis Reception axis Three,.5-dia. holes Operation indicators 8 dia (5) () Panel opening dimensions (5.5) (5) (55) 5 min. Monitor Cable (F5-VM) Tolerance: ± mm The dimensions in parentheses are provided for reference..7 Receiver Reference plane (5) mm Vinyl-insulated round cable 6.8 dia. Standard length: m Connector mm Controller Z5-MCE/MC5E Console Z-KP Indicators ESC TRIG ENT 87 Connector.5 dia. 5 MULTI DIMENSION CONTROLER dia. SHIFT Z-KP CONSOLE (66.5) 85 Four,.5-dia. holes ALL DIMENSIONS SHOWN ARE IN MILLIMETERS. To convert millimeters into inches, multiply by.97. To convert grams into ounces, multiply by.57. Cat. No. QE-EN- In the interest of product improvement, specifications are subject to change without notice. B-5 Displacement sensors / Width-measuring Sensors

53 Welding Bead Sensor Z5 Inspect for welding flaws by measuring the bead shape. Accumulate and output the profile data. Greatly simplify the management of welding bead quality. The high-speed -ms measurement period allows % in-line inspection. Automatic light intensity (brightness) adjustment provides stable measurement of fluctuating metal surfaces. The compact sensor head contains both the transmitter and receiver, so mounting space is not an issue. In-line Inspection of Welding Beads Z5 Features Improve quality by performing % inspection of weld strength uniformity. Display the Inspection Results or D Shape Data Flatness OK ( / ) Last Step :. 586 mm PASS Depth:Bead :. 5 mm PASS Gap : +. mm PASS Flatness :. 5 mm PASS PEAK-BTM : mm PASS Length : mm PASS ESC: Back SFT + ENT/ESC : Save/Load Detect Various Bead Flaws Bead shape Cracks or pinholes Wide laser beam for fast, highly accurate inspections Gaps in the weld Z5 B-5

54 ESC SHIFT TRIG POWER SYNC ENT CONSOLE Basic System Configuration Sensors Controllers Z5-WCE Z5-WC5E Power supply Console Z-KP (-m cable) Z5-SWT (.5-m cable) Z5-SW6 (.5-m cable) Z5-SW7 (.5-m cable) Sensor Extension Cables Z59-SCIR (.5 m, m, 6 m, 8 m, m, or 8 m) Specify the required cable length when ordering. Monitors Up to Sensors can be connected. F5-VM Monitor Cable ( m) F5-M5L Color Liquid Crystal Monitor (pin input) BNC Jack (Included with the F5-VM) Use the Monitor to check the image and display menus when making Specifications Controllers: Z5-WCE and Z5-WC5E General Specifications Item Supply voltage Current consumption Insulation resistance Dielectric strength Leakage current Noise resistance Vibration resistance Specification.6 to 6. VDC A max. (with Sensors connected) MΩ min. (at V DC) between DC external terminals and GR terminal (with internal surge absorber removed), VAC, 5/6 Hz between DC external terminals and GR terminal (with internal surge absorber removed) ma max.,5 VP-P; pulse width:. μs/ μs; rising edge: -ns pulse to 5 Hz (double amplitude of. mm) for 8 minutes each in the X, Y, and Z directions Shock resistance m/s times each in 6 directions Ambient temperature Ambient humidity Atmosphere Grounding Degree of protection Material Operating: to 5 C (with no icing or condensation) Storage: -5 to 6 C (with no icing or condensation) Operating and storage: 5% to 85% (with no condensation) No corrosive gases Less than Ω IEC659 IP (In-panel) Case: ABS Characteristics Item Specification Number of Sensors Up to Sensors can be connected. Number of scenes 6 Light intensity tracking function Measurement items Region specification Data storage Trigger function Results output Terminal block Monitor interface Analog output resolution Weight Automatic (The light intensity tracking range can be specified.) Fixed (Select one of stages.) Select one of the following 6 items: Deviation from reference surface, Bead height, Width, Bead change, Peak/Bottom, Inspection length A region can be specified in the direction of the line beam.,8 points max. Free-run, External, External, or Auto Judgement output RS-C output Terminal block output Measurement value output (measurement value) RS-C output Analog output 8 input points: TRIGGER, LD-OFF, RE- SET, DI, and DI to DI7 output points:do to DO5, DO8, DO5, DO7 to DO9, and GATE channel (for pin jack or overscan monitor) The full-scale output can be divided into, gradations max. Resolution (See note.):.5 mv (± 5 V). μa ( to ma) Approx. 7 g (Controller only) Note: This resolution is for measurements with an OMRON KAS Linear Sensor Controller connected and values averaged over 6 measurements. B-5 Displacement sensors / Width-measuring Sensors

55 Sensors: Z5-SWT, Z5-SW6, and Z5-SW7 Sensor model Z5-SWT Z5-SW6 Z5-SW7 Measurement mode Mirror reflection Diffuse reflection Diffuse reflection Mirror reflection Diffuse reflection Mirror reflection Measurement distance at center mm (6 mm with beam cover mounted) 5. mm 5 mm mm mm 9 mm Measurement range ±.8 mm ±5 mm ± mm ± mm ±6 mm Light source Beam dimensions (See note.) Linearity Visible semiconductor laser (Wavelength: 67 nm, 5 mw max., class B) μm mm typical at the reference distance (-mm measurement region) ±.% F.S. (See note.) ±.% F.S. (See note.) Visible semiconductor laser (Wavelength: 658 nm, 5 mw max., class B) μm mm typical at the reference distance (6-mm measurement region) ±.% F.S. (See note.) 6 μm 5 mm typical at the reference distance (7-mm measurement region) Resolution.5 μm (See notes 5 and 6.). μm (See notes 7 and 8.) μm (See notes 7 and 8.) Sampling period LED indicator (Laser indicator) Temperature characteristic (See note 9.) Degree of protection Environmental resistance Ambient operating illumination Ambient temperature 9.9 ms Lit when the laser is ON..% F.S./ C IP6 IP66 Illumination at light-receiver surface:, lx max. (incandescent light) Operating: to 5 C (with no icing or condensation) Storage: -5 to 6 C (with no icing or condensation) Ambient humidity Operating and storage: 5% to 85% (with no condensation) Vibration (destruction) to 5 Hz (double amplitude of.5 mm) for 8 minutes each in the X, Y, and Z directions Controller: Die-cast aluminum Materials Cable sheathing: Heat-resistant PVC Connector: Zinc alloy and brass Cable length.5 m Minimum bending radius 68 mm Weight Approx. 5 g Approx. 6 g Z5 Note:. The minimum light intensity at the edges of the beam is defined as /e (.5%) of the intensity at the center of the beam. Some light will scatter beyond this beam region and the measurement may be affected if the immediate vicinity around the workpiece is highly reflective.. This is the error with respect to the theoretical line of the displacement output when measuring the standard OMRON quartz glass. The linearity may vary depending on the workpiece being used.. This is the error with respect to the theoretical line of the displacement output when measuring a standard OMRON stainless-steel block. The linearity may vary depending on the workpiece being used.. This is the error with respect to the theoretical line of the displacement output when measuring the standard OMRON white alumina ceramic. The linearity may vary depending on mm Z5-SW7 the workpiece being used. 5. This is the displacement output s peak-to-peak displacement conversion value. These figures are for measurement of the standard OMRON quartz glass (mirror reflection) or standard OMRON stainless-steel block (diffuse reflection) at the center of the measurement ±.% max. 8 mm region. The resolution performance characteristics may not be met when operating in a 8 mm mm Distance magnetic field. 6. These figures are for Sensors connected to a Z5-WCE or Z5-WC5E and averaged over 6 measurements. The averaged data was transmitted to a PC through an RS-C connection for storage and processing. 7. This is the displacement output s peak-to-peak displacement conversion value. (These figures are for measurement of the standard OM- RON white alumina ceramic at the center of the measurement region.) The resolution performance characteristics may not be met when operating in a strong magnetic field. 8. These figures are for Sensors connected to a Z5-WCE or Z5-WC5E and averaged over 6 measurements. The averaged data was transmitted to a PC through an RS-C connection for storage and calculations. 9. This is the value measured when the gap between the Sensor and workpiece (white alumina ceramic) is fixed with an aluminum jig. Digital output Z5 B-55

