BARION atm Manual. Combination vacuum meter for measurements from atmosphere to UHV.

BARION atm Manual Combination vacuum meter for measurements from atmosphere to UHV www.vacom-vacuum.com

0 Inhaltsverzeichnis BARION atm Manual 07 / 2016

VACOM combination vacuum meter for measurements from atmosphere to UHV BARION atm Contact: support@vacom.de 07 / 2016 01 / 2014-1 BARION atm Manual COLDION Bedienungsanleitung

0 Contents 0 Table of contents... 4 1 General information... 6 1.1 Product description...6 1.2 Storage...6 1.3 General regulations and warranty...6 1.4 CE-derclaration of conformity...6 2 Safety... 7 2.1 Observance of the operating instructions...7 2.2 Basic safety information...7 2.3 Signs and symbols...7 3 Getting started... 8 3.1 Unpacking...8 3.1.1 Check for damage...8 3.1.2 Scope of delivery...8 3.1.3 Acclimatisation...9 4 Connection and installation... 10 4.1 Description of the RS232 interface...10 4.2 Conversion of the voltage or current at the analogue interface...10 5 Operation... 12 5.1 General information...12 5.1.1 Safety information...12 5.2 Adjustment...12 5.3 Setpoints...12 6 Maintenance... 13 6.1 Cleaning and care...13 6.2 Firmware update...13 7 Troubleshooting... 14 8 Return / disposal... 15 4 BARION atm Manual

0 Contents A... 16 A.1 Technical data...16 A.2 Accessories...17 A.3 Communication with the BARION atm...17 A.3.1 ATMION protocol...17 A.3.2 Port settings...18 A.3.3 Command set...18 A.3.4 Pressure output via RV...19 A.3.5 Calculation of the input values for specifying the setpoint...19 A.3.6 Meaning of the status bit...20 A.3.7 Meaning of the control bit...21 A.4 Legally binding Declaration of Contamination...21 A.5 VACOM Protocol (quick introduction)...22 A. 5.1 Setups...22 A. 5.2 Entering instructions...23 A. 5.2.1 For all devices valide commands...24 A. 5.2.2 Instructions for device class of pressure gauges...25 A. 5.2.3 Instructions for device class of ion getter pumps (IGP)...26 A. 5.2.4 Special instructions for GAPAS...28 A. 5.2.5 Special instructions for BARION atm...29 A. 5.2.6 Control by the way of +24 V control signals... 32 Notes...33 BARION atm Manual 5

1 General information 1.1 Product description The wide-range vacuum gauge BARION atm allows a pressure measurement from 5 x 10-10 mbar to atmosphere. This is made possible by the combination of a heat loss vacuum gauge, also known as Pirani, and a Bayard-Alpert vacuum meter. 1.2 Storage The sensor and the control electronics must be stored in a dry and dust-free environment. The flange must be covered with a plastic cap. The ambient temperatures for the storage must only be between 0 C and 40 C. In addition, the environment must be non-condensing and must have an accordingly low humidity. 1.3 General regulations and warranty A warranty of one year is assumed for the proper functioning of the device. During this period, material and manufacturing defects are eliminated free of charge. Normal wear as well as malfunctions caused by improper use (this also includes severe contamination of the sensor) are not covered by warranty. The manufacturer does not assume any warranty for alterations to the device beyond the work listed in the manual. The costs for returning are borne by the customer. Return is made in the original packaging. We reserve the right to decide on replacement or repair after examination in our premises. 1.4 CE-declaration of conformity Within the CE-declaration of conformity the following directives, standards and guidelines have been used: 2004 / 108 / EG EN 61010-1 (2011-07) EN 55011 (2011-04) EG guideline for electromagnetic compatibilityt Safety requirements for electrical equipment for measurement, control, and laboratory use Industrial, scientific and medical equipment; Limits and methods of measurement EN 61000-3-2 (2010-03) Electromagnetic compatibility (EMC) - Limits for harmonic current emissions EN 61000-3-3 (2009-06) Electromagnetic compatibility (EMC) - Limits Limitation of voltage changes, voltage fluctuations and flicker in public low-voltage supply EN 61326-1 (2006-10) electrical equipment for measurement, control, and laboratory use EMC requirements 2014/ 53/ EU Guideline for radio installation 6 BARION atm Manual 07 / 2016

