High-speed sampling and high resolution. The new choice for even more variegated data collection and processing.

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867 PHOTO PHOTO High Speed High Accuracy Eddy Current Type Digital Sensor SERIES Related Information General terms and conditions... P.1 Glossary of terms... P.1019 Sensor selection guide... P.11~ / P.833~ General precautions... P.1027 Conforming to EMC Directive MEASURE SUNX website http://www.sunx.com High-speed sampling and high resolution. The new choice for even more variegated data collection and processing. They perform with a ±0.3 % F.S. linearity for stainless steel and iron -300 Because they perform with a ±0.3 % F.S. linearity, they can be used for sensing stainless steel and iron enabling precise measurements not affected by the work s material. Specifi cations corresponding to each material (stainless steel, iron, aluminum) has already been inputted in the controller enabling the easy selection of the setting that is most suitable for the particular material used. We ve realized a 25 μs (40,000 times/sec.) ultra high sampling speed With a 25 μs ultra high sampling speed, the series won t miss even high speed work displacements. These devices boast a 0.07 % F.S./ C temperature characteristics By combining the sensor head with the controller, we ve realized 0.07 % F.S./ C. They are highly resistant to ambient temperature changes enabling stable microdisplacement measurements. Output value Optimal correction of the output feature Aluminum Distance Before correction Stainless steel Iron Output value Distance After correction They possess a 0.02 % F.S. resolution for highly accurate measurement With high resolution, 0.02 % F.S. (Note), they can perform high-accuracy measurements of micro-displacements. In particular, the sensor head 3SE for 0.8 mm 0.049 in sensing can differentiate ultra micro displacement of 0.32 μm 0.013 mil (Average number of samples: 64). Note: C3SE and C5SE Resolution: 0.04 % F.S.

ORDER GUIDE P.871 SPECIFICATIONS P.873 ~ High Speed High Accuracy Eddy Current Type Digital Sensor SERIES 868 I/O CIRCUIT DIAGRAMS P.875 ~ PRECAUTIONS FOR PROPER P.877 ~ DIMENSIONS P.878 ~ APPLICATIONS Stroke end sensing Eccentricity sensing Height sensing PHOTO PHOTO 12ML 3SE 10M ENVIRONAL RESISTANCE / VARIETY IP67g sensor head variation 6 types of sensor heads from the ultra compact ø3.8 mm ø0.150 in cylindrical type to the long range sensing type ø22 mm ø0.866 in are available. All sensor heads are oil-proof as per IP67g (JEM) enabling safe, stable performance even under harsh environments. NPN output type, PNP output type DIN 48 mm 1.890 in size MEASURE 22KL Sensing range: 0 to 10 mm 0 to 0.394 in Appearance: ø22 mm ø0.866 in / M12 12ML Sensing range: 0 to 5 mm 0 to 0.197 in Appearance: M12 MOUNTING / MAINTENANCE 10M Sensing range: 0 to 2 mm 0 to 0.079 in Appearance: M10 3SE Sensing range: 0 to 0.8 mm 0 to 0.031 in Appearance : ø3.8 mm ø0.150 in s with superior workability and maintainability Replacement of sensor heads possible As a result of damage or other mishap rendering maintenance necessary, you can replace only the sensor head leaving the controller as it is. One-touch connector hook up The sensor head and the controller connection is a simple one-touch connector type. One-touch connector 5SE Sensing range: 0 to 1 mm 0 to 0.039 in Appearance : ø5.4 mm ø0.213 in 8S Sensing range: 0 to 2 mm 0 to 0.079 in Appearance: ø8 mm ø0.315 in extensions possible Between the sensor head and the controller, a CCJ7 extension cable (optional) can be used up to a 10 m 32.808 ft total length. -300 Sensor cable: 3 m 9.843 ft Total length: 10 m 32.808 ft Extension cable CCJ7: 7 m 22.966 ft

869 High Speed High Accuracy Eddy Current Type Digital Sensor SERIES PHOTO PHOTO FUNCTIONS The 5-digit, dual, 2-color digital display offers great visibility If the measurement results fall within the setting range (GO), they will appear on the lower digital display in green. If they are out of range (HI, LO), they will be displayed in the upper digital display in orange. The display position and color change allows for accurate visibility even for momentary changes. Digital input display enabling easy setting Its dual digital display enables numerical setting while verifying setting items for each mode. Even when sensing, it enables the verifi cation of the main settings. Sensing values Upper threshold value Lower threshold value MEASURE Out of setting range (upper threshold) (Orange) Sensing values within setting range (Green) Out of setting range (lower threshold) (Orange) The RS-232C communication connector is standard equipment