Mass Flow Meter (MFM)

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1 Mass Flow Meter (MFM) Type 800 can be combined with Nominal flow ranges from 0 l N /min up to 00 l N /min High accuracy Fast response time Protection class IP Optional: Fieldbus interface Type 89 Multichannel program controller Type 00 / or / way solenoid valve The mass flow meter (MFM) type 800 is suited for measuring the mass flow of high gas flows. The thermal inline sensor is located directly in the gas stream and therefore reaches very fast response times. Typ 07 / way plunger valve Typ 8 econtrol Type 800 can optionally be calibrated for two different gases; the user can switch between these two gases. s electrical interfaces both, analog standard signals and fieldbuses are available. The MFM type 800 is especially designed for use in harsh environments due to a low sensitivity to contamination and the high protection class. Technical Data Nominal flow range ) 0 00 l N /min ), N equivalent (Q nom ) see table on page, higher fl ows on request Turn-down ratio :0 ) Operating gas Neutral, non-contaminated gases, others available on request Calibration gas Operating gas or air with correcting function Max. operating pressure (Inlet pressure) 0 bar, up to bar (N, air, argon) Gas temperature C ( C with oxygen) mbient temperature C (higher temperatures on request) ccuracy ±. % o.r. ± 0. % F.S. (after min warm up time) (o.r.: of reading; F.S.: of full scale) Repeatability ± 0. % F.S. Response time (t 9 % ) < 00 ms Materials ody luminium (black anodized) or stainless steel Housing luminium (coated) Seals FKM, EPDM ) The nominal fl ow value is the max. fl ow value calibrated which can be measured. The nominal fl ow range defi nes the range of nominal fl ow rates (full scale values) possible. ) Index N: Flow rates referred to.0 bar and 0 C. lternatively there is an Index S available which refers to.0 bar and 0 C ) With vertical installation and fl ow downwards the turn-down ratio is :0 Port connection G ¼, ⅜, ½, ¾, NPT ¼, ⅜, ½, ¾, With compression fi ttings (see p. 7) Electr. connection Socket M, round, 8 pin and socket D-Sub HD, pin dditionally with: -PROFIUS-DP: -CNopen: with RS8 version only: Operating voltage Socket M pin or D-Sub 9 pin Plug M pin or D-Sub 9 pin Plug D-Sub 9 pin V DC Voltage tolerance ± 0 % Residual ripple < % Power consumption. 0 W, with fi eldbus:. W (acc. to the version) Type of protection IP (with connected cables) Dimensions See drawings on p. Total weight (Example standard block). kg (l).0 kg (V ) Mounting position Horizontal or vertical Light emitting diodes Indication for (Default, other functions programmable). Power. Limit. Communication. Error p. /7

2 Technical Data (cont.) Device variant nalog signal version Fieldbus version RS8 version (only D-Sub, 9 pin) nalog communication None None Output signal (actual fl ow) Max. current voltage output Max. load current output 0 V, 0 0 V, 0 0 m or 0 m 0 m 00 Ω Fieldbus option (D-Sub HD covered with sealed plate for, pins for analogue inputs/outputs not connected) None PROFIUS-DP, CNopen Modbus RTU (via RS interface) Digital communication via adapter possible: RS (supports Modbus RTU) RS8, RS or US RS8, RS US inary inputs (Default, other functions programmable) inary outputs (Default, other functions programmable) Three:. not assigned. not assigned. not assigned Two relay outputs. Limit (Q nom almost reached). Error (e.g. sensor fault) Load capacity: max. 0 V,, 0 V One: not assigned One relay output. Limit (Q nom almost reached) Load capacity: max. V,, V Pressure Loss Diagram (ref. to air, with 0μm inlet filter) p [mbar] G/ G/8 G/ G/ G Q [ln/min] The diagram shows exemplarily the pressure loss characteristics when air flowing through. For determining the pressure loss with another gas it needs to calculate the air equivalent and respect the fluidics needed with the other gas. Measuring Principle This sensor works as a hot-film anemometer in the so-called CT operational mode (Constant Temperature nemometer). To do this, two resistors with precisely specified temperature coefficients located directly in the media flow and three resistors located outside the flow are connected together to form a bridge. The first resistor in the gas flow (R T ) measures the fluid temperature, while the second, low-value resistor (R S ) is heated so that it is maintained at a fixed, predefined over-temperature with respect to the fluid temperature. Nominal Flow Ranges of Typical Gases (Other gases on request) Gas Min. Q nom [l N /min] Max. Q nom [l N /min] cetylene 0 97 mmonia 0 0 rgon 0 00 Carbon dioxide ir 0 00 Methane 0 70 Propane 0 00 Oxygen 0 00 Nitrogen 0 00 The heating current required to maintain this is a measure of the heat being removed by the flowing gas, and represents the primary measurement. n adequate flow conditioning within the MFM and the calibration with high-quality flow standards ensure that the mass of gas flowing per time unit can be derived from the primary signal with high accuracy. Notes Regarding the Configuration The decisive factors for the perfect functioning of an MFM within the application are the fluid compatibility, the max. inlet pressure and the correct choice of the flow meter range. The pressure drop over the MFM depends on the flow rate and the operating pressure. The questionnaire on page 7 contains the relevant fluid specification. Please use in this way the experience of urkert engineers already in the design phase and provide us with a copy of the questionnaire containing the data of your application together with your inquiry or order. p. /7