2 Safety 2.1 Observance of the manual The BARION atm is delivered ready for operation. Please observe the notes for handling the measuring device listed in this manual. Any damage to the product caused by improper handling will void the warranty. 2.2 Basic safety information With regard to installation, maintenance and repair measures, observe the specified protection provisions. Voltages exceeding 30 V AC or 60 V AC are considered to be hazardous live according to EN 61010. Replacing the damaged component must be performed at VACOM. Unauthorised interference will void any warranty claims. All work on the device must only be performed by trained personnel! Improper use may lead to serious injuries or death! 2.3 Signs and symbols NOTE, DANGER or WARNING: Information on preventing any kind of personal or material damage. DANGER: Information on preventing any kind of personal or material damage caused by electrical influences. NOTE: General notes on further information or related articles. 07 / 2016 BARION atm Manual 7

3 First steps 3.1 Unpacking 3.1.1 Check for damage Before unpacking the product, check the package for visual damage. If the package and thus also the operating device is damaged, contact us at support@vacom.de. 3.1.2 Scope of delivery The scope of delivery includes one BARION atm, consisting of control electronics and sensor. The following fi gures show the rears of the sensor and the control electronics after taking apart the BARION atm. Rear of control electronics a b c d Mains connection RS232 communication Signal lamp for setpoint control Signal lamp for current mode Rear of sensor a Pirani sensor b 1, 2 Filament 1, 2 c d e Filament Common Anode Collector 8 BARION atm Manual 07 / 2016

3 First steps The signal lamp for the current mode [c in Fig. 1] indicates in which mode the BARION atm is currently operated (see site 9). The signal light d shows wether the setpoint is active or inactive. Signal light Colour Meaning c (mode) Green, lighting Hot cathode active c Green, flashing slowly Pirani active c Green, flashing rapidly Degas active c Yellow, lighting Internal reboot Do not cancel in this state! If this state lasts longer than one minute, please contact your customer adviser at VACOM. c green/red, flashing Defective filaments c red, flashing Defective Pirani or control electronics d (setpoint) off SP1 off/ SP2 off d yellow, glowing SP1 active/ SP2 off d green, glowing SP1 off/ SP2 active d yellow, flashing SP1 active/ SP2 active 3.1.3 Acclimatisation After unpacking and before the first start, the device should be brought to room temperature for some hours for acclimatisation. This way, electrical short-circuits and thus the failure of the device caused by condensation can be prevented. 07 / 2016 BARION atm Manual 9

4 Connection and installation The sensor is conventionally assembled to a KF25 flange. In order to guarantee a clean vacuum and thus an optimum pressure measurement, we recommend the use of gloves. If the sensor is connected, it can be connected to a PC via a RS232 cable. The BAA adapter cable (not included in the scope of delivery, see A.2) can be used for the connection to a VMG read or an MVC3-A. Moreover, the communication with BARION atm is optionally possible via fieldbus. In case of communicating with a PC or via fieldbus, the power supply must be connected. 4.1 Description of the RS232 interface The RS232 interface allows communication with the outside world. In addition to RxD / TxD connections for communicating via RS232, the interface has inputs for the power supply, an analogue output, which supplies a voltage proportional to the pressure or a current proportional to the pressure, and three setpoint outputs. 1) Analogue output 2) RxD 3) TxD 4) + 24 V DC 5) GND 6) Analogue GND 7) Setpoint 1 (RTS), max. 30 V / 0.5 A 8) Setpoint 1 (CTS) 9) Setpoint 2 OC, max. 30 V / 0.5 A 4.2 Conversion of the voltage or current at the analogue interface During the readout of the pressure from the BARION atm via an analogue interface, the following conversions must be observed: Type of readout Voltage (0 10 V) Conversion factor 0.625 V / Dekade Maximum (V or ma / mbar) Minimum (V or ma / mbar) 9.375 V / 1000 mbar 0.625 V / 10-11 mbar Current (0 20 ma) 1.250 ma / Dekade 18.750 ma / 1000 mbar 1.250 ma / 10-11 mbar Current (4 20 ma) 1.000 ma/ Dekade 19.000 ma/ 1000 mbar 5.000 ma/ 10-11 mbar An error signal is generated above the maximum and below the minimum. 10 BARION atm Manual 07 / 2016