It is capable of various controls such as saving measurement data to PC and the controller s inputted settings and loading stored memory. Setting value verifiable even in sensing mode Simple setting mode Manual mode Exclusive RS-232C cable (Accessory for the intelligent monitor AiM) Cable length: 3 m 9.843 ft [PC side connector: D-SUB (9 pins)] Average number of samples setting value -300 Connector for RS-232C communication Enables sensors data comparisons and calculations Link cable for controller communication unit (Optional) SL-F Cable length: 150 mm, 250 mm, 1,000 mm 5.906 in, 9.843 in, 39.307 in communication unit COM 3-value judgment output for calculating measurement data conformity and calculation results between 2 interconnected controllers is rendered possible. The calculation function equipment renders digital panel controllers unnecessary. Sensor A and B are linked and the measurement values are calculated (a +b) and outputted. On the control device side, subtracting the calculated value (a +b) from the actual distance between sensors A and B will give you the object s thickness. Object Sensor A a b Sensor B Distance between sensors

High Speed High Accuracy Eddy Current Type Digital Sensor SERIES 870 Datalink between sensors possible The controller communication unit COM (optional) can be linked to up to 8 controllers and load via just one RS-232C cable each controller settings and measurement data to a PC. Maximum of eight units PHOTO PHOTO communication unit Link cable Data sent to a PC via the RS-232C An intelligent monitor (AiM) optimal for collecting and analyzing measurement data is also available An intelligent monitor capable of the settings for each measurement conditions and waveform display monitoring. It can perform waveform monitoring, which could until now only be done by the oscilloscope, as well as the simple loading and saving onto a PC of settings for each condition and function. (Exclusive RC-232C cable is attached.) MEASURE BCD output unit BCD (Optional) 20 khz high-speed data output Mutual interference prevention function The measurement data can be processed quickly in the PLC. (Sampling rate: 20 khz) Cable with connector on one end for BCD output unit BCC3 (Optional) Cable length: 3 m 9.843 ft side: BCD connector Output side: Multi-core cable BCC3 BCD output unit BCD 4 types of measurement modes available Measurement modes compatible to the most widely used applications are available. Because of this, inputting setting values can be done with ease. Please select the most appropriate mode to suit your specific application. <Maunally set mode> The sensor head can be made interference prevention by linking up to 8 controllers via an interference prevention output cable and shifting the oscillation timing. This enables precise measurements to be obtained even in cases where many sensor heads are crowded in the same area. Removable type terminal block It is equipped with a removable type European terminal block very convenient during assembly, when dividing the equipment into segments or when performing maintenance. It also features an reverse insertion prevention European terminal block construction. 4 types of selectable memory functions The setting data can be processed in 4 types of memory when measuring. This function enables either the changing of the workpiece, the sensing of multiple products or sensing after product changeover to be done smoothly. -300 <Stroke end sensing mode> <Rotation / eccentricity / vibration sensing mode> <Height sensing mode>

871 High Speed High Accuracy Eddy Current Type Digital Sensor SERIES ORDER GUIDE Type Non-threaded type sensor head Threaded type sensor head s ø3.8 ø0.150 ø5.4 ø0.213 Appearance (mm in) ø8 ø0.315 M10 M12 ø22 ø0.866 21 0.827 35 1.378 M12 48 1.890 83 3.268 48 1.890 0 to 0.8 mm 0 to 0.031 in 0 to 1 mm 0 to 0.039 in Sensing range 0 to 2 mm 0 to 0.079 in 0 to 2 mm 0 to 0.079 in 0 to 5 mm 0 to 0.197 in 0 to 10 mm 0 to 0.394 in Set Model No. ( model No.) C3SE (3SE) C3SE-P (3SE) C5SE (5SE) C5SE-P (5SE) C8S (8S) C8S-P (8S) C10M (10M) C10M-P (10M) C12ML (12ML) C12ML-P (12ML) C22KL (22KL) C22KL-P (22KL) Comparative output NPN open-collector PNP open-collector NPN open-collector PNP open-collector NPN open-collector PNP open-collector NPN open-collector PNP open-collector NPN open-collector PNP open-collector NPN open-collector PNP open-collector -300