56 ALL DIMENSIONS SHOWN ARE IN MILLIMETERS. To convert millimeters into inches, multiply by.97. To convert grams into ounces, multiply by.57. Cat. No. QE-EN- In the interest of product improvement, specifications are subject to change without notice. B-56 Displacement sensors / Width-measuring Sensors

57 Multi-Dimensional Sensor Z55 Inline profile inspections for workpieces made of metal, plastic, or other materials all at one time Z55 Features Turn Height Width Crosssectional area Inclination Long distance: mm into precise numeric evaluation criteria! Measurement width: 7 mm Measurement height: 6 mm High-precision Measurements Over a Wide Area Height of measurement range: 6 mm, width of measurement range: 7 mm Cross-sectional Measurements without Moving the Sensor or Target Object OMRON's unique -dimensional SW-CCD element and light sensitivity control ensure consistent measurements even on workpieces with curves and other surface shapes. Complete Measurement Menus Menu selections include items for measuring heights, - or -pt steps, edge positions, widths, edge centers, peaks/bottoms, crosssectional areas, inclinations, average roughness, and maximum roughness. There are also menu items for user-defined continuous measurements (unrestricted calculations), trigger measurements, and logging measurements. Image Monitor This window is a conceptualization and not an actual window. Scn Run 99.6ms NEAR FAR OUT S+ / : Display S+ENT: Adjust Sen LV PEAK Sen LV PEAK Zero's OFF mm PASS Workpiece shape and measurement results can be checked at a glance. Thru Profile Monitor This window is a conceptualization and not an actual window. div T:.996 [s] V:.5[mm] 99.6ms Sen mm PASS S+ / : Display S+ENT: Adjust Profiles that change sequentially as the workpiece moves can be checked through images with -D shading. Z55 B-57

58 Specifications Z55-MC/MC5 Controller Model Z55-MC Z55-MC5 I/O type NPN PNP Power supply voltage.6 to 6. V DC Current consumption A max. (with sensors connected) Insulation resistance Between the group of external DC terminals and the ground terminal: MΩ max. (at V DC ) (when the built-in surge absorber is removed) Dielectric strength Between the group of external DC terminals and the ground terminal: V AC at 5/6 Hz (when the built-in surge absorber is removed) Leakage current ma max. Noise resistance,5 Vp-p; Pulse width:. ms/ ms; Rising edge: -ns pulse Vibration resistance to 5 Hz (at a double amplitude of. mm) for 8 minutes each in the X, Y, and Z directions Shock resistance m/s²; times each in 6 directions Ambient temperature to +5 C at operation, -5 to +6 C at storage (no icing or condensation) Ambient humidity Operating and storage: 5% to 85% (no condensation) Ambient environment No corrosive gases Ground D-type ground (ground resistance of W or less) * conventional class ground Degree of protection IEC659 IP (in-panel) Materials Console: ABS Weight Approx..7 kg Number of connectable sensors Up to two Z55-SW7 sensors can be connected. Number of scenes 6 Averagin number 9 levels ( to 56 times) Sensor control 6 levels (varies depending on the sensor) Area specification function Available Control of quantity of light Multi-sensitivity adjustment (dynamic range or sampling interval takes precedence) fixed sensitivity, automatic sensitivity adjustment Measurement time * ms (at fixed sensitivity) ms (at automatic sensitivity) ms to 5 ms (when sampling interval takes precedence) ms to 6 ms (when dynamic range takes precedence) Run Mode Continuous measurement or trigger measurement Image pre-processing Noise removal Measurement pre-processing Interpolation processing, filter processing, Inclination compensation processing, Height and position compensation processing Detection method Height position method, Reflectance method Measurement item Height, Step: pts, Step: pts, Edge position, Width, Edge center, Peak/Bottom, Cross-sectional area, Inclination, Roughness, User-defined Logging function The measurement results of up to, measurements can be stored. (It is possible to select the number ofmeasurements after which the measurement results will be stored.) Output pre-processing Forced zero, Offset/span adjustment Profile data output Up to height profiles can be output in one batch. The output format may be either ASCII code or binary format (when sending via XMODEM) Results output Terminal block: Judgment result Analog: Measurement result RS-C: Measurement result, judgment result, profile data Screen display Image monitor, Trend monitor, Digital monitor, Profile monitor Tool function Peripheral image display function, test measurement function Terminal blocks input points: TRIGGER, LD-OFF, RESET, DI to DI7 output points: DO to DO9 and GATE RS-C (Baud rate) Up to 5 kbps (at XMODEM transmission, external trigger measurement) Normally 8. kbps Monitor interface channel (for pin jack or overscan monitor) Analog output resolution The full output scale can be divided into a maximum of, divisions. Resolution * :.5 mv (±5 V),. ma ( to ma) *. The sampling interval varies depending on the measurement settings. Check the actual sampling interval on the image monitor. *. When performing measurement taking the average of every 6 measurements with an OMRON KAS linear sensor controller connected. B-58 Displacement sensors / Width-measuring Sensors