5 Operation Any operation is realised via a connection to the PC or to the display (a VMG read or an MVC3-A). The communication takes place regularly via the VACOM protocol; however, the ATMION protocol is supported as well. A more detailed description of these two protocols can be found in the. 5.1 General information 5.1.1 Safety information The change from pressure measurement using the Pirani principle to pressure measurement using the Bayard-Alpert measuring principle and back is made by the control electronics. Nevertheless, it is important to point out that the Bayard-Alpert gauge may be irreparably damaged in case of inrush airing. Minimize the contamination of the sensor (e.g. via a baffle, see accessories), since contaminations may drastically reduce the reproducibility of the sensor and may lead to failures in extreme case. Slight contaminations may be cleaned by repeated outgassing cycles in a clean vacuum environment (p < 1 x 10-5 mbar). Make sure that strong vibrations of the sensor are avoided, since those vibrations may irreparably damage the Pirani gauge. 5.2 Adjustment As explained in the last section, the BARION atm automatically switches between its two measuring principles. In doing so, it is switched from Pirani to hot cathode at a pressure of 1 x 10-2 mbar, and from hot cathode to Pirani at a pressure of 1 x 10-1 mbar. In order to ensure good coordination of both measuring principles, an adjustment is required. Regarding such an adjustment, the upper and the lower measuring limit of the Pirani measuring gauge are specified by the user. At atmospheric pressure (e. g. when the chamber is open), the sensor is informed that there is a pressure of 1000 mbar. At a pressure p < 1 x 10-3 mbar, the sensor receives the confirmation that the lower measuring range has been reached. 5.3 Setpoints BARION atm is equipped with two independent setpoint relais. These can be programmed via RS232 interface. The electrical contacting is possible via SUB-D connector (see chapter 4.1) 07 / 2016 BARION atm Manual 11

5 Operation 5. Control by the way of +24 V Steuersignalen Elementary control signals can be transmitted to BARION atm by wiring of the inputs Control 1 (RxD) and Control 2 (TxD) with +24 V. Control 1 (0 V) Control 2 (0 V) Normal operation Control 1 (+24 V) Control 2 (0 V) Start Degas Control 1 (0 V) Control 2 (+24 V) Pirani only operation Hot cathode gauge off as long as +24 V active Control 1 (+24 V) Control 2 (+24 V) Adjustment Pirani gauge* * atmosphere or vacuum adjustment depends from the displayed pressure at the time of this adjustment: >10 mbar atmosphere adjustment < 1 mbar vacuum adjustment. 12 BARION atm Manual 07 / 2016