3 Ordering Chart for ccessories rticle Item no. Connectors / Cables Round plug M 8 pin (Solder connection) Round plug M 8 pin with m cable Round plug M 8 pin with 0 m cable Plug D-Sub HD pin with m cable Plug D-Sub HD pin with 0 m cable dapters ) RS adapter for connection to a computer, connection with an extension cable (Item no ) 77 Extension cable for RS 9 pin socket/plug m RS-dapter (RS8 compatible) 70 US-dapter (Version., US socket type ) 70 9 US connection cable m dapter for manual bus adresse settings (instad of SW) 7 Software MassFlowCommunicator Download from ccessories for Fieldbus PROFIUS DP (-coded) CNopen (-coded) M-Plug ) M-socket ) Y-junction ) T-junction 98 (on request) Terminating resistor 90 (on request) GSD-File (PROFIUS), EDS-File (CNopen) Download from ) The adapters serve mainly for initial operation or diagnosis. Those are not obligatory for continuous operation. ) The two M connectors as listed above cannot be used together on the same side of the Y-junction. t least one of the two M connection needs to be an overmoulded cable which uses typically a thinner connector. dapter for manual setting of a bus address 7 M P-DP: DVN/CN: 97 M P-DP: 98 7 DVN/CN: 97 OR T junction P-DP: 98 DVN/CN: on request RS adapter 77 RS adapter 70 Shut-off resistor P-DP: 90 (male) DVN/CN: on request Female M with cable Male M with cable Y junction P-DP: DVN/CN: 788 M P-DP: DVN/CN: 97 US-dapter 70 9 p. /7

4 Pin ssignment Socket D-Sub HD Pin ssignment nalog Version N.C. ) N.C. us Version N.C. N.C. ctual value output + N.C. inary input V-Output (only for factory use) RS TxD (direct connection to computer) 7 inary input 8 GND (for binary inputs) 9 only for factory use (do not connect!) 0 V-Output (only for factory use) V-Output (only for factory use) inary input ctual value output GND N.C. RS RxD (direct connection to computer) DGND (for RS-interface) ) N.C.: not connected (not used) Note: Optional Pin and with bus version as transmitter input possible The cable length for RS/ Setpoint and fl ow value signal is limited to 0 meters. Standard Socket M, round, 8 pin Pin ssignment V-Supply Relay reference contact Relay reference contact Relay Normally closed contact Relay Normally open contact V-Supply GND 7 Relay Normally open contact 8 Relay Normally closed contact Socket D-Sub 9 pin (only with fieldbus version) Pin ssignment PROFIUS DP CNopen Shield Shield N.C. CN-L data line RxD/TxD - P (-line) GND RTS N.C. (control signal for repeater) GND N.C. VDD (only for termination N.C. resistor) 7 N.C. CN-H data line 8 RxD/TxD - N (-line) N.C. 9 N.C. N.C. Fieldbus D-SU p. /7

5 Pin ssignment (continued) PROFIUS DP socket -coded M (DPV max. Mbaud) Pin ssignment VDD (only for termination resistor) RxD/TxD N (-line) DGND RxD/TxD P (-line) N.C. M Profibus CNopen Plug -coded M Pin ssignment Shield N.C. 7) DGND CN_H CN_L 7) Optional confi guration with V DC possible for power supply via fi eldbus connector. With this no power supply connection on round M plug needed. M Plug D-Sub 9 pin Pin ssignment inary input (related to GND Pin ) GND Power supply + V DC Relay, normally opened Relay, normally closed TX+ (RS8-Y) bridge with pin 9 at half duplex 7 TX- (RS8-Z) bridge with pin 8 at half duplex 8 RX- (RS8-) 9 RX+ (RS8-) RS8 version p. /7

6 Dimensions [mm].. C D G ¼; NPT ¼ 0. G ⅜; NPT ⅜ 0. G ½; NPT ½ 7. G ¾; NPT ¾ 7. x M C 00 D US: D-SU US: M G ⅜; NPT ⅜ G ½; NPT ½ G ¾; NPT ¾ x M US: D-SU US: M p. /7

7 MFC/MFM pplications Request for Quotation Please complete and send to your nearest ürkert sales centre Company Contact person Customer No ddress Postcode/Town Department Tel./Fax MFC-pplication MFM-pplication Quantity Required delivery date Fluid data Type of gas (or gas proportion in mixtures) Density kg/m 8) Gas temperature ºC ºF Moisture content g/m brasive components/solid particles no yes, as follows: Fluidic data Flow range Q nom Min. l N /min 8) l S /min (slpm) 9) 0) Inlet pressure at Q nom p = bar(g) Outlet pressure at Q nom p = bar(g) Max. inlet pressure p max bar(g) MFC/MFM port connection without screw-in fitting Max. m N /h 8) kg/h cm N /min 8) cm S /min (sccm) 9) l N /h 8) l S /h 9) ¼" G-thread (DIN ISO 8/) ¼" NPT-thread (NSI.) ⅜" G-thread (DIN ISO 8/) ⅜" NPT-thread (NSI.) ½" G-thread (DIN ISO 8/) ½" NPT-thread (NSI.) ¾" G-thread (DIN ISO 8/) ¾" NPT-thread (NSI.) with screw-in fitting mm Pipeline (external Ø) inch Pipeline (external Ø) Installation horizontal, valve upright (standard) horizontal, valve on side vertical, flow upwards mbient temperature C Material data vertical, flow downwards ody (base block) luminium (anodised) Stainless steel Seal material FKM EPDM Electrical data Signals for set point Standard signal with fieldbus with RS8 and actual value Setpoint / ctual value 0 V 0 0 m PROFIUS DP M D-Sub 0 0 V 0 m CNopen D-Sub Please quote all pressure values as overpressures with respect to atmospheric pressure [bar(ü)] 8) at:.0 bar(a) and 0 ºC 9) at:.0 bar (a) and 0 ºC 0) matches with calibration pressure To find your nearest ürkert facility, click on the orange box In case of special application conditions, please consult for advice. Subject to alteration. Christian ürkert GmbH & Co. KG 70/8_EU-en_ p. 7/7

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