59 Z55-SW7 Sensor Sensor installation Diffuse reflection only Reference distance mm (for 6-mm measurement range mode) (direction of height) Measurement Direction of width 7 mm (at mm-reference distance) range Direction of height * ± mm max. (for 6-mm measurement range mode) Light source Visible semiconductor laser (wave length: 658 nm, 5 mw max, class B) Beam dimensions * µm x 75 mm typical at the mm-reference distance Resolution in the direction of width * Resolution in the direction of height * Linearity in the direction of height *5 LED indicator lamp Temperature characteristic *6 Operation environment robust- Ambient operating Degree of protection ness illumination. mm µm ±.5% F.S. Lit when the laser is on.% F.S./ C IP66 Illumination at light-receiving surface:, lx max., incandescent light Ambient temperature to +5 C at operation, -5 to +6 C at storage (no icing) Ambient humidity Operating and storage: 5% to 85% (no condensation) Vibration (durability) to 5 Hz (at a double amplitude of.5 mm) for 8 minutes each in the X, Y, and Z directions Materials Body: Aluminum die-cast Cable sheathing: Heat-resistant PVC Connector: Zinc alloy and brass Cable length.5 m Minimum bending radius 68 mm Weight Approx. 55g Accessory CLASS B Warning label (IEC685-: 99 +A: 997) x *. For 6-mm measurement range mode *. Defined as /e² (.5%) of the central light intensity. Leakage of light is also present in areas other than those defined. Thus, there are some influences in cases where the reflection factor of the area surrounding the workpiece is higher than that of the workpiece itself. *. When an OMRON-standard workpiece (alumina ceramics) is placed at -mm distance, and edge position is measured. 6-mm measurement range mode is used. The average of 6 measurements is taken. Note that the resolution performance may not be satisfied in the presence of strong magnetic fields. *. When an OMRON-standard workpiece (alumina ceramics) is placed -mm away and the average height of all lines is measured. The measuring range is 6 mm and the average of 6 measurements is taken. Resolution performance, however, may not be satisfied in the presence of strong magnetic fields. *5. The error in relation to an ideal straight line when the average height of all lines on an OMRON-standard workpiece (alumina ceramics) is measured. The measuring range is 6 mm. The degree of linearity may change depending on the workpiece. 6-mm Range Mode Z55 6 mm Digital output mm ±.5% F.S. max. Distance mm 6 mm *6. The value obtained at measurement with the space between the sensor and the workpiece fixed with an aluminum jig. The measurement range is 6 mm. Z55 B-59

60 ALL DIMENSIONS SHOWN ARE IN MILLIMETERS. To convert millimeters into inches, multiply by.97. To convert grams into ounces, multiply by.57. Cat. No. Z9-E--X In the interest of product improvement, specifications are subject to change without notice. B-6 Displacement sensors / Width-measuring Sensors

61 Smart Sensors (Inductive Displacement Type) ZX-E Series Smart Sensors that use the eddy current method are now available. Develop new applications with sub-micron sensing technology. ZX-E Series. Features Designed to meet your measurement needs What's innovative about the ZX-E sensor is that the same amplifer unit can be attached to any one of five sensor headds; It's simply a matter of selecting the sensor head that best suits your measurement application. And there's total compatibility between all sensor heads and the amplifier, making maintenance quick and easy. Plug & Play Concept All sensor heads are fully compatible to the amplifier unit and can be selected based on application. Also for maintenance reason it is more efficient and cost saving to replace only the sensor head. Simply Linearity Adjustment With the ZX-E it is possible to adjust the linearity of the sensor for different types of metals, ferrous and non-ferrous. Using Omron's patented Linearity Adjustment Function % 5% % you can perform a teaching function at %, 5% and % of the measurement distance from the object to the sensor head. The amplifier then confirms the result. This feature greatly reduces setting time. Mutual interference prevention function Up to five sensors can be combined very closely together without any mutual interference occurring between them. This is achieved by placing a calculating unit (ZX-CAL) between each sensor. With this unique feature multiple measurements can be made in a machine or a process. Smart calculation function By inserting a 'calculation unit' (ZX- CAL) between two amplifiers the thickness and difference measurements are easily obtained, and these results will be ZX-Cal displayed on the amplifier. This technolo- Calculation unit for thickness-measurement gy, patented by Omron, eliminates the need for connecting a digital panel meter and the troubles one wiring and setting up associated with it. ZX-E Series B-6

62 Easy-to-read resolution display With Omron's resolution display function (patend pending), the resolution based on the object being measured is displayed and can be verified in realtime. It is easy to learn the margin for threshold values with this resolution display, allowing accurate judgements on whether or not detection is possible. modes can be changed within seconds and interrupt time is kept to a minimum, which is very important in production processes. In addition, all settings can be saved on a computer, end reloaded based on production requirements. Amplifier Deviation to be detected. Head Interface Unit Easy-to-see resolution (patent pending) Intelligent Communiction SmartMonitor V software makes sensor set-up easier! With Omron's interface unit and SmartMonitor V software the ZX-E sensor can be easily connected to a Notebook or PC. The software is ideal for quickly and easily setting up parameters and values via the menu screen from a PC or using the serial port of a PLC. It offers full visualisation of all measured values on the spot. Threshold settings can be done using the Position Teach feature or by entering the values directly. All parameters and Smart Monitor software tool enables easy system set-up via PC or Notebook Data logging results can be processed using SmartMonitor V software and stored automatically (as an Excel csv file) for quality control information, leading to smoother production runs. Data can also be displayed in waveform during logging. Waveforms can be easily monitored and threshold values set simply by dragging an dropping. High-speed waveforms can be obtained and displayed in a one-shot operation. This innovative feature is ideal for use in high-speed processes, where the software can be used to generate a waveform. Wave form monitoring Visualisation and monitoring of all saved data Data logging and processing Threshold setting by drag & drop graphic function B-6 Displacement sensors / Width-measuring Sensors

63 Application Minute gap detection Height and step detection Eccentricity and vibration ZX-E Series Cutter control Injection Moulding Vertical packaging ZX-E Series B-6

64 Ordering Information Sensors Sensor Heads Shape Dimensions Sensing distance Accuracy * Model Cylindrical dia. x 8 mm.5 mm μm ZX-EDR5T 5. dia. x 8 mm mm ZX-EDT * 8 dia. x mm mm ZX-EDT * Screw-shaped M x mm mm ZX-EMT * M8 x 6. mm 7 mm ZX-EM7MT * *: For an average count of,96. *: Models with Protective Spiral Tubes are also available. Add a suffix of -S to the above model numbers when ordering. (Example: ZX-EDT-S) Amplifier Units Appearance Power supply Output type Model DC NPN ZX-EDA PNP ZX-EDA Note: Compatible connection with the Sensor Head. Accessories (Order Separately) Calculating Unit Appearance Model ZX-CAL * SmartMonitor Sensor Setup Tool for Personal Computer Connection Appearance Name Model ZX-series Communications ZX-SF Interface Unit *Calculating Units are required to connect three or more Sensors. Amplifier Mounting Brackets Appearance Model Remarks ZX-XBE ZX-XBE Attached to each Sensor Head For DIN track mounting + CD-ROM CD-ROM ZX-series Communications Interface Unit + Setup Software ZX-series Sensor Setup and Logging Software ZX- SFWEV ZX- SWEV Cables with Connectors on Both Ends (for Extension) Cable length Model Quantity m ZX-XCA m ZX-XCA 8 m ZX-XC8A B-6 Displacement sensors / Width-measuring Sensors

