ECLIPSE L200ND / L200N

Transcription

1 M513E 09.3.NF.2 (2/4) IC Inspection Microscope ECLIPSE L200ND / L200N Instructions

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3 Introduction Introduction Thank you for purchasing a Nikon product. This instruction manual is written for users of IC Inspection Microscope, ECLIPSE L200ND/L200N. To ensure correct usage, read this manual carefully before operating the product. No part of this manual may be reproduced or transmitted in any form without prior written permission from Nikon. The contents of this manual are subject to change without notice. Although every effort has been made to ensure the accuracy of this manual, errors or inconsistencies may remain. If you note any points that are unclear or incorrect, please contact your nearest Nikon representative. Some of the equipment described in this manual may not be included in the set you have purchased. If you intend to use any other equipment with this product, read the manual for that equipment too. If the equipment is used in a manner not specified by the manufacturer, the protection provided by the equipment may be impaired. I

4 Safety Precautions Safety Precautions To ensure correct and safe operation, read this manual before using the product. Warning and Caution Symbols Used in This Manual Although this product is designed and manufactured to be completely safe during use, incorrect usage or failure to follow the safety instructions provided may cause personal injury or property damage. To ensure correct usage, read this manual carefully before using the product. Do not discard this manual and keep it handy for easy reference. Safety instructions in this manual are marked with the following symbols to highlight their importance. For your safety, always follow the instructions marked with these symbols. Table-1 WARNING / CAUTION symbol Symbol WARNING CAUTION Meaning Disregarding instructions marked with this symbol may lead to serious injury or death. Disregarding instructions marked with this symbol may lead to injury or property damage. II

5 Meaning of Symbol Used on the Equipment Meaning of Symbol Used on the Equipment The following symbol placed on the equipment indicates that you need to be cautious when using the equipment. Before you operate the part of the equipment with this symbol, check this instruction manual. Caution symbol Caution symbol Figure-1 Table-2 Symbol affixed positions Meaning of symbol Symbol Meaning Caution for heat. This marking on the rear of the lamphouse and the upper and the lower right of the microscope stand calls your attention on the following: Lamphouse becomes extremely hot during and immediately after the illumination. Risk of burns. Do not touch the lamphouse during and immediately after the illumination. Make sure that the lamphouse is sufficiently cool before the lamp replacement. IC Inspection Microscope III ECLIPSE L200ND / L200N Instructions

6 Safety Notes Safety Notes Note the following for safe usage. WARNING 1 Intended product use This product should only be used for microscopic observation. Do not use it for any other purpose. Do not use it to view overly large samples that stick out beyond the stage. 2 Read the instruction manual thoroughly. For your safety, thoroughly read this instruction manual and the instruction manual of the equipment used along with this product. Be sure to observe the warnings and cautions explained in the beginning of this manual. 3 Do not disassemble. Disassembly may cause malfunction, electrical shock and/or injury. Do not disassemble any part other than those described in this manual. If you experience any problem with the microscope, contact your nearest Nikon representative. 4 Power cord Use only the specified power cord. Using other power cords could result in failures or fire. Also note that the protection Class 1 equipment should be connected to the PE (protective earth) terminal for grounding. For details about the specified power cord, see 7 Technical specifications. To prevent electrical shock, always turn off the power switch (flip it to the side) before connecting or disconnecting the power cord. 5 Heat from the light source The lamp and the lamphouse become extremely hot. To avoid burns, do not touch the lamphouse while the lamp is lit or for thirty minutes after it has been turned off. Further more, in order to avoid the risk of fire, do not place fabric, paper or highly flammable volatile materials such as gasoline, petroleum benzene, paint thinner or alcohol near the lamphouse while the lamp is lit or for about thirty minutes after it has been turned off. The rear of the microscope also becomes hot during use. Although this is not a malfunction, be careful not to touch it. 6 Reflection The polished surface of the sample will reflect strong light by the illumination. Do not look at the illuminated surface for a long time because the strong reflection may hurt your eyes. 7 External light source For the fluorescent microscopy with the ECLIPSE L200ND/L200N microscope, the light source brightness of the lamphouse specified in 7. Technical Specifications may be less than desired. In this case, an external light source can be used. For external light source, use the specified C-HGFIE HG Precentered Fiber Illuminator (motorized type). When attaching the fiber illuminator to the microscope, be sure to connect them with the RS-232C cable (cross cable) to prevent a flash of light. IV