6 Maintenance 6.1 Cleaning and care The BARION atm is maintenance-free. For cleaning the housing, the supply voltage must be switched off by unplugging the plug-in power supply. The housing can be cleaned using a soft, slightly damp cloth. Using aggressive cleaning agents should be avoided since this may attack the surfaces. 6.2 Firmware update Possible firmware updates may quickly be installed on the BARION atm by the customer. The current firmware versions and a programme for installing the firmware can be downloaded from our website at http://www.vacom.de/downloads/software. In case of special requests, such as older or special firmware versions, please contact your customer adviser or inform us. Regarding the update procedure, proceed as follows: 1. Connect the BARION atm via a RS232 cable to your PC. 2. Connect the power supply to the BARION atm. 3. Open the programme VACOM Firmware updater (File name: firmwarewpf.exe) 4. Select the language English and click Next twice. 5. Select the COM port to which the BARION atm is connected. 6. Do not change the baud rate, the correct value 19200 kb / s is preset. If an error message is displayed here, check whether the communication with the BARION atm is ensured, i. e. whether it is correctly connected, supplied with power and whether the correct COM port is selected. 7. After clicking Next again, search in the File field for the firmware which you want to install on the BARION atm. 8. Click on Update in the next window. Here, it is displayed which firmware is currently installed on the device and which firmware shall be loaded to the device. 07 / 2016 BARION atm Manual 13

7 Troubleshooting Problem Cause Measure There is no change from the Pirani to the hot cathode mode, even though the pressure would allow it While measuring with the hot cathode, a pressure too low or a heavily varying pressure is displayed Adjustment from the Pirani incorrect Sensor contaminated Sensitivity values incorrectly set Repeat adjustment Perform degas Reset sensor again to factory-set sensitivity values In case of doubts or other occurring problems, please contact our support at support@vacom.de. 14 BARION atm Manual 07 / 2016

8 Return / disposal Contamination of the product: If the BARION atm was used in atmospheres with substances hazardous to health or the environment, these substances must be indicated at the disposal company. In case of returning the sensor to the VACOM Vakuum Komponenten & Messtechnik GmbH, a legally binding declaration on the contamination of the product must be completed and signed by a competent person. The Declaration of Contamination can be downloaded from www.vacom.de. Without an enclosed Declaration of Contamination, a return delivery is not accepted and sent back. 07 / 2016 BARION atm Manual 15

A.1 Technical data The BARION atm is a wide-range vacuum meter consisting of a hot cathode and a heat loss vacuum meter according to the Pirani principle. With this device, a failure-free process control from atmosphere up to the UHV regime is possible. By a high variety of interfaces, an easy system integration is guaranteed. range Accuracy Reproducibility Max. bake-out temperature 5 x 10-8 to 1 x 10 +5 Pa 5 x 10-10 to 1000 mbar 4 x 10-10 to 750 torr ± 20 % of the measured value ± 5 % of the measured value CF version: 220 C at the flange KF version: 150 C at the flange Max. operating temperature 50 C Filaments Setpoints Maximum power Dimensions (H x W x D) Possible vacuum connections Available interfaces 2 Y 2 O 3 coated filaments 2 (1 x floating, 1 x grounded) 30 V DC / 0,5 A, max 100 V to ground! 15 W 122 x 73 x 66 mm DN40CF / DN25KF RS232, analogue (0 to 10 V, 0 to 20 ma), Profibus optional, other interfaces upon request 16 BARION atm Manual 07 / 2016

A.2 Accessories The following accessories are available for the BARION atm: Article number Description BARION-ATM-PS-EU Power supply unit* ATLPC3 RS232 cable, length 3 m* BAA3 Adapter cable for VMG, length 3 m* KF25LBAFFLE3-SVCR-304 Lamella baffle DN25KF CF40LBAFFLE3-SVCR-304 Lamella baffle DN40CF * Other versions on request A.3 Communication with the BARION atm The BARION atm has the following communication interfaces: Via an RS232 interface, communication is possible via both the VACOM protocol and the ATMION protocol. At an analogue interface, both a current proportional to the pressure and a voltage proportional to the pressure can be output. Optionally, there are possibilities of a PROFIBUS or other fieldbus communication. Please refer to the corresponding manuals for information on the VACOM protocol and the fieldbus systems; here, details of the ATMION protocol are presented. A.3.1 ATMION protocol As an alternative to the VACOM protocol, the ATMION protocol can also be used for interacting with the BARION atm. (VACOM Protocol see chapter 5.4) 07 / 2016 BARION atm Manual 17