65 Specifications Sensor Heads Model ZX-EDR5T ZX-EDT ZX-EDT/EMT ZX-EM7MT Measurement range to.5 mm to mm to mm to 7 mm Sensing object Magnetic metals (Measurement ranges and linearities are different for non-magnetic metals. Refer to Engineering Data on B-67.) Standard reference object 8 8 mm mm 6 6 mm Material: ferrous (S5C) Accuracy * μm Linearity * Linear output range Temperature characteristic * (including Amplifier Unit) Ambient humidity Insulation resistance Dielectric strength Operating Storage Vibration resistance (destruction) Shock resistance (destruction) ±.5% F.S. Same as measurement range..5% F.S./ C.7% F.S./ C to 5 C (with no icing or condensation) to 5 C (with no icing or condensation) to 6 C (with no icing or condensation) to 7 C (with no icing or condensation) Operating and storage: 5% to 85% (with no condensation) 5 MΩ min. (at 5 DC), VAC, 5/6 Hz for min between charged parts and case to 55 Hz with.5-mm double amplitude for h each in X, Y, and Z directions 5 m/s, times each in X, Y, and Z directions Degree of protection (Sensor Head) IEC659, IP65 IEC659, IP67 Connection method Connector relay (standard cable length: m) Ambient temperature Weight (packed state) Approx. g Approx. g Approx. 6 g Materials Sensor Case Brass Stainless steel Brass Sensing Heat-resistant ABS Head surface Preamplifier PES Accessories Amplifier Mounting Brackets (ZX-XBE), Instruction Manual ZX-E Series *:Accuracy: The resolution is the deviation (±σ) in the linear output when connected to the ZX-EDA Amplifier Unit. The above values indicate the deviations observed minutes after the power is turned ON. (The resolution is measured with OMRON's standard reference object at / of the measurement range with the ZX-EDA set for the maximum average count of,96 per period.) The resolution is given at the repeat accuracy for a stationary workpiece, and is not an indication of the distance accuracy. The resolution may be adversely affected under strong electromagnetic fields. *: Linearity: The linearity is given as the error in an ideal straight line displacement output when measuring the standard reference object. The linearity and measurement values vary with the object being measured. *: Temperature characteristic: The temperature characteristic is measured with OMRON's standard reference object at / of the measurement range. ZX-E Series B-65

66 Amplifier Units Measurement period Model ZX-EDA ZX-EDA 5 μs Possible average count settings *,,, 8, 6,, 6, 8, 56, 5,,,,8, or,96 Linear output * Judgement outputs ( outputs: HIGH/PASS/LOW) Zero reset input, timing input, reset input, judgement output hold input Current output: to ma/f.s., Max. load resistance: Ω Voltage output:± V (± 5 V, to 5 V *), Output impedance: Ω NPN open-collector outputs, VDC, 5 ma max. Residual voltage:. V max. ON: Short-circuited with -V terminal or.5 V or less OFF: Open (leakage current:. ma max.) PNP open-collector outputs, VDC, 5 ma max. Residual voltage: V max. ON: Supply voltage short-circuited or supply voltage within.5 V OFF: Open (leakage current:. ma max.) Function - Measurement value display - Set value/output value/resolution display - Linearity adjustment (materials selection) - Scaling - Display reverse - Display OFF mode - ECO mode - Number of display digit changes - Sample hold - Peak hold - Bottom hold, peak-to-peak hold - Self-peak hold - Self-bottom hold - Average hold - Delay hold - Zero reset - Initial reset - Linearity initialization - ON-delay timer - OFF-delay timer - One-shot timer - Previous value comparison - Non-measurement setting - Direct threshold value setting - Position teaching - Automatic teaching - Hysteresis width setting - Timing inputs - Reset input - Judgement output hold input - Monitor focus - Linear output correction - (A-B) calculations * - (A+B) calculations * - K-(A+B) calculation * - Mutual interference prevention * - Sensor disconnection detection - Zero reset memory - Zero reset indicator - Key lock Indications Judgement indicators: High (orange), pass (green), low (yellow), 7-segment main digital display (red), 7-segment sub-digital display (yellow), power ON (green), zero reset (green), enable (green) Voltage influence (including Sensor) Power supply voltage Current consumption Ambient temperature Ambient humidity Insulation resistance Dielectric strength Vibration resistance (destruction) Shock resistance (destruction).5% F.S. of linear output value at ±% of power supply voltage to VDC ±%, Ripple (p-p): % max. ma max. with power supply voltage of VDC (with Sensor connected) Operating and storage: to 5 C (with no icing or condensation) Operating and storage: 5% to 85% (with no condensation) MΩ min. (at 5 DC), VAC, 5/6 Hz for min Connection method Prewired (standard cable length: m) Weight (packed state) Materials Accessories to 5 Hz with.7-mm double amplitude for 8 min each in X, Y, and Z directions m/s, times each in 6 directions (up, down, left, right, forward, backward) Approx. 5 g Case: PBT (polybutylene terephthalate), Cover: Polycabonate Instruction Manual *:The response speed of the linear output is calculated as the measurement period (average count setting + ) (with fixed sensitivity). The response speed of the judgement outputs is calculated as the measurement period (average count setting + ) (with fixed sensitivity). *: The output can be switched between a current output and voltage output using a switch on the bottom of the Amplifier Unit. *: Setting is possible via the monitor focus function. *: A Calculating Unit (ZX-CAL or ZX-CAL) is required. B-66 Displacement sensors / Width-measuring Sensors

67 Engineering Data (Typical) Measurement Distance vs. Linearity (with Linearity Adjusted for Standard Sensing Object) Size of Sensing Object vs. Linearity (with Linearity Adjusted for Each Sensing Object) ZX-EDR5T ZX-EDR5T ZX-EDR5T Size of Sensing Object vs. Linearity (with Linearity Adjusted for Standard Sensing Object) Linearity (% F.S.)... Linearity (% F.S.) Linearity (% F.S.) ZX-E Series Measurement distance (mm) Measurement distance (mm) ZX-EDT ZX-EDT ZX-EDT Measurement distance (mm) Linearity (% F.S.) Measurement distance (mm) Linearity (% F.S.) Measurement distance (mm) ZX-EDT/ZX-EMT ZX-EDT/ZX-EMT ZX-EDT/ZX-EMT Linearity (% F.S.) Measurement distance (mm) Linearity (% F.S.) Measurement distance (mm) ZX-EM7MT ZX-EM7MT ZX-EM7MT Linearity (% F.S.) Linearity (% F.S.) Measurement distance (mm) Measurement distance (mm) Linearity (% F.S.)... Linearity (% F.S.)... Linearity (% F.S.) Measurement distance (mm) Measurement distance (mm) Measurement distance (mm) ZX-E Series B-67