7 Safety Notes The fiber illuminator can be used on the L200ND microscope, but not on the L200N microscope. Please note that if a light source not specified for the L200ND microscope is attached on the microscope, the microscope will not be considered as a TUV/SEMI-approved product. 8 Ultraviolet light from an external light source (including those not specified) If you use a light source other than those specified, and if the light source has a mercury lamp, etc., the light source radiates ultraviolet light from the emission port. The ultraviolet light is harmful to the eyes and skin. Direct viewing of such light may result in a minor eye injury such as snow blindness, or, in a worst case, may result in a serious eye injury that could lead to blindness. To prevent injury, follow the guidelines below. 1) Insert the UV collector lens into the optical path of the microscope unless the UV excitation light is necessary. On the ECLIPSE L200ND/L200N microscope, the UV filter automatically enters the optical path when turning the dark-field/bright-field/fluorescent selection lever to BF (bright-field) or DF (dark-field). The UV filter is removed from the optical path when turning the lever to FL (Fluorescent). 2) When performing the fluorescent microscopy by using the UV excitation light, attach the filter block dedicated to the UV excitation light. And then, if you must see the objective or its surroundings, be sure to see through the breath shielding plate (ultraviolet light shield). 3) Attach the light source to the microscope during use. Always attach the light source to the microscope when the light source is ready to turn on. Do not turn on the light source unattached to the microscope, or remove the light source from the microscope while the light source is lit. When removing the light source from the microscope, turn off the power to the light source, and then unplug the power cord from the wall outlet. V

8 Safety Notes CAUTION 1 Disconnect this product from the power supply before assembling this product, attaching or removing the cord, replacing the lamp, or performing maintenance. To prevent electric shocks and failures, when you assemble this product, attach or remove the cord, replace the lamp, or clean the main body or objectives, you must turn off this product and other related equipment (flip the power switches to the side) and unplug the power cords from the wall outlet. 2 Check the light source. Use only the specified lamp and the lamphouse on this product. The use of other lamps and lamphouses may lead to malfunction. For details about the specified lamp and lamphouse, see 7 Technical specifications. 3 Cautions on lamp replacement To prevent burn injury, allow the lamp to cool for at least 30 minutes after turning off the power switch, before replacing the lamp. To prevent electrical shock and damage to the microscope, always turn off the power switch (flip it to the side) and unplug the power cord from the wall outlet before connecting or disconnecting the lamphouse. Do not touch the glass surface of the lamp with bare hands. Fingerprints or grease on the bulb surface will reduce the illumination of the lamp. Wipe clean the fingerprints or grease with a clean piece of cloth. Securely attach the lamphouse cover to the lamphouse after replacing the lamp. Never light the lamp while the lamphouse cover is open. When you dispose of the replaced lamp, do not shatter it or dispose of it casually. Dispose of the used lamp as the special industrial waste or dispose of them according to the regulations and rules of your local authority. 4 Do not let the microscope become wet. Do not get this product wet. In addition, do not use this product in an environment where water will get into this product. If the product gets wet, a short circuit may result that may cause malfunction or abnormal heating of the product. If you accidentally spill a liquid on the microscope, immediately turn off the power switch (flip it to the side) and unplug the power cord from the wall outlet. Then use a dry cloth to wipe away the moisture. If any liquid gets inside the microscope, do not use it; instead, notify your nearest Nikon representative. 5 Weak electromagnetic emission This product emits weak electromagnetic waves. The accuracy of any precision electronic equipment may be adversely affected if positioned too close. If the microscope affects TV or radio reception, move the radio or TV further away from the microscope. 6 Installation location This product is a precision optical instrument. Using or storing the microscope under unsuitable conditions may damage it or may have an adverse effect on its accuracy. The following conditions should be kept in mind when selecting the installation location. Avoid a brightly lit location such as a room that receives direct sunlight, or directly under room lights. If there is excessive ambient light, image may not clearly be visible. Choose a location that is free from dust or dirt. VI