High Speed High Accuracy Eddy Current Type Digital Sensor SERIES 872 Designation Model No. Description BCD output unit BCD Cable with connector on one end for BCD output unit communication unit Link cable for controller communication unit Intelligent monitor Extension cable for sensor head mounting bracket BCC3 COM SL-F150 SL-F250 SL-F1000 AiM CCJ7 MS-SS3 MS-SS5 MS-SS8 This unit outputs measurement values in BCD data format at a high speed. Sampling frequency: 20 khz Length: 3 m 9.843 ft Up to 8 controllers can be linked Length: 150 mm 5.906 in Length: 250 mm 9.843 in Length: 1,000 mm 39.370 in Cable for BCD data output unit 26-core cable with connector on one end This cable links the controller communication units. Select as per the cable length. Monitoring settings for each measurement condition and measurement waveforms is enabled by way of a PC. One exclusive RS-232C cable (3 m 9.843 ft length) is attached. Length: 7 m 22.966 ft Mounting bracket for 3SE Mounting bracket for 5SE Mounting bracket for 8S This cable with connector is for extensions between the sensor head and controller. BCD output unit Cable with connector on one end for BCD output unit BCD BCC3 communication unit Link cable for controller communication unit COM SL-F Intelligent monitor AiM Extension cable for sensor head CCJ7 Cable with connector on one end for BCD output unit BCC3 BCD output unit BCD Link cable for controller communication unit SL-F communication unit COM mounting bracket MS-SS The sensor head can be easily fi xed. -300

873 High Speed High Accuracy Eddy Current Type Digital Sensor SERIES SPECIFICATIONS s Type NPN output PNP output Item Set model No. C C -P Supply voltage Current consumption Resolution (Note 2) Sampling frequency 24 V DC ± 10 % Ripple P-P 10 % or less 150 ma or less C3SE / C5SE: 0.04 % F.S. (64 times average processing) C8S / C10M / C12ML / C22KL: 0.02 % F.S. (64 times average processing) 40 khz (25 μs) Linearity (Note 2) Temperature characteristics (Note 3) Analog voltage outputs Response time Comparative outputs (HI, GO, LO) Utilization category Output number Output operation Short-circuit protection Within ±0.3 % F.S. 0.07 % F.S./ C or less Output voltage: 5 to +5 V (Note 4), Output impedance: 100 Ω approx. 75 μs (maximum speed) NPN open-collector Maximum sink current: 100 ma Applied voltage: 30 V DC or less (between comparative output and 0 V) Residual voltage: 1.6 V or less (at 100 ma sink current) 0.4 V or less (at 16 ma sink current) DC-12 or DC-13 HI / GO / LO 3 value output PNP open-collector Maximum source current: 100 ma Applied voltage: 30 V DC or less (between comparative output and +V) Residual voltage: 1.6 V or less (at 100 ma source current) 0.4 V or less (at 16 ma source current) HI : ON when measured value > the upper limit value GO: ON when upper limit value measured value lower limit value LO : ON when lower limit value > measured value Incorporated External input Photo-coupler input Input current: 9 ma or less Operating voltage: ON voltage V or more (between +24 V and input) OFF voltage 4 V or less (between +24 V and input) Input impedance: 5 kω approx. Photo-coupler input Input current: 9 ma or less Operating voltage: ON voltage V or more (between 0 V and input) OFF voltage 4 V or less (between 0 V and input) Input impedance: 5 kω approx. Serial I/O RS-232C -300 Zero-set setting method Push button setting / External input setting MODE Orange LED (lights up when in mode status) Indicators HI Orange LED (lights up when the upper limit value is exceeded) GO Green LED (lights up when within the upper and lower limit value) LO Orange LED (lights up when less than the lower limit value) TIMING Green LED (lights up as per the external or internal trigger timing) Upper level digital display part 5 digit orange LED (display of numerical values out of upper and lower limit value) Lower level digital display part 5 digit green LED (display of numerical values within the upper and lower limit value) Environmental resistance Pollution degree 3 (Industrial environment) Ambient temperature 0 to +50 C +32 to +122 F (No dew condensation), Storage: 0 to +50 C +32 to +122 F Ambient humidity 35 to 85 % RH, Storage: 35 to 85 % RH EMC EN 61000-6-2, EN 61000-6-4 Vibration resistance 10 to 55 Hz frequency, 0.75 mm 0.030 in amplitude in X, Y and Z directions for two hours each Shock resistance 100 m/s 2 acceleration (10 G approx.) in X, Y and Z directions for fi ve times each Material Enclosure: Polycarbonate Weight Accessory Net weight: 120 g approx. ATA4811 ( mounting frame): 1 set Notes: 1) Where measurement conditions have not been specifi ed precisely, the conditions used were an ambient temperature of +20 C +68 F. 2) This value was obtained at a constant +25 C +77 F. 3) This value represents 20 to 60 % of the maximum sensing distance when combining the sensor head and controller. 4) Adjusted to a 0 to +5 V factory setting.