A.3.2 Port settings The following settings are provided for the RS232 communication: Baud rate 19200 Data bits 8 Stop bit 1 Parity Protocol None None A.3.3 Command set The general format of the commands is as follows: <Command><Command parameter><cr> Command RV RS RP RT SD SC**** SP**** **** SX1 SX0 Function Reading the current pressure value. Reading the status bit (see below for more details). Reading the setpoint value for SP On and SP Off. Output value in hex. Reading the operating time of the filaments. Degas (2 min) Set control bit. Input values in hex. Set setpoint values for SP On and SP Off. Input values in hex. Start automatic transmission of pressure and service values every 500 ms. Stop automatic transmission of pressure and service values. 18 BARION atm Manual 07 / 2016

A.3.4 Pressure output via RV As shown in the table, the current pressure value can be read out via RV<CR>. The response string has the following form: <Mode>_<Pressure> The pressure has thereby the form 0.00E+/-00. The different modes are explained in the following table: Mode Description P Pirani measuring mode I1 Ionisation measuring mode with filament 1 I2 Ionisation measuring mode with filament 2 D Degas E Error A.3.5 Calculation of the input values for specifying the setpoint The pressures, at which a setpoint is switched on or switched off, are saved in the hex format. The conversion is as follows: Input value = 49152 + 4069*log (p) Here, the pressure value p is given in mbar. 07 / 2016 BARION atm Manual 19

A.3.6 Meaning of the status bits Status bits can be read out via the command RS<CR>. The response is a four-digit hexadecimal number and stands for 16 bits. The individual bits stand for various status information. The 16 bits are divided into four sections, which can, in each case, be described by a hexadecimal number. The following table explains the meanings of the individual status bits and how to decode a sample code (in this case 001D). Bit Meaning Hex Bit 0 Pressure-dependent switching of gauge active D 1 1 Pirani active, measured value is output 0 2 Ionisation gauge active, measured value is output 1 1 3 Filament is automatically selected 1 1 4 Filament 1 active 1 1 5 Filament 2 active 0 6 Degas active 0 7 Small emission current range active 0 8 Setpoint is controlled externally 0 0 9 State at the setpoint output 0 10 Setpoint function is active 0 11 External inputs for system control are activated 0 12 Error bit is reset 0 0 13 Adjustment at vacuum is activated 0 14 Adjustment at atmospheric pressure is activated 0 15 Live signal 0 A response to the command RS<CR> is read from right to left. As shown above, the code 001D means that the measuring mode is changed pressure-dependently, the automatic filament selection and the ionisation gauge are activated and the filament 1 is running. 20 BARION atm Manual 07 / 2016

A.3.7 Meaning of the control bits As described further above, the control bits can be set via the command SC<Value><CR>. As in the case of the status bits, the 16 individual bits stand for certain detailed information. In the following table, they are described and illustrated with an example, the command SC 0049<CR>. Bit Meaning Hex Bit 0 Specification of the pressure-dependent switching. 9 1 1 Measurement only in the Pirani mode. 0 2 Measurement only in the ionisation mode. 0 3 Setting of the automatic filament selection. 1 4 Use of filament 1. 4 0 5 Use of filament 2. 0 6 Initiation of degas. 1 7 Set small emission current. 0 8 Switch setpoint independently of the pressure value. 0 0 9 If bit 8 is set: Setpoint switch On / Off. 0 10 Switch setpoint depending on pressure. 0 11 Release external inputs for analogue control. 0 12 Error bit is reset 0 0 13 Adjustment at vacuum is activated 0 14 Adjustment at atmospheric pressure is activated 0 15 N. a. 0 It is obvious that the command SC 0049<CR> starts a degas process with automatically selected filaments and automatically selected measuring mode. A.4 Legally binding Declaration of Contamination The legally binding Declaration of Contamination is provided for download at www.vacom.de. 07 / 2016 BARION atm Manual 21