68 Material of Sensing Object vs. Linearity (with Linearity Adjusted for Each Sensing Object) ZX-EDR5T Material of Sensing Object vs. Linearity (with Linearity Adjusted for Standard Sensing Object and Iron) ZX-EDR5T Linearity (% F.S.)... Display value (mm) Measurement distance (mm) Measurement distance (mm) ZX-EDT ZX-EDT Linearity (% F.S.)... Display value (mm).5.5 ZX-EDT/ZX-EMT Measurement distance (mm) ZX-EDT/ZX-EMT Measurement distance (mm) Linearity (% F.S.)... Display value (mm).5.5 Measurement distance (mm) Measurement distance (mm) ZX-EM7MT ZX-EM7MT Linearity (% F.S.)... Display value (mm) Measurement distance (mm) Measurement distance (mm) B-68 Displacement sensors / Width-measuring Sensors

69 I/O Circuit Diagrams NPN Amplifier Unit: ZX-EDA PNP Amplifier Unit: ZX-EDA Brown: to VDC Brown: to VDC Internal circuits Green: PASS judgement output Gray: LOW judgement output Blue: GND (V) Load White: HIGH judgement output Purple: Timing input Load Orange: Zero reset input Load Pink: Judgement output hold input to VDC Internal circuits White: HIGH judgement output Green: PASS judgement output Gray: LOW judgement output Load Blue: GND (V) Pink: Judgement output hold input Purple: Timing input Load Orange: Zero reset input Load to VDC ZX-E Series Red: Reset input Red: Reset input Current/voltage switch Ω Current output to ma Voltage output ±V Black: Linear output Shield: Linear GND Load Current output: Ω max. Voltage output: kω min. Current/voltage switch Current output to ma Voltage output ±V Ω Black: Linear output Shield: Linear GND Load Current output: Ω max. Voltage output: kω min. Connections: Amplifier Unit Brown White Green Gray Black Shield Pink Orange Purple Red to VDC GND (V) HIGH judgement output PASS judgement output LOW judgement output Linear output Linear output GND Judgement output hold input Zero reset input Timing input Reset input Note. Use a separate stabilized power supply for the Amplifier Unit, particularly when high resolution is required.. Wire the Unit correctly. Incorrect wiring may result in damage to the Unit. (Do not allow wiring, particularly the linear output, to come into contact with other lines.). Use the blue (-V) line for the power supply and use the shield wire (linear output ground) together with the black (linear output) line for linear output. Each of these grounds must be used for the designed purpose. When not using the linear output, connect the linear output ground to the -V ground. Blue ZX-E Series B-69

70 Part Names Sensors ZX-EDR5T Amplifier Units ZX-EDA ZX-EDT ZX-EDA ZX-EDT ZX-EMT ZX-EM7MT Display area Controls Sensor head Preamplifier Output cable (with connector) Input cable (with connector) Output cable Connector (Cover opens and closes) Calculating Unit ZX-CAL / ZX-CAL Display area Connector Precautions Design Precautions Conform to the specified ratings and performance. Refer to page B-65 Specifications for details. Objects of certain materials or shapes may not be detectable, or the detection accuracy may not be sufficiently high. Environment Do not operate the product in locations subject to flammable or explosive gases. In order to ensure safe operation and maintenance, do not install the product in the vicinity of high-voltage devices or power equipment. Wiring Do not use the product at voltages exceeding the rated values. Doing so may result in damage. Do not connect the product to an AC power supply or connect the power supply in reverse. Do not short-circuit the load for open-collector output. Do not lay the power cable for the product together with or in the same duct as high-voltage lines or power lines. Doing so may result in incorrect operation or damage due to induction. Do not connect or disconnect connectors while the power is ON. Doing so may result in damage. Adjustment Setting When setting threshold values, ensure that the Amplifier Unit s judgement output hold input line is ON so that there is no judgement output to external devices. Other Precautions Do not attempt to disassemble, repair, or modify the product. Dispose of the product using standard procedures for industrial waste. These Sensors are not compatible with the ZX-L@@ Smart Sensors (laser type). Do not connect combinations of ZX-E@@ Smart Sensors and ZX-L@@ Smart Sensors. Correct Use Design Precautions Power Supplies Allow a warm-up period of approximately minutes after turning ON the power supply. Mutual Interference Up to 5 Sensor Heads can be used together by connecting the ZX-CAL/ZX-CAL Calculating Unit between Amplifier Units. When installing Sensor Heads facing each other or in parallel, separate them by the minimum distances given in the table below. A B B-7 Displacement sensors / Width-measuring Sensors

71 Mutual Interference Model A B ZX-EDR5T 5 mm (.) mm ZX-EDT mm 5 (5.) mm ZX-EDT mm 5 (8) mm ZX-EMT mm 5 () mm ZX-EM7MT mm 5 () mm Note: The figures in parentheses apply when the mutual interference prevention function is used. Compatibility Sensors and Amplifier Units are mutually compatible. Sensors can be added or replaced individually. Influence of High-frequency Electromagnetic Fields Using the product in the vicinity of devices that generate highfrequency electromagnetic fields, such as ultrasonic cleaning equipment, high-frequency generators, transceivers, mobile phones, and inverters, may result in malfunction. Influence of Metallic Objects When installing the product, separate it from metallic objects by the distances shown below. Handling When mounting the Sensor Head, do not apply excessive shock by, for example, using a hammer. Doing so may result in damage or a reduction in the level of water-proofing. Also, there are screwshaped models that require a toothed washer to allow for a tolerance in the tightening torque for the nut. Tightening Torque Do not apply excessive torque when tightening the nut. Use a toothed washer if necessary. Model Tightening torque ZX-EMT 5 N m ZX-EM7MT Note: The above figure applies for use with a toothed washer. Mounting Cylindrical Models: Tighten set screws with a tightening torque of. N m max. Set screw hole A Mounting Bracket ZX-E Series Influence of Metallic Objects Model d D ZX-EDR5T 8 mm 9 mm ZX-EDT mm ZX-EDT/EMT mm ZX-EM7MT 55 mm mm Wiring Wiring Check After wiring is completed, before turning ON the power, confirm that the power supply is connected correctly, that there are no faulty connections, such as load short-circuits, and that the load current is correct. Incorrect wiring may result in failure. Cable Extension Do not extend the cable for the Sensor and the Amplifier Unit to a length exceeding m. Use a ZX-XC@A Extension Cable (sold separately) to extend the Sensor s cable. Extend the Amplifier Unit s cable using a shielded cable of the same type. Power Supply When using a commercially available switching regulator, ground the FG (frame ground) terminal. If the power supply line is subject to surges, connect a surge absorber that meets the conditions of the operating environment. Calculating Unit When using a Calculating Unit, connect the linear output ground of the corresponding Amplifier Unit. Connectors Do not connect or disconnect connectors while the power is ON. Be sure hold to connectors by the cover when connecting or disconnecting. Mounting D d dia. Model ZX-EDR5T ZX-EDT ZX-EDT 9 to 8 mm to mm Installation Location Do not install the product in the following locations. Locations subject to temperatures outside the specified range Locations subject to condensation due to sudden temperature changes Locations subject to humidity levels outside range 5% to 85% Locations subject to corrosive or flammable gases Locations subject to dust, salts, or metallic powder. Locations directly subject to vibrations and shocks Locations subject to direct sunlight Locations subject to splashes of water, oil, or chemicals Locations subject to strong electromagnetic or electrical fields Maintenance and Inspection Y9E-F5R (for 5.-dia. screws), sold separately A Be sure to turn OFF the power supply before adjusting or removing the Sensor Head. Cleaning: Do not use thinners, benzine, acetone, or kerosene for cleaning. ZX-E Series B-7