High Speed High Accuracy Eddy Current Type Digital Sensor SERIES 874 SPECIFICATIONS s Type Non-threaded type Threaded type For 0.8 mm 0.031 in sensing For 1 mm 0.039 in sensing For 2 mm 0.079 in sensing For 2 mm 0.079 in sensing For 5 mm 0.197 in sensing For 10 mm 0.394 in sensing Item Model No. 3SE 5SE 8S 10M 12ML 22KL Sensing range (Note 2) 0 to 0.8 mm 0 to 0.031 in 0 to 1 mm 0 to 0.039 in 0 to 2 mm 0 to 0.079 in 0 to 2 mm 0 to 0.079 in 0 to 5 mm 0 to 0.197 in 0 to 10 mm 0 to 0.394 in Standard sensing object Temperature characteristics (Note 3) Environmental resistance Stainless steel (SUS304) / Iron sheet [Cold rolled carbon steel (SPCC)] 60 60 t 1 mm 2.362 2.362 t 0.039 in 0.07 % F.S./ C or less Pollution degree 3 (Industrial environment) Protection IP67 (IEC), IP67g (JEM) (Refer to p.1010 for defails of standards.) Ambient temperature 10 to +55 C +14 to +131 F, Storage: 20 to +70 C 4 to +158 F Ambient humidity 35 to 85 % RH, Storage: 35 to 85 % RH Voltage withstandability 250 V AC for one min. between all supply terminals connected together and enclosure Insulation resistance 20 MΩ, or more, with 250 V DC megger between all supply terminals connected together and enclosure Vibration resistance 10 to 150 Hz frequency, 0.75 mm 0.030 in amplitude in X, Y and Z directions for two hours each Shock resistance 500 m/s 2 acceleration (50 G approx.) in X, Y and Z directions for fi ve times each Enclosure Stainless steel (SUS303) Brass (Nickel plated) Cable protector PP Sensing part ABS PAR ABS PA Cable High frequency coaxial cable with connector, 3 m 9.843 ft long (Note 4) Cable extension Extension up to total 10 m 32.808 ft is possible with the optional cable. Net Weight (Note 5) 40 g approx. 40 g approx. 40 g approx. 50 g approx. 45 g approx. 80 g approx. Accessories Nut: 2 pcs., Toothed lock washer: 1 pc. Material Notes: 1) Where measurement conditions have not been specifi ed precisely, the conditions used were an ambient temperature of +20 C +68 F. 2) The sensing range is specifi ed for the standard sensing object. 3) This value represents 20 to 60 % of the maximum sensing distance when combining the sensor head and the controller. 4) For the fl exible cable type, please contact our offi ce. 5) The given weight of the threaded type sensor head is the value including the weight of the nuts and the toothed lock washer. BCD output unit Item Model No. BCD Current consumption 20 ma or less Outputs N-channel MOSFET open drain 5 digits BCD, Maximum sink current: 50 ma Polarity Applied voltage: 30 V DC or less (between output and GND) indication, VALID Residual voltage: 1 V or less (at 50 ma sink current) Non-voltage contact or NPN open-collector input Hold input Low: 0 to 1 V High: Open Material Enclosure: ABS Weight Net weight: 30 g approx. Accessory Mounting bracket [Stainless steel (SUS304)]: 1 pc. Note: Connects to the control device with BCC3 cable with connector on one end for BCD output unit (3 m 9.843 ft cable length, optional). communication unit Item Model No. COM Current consumption 5 ma or less Material Enclosure: ABS Weight Net weight: 20 g approx. Accessory Mounting bracket [Stainless steel (SUS304)]: 1 pc. Note: Each COM is connected using a link cable for controller communication units (SL-F, optional). When COM is used, controllers cannot communicate if their software versions are not compatible (Ver. 1.06 or earlier version with Ver 2.00 or later version). Check the software version and use the correct combination. -300

875 High Speed High Accuracy Eddy Current Type Digital Sensor SERIES I/O CIRCUIT AND WIRING DIAGRAMS NPN output type controller I/O circuit diagram Tr6 Tr5 ZD6 Terminal No. D1 +V 18 Comparative ZD1 output LO Load Tr1 1 Load Comparative ZD2 output GO 100 ma max. Tr2 2 Load ZD3 Comparative output HI 100 ma max. Tr3 3 Load + ZD4 Alarm output Tr4 5 100 ma max. Load ZD5 Strobe output 100 ma max. 6 100 ma max. Interference Used for interference 7 prevention output prevention function. 