IoT Enabling Smart Facilities - an Owner Perspective Arthur Chuang Senior Director, 300mm Facility Div., TSMC
EDUCATION Arthur Chuang - Bio BS, Mechanical Engineering, National Taiwan University of Science and Technology Ph.D., Civil Engineering, National Taiwan University OCCUPATION Senior Director, 300mm Facility Division, TSMC Vice-Chair, High-tech Facility Committee, SEMI Taiwan ACCOMPLISHMENTS TEN Outstanding Project Managers (2011) Outstanding Alumnus, Civil Engineering Department, NTU (2014) National Industrial Innovation Elite Award (2015) TSMC Conservation Volunteer (Since 2009) 2
Agenda Evolution of Facility Monitoring and Control System What Does Industry 4.0 Mean in High-tech Facility How IoT Enabling Smart Facilities Summary 3
FMCS Overview Facility Monitoring and Control System (FMCS) ERP Financial Production Supply chain Customer Service Material MES Manufacture Scheduling Quality, Yield, CIM FAC Management Asset Management(PM/Materials) Operation Management Energy/Quality/ESH Operator Workstation AP Server Engineer Workstation Database DH Server AP Server Web Server OPC Server DB Server Control & Monitor Field Instrument SCADA HMI Network Control System IO module Smart Instrument Redundant Controller Control IO / Marshalling Control IO / Marshalling Control Redundant Network SI SCADA Control IO / Marshalling System SCADA Redundant Controller Control IO / Marshalling 4
FMCS Evolution Digital Technology Changed FMCS Landscape Value Centralized Control & Monitoring Digital Plant Smart Management Hardwired Panel Boards 1940 1960 1980 2000 2020 Time 5
FMCS R&R in Modern Facilities Improve facility system reliability and availability, reduce maintenance cost. Improve situational awareness to reduce ESH incidents and response time. Reduce waste and loss to pursue high energy efficiency. Enhance operation productivity. Be ready for infrastructure integration with future smart facility. 6
Agenda Evolution of Facility Monitoring and Control System What Does Industry 4.0 Mean in High-tech Facility How IoT Enabling Smart Facilities Summary 7
Industry 4.0 The 4 th industrial revolution will be based on Cyber Physical System (CPS), the Internet of Things (IoT) and the Internet of Service. 1.0 2.0 3.0 4.0 1784 1870 1969 End of 18 th century Start of 20 th century Start of 1970s Today It will generate enormous Big Data streams stored in the Cloud that can be analyzed for resource-efficient and high quantity production. 8
Why Cyber Physical System CPS is a system featuring a tight combination of, and coordination between, the system s cyber and physical elements. Combination Integration Merging Cyber Reference: 從集合 整合 融合看工業 4.0 發展藍圖 Science & Technology Policy Research and Information Center, NAR Labs CPS uses computation, communication, and control embedded in and interacting with physical processes to add new capabilities (three-in-one) to physical system. 9
Why Internet of Things INTERNAL Material management Energy management PM management Cost management CLOUD (BIG DATA) EXTERNAL Suppliers management Environmental management Process monitoring Alarm handling FMCS IoT Image/sound info. Operator info. Process control Environment info. Auto operation Material info. 10
Agenda Evolution of Facility Monitoring and Control System What Does Industry 4.0 Mean in High-tech Facility How IoT Enabling Smart Facilities Summary 11
Facility Automation FMCS Framework Management Information Control 12
Smart Facility Profile FMCS+IoT+Cloud Sketch HMI OPC Productivity Maintenance Reliability ESH Energy I IoT Gateway IoT Gateway Smart Factory Security & surveillance Every things M2M & wireless sensor network Building management Embedded Mobile Vehicle, asset, person monitoring & control Energy Consumption 13
IoT Enabling Smart Facilities Smart Facility is to apply the concept of prediction, so that the facility system achieves zero-trouble such as zerofailure and zero-contamination. Smart Facility is built on the foundation of FMCS system. IoT is the basic construction to start Smart Facility, so to develop IoT elements and applications is currently the most important. Digitalized Data 3D Model FMCS Foundation IOT Information Cloud Computing Big data Analysis Smart Facility Industry 3.0 Industry 4.0 14
UPS Load Example Electrical System Current Pictures: Power remote control Auto-Switch while abnormal Energy information and alarm monitoring Better Future? Predict fault of high voltage equipment Real time fault analysis and smart recovery guide Build energy map for smart demand response Energy Saving Power SCADA PLC Temp. Relay M M Battery Monitoring M Substation Main Transformer High Voltage Vibration Monitoring Generators G TPC Abnormal Point Handling Notice Troubleshooting Guide M SCADA IoT Gateway Vibration, Noise Partial Discharge Over Temp. Battery 15
Example Waste Water Treatment Current Pictures: Lack of monitoring for tool waste drain Hindsight and labor-intensive operations along abnormal discharge UPW H2O 2 H2SO 4 HF NH 4 OH IPA Chemical Tools Quantity Sensor Better Future? Drain Real-time devices for monitoring of tool drains, such as frequency, volume and time. Sensor Quality Smart Operation : Predict water variation, Optimize treatment parameter, Minimize chemical consumption. Reclaim & WWT WWT SCADA SCADA IoT Gateway Smart Water Apps 16
Example Air Abatement System Current Pictures: Equipment status monitoring Process performance and efficiency tracking Exhaust sub-main static pressure monitoring Better Future? Real-time emission monitoring for emergency response and audit Predictive maintenance replace preventive maintenance to eliminate risk of abnormal emission. Process Material Product Tool Performance Monitoring Central Weather Bureau Internet Scrubber (Wet ) (Plasma) Velocity sensor (Adsorb.) Utility measure sensor Removal efficiency sensor Vibration Exhaust concentration Sensor and intensity Sensor Concentration Monitoring SCADA IoT Gateway Central Scrubber VOC Oxidizer Vibration Monitoring Exhaust Fan Exhaust Fan AAS Control Exhaust to atmosphere Stack Stack 17
Example Security System Current Pictures: People identity and access control Video recording and retrieve Unlock security equipment & CCTV tracking (Fire/ gas leak alarm) Better Future? Acquire ERT member status and monitor accident situation Intelligent video analysis for property and fire protection People counting Video Analytics Fire protection Vehicle tracking 18
Agenda Evolution of Facility Monitoring and Control System What Does Industry 4.0 Mean in High-tech Facility How IoT Enabling Smart Facilities Summary 19
Future Facility Needs Develop all kinds of IoT application technique, build the big database that facility system required. Develop simulation learning system and technique, as a training strategy for complete automatic facilities. Develop cyber physical system (beyond FMCS) for smart Safety management, Environmental management, and Energy management etc. 20
SMART FACILITY Summary FMCS automation uses electronics and information technique, to replace manual operation with automatic control. Smart Facility is built on the basis of existing automation, and it collects information with IoT devices, then integrates it to could for big data analysis via Internet of service, and finally engineer decides new strategy according to the results. IoT is basic element of the innovation of future Smart Facility. Therefore, the development effectiveness of IoT devices will affect directly the progress of Smart Facility. 21