9 Safety Notes Choose a flat surface with little vibration. Choose a sturdy desk or table that is able to bear the weight of the instrument. The main body of this instrument weighs about 30 kg. To install this instrument on a desk or a table, at least two people are required. Handle the instrument carefully and do not drop it. Dropping may injure the person carrying it or damage the instrument. Install this product in a place where it will not be a hazard in case of an unexpected event such as an earthquake. In some locations, you may need to tie down this product to a workbench or secure object so that it will not overturn or fall down. Do not use this microscope in an environment where water can get into the microscope. Do not install the microscope in a warm, humid location. Install this microscope in a location where you can easily unplug the power cord from the AC inlet of this microscope in emergency. Provide enough space around the microscope referring to the layout diagrams on the next page. The installation conditions are as follows: Area required : 710 mm (W) 940 mm (D) or more (see the layout diagrams) Power source : 100 to 240 V AC ±10% (1.2 A) Humidity : Relative humidity 85% at maximum (no condensation) Operating environmental temperature : +5 to +35 C Weight of the microscope : 45 kg (including stage and eyepiece tube) approx. 7 Cautions on moving the microscope The microscope is a precision optical instrument. Handle it carefully and do not subject it to a strong physical shock. When moving the microscope, first remove the stage. Then, have two or more people grasp the microscope from both sides. (Information) The main body of the L200ND/L200N weighs about 30 kg. With the eyepiece tube, lamphouse and other parts (except stage) attached, the microscope weighs about 35 kg. Do not grasp the focusing knobs, eyepiece tube, lamphouse, stage mount, breath shielding plate, etc., when carrying the microscope. They may come off and may cause serious injury or malfunction. Ask your nearest Nikon representative for the carrying rods of the microscope. Before carrying the stage, attach the two fixing metals to hold the movement of the stage plate. Use the smaller fixing metal to secure the side of the stage and then use the larger fixing metal to secure the front of the stage. Be careful not to pinch your fingers or hands when moving the microscope. 8 Cautions on assembling the microscope Be careful not to pinch your fingers or hands during the assembly. The scratches or fingerprints on the lens surface will adversely affect the microscope's image. Be careful not to scratch or touch the lens surfaces. VII

10 Layout Diagram Layout Diagram (Stage movable range) Gravity point (Stage movable range) (Stage movable range) <Operator space> 339 Eye point Gravity point Gravity point (Stage movable range) Dimensions are in mm. Figure-2 Layout diagram VIII

11 Operating Posture Operating Posture The figure below shows the posture that prevents strain on your body when you operate this equipment. Choose a workbench and a chair having the similar dimensions to those shown on the figure. The 95th percentile male (Height: 1895 mm) 1253 (The height of the eye point) 405 (The height of the seating surface) 510 (The front clearance for the knees) 690 (The upper clearance for the knees) 760 (The height of the workbench) The 5th percentile female (Height: 1475 mm) 1138 (The height of the eye point) 470 (The height of the seating surface) 510 (The front clearance for the knees) (The upper clearance for the knees) 760 (The height of the workbench) Dimensions are in mm. Figure-3 Operating posture IX

12 Contents Introduction... I Safety Precautions... II Meaning of Symbol Used on the Equipment... III Safety Notes... IV Layout Diagram... VIII Operating Posture... IX 1 Names of the Parts Names of the parts Names of the operational parts Microscopy Episcopic bright-field microscopy Episcopic dark-field microscopy Episcopic DIC (differential interference contrast) microscopy Episcopic bright-field simplified polarization microscopy Episcopic fluorescent microscopy (for L200ND only) Diascopic bright-field microscopy (for L200ND only) Operation of Each Part Filters The types and usage of the filters Placing the filter in and out of the optical path (for episcopic illumination) Placing the filter in and out of the optical path (for diascopic illumination) Coarse / fine focus knobs The relationship between the focus knob rotation and the stage vertical movement Adjusting the torque of the coarse focus knobs Coarse focus stopper ring Eyepiece tube Optical path selection Tilting function Vertical tube adapters Diopter adjustment Interpupillary distance adjustment X

13 Contents 3.6 Aperture diaphragm Adjusting the size of the aperture diaphragm Centering the episcopic aperture diaphragm Changing the illumination Stage The coarse mode The fine mode Focusing target How to use the focusing target Motorized nosepiece Polarizer slider Attaching the polarizer slider Placing/removing the polarizer in/from the optical path Adjusting the orientation of the polarizer Analyzer slider Attaching the analyzer slider Placing/removing the analyzer in/from the optical path DIC slider Attaching (removing) the DIC slider Placing/removing the DIC prism in/from the optical path Selecting the DIC prism position Setting the interference color Pinhole slider Attaching the pinhole slider Placing/removing the pinhole in/from the optical path Centering the pinhole L200ND EPI/DIA simultaneous illumination Assembly Required tools Installation location System diagram Attaching the lamphouse and replacing the lamp Attaching the lamphouse Replacing the lamp Attaching the fiber adapter and external light source Attaching the stage and the holder Attaching the eyepiece tube When removing the eyepiece tube Attaching the objectives XI

14 Contents When removing the objectives If the objectives are out of the optical path when they are switched Attaching the eyepieces Installing the filter block (for fluorescent illumination only) Attaching breath shielding plate (ultraviolet light shield) Seismic restraint Connecting the power cord Attaching a camera LV-TV TV adapter/c-mount adapter TV cameras Digital cameras Setting the Dip switch on the L200ND/L200N main body Communications control Connecting external devices Control options and status displays on a PC or the DS-L Registering information on the objective Procedure for turning on the power switch Troubleshooting Viewing and control systems Electrical Care and Maintenance Daily care and maintenance Cleaning the lens Cleaning tool and supplies (consumables) Cleaning procedure and notes Cleaning this equipment Storage Regular inspections (with charge) Technical Specifications XII

15 1 Names of the Parts 1 Names of the Parts 1.1 Names of the parts Analyzer slider * 1 Eyepiece tube Eyepieces Polarizer slider * 1 Episcopic lamphouse Attaching part for the pinhole slider * 2 DIC slider * 3 Breath shielding plate Stage Sample holder (The glass plate is used in this figure.) Microscope arm Microscope main body Revolving nosepiece Objective Diascopic lamphouse (for L200ND only) Microscope base *1: For DIC microscopy or episcopic bright-field simplified polarization microscopy *2: For pinhole microscopy, insert the pinhole slider here. *3: For DIC microscopy Figure-4 Names of the parts 1

16 1 Names of the Parts 1.2 Names of the operational parts Optical path selection lever Clamp for various adapters Diopter adjustment rings Analyzer slider * 1 Polarizer slider * 1 Prism movement knob Prism selection knob Attaching part for the pinhole slider * 2 Dark -field/brightfield/fluorescent selection lever (for L200ND only) (Dark-field/brightfield selection lever for L200N) DIC slider * 3 Aperture diaphragm lever for diascopic illumination (for L200ND only) (The lever is found under the substage.) Nosepiece rotation buttons Brightness control dial Pilot lamp (Lights when the power is ON.) Episcopic/Diascopic illumination selection switch Episcopic aperture diaphragm control buttons Coarse movement ON switch Stage coarse movement lever Coarse movement OFF switch Stage fine movement knob for Y-axis Stage fine movement knob for X-axis Fine focus knob Coarse focus knob Coarse torque adjustment ring *1: For DIC microscopy or episcopic bright-field simplified polarization microscopy *2: For pinhole microscopy, insert the pinhole slider here. *3: For DIC microscopy Figure-5 Names of the operational parts (1) 2

17 1 Names of the Parts Aperture diaphragm centering screw holes Filter sliders Focusing target lever Filter sliders Screw hole for carrying rod Coarse focus stopper ring Screw holes for AF drive Slots for diascopic illumination filter (for L200ND only) Figure-6 Names of the operational parts (2) CAUTION label Connector for episcopic lamphouse Caution for heat symbol HGFIE connector (For connecting the C-HGFIE HG Precentered Fiber Illuminator (motorized type)) Input voltage indication USB connector (For connecting a PC or the DS-L2 digital camera) Connector for diascopic lamphouse Power switch Screw holes for carrying rods AC IN connector Power cord Figure-7 Names of the operational parts (3) 3

18 2 Microscopy 2 Microscopy In this chapter, each type of microscopy is described. Please also refer to 3 Operation of Each Part for how to operate each part. 1. Episcopic bright-field microscopy p.5 2. Episcopic dark-field microscopy p.6 3. Episcopic DIC (differential interference contrast) microscopy p.7 4. Episcopic bright-field simplified polarization microscopy p.8 5. Episcopic fluorescent microscopy (for L200ND only) p.9 6. Diascopic bright-field microscopy (for L200ND only) p.10 4

19 2 Microscopy 2.1 Episcopic bright-field microscopy 1. Set each part as follows. You can perform steps in any sequence. Press in the NCB and ND filters. (Insert the NCB filter into the nearest slot to the lamphouse.) Press in for 100% binocular observation. Slide out the analyzer and the polarizer. Press in for BF (bright-field). (For L200ND, press in to the limit and then pull to the first click-stop position for BF.) Slide out the DIC slider. Lower the stage to the limit. Turn ON the power. Select 10 objective. Adjust brightness. Press for EPI. (For L200ND only) Fully open the aperture diaphragm Place the sample on the stage see Stage Move the stage to your right (or left) side. Focus on the sample See Stage and 3.9 Focusing target Use the focusing target for a sample with a polished surface. Adjust diopter see 3.4 Diopter adjustment Adjust interpupillary distance See 3.5 Interpupillary distance adjustment Switch to the desired objective and focus on the sample again Adjust brightness See 3.1 Filters Use the ND filters and brightness control dial. Adjust the size of the aperture diaphragm See 3.6 Aperture diaphragm 5

20 2 Microscopy 2.2 Episcopic dark-field microscopy 1. Mount the BD objectives. However, only the objectives marked BD can be used on the dark-field microscopy. BD marking on the objective Observe the sample by following the steps for the episcopic bright-field microscopy See 2.1 Episcopic bright-field microscopy Switch to the dark-field microscopy. Adjust brightness with the ND filters. Swing in the BD objective. Slide out for DF (dark-field). (For L200ND, pull out to the limit for DF.) 4. Adjust brightness with the brightness control dial. Fully open the aperture diaphragm. After dark-field microscopy, return to bright-field microscopy, if required. Adjust brightness with the ND filters. Press in for BF (bright-field). (For L200ND, press in to the next click-stop position for BF.) Adjust brightness with the brightness control dial. Adjust the size of the aperture diaphragm. 6

21 2 Microscopy 2.3 Episcopic DIC (differential interference contrast) microscopy Attach the analyzer, polarizer and DIC sliders. Slide them out to the click-stop position. Observe the sample by following the steps for the episcopic bright-field microscopy See 2.1 Episcopic bright-field microscopy Switch to the DIC microscopy. The objective with LU marking is suitable for DIC microscopy. Adjust brightness with the ND filters. Press in the polarizer and the analyzer. Press in the DIC slider. Adjust brightness with the brightness control dial. Rotate the knob to the position indicated on the objective. (For the objective shown below, turn the knob to match the leter A with the white dot.) Rotate to change the background color. Prism position indication on the objective 4. After DIC microsopy, return to bright-field microscopy, if required. Adjust brightness with the ND filters. Slide out the polarizer and analyzer. Slide out the DIC slider. Adjust brightness with the brightness control dial. 7

22 2 Microscopy 2.4 Episcopic bright-field simplified polarization microscopy Attach the analyzer and polarizer. Slide them out to the click-stop position. Observe the sample by following the steps for the episcopic bright-field microscopy See 2.1 Episcopic bright-field microscopy Switch to the episcopic bright-field simplified polarization microscopy. Adjust brightness with the ND filters. Press in the polarizer and the analyzer. 4. Adjust brightness with the brightness control dial. After episcopic bright-field simplified polarization microscopy, return to bright-field microscopy, if required. Adjust brightness with the ND filters. Slide out the polarizer and analyzer. Adjust brightness with the brightness control dial. 8

23 2 Microscopy 2.5 Episcopic fluorescent microscopy (for L200ND only) Attach the filter block for the desired excitation method See 4.9 Installing the filter block (for fluorescent illumination only) Observe the sample by following the steps for the episcopic bright-field microscopy See 2.1 Episcopic bright-field microscopy Perform the episcopic fluorescent microscopy. Adjust brightness with the ND filters. Press to the limit to place the filter block in the optical path. Adjust brightness with the brightness control dial. Fully open the aperture diaphragm. 4. After episopic fluorescent microscopy, return to bright-field microscopy, if required. Adjust brightness with the ND filters. Pull to the next click-stop position for BF (bright-field). Adjust brightness with the brightness control dial. Adjust the size of the aperture diaphragm. 9

24 2 Microscopy 2.6 Diascopic bright-field microscopy (for L200ND only) 1. Set each part as follows. You can perform steps in any sequence. Press in for 100% binocular observation. Slide out the analyzer. Pull out to the limit for DF (dark-field). Slide out the DIC slider. Lower the stage to the limit. Select 10 objective. Adjust the brightness. Press for DIA. Fully open the aperture diaphragm. Press in the NCB and ND filters. (Insert the NCB filter into the slot nearest to the lamphouse) Place the sample on the stage see Stage Move the stage to your right (or left) front side. Focus on the sample See Stage The focusing target cannot be used for diascopic illumination. Adjust diopter see 3.4 Diopter adjustment Adjust interpupillary distance See 3.5 Interpupillary distance adjustment Switch to the desired objective and focus on the sample again Adjust brightness See 3.1 Filters Use the ND filters and brightness control dial. Adjust the size of the aperture diaphragm See 3.6 Aperture diaphragm 10

25 3 Operation of Each Part 3 Operation of Each Part 3.1 Filters Use filters to adjust color temperature, brightness, and contrast. Up to four episcopic illumination filters can be installed to the left side of the microscope arm, while two diascopic illumination filters can be installed to the front of the lamphouse. Note that the diascopic illumination filters can be used only for L200ND. Figure-8 Filters The types and usage of the filters The filters as listed in the table below are available. Table-3 Types and usage of the filters Filters NCB (neutral color balancing filter) ND4 (transmission rate: 25%) ND16 (transmission rate: 6%) GIF (green interference filter) Usage Color temperature adjustment for general use and color photomicrography Brightness adjustment Brightness adjustment Contrast adjustment 11

26 3 Operation of Each Part Placing the filter in and out of the optical path (for episcopic illumination) You can insert an episcopic illumination filter slider in either of the two slots provided for each of two places on the left side of the microscope arm. You can find two click-stop positions as you place a filter slider in a slot. Slots for filter sliders Figure-9 Installation positions of episcopic illumination filters Placing the filter in the optical path Push in the filter slider to the second click-stop position to place the filter in the optical path. Up to four filter sliders can be combined at your desired way. The NCB filter, however, must be inserted in the nearest slot to the episcopic lamphouse. Removing the filter from the optical path Slide out the filter slider to the first click-stop position to remove the filter from the optical path. Keep this state if the filter is not used Placing the filter in and out of the optical path (for diascopic illumination) You can insert a filter slider in either of the two slots provided in front of the diascopic lamphouse. Slots for filter sliders (on L200ND only) Figure-10 Installation positions of diascopic illumination filters Placing the filter in the optical