4 Output COM. 0 V 47 Ω 47 Ω 9 Analog voltage output ( 5 to +5 V) (Note) + +24 V 8 For analog output GND 24 V DC ± 10 % PNP output type controller I/O circuit diagram D1 + 18 +V Terminal No. 4 Output COM. 100 ma max. Tr1 ZD1 1 Comparative output LO 100 ma max. Tr2 2 ZD2 + Comparative output GO 100 ma max. Load Tr3 ZD3 3 Comparative output HI 100 ma max. Load Tr4 ZD4 5 Alarm output 100 ma max. Load Tr5 ZD5 6 Strobe output Load Interference prevention Load output Used for interference Tr6 7 ZD6 prevention function. 0 V 47 Ω 47 Ω 9 Analog voltage output ( 5 to +5 V) (Note) 8 For analog output GND 24 V DC ± 10 % Main circuit 5 kω Zero-set input 10 +24 V 5 kω Memory selection input 1 11 +24 V 5 kω Memory selection input 2 12 +24 V 5 kω Timing input 14 Main circuit Input COM. (+24 V) 13 *1 *1 *1 *2 *1 5 kω Zero-set input 10 5 kω Memory selection input 1 11 5 kω Memory selection input 2 12 +24 V 5 kω Reset input 15 5 kω Timing input 14-300 +24 V 5 kω 16 Interference prevention input Used for interference prevention function. *1 *2 *1 *1 *1 Input COM. 13 (0 V) Internal circuit Users circuit Note: Devices connected to the analog voltage output must have an input impedance set at 1 MΩ or more. Symbols D1: Reverse supply polarity protection diode ZD1 to ZD6: Surge absorption zener diode Tr1 to Tr6: NPN output * 1 Non-voltage contact or NPN open-collector or Zero-set input, reset input, memory selection input Low (0 to 4 V): Effective High (+V or open): Ineffective * 2 NPN open-collector 5 kω Reset input 15 5 kω 16 Interference prevention input Used for interference prevention function. Internal circuit Users circuit Note: Devices connected to the analog voltage output must have an input impedance set at 1 MΩ or more. * 1 * 2 Symbols D1: Reverse supply polarity protection diode ZD1 to ZD6: Surge absorption zener diode Tr1 to Tr6: PNP output Non-voltage contact or PNP open-collector or Zero-set input, reset input, memory selection input Low (0 V or open): Ineffective High (+ or +24 V): Effective PNP open-collector Timing input Low (0 to 4 V): Effective High (+V or open): Ineffective Memory selection input Memory No. Memory selection 1 Memory selection 2 0 High High 1 Low High 2 High Low 3 Low Low Timing input Low (0 V or open): Ineffective High (+ to +24 V): Effective Memory selection input Memory No. Memory selection 1 Memory selection 2 0 Low Low 1 High Low 2 Low High 3 High High

High Speed High Accuracy Eddy Current Type Digital Sensor SERIES 876 I/O CIRCUIT AND WIRING DIAGRAMS Terminal arrangement 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 18 Connector for RS-232C communication Terminal No. Connector for sensor head connection Description 1 Comparative output LO 2 Comparative output GO 3 Comparative output HI 4 Output COM. 5 Alarm output 6 Strobe output 7 Interference prevention output 8 For analog output GND 9 Analog output BCD output unit Connector pin position and cable color Connector pin No. Sheath color Cable ID mark Signal Terminal No. 1 Orange Red: 1 A0 1 2 Orange Black: 1 B0 2 3 Gray Red: 1 C0 4 4 Gray Black: 1 D0 8 5 White Red: 1 A1 1 6 White Black: 1 B1 2 7 Yellow Red: 1 C1 4 8 Yellow Black: 1 D1 8 9 Pink Red: 1 A2 1 10 Pink Black: 1 B2 2 11 Orange Red: 2 C2 4 12 Orange Black: 2 D2 8 13 Gray Red: 2 A3 1 14 Gray Black: 2 B3 2 15 White Red: 2 C3 4 16 White Black: 2 D3 8 Yellow Red: 2 A4 1 18 Yellow Black: 2 B4 2 19 Pink Red: 2 C4 4 20 Pink Black: 2 D4 8 Description 10 Zero-set input 11 Memory selection input 1 12 Memory selection input 2 13 Input COM. 14 Timing input 15 Reset input 16 Interference prevention input 0 V 18 +V Measurement value to the 10 0 digit Measurement value to the 10 1 digit Measurement value to the 10 2 digit Measurement value to the 10 3 digit Measurement value to the 10 4 digit Description Measurement value BCD output 21 Orange Red: 3 POLE Polarity signal output High (OFF): +, Low (ON): mating connector Connector for BCD output -300 22 Orange Black: 3 VALID VALID output 23 Gray Red: 3 HOLD Hold input Low (ON) when the data output is enabled This input is to maintain the external data output. The data output is maintained during low (ON). 24 Gray Black: 3 GND Ground 25 White Red: 3 GND Ground White Black: 3 Not connected Not used Note: The shield wire is connected externally at 0 V.