72 Dimensions Sensors Sensor Heads ZX-EDR5T Dimensions with Mounting Bracket Attached 8 Vinyl-insulated coaxial round cable.7 dia., conductor, standard length: m Vinyl-insulated round cable 5. dia., 9 conductors, standard length: mm (6) (5 dia.) (5.5) dia. 5 dia. 7 Connector 5 (.5) Mounting Hole Cutout Dimensions Two, M holes ZX-EDT 8 7±. Dimensions with Mounting Bracket Attached Vinyl-insulated coaxial round cable.5 dia., conductor, standard length: m Vinyl-insulated round cable 5. dia., 9 conductors, standard length: mm (6) (5 dia.) (5.5) 5. dia. 5 dia. 7 Connectors 5 (.5) Mounting Hole Cutout Dimensions Two, M holes 7±. ZX-EDT Dimensions with Mounting Bracket Attached Vinyl-insulated coaxial round cable.5 dia., conductor, standard length: m Vinyl-insulated round cable 5. dia., 9 conductors, standard length: mm (6) (5 dia.) (5.5) 8 dia. 5 dia. 7 Connector 5 (.5) Mounting Hole Cutout Dimensions Two, M holes 7±. B-7 Displacement sensors / Width-measuring Sensors

73 ZX-EMT Dimensions with Mounting Bracket Attached 8 dia. 6 (5.) 6.6 Vinyl-insulated coaxial round cable.5 dia., conductor, standard length: m Vinyl-insulated round cable 5. dia., 9 conductors, standard length: mm (6) 8 dia. (5 dia.) (5.5) M tightening nuts 5 dia. toothed washers 7 Connector (.5) Mounting Hole Cutout Dimensions Two, M holes 5. ZX-E Series ZX-EM7MT 7±. Dimensions with Mounting Bracket Attached dia (.) 9.8 dia. Vinyl-insulated coaxial round cable.5 dia., conductor, standard length: m Vinyl-insulated round cable 5. dia., 9 conductors, standard length: mm (6) 5.7 dia. (5 dia.) (5.5) M8 tightening nuts toothed washers 5 dia. 7 Connector 5 (.5) Mounting Hole Cutout Dimensions Two, M holes 7±. ZX-E Series B-7

74 Amplifier Units ZX-EDA ZX-EDA dia Vinyl-insulated round cable 5. dia., standard: mm Vinyl-insulated round cable 5. dia., conductors (conductor cross-section:.9 mm, insulator diameter:.7 mm), standard length: m.7 9. Current/voltage switch (Factory-set to voltage output.) Voltage output Accessories (Sold Separately) Preamplifier Mounting Bracket ZX-XBE ZX -X BE 5.5 7± ± M 8 pan-head screw (with M spring washer) Material: Stainless steel (SUS) Material: Stainless steel (SUS) Calculating Unit ZX-CAL/ZX-CAL Operation indicators Connectors B-7 Displacement sensors / Width-measuring Sensors

75 ZX-series Communications Interface Unit ZX-SF Sensor communications indicator (communications operation) Sensor communications indicator (communications error) Connector (6) (6) Power supply indicator. External terminal communications indicator (communications operation) External terminal communications indicator (communications error) 6.. ZX-E Series 5.5. Vinyl-insulation round cable, 5. dia (.).7 Connector Cables with Connectors on Both Ends (for Extension) ZX-XCA ( m) ZX-XCA ( m) ZX-XC8A (8 m) 6 5 dia. 5.5 dia. pins (male) Vinyl-insulated round cable, 5. dia., conductors *ZX-XCA:, ZX-XCA:, ZX-XC8A: 8, pins (female) ZX-E Series B-75

76 ALL DIMENSIONS SHOWN ARE IN MILLIMETERS. To convert millimeters into inches, multiply by.97. To convert grams into ounces, multiply by.57. Cat. No. Q6E-EN- In the interest of product improvement, specifications are subject to change without notice. B-76 Displacement sensors / Width-measuring Sensors

77 Smart Sensor High precision contact type ZX-T Series ZX-T Series ZX-T Series Ordering Information Sensors Sensor Heads Size Type Sensing distance Resolution (See note.) Model 6 dia. Short type mm. μm ZX-TDST 6 dia. Standard type mm. μm ZX-TDST 6 dia. Low measurement type mm. μm ZX-TDST-L Note:The resolution refers to the minimum value that can be read when a ZX-TDA@ Amplifier Unit is connected. Amplifier Units Appearance Power supply Output type Model DC NPN ZX-TDA PNP ZX-TDA Accessories (Order Separately) Calculating Unit Appearance ZX-CAL Model ZX-series Communicationys Interface Unit Appearance Model ZX-SF ZX-T Series B-77