A.5 VACOM Protocol (quick start) The VACOM Protocol enables a simple, flexible and reliable interface communication with VA- COM devices. It s possible to use this next to other existing protocols who are continued to support for reasons of compatibility. A.5.1 Setups The VACOM device is always the client. It will only reply, when it is asked by the master (as a rule the PC). The connection between client and master takes place by means of serial interfaces (RS232, RS422 oder RS485). Connection settings: Standard data transmission rate: 19.200 bit /s because of compatibility to older devices the data transmission rate of 9.600, 38.400, 57.600 und 115.200 bit/s are supported note: there are no automated detection Transmission format: 8N1 (8 data bit, no parity 1, and one stop bit) Kinds of connections: a) 1:1 connection: 1 master, 1 client (RS232) b) Bus system 2 : 1 master, a few clients (RS422) c) Bus system: a few master, a few clients (RS485) Data transmission: Transmission of data packets with a fixed size of 24 byte and a fixed structur Content: target and source address, tax information (for leading the data flow), transferred parameters, checksum displayed information of the data packet at the hexadecimal system 1 parity = is used to identify incorrect transferred information (here: effective securing of the data transmission via cecksum) 2 for entering commands of bus systems see extended VACOM Protocol 22 BARION atm Manual 07 / 2016

A.5.2 Entering commands (for 1:1 connections 1 master & 1 client) Important and often used functions of the VACOM devices can be outputted directly as a command via serial interface. Example A5 50 00 00 01 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 69 EF Fixed value Command and subcommand actual commands and functions transferred parameters only at set commands and. by specifying of the measure. ment channel, field number.. or of the set points Checksum n fixed value for commands where no parameters are passed n for commands where parameters are passed, you can find a special program on our website for the calculation of the checksum 07 / 2016 BARION atm Manual 23

A.5.2.1 Valide commands for all devices (for 1:1 connections 1 master & 1 client)) A5 50 00 00 01 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 69 EF Fixed value request serial number = command no transferred parameters Checksum n fixed value for commands where no parameters are transferred Fixed value Command and subcommand transferred parameters Checksum Value Meaning / answer of the client Transfer Parameter Value 01 00 request name Answer: name of the device (zero terminated 3 string 4 ) --- 69 EF A5 50 00 00 01 01 request software version Answer: version number of the software (zero terminated string) without a valid firmware, an empty string will be returned --- 38 7F 01 02 request serial number Answer: serial number, if available (zero terminated string) --- C8 8F 3 zero- terminated = the finish stopped with 0 4 String = sequence of characters (letters, numbers, special and control characters) in ASCII code 24 BARION atm Manual 07 / 2016

A.5.2.2 Commands for the device class of pressure gauges (for 1:1 connections 1 master & 1 client) A5 50 00 00 20 10 05 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 57 3D Fixed value request actual value string (mbar) = command channel 5: = transferred parameters Checksum n fixed value for commands where no parameters are passed Fixed value Command and subcommand transferred parameters Checksum Value Meaning / answer of the client Transfer Parameter Value 20 10 request actual value string (mbar) Answer: actual pressure value in mbar (zero terminated string) channel (8 bit value) ** channel No.: 1 FF 8C channel No.: 2 BF 7D A5 50 00 00 21 08 request setpoint thresholds (mbar) Answer: lower and upper switching threshold in mbar (float 5 values) + set point number Number of the setpoint (8 bit value) ** Set point No.: 1 24 77 Set point No.: 2 64 86 21 10 set setpoint thresholds (mbar) Answer: actuating value lower and upper switching threshold in mbar (float values), number of the setpoint (8 bit value) ** ** There is a special program on our website for the calculation of the checksum for other parameters. 5 float = floating point number; consists of signs, mantissa, base and exponent in the form X=s*m*be Typ single (32 bit); Little Endian (DCBA) according to ANSI / IEEE Std 754-2008 07 / 2016 BARION atm Manual 25