877 High Speed High Accuracy Eddy Current Type Digital Sensor SERIES -300 PRECAUTIONS FOR PROPER The sensor head and the controller are adjusted in order to conform to the default specifi cation linearity. In the event of replacing sensor heads, input the sensor head s characteristic code and conduct 3-point correction (calibration). Should you use an extension cable, turn the sensor head cable length selection switch located on the back of the controller to 3 m + 7 m 9.843 ft + 22.966 ft. Then reintroduce the power supply and conduct 3-point correction (calibration). Conditions in use for CE conformity This product is CE compliant and complies with EMC directives. EN 61000-6-2 is the applicable standard that covers immunities relating to use of this product, but in order to comply with this standard, the following conditions must be satisfi ed. Conditions The controller should be connected less than 10 m 32.808 ft from the power supply. The signal line to connect with the controller should be less than 30 m 98.425 ft. A ferrite clamp must be mounted within 10 mm 0.394 in from connector fi tted onto the BCC3 cable with connector on one end for BCD output units. Linearity in case of disc-shaped or cylindrical objects In case the sensing object is disc-shaped or cylindrical, the linearity varies with the sensing object size. In the event the sensing object is larger than the sizes indicated in the table below, the linearity specifi cation (within ±0.3 % F.S.) is satisfi ed by performing zeroadjustment and span adjustment when in contact using the scaling function. <In case of disc> Iron disc ( ) ø mm t: 1 mm in 0.039 in <In case of cylinder> Never use this product as a sensing device for personnel protection. In case of using sensing devices for personnel protection, use products which meet laws and standards, such as OSHA, ANSI or IEC etc., for personnel protection applicable in each region or country. Iron cylinder l: 135 mm 5.315 in l t Disc diameter ø (mm in) Cylinder diameter ø (mm in) 3SE 6 0.236 16 0.630 5SE 8 0.315 16 0.630 8S 12 0.472 50 1.969 10M 12 0.472 50 1.969 12ML 25 0.984 55 2.165 22KL 30 1.181 165 6.496 ø (mm in) Mounting sensor head The tightening torque should be under the value given below. Mounting with set screw Make sure to use an M3 or smaller set screw having a cup-point. Set screw (M3 or less) (Cup-point) A Model No. A (mm in) Tightening torque 3SE 4 to 16 0.157 to 0.630 0.10 N m or less 5SE 0.44 N m or less 5 to 16 0.197 to 0.630 8S 0.58 N m or less Mounting with nut <10M> <12ML> <22KL> B Attached toothed lock washer Mounting plate B Attached toothed lock washer Mounting plate B Attached toothed lock washer Mounting plate Model No. B (mm in) Tightening torque 10M 7 0.276 or more 9.8 N m or less 12ML 14 0.551 or more 20 N m or less 22KL 20 0.787 or more (Note 1) 20 N m or less Notes: 1) Without nut. If a nut is installed, the dimension will be 23.5 mm 0.926 in or more. 2) Mount such that the nuts do not protrude from the threaded portion. Distance from surrounding metal As metal around the sensor head may affect the sensing performance, pay attention to the following points. <Embedding of the sensor head in metal> Since the analog output may change if the sensor head is completely embedded in metal, keep the minimum distance specifi ed in the table below. C D Metal Refer to p.1027 for general precautions. C (mm in) D (mm in) 3SE ø10 ø0.394 5SE 3 0.118 8S ø18 ø0.709 10M ø14 ø0.551 12ML ø50 ø1.969 14 0.551 22KL ø50 ø1.969 20 0.787 Mutual interference If several sensor heads are mounted close together, some specifications may not be satisfied. Therefore, proceed with the interference prevention function enabled. The interference prevention function eliminates interference among sensors by alternating sensor oscillations. Contact our offi ce for details about time charts etc. If not using the interference prevention function, leave a distance more than the values given below. <Face to face mounting> E <Parallel mounting> F E (mm in) F (mm in) 3SE 15 0.591 9 0.354 5SE 30 1.181 11 0.433 8S 40 1.575 15 0.591 10M 40 1.575 15 0.591 12ML 0 6.693 50 1.969 22KL 200 7.874 200 7.874 Sensing range The sensing range is specifi ed for the standard sensing object [stainless steel (SUS304) / iron [Cold rolled carbon steel (SPCC)], 60 60 t 1 mm 2.362 2.362 t 0.039 in]. For sensing metals other than the standard sensing objects, use the correction coeffi cient stated below as a guideline. Verify with the actual sensor before using. Correction coefficient 3SE 5SE 8S Metal Stainless steel (SUS304), Iron 1 Aluminum 0.5 approx. 10M 12ML 22KL

High Speed High Accuracy Eddy Current Type Digital Sensor SERIES 878 PRECAUTIONS FOR PROPER Connection of sensor head and controller Make sure that the power supply is off while connecting the sensor head to the controller. Connection Hold the sensor head s connector by the outer ring and insert it into the connector provided on the controller for sensor head connection. Insert till you hear a click sound. Connector for sensor head connection Connector outer ring Removing When removing, hold the connector outer ring and pull it straight out. Cable extension for sensor head When using a sensor head extension cable, turn the sensor head cable length selection switch side to the controller s sensor head connector to 3 m + 7 m 9.843 ft + 22.966 ft with the power supply is off. After switching, reintroduce the power supply. Connector for sensor head connection cable length selection switch UP side : Standard (3 m 9.843 ft) + extension (7 m 22.966 ft) DOWN side : Standard (3 m 9.843 ft) (factory shipment setting) The coaxial connector for the extension cable is connected to the 0 V power supply. If installing to a metal plate or similar, insulate the connector from the surrounding metal. Mounting controller Use the attached controller mounting frame (ATA4811) and mount the controller onto the panel by fastening the frame s screws. mounting frame (ATA4811) Refer to the DIMENSIONS ( p.879 ) for the panel cut-out dimensions. The mountable panel thickness is 1 to 5 mm 0.039 to 0.197 in. However, if using a controller communication unit or BCD output unit, make the panel thickness between 1 and 2.5 mm 0.039 and 0.098 in. Wiring Make sure that the power supply is off while wiring. Take care that wrong wiring will damage the sensor head or the controller. Verify that the supply voltage variation is within the rating. If power is supplied from a commercial switching regulator, ensure that the frame ground (F.G.) terminal of the power supply is connected to an actual ground. In case noise generating equipment (switching regulator, inverter motor, etc.) is used in the vicinity of the sensor head or the controller, connect the frame ground (F.G.) terminal of the equipment to an actual ground. Do not run the wires together with high-voltage lines or power lines or put them in the same raceway. This can cause malfunction due to induction. Make sure to use an isolation transformer for the power supply. It an auto-transformer (single winding transformer) is used, this product or the power supply may get damaged. In case a surge is generated in the used power supply, connect a surge absorber to the supply and absorb the surge. The analog voltage output does not incorporate a shortcircuit protection circuit. Do not directly connect a power supply or a capacitive load. Make sure that stress by forcible bend or pulling is not applied directly to the sensor cable joint. If using separate power supplies for multiple controllers, use the same +V or 0 V supply for all. Refer to p.1027 for general precautions. s After turning on the power, wait 15 min. or more [20 min. for the C3SE(-P) and C5SE(-P)] before using the product. The power supply circuit is not stable immediately after the power is turned on, and this may cause measurement values to be distorted. In addition, note that there will also be a muting period of approx. 2 sec. This sensor is suitable for indoor use only. Avoid dust, dirt, and steam. Take care that the product does not come in direct contact with water, oil, grease, or organic solvents, such as, thinner, etc. -300 DIMENSIONS (Unit: mm in) The CAD data in the dimensions can be downloaded from the SUNX website: http://www.sunx.com 3SE 5SE ø3.8 ø0.150 ø2.5 ø0.098 high frequency coaxial cable, 3 m 9.843 ft long Coaxial connector for controller connection () () (25.7) (1.012) (ø6.4) (ø0.252) ø5.4 ø0.213 (6.2) (0.244) ø2.5 ø0.098 high frequency coaxial cable, 3 m 9.843 ft long Coaxial connector for controller connection () () (25.7) (1.012) (ø6.4) (ø0.252)

879 High Speed High Accuracy Eddy Current Type Digital Sensor SERIES DIMENSIONS (Unit: mm in) The CAD data in the dimensions can be downloaded from the SUNX website: http://www.sunx.co.com 8S 10M ø8 ø0.315 (6.2) (0.244) ø2.5 ø0.098 high frequency coaxial cable, 3 m 9.843 ft long Coaxial connector for controller connection () () (25.7) (1.012) (ø6.4) (ø0.252) ø18 ø0.709 14 0.551 3 0.118 (6.2) (0.244) ø2.5 ø0.098 high frequency coaxial cable, 3 m 9.843 ft long Coaxial connecfor for controller connection () M10 1 0.039 () Nut (25.7) (1.012) Toothed lock washer (internal tooth) (ø6.4) (ø0.252) 12ML 22KL ø21 ø0.827 ø10.1 ø0.398 21 0.827 7 0.276 3.5 0.138 (6.2) (0.244) ø2.5 ø0.098 high frequency coaxial cable, 3 m 9.843 ft long Coaxial connector for controller connection () M12 1 0.039 () (25.7) Nut (1.012) Toothed lock washer (internal tooth) (ø6.4) (ø0.252) ø22 ø0.866 35 1.378 20 0.787 3.5 0.138 ø2.5 ø0.098 high frequency (6.2) coaxial cable, 3 m 9.843 ft long (0.244) Coaxial connector for controller connection (25.7) (1.012) M12 1 0.039 Nut Toothed lock washer (internal tooth) (ø0.252) ø21 ø0.827 Diameter of toothed lock washer (ø6.4) ( ) -300 MODE indicator (Orange) Comparative output operation indicators (Orange / Green / Orange) MODE key 5-digit, dual numerical display (Orange / Green) series Panel cut-out dimensions Timing indicator (Green) UP key DOWN key SHIFT key Zero-set key ENTER key 48 1.890 10 0.394 <When BCD output unit / controller communication unit not mounted> +0.6 45 0 1.772 +0.024 0 +0.6 45 0 1.772 +0.024 0 When mounted in series +0.6 A = (48 n 2.5) 0 A = (1.890 n 0.098) +0.024 0 73 2.874 (16.7) (0.657) 44.5 1.752 Terminal block Connector for RS-232C cable length selection switch Coaxial connector for sensor head connection <When BCD output unit / controller communication unit mounted> +0.6 45 0 1.772 +0.024 0 +0.6 45 0 1.772+0.024 0 Minimum 90 3.543 A Minimum 90 3.543 Note: The panel thickness should be 1 to 5 mm 0.039 to 0.197 in. Minimum 100 3.937 Note: The panel thickness should be 1 to 2.5 mm 0.039 to 0.098 in.

High Speed High Accuracy Eddy Current Type Digital Sensor SERIES 880 DIMENSIONS (Unit: mm in) The CAD data in the dimensions can be downloaded from the SUNX website: http://www.sunx.co.com BCD Assembly dimensions with controller BCD output unit (Optional) 40 1.575 Connector for controller connection Connector for BCD output Mounting frame Mounting bracket BCD output unit 55 2.165 20 0.787 (8.5) (0.335) Panel thickness dimension 1 to 2.5 0.039 to 0.098 (74.6) (2.937) (27.8) (1.094) (68) (2.677) Connector for BCD output (68) (2.677) Cable with connector for BCD output unit COM Assembly dimensions with controller communication unit (Optional) Connector for communication 40 1.575 55 2.165 20 0.787 Connector for controller connection Terminator switch (8.5) (0.335) Panel thickness dimension 1 to 2.5 0.039 to 0.098 Mounting frame (74.6) (2.937) Mounting bracket Communication unit Communication cable Connector for communication Terminator switch (68) (2.677) (68) (2.677) MS-SS3 MS-SS5 MS-SS8 A B 4 0.157 2-ø3.5 ø0.138 mounting holes 0.157 4 8 4 0.315 0.157 16 D 0.630 Material: Nylon 66 C Model No. Symbol MS-SS3 MS-SS5 MS-SS8 A 16 0.630 18 0.709 20 0.787 B 9 0.354 10 0.394 11 0.433 C 6.3 0.248 8.3 0.327 10.3 0.406 D 4.9 0.193 6.1 0.240 6.5 0.256 Applicable sensor head model No. 3SE 5SE 8S mounting bracket (Optional) -300