78 SmartMonitor Sensor Setup Tool for Personal Computer Connection Appearance Name Model + CD-ROM CD-ROM ZX-series Communications Interface Unit ZX-series Communications Interface Unit + ZX-series Sensor Setup Software Basic ZX-series Sensor Setup Software ZX-SF ZX- SFWEV *, * ZX-SWEV * Note: *. When using the ZX-TDA/ with the SmartMonitor, either the ZX-SFWEV or the ZX-SWEV SmartMonitor must be used. Earlier versions cannot be used. Note: *. The ZX-SFWEV SmartMonitor can be used for parameter setting, data logging and waveform monitoring. Cables with Connectors on Both Ends (for Extension)* Cable length Model Quantity m ZX-XCA m ZX-XCA 8 m ZX-XC8A Note: *Robot Cable models are also available. The model numbers are ZX-XC@R. Preamplifier Mounting Brackets Appearance Model Remarks ZX-XBT Attached to each Sensor Head ZX-XBT For DIN track mounting Cables with Connectors on Both Ends (for Extension) Cable length Model Quantity m ZX-XCA m ZX-XCA 8 m ZX-XC8A Specifications Sensor Heads Item ZX-TDST ZX-TDST ZX-TDST-L Measurement range mm mm Maximum actuator travel distance Approx..5 mm Approx. 5 mm Resolution (See note.). μm Linearity (See note.).% F.S. Operating force (See note.) Approx..7 N Approx..5 N Degree of protection (Sensor IEC659, IP67 IEC659, IP5 Head) Mechanical durability,, operations min. Ambient temperature Operating: C to 5 C (with no icing or condensation) Storage: 5 C to 6 C (with no icing or condensation) Ambient humidity Operating and storage: 5% to 85% (with no icing or condensation) Temperature Sensor Head.% F.S./ C characteristic (See note.) Preamplifier.% F.S./ C Weight (packed state) Approx. g Materials Sensor Head Stainless steel Preamplifier Polycarbonate Accessories Instruction manual, Preamplifier Mounting Brackets (ZX-XBT) Note. The resolution is given as the minimum value that can be read when a ZX-TDA@ Amplifier Unit is connected. This value is taken 5 minutes after turning ON the power with the average number of operations set to 56.. The linearity is given as the error in an ideal straight line displacement output.. These figures are representative values that apply for the measurement mid-point, and are for when the provided actuator is used, with the actuator moving downwards. If the actuator moves horizontally or upwards, the operating force will be reduced. Also, if an actuator other than the standard one is used, the operating force will vary with the weight of the actuator itself.. These figures are representative values that apply for the mid-point of the measurement range. B-78 Displacement sensors / Width-measuring Sensors

79 Amplifier Units Item ZX-TDA ZX-TDA Measurement period ms Possible average count settings, 6,, 6, 8, 56, 5, or, (See note.) Linear output (See note.) Current output: to ma/f.s., Max. load resistance: Ω Voltage output: ± V (±5 V, to 5 V (See note.)), Output impedance: Ω Judgement outputs ( outputs: HIGH/PASS/ LOW) Zero reset input, timing input, reset input, judgement output hold input NPN open-collector outputs, VDC, ma max. Residual voltage:. V max. ON: Short-circuited with -V terminal or.5 V or less OFF: Open (leakage current:. ma max.) PNP open-collector outputs, VDC, ma max. Residual voltage: V max. ON: Supply voltage short-circuited or supply voltage of.5 V or less OFF: Open (leakage current:. ma max.) Function - Measurement value display- Present value/set value/output value display - Display reverse- ECO mode - Number of display digit changes - Sample hold- Peak hold- Bottom hold, peak-to-peak hold - Self-peak hold - Self-bottom hold- Zero reset - Initial reset- Direct threshold value setting- Position teaching - Hysteresis width setting- Timing inputs- Reset input - Judgement output hold input - Monitor focus- (A-B) calculations (See note.) - (A+B) calculations (See note.) - Sensor disconnection detection - Zero reset memory- Function lock- Non-measurement setting - Clamp value setting- Scale inversion- Zero reset indicator - Span adjustment- Warming-up display- Pressing force alarm Indicators Judgement indicators: High (orange), pass (green), low (yellow), 7-segment main digital display (red), 7-segment sub-digital display (yellow), power ON (green), zero reset (green), enable (green) Power supply voltage to VDC ±%, Ripple (p-p): % max. Current consumption ma max. (with Sensor connected), For -VDC power supply voltage: ma max. (with Sensor connected) Ambient temperature Operating and storage: to 5 C (with no icing or condensation) Temperature characteristic.% F.S./ C Connection method Prewired (standard cable length: m) Weight (packed state) Approx. 5 g Materials Case: PBT (polybutylene terephthalate), Cover: Polycarbonate Note. The response speed of the linear output is calculated as the measurement period (average count setting + ). The response speed of the judgement outputs is calculated as the measurement period (average count setting + ).. The output can be switched between a current output and voltage output using a switch on the bottom of the Amplifier Unit.. Setting is possible via the monitor focus function.. A Calculating Unit (ZX-CAL) is required. ZX-T Series Characteristic Data Output Characteristics Voltage/Current Output ZX-TDST/-ST/-ST-L V Measurement distance (F.S) ma Voltage output Analog output Voltage/current Current output V ma Displacement direction V.5 mm ( mm) (Released) (Pushed) Center mm +.5 mm (+ mm) + ma Displacement ON High/Low output OFF Note:To prevent destroying the Sensor Head, both the high and low judgment outputs will light if % of the upper limit of the measurement distance is reached. ZX-T Series B-79

80 I/O Circuit Diagrams NPN Amplifier Unit: ZX-TDA PNP Amplifier Unit: ZX-TDA Brown to V DC HIGH Load White judgement output Load PASS judgement Green output Load LOW judgement Gray output to V DC Brown to V DC White Green Gray HIGH judgement output PASS judgement output LOW judgement output Load Load Load to V DC Internal circuit Blue Pink GND (V) Judgement output hold input Purple Timing input Orange Zero reset input Red Reset input Internal circuit Blue Pink GND (V) Judgement output hold input Purple Timing input Orange Zero reset input Red Reset input Current/voltage output selector Ω Current output ( to ma) Voltage output ±V Black Shield Linear output Linear ground Load Current output: Ω max. Voltage output: kω min. Current/voltage output selector Ω Current output ( to ma) Voltage output ±V Black Shield Linear output Linear ground Current output: Load Ω max. Voltage output: kω min. Connectors Amplifier Unit Brown Blue White Green Gray Black Shield Pink Orange Purple Red to VDC GND ( V) HIGH judgement output PASS judgement output LOW judgement output Linear output Linear output GND Judgement output hold input Zero reset input Timing input Reset input Note. Use a stabilized power supply separate from other devices and power systems for the Amplifier Unit, particularly when high resolution is required.. Always wire correctly. Incorrect wiring may damage the Unit. Use a different ground for the linear output from the normal ground.. The blue line ( V) is the V power supply line. The shield wire (linear output GND) is used together with the black line (linear output) to connect the linear output. Wire these lines correctly. Always ground the linear output terminal even when the linear output is not used. Part Names Sensor Heads Calculating Unit ZX-TDST ZX-TDST ZX-TDST-L ZX-CAL Sensor head Preamplifier Output cable (with connector) Display area Amplifier Unit ZX-TDA ZX-TDA Connector Controls Display area Input cable (with connector) Output cable Connector (Cover opens and closes) B-8 Displacement sensors / Width-measuring Sensors

81 Options (Actuators) Model Type (material) Screw section Appearance Application Applicable Sensor (See note.) D5SN- TB Ball type (steel) Female screw M.5 x.5 Measuring ordinary flat surfaces (standard actuator supplied with the ZX-TDS Series) TB Ball type ( carbide steel) Female screw M.5 x.5 TB Ball type (ruby) Female screw M.5 x.5 TN Needle type (carbide steel) Male screw M.5 x.5 Measurements where abrasion resistance is critical Measured objects: Carbide (HR9) or lower. Measurements where abrasion resistance is critical Measured objects: Carbide (HR9) or higher. Measuring the bottom of grooves and holes ZX-T Series TF Flat (carbide steel) Male screw M.5 x.5 Measuring spherical objects TA Conversion Adapter (stainless steel) Through-hole female screw M.5 x.5 Mounting D5SN-TN/-TF or commercially available actuators on ZX-TDSseries Sensors Note: Replacement possible Conversion Adapter required Dimensions D5SN-TB/TB/TB D5SN-TN D5SN-TF D5SN-TA.5 7 (5) 5 5 () 5. Two, C. Grooves m. 5 dia. SR.5 Crisscross pattern m. M.5.5 dia. C ±..5 dia. dia. 5 dia. Carbide steel M dia.. dia. Carbide steel M.5.5 M.5 (Through-hole) Mounting Jigs Recommended Mounting Jigs for ZX-TDS Sensors 6H7 dia..5 A dia..5 dia..5 M Two,.5 dia. Mounting Jigs for an 8-diameter Stand Material: Brass +. 6 dia. Mounting with -point Support 8. dia. 5 5 dia. 6 Tightening torque:.6 to.8 N m (M screws) Material: Aluminum 8 A 8 A-A Sensor Head cross-section Mounting jig 6 Base jig Supported at points Tightening force: N max. Mounting width: 8 mm min. ZX-T Series B-8

82 Replacing Actuators Be careful not to damage the rubber boot with pliers or other tools when replacing the actuator.. Remove the standard actuator. Hold the plunger s D-cut section with radio pliers or a similar tool while removing the actuator. If the replacement must be performed by holding the Sensor Head itself, ensure that a torque exceeding.5 N m is not applied. Applying excessive torque may have an adverse affect on plunger operation. Conversion Adapter (D5SN-TA) Commercially available actuator (e.g., one with a flat end) Width: mm Screw-locking agent required. Mount the Conversion Adapter to the plunger. Hold the plunger s D-cut section with radio pliers or a similar tool while mounting and securing the Conversion Adapter. If the replacement must be performed by holding the Sensor Head itself, ensure that a torque exceeding.5 N m is not applied. Applying excessive torque may have an adverse affect on plunger operation. Rubber boot D-cut section Radio pliers or a similar tool. Mount the commercial actuator to the Conversion Adapter. Tighten the actuator securely, and ensure that there is no looseness. If necessary, apply a screw-locking agent. (Recommended: Three-Bond B) Precautions Design Precautions Conform to the specified ratings and performance. Refer to Specifications on page B-78 for details. Measurements may not be possible or may not be accurate for some materials and shapes. The Sensor will be destroyed if the Actuator is pressed too far. Do not use the Actuator past the point where a pressing force alarm (OVER) is displayed. Do not remove the rubber boot. Without the rubber boot, foreign matter may enter the Sensor Head, possibly causing the Sensor Head to malfunction. Use suitable torque and force when mounting the Sensor. Refer to page B-8 for details. The Sensor may be destroyed if excessive force is applied. Environment Do not operate the product in locations subject to flammable or explosive gases. In order to ensure safe operation and maintenance, do not install the product in the vicinity of high-voltage devices or power equipment. Wiring Do not use the product at voltages exceeding the rated values. Doing so may result in damage. Do not connect the product to an AC power supply or connect the power supply in reverse. Do not short-circuit the load for open-collector output. Correct Use System Design Warming Up After turning ON the power, allow the Smart Sensor to warm up for 5 minutes minimum prior to use. Measurements Do not expose the plunger to forces exceeding the limits in the following diagram. Doing so may damage the plunger. ZX-TDS-Series Sensors N N N.5 N m Adjustments Settings When setting the threshold value with the Smart Sensor connected to an external device, turn ON the Amplifier Unit's judgement output hold input to prevent the judgement from being output to the external device. Compatibility Sensors and Amplifier Units are mutually compatible. Sensors can be added or replaced individually. Influence of High-frequency Electromagnetic Fields Using the product in the vicinity of devices that generate high-frequency electromagnetic fields, such as ultrasonic cleaning equipment, high-frequency generators, transceivers, mobile phones, and inverters, may result in malfunction. Other Precautions Do not attempt to disassemble, repair, or modify the product. Dispose of the product using standard procedures for industrial waste. These Sensors are not compatible with the ZX-L@@ Smart Sensors (laser type). Do not connect combinations of ZX-E@@ Smart Sensors and ZX-T@@ Smart Sensors. B-8 Displacement sensors / Width-measuring Sensors

83 Wiring Wiring Check After wiring is completed, before turning ON the power, confirm that the power supply is connected correctly, that there are no faulty connections, such as load short-circuits, and that the load current is correct. Incorrect wiring may result in failure. Dimensions Sensors ZX-TDST ZX-TDST ZX-TDST-L Amplifier Unit ZX-TDA ZX-TDA.5 dia. SR dia. SR Measurement range*.6 ±..6 ± ± dia. Measurement range* 6. ±. 66. ±.8 86 ±.5 Vinyl-insulated round cable.7 dia., standard length: m Cable Extension Do not extend the cable for the Sensor and the Amplifier Unit to a length exceeding m. Use a ZX-XC@A Extension Cable (sold separately) to extend the Sensor s cable. Extend the Amplifier Unit s cable using a shielded cable of the same type. Power Supply When using a commercially available switching regulator, ground the FG (frame ground) terminal. If the power supply line is subject to surges, connect a surge absorber that meets the conditions of the operating environment. 6 Vinyl-insulated round cable 5. dia., standard length: mm 5 dia. Connector 6 * Measurement range:. to. (TYP) Vinyl-insulated round cable 6. dia..7 dia., standard length: m 6 Vinyl-insulated round cable 5. dia., standard length: mm 5 dia. Connector * Measurement range:.9 to 8.9 (TYP) 6 ZX-T Series dia Vinyl-insulated round cable 5. dia., standard length: mm.7 Vinyl-insulated round cable 5. dia., conductors, (conductor cross-section:.9 mm, insulator diameter:.7-mm dia.), standard length: m.7 9. Current/voltage switch (Factory-set to voltage output) Voltage output ZX-T Series B-8