A.5.2.3 Commands for the device class of the ion getter pumps (IGP) (for 1:1 connections 1 master & 1 client) A5 50 00 00 20 30 12 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 AB 7B Fixed value get voltage (V) = command channel no. 18: = transferred parameters Checksum n fixed value for commands, where no parameters are transferred Fixed value Command and subcommand transferred parameters Checksum ** Value Meaning / answer of the client Transfer Parameter Value 20 0C request actual current value string (A) Answer actual current in A (zero terminated string) channel (8 bit value) channel No.: 1 37 4A channel No.: 2 77 BB A5 50 00 00 20 10 20 30 request actual pressure value string (mbar) Answer: actual pressure value in mbar (zero terminated string) get voltage (V) Answer: aktual voltage in V (float value), measuring channel number (8 bit value) channel (8 bit value) channel (8 bit value) channel No.: 1 FF 8C channel No.: 2 BF 7D channel No.: 1 E6 46 channel No.: 2 A6 B7 20 38 get nominal voltage (V) Answer: aktual set voltage in V (float value), measuring channel number (8 bit value) channel (8 bit value) channel No.: 1 61 84 channel No.: 221 75 20 39 set nominal voltage (V) Answer: --- (note: a value of 0.0 effected the return to the automatic mode) new set voltage in V (float value), measuring channel number (8 bit value) ** 26 BARION atm Manual 07 / 2016

Fixed value Command and subcommand transferred parameters Checksum ** 22 04 request setpoint threshold (A) Antwort: lower and upper switching threshold in A (float values), number of the setpoint (8 bit value) Number of the setpoint (8 bit value) ** Set point No.: 1 11 30 Set point No.: 2 51 C1 A5 50 00 00 22 08 request setpoint threshold (mbar) Antwort: lower and upper switching threshold in mbar (float values), number of the setpoint (8 bit value) Number of the setpoint (8 bit value) ** Set point No.: 1 D4 33 Set point No.: 2 94 C2 22 0C set setpoint threshold (A) Answer: actuating value lower and upper switching threshold in A (float values), number of the setpoint (8 bit value) ** 22 10 set setpoint threshold (mbar) Answer: actuating value lower and upper switching threshold in mbar (float values), number of the setpoint (8 bit value) ** ** There is a special program on our website for the calculation of the checksum for other parameters. 07 / 2016 BARION atm Manual 27

A.5.2.4 Special commands for GAPAS (for 1:1 connections 1 master & 1 client) A5 50 00 00 40 08 0E 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 2E 61 Fixed value request 60-min-history (mbar) = command field number 14: = transferred parameters Checksum n fixed value for commands, where no parameters are transferred Fixed value Command and subcommand transferred parameters Checksum Value Meaning / answer of the client Transfer Parameter Value A5 50 00 00 40 08 request 60-min-history (mbar) Answer: 8 pressure value in mbar in logarithmic scale (16 bit value) field number [0 14] ** field number: 1 6B 95 field number: 2 2B 64 40 10 request 24-h-history (mbar) Answer: 8 pressure values in mbar in logarithmic scale (16 bit value) field number [0 14] ** channel No.: 1 E1 92 channel No.: 2 A1 63 ** There is a special program on our website for the calculation of the checksum for other parameters. 28 BARION atm Manual 07 / 2016

A.5.2.5 Special commands for Barion atm (for 1:1 connections 1 master & 1 client) A5 50 00 00 40 08 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 00 7C 3B Fixed value request 60-min-history (mbar) = command field number 14: = transferred parameters Checksum n fixed value for commands, where no parameters are transferred Fixed value Command and subcommand transferred parameters Checksum Value Meaning / answer of the client Transfer Parameter Value 40 00 request serial number (head) Answer: serial number (zero terminated string) (serial number of the sensor head is safed on whose EEPROM) --- ** field number: 1 6B 95 field number: 2 2B 64 A5 50 00 00 40 10 get output mode Answer: output mode (8 bit value) 0 voltage output 1 power output (0 20 ma) 2 power output (4 20 ma) --- ** channel No.: 1 E1 92 channel No.: 2 A1 63 40 11 set output mode Answer: actuating value Output mode (8 bit value) 0 voltage output 1 power output (0 20 ma) 2 power output (4 20 ma) ** Output mode: 0 71 92 Output mode: 1 B0 02 Output mode: 2 F0 F3 07 / 2016 BARION atm Manual 29

Fixed value Command and subcommand transferred parameters Checksum A5 50 00 00 40 F0 reset to factory values Answer: --- note: values like lifetimes etc. will not be reset --- 69 F4 Pirani gauge 41 00 adjust atmosphere value Answer: --- set the current value of the Pirani gauge as the value for atmosphere --- 7C 3B 41 01 adjust vacuum value Answer: --- set the current value of the Pirani gauge as the value for vacuum --- 2D AB A5 50 00 00 41 10 41 11 get cold resistance Answer: resistance of the Pirani gauge at 0 C in Ohm (float value) set cold resistance Answer: actuating value (float value) Resistance of the Pirani gauge at 0 C in Ohm 71 FE ** 41 F0 self calibration Answer: --- note: starts a measurement of the cold resistance of the Pirani gauge, whereby it is blocked for 1 minute --- D0 9E 41 20 get lifetime Answer: the entire operating time of the Pirani gauge in seconds (float value) --- 65 F1 30 BARION atm Manual 07 / 2016

Fixed value Command and subcommand transferred parameters Checksum hot cathode 42 01 start degas Answer: --- note: start of a degas process, if the hot cathode is still running and the maximum pressure for starting the degas is falling below --- DD EF 42 10 get filament selection Answer: information which filament is choosen (8 bit value) (8-Bit-Wert) 0 filament off 1 only filament 1 2 only filament 2 3...automatical selection --- 81 BA A5 50 00 00 42 11 set filament selection Answer: actuating value information which filament is choosen (vorzeichenloser 8-Bit-Wert) 0 filament off 1 only filament 1 2 only filament 2 3...automatical selection anderer Wert Filament aus ** Filament information: 0 D0 2A Filament information: 1 11 BA Filament information: 2 51 4B Filament information: 3 90 DB 42 20 get sensitivity filament 1 Answer: sensitivity of filament 1 in 1 / mbar (float value) --- 95 B5 42 21 set sensitivity filament 1 Answer: actuating value (float value) Sensitivity of filament 1 in 1 / mbar (float value) C4 25 42 22 set sensitivity filament 2 Answer: actuating value (float value) ** 07 / 2016 BARION atm Manual 31

Fixed value Command and subcommand transferred parameters Checksum 42 23 set sensitivity filament 2 Answer: actuating value (float value) Sensitivity of filament 2 in 1 / mbar (float value) ** 42 28 get factory set sensitivity filament 1 Answer: adjusted sensitivity of filament 1 in 1 / mbar (float value) --- 12 77 A5 50 00 00 42 29 get factory set sensitivity filament 2 Answer: adjusted sensitivity of filament 2 in 2 / mbar (float value) --- 43 E7 42 40 get lifetime filament 1 Answer: operating time of filament 1 in seconds (not exactly!) --- 98 70 42 41 get lifetime filament 2 Answer: operating time of filament 2 in seconds (not exactly!) --- C9 E0 ** For calculating checksum for other parameters you can find a special program on our website. 32 BARION atm Manual 07 / 2016

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201608 - Vakuum Messtechnik VACOM Vakuum Komponenten & Messtechnik GmbH Gabelsbergerstraße 9 07749 Jena Germany Tel. +49 3641 4275-0 Fax +49 3641 4275-82 info@vacom.de www.vacom.de www.vacom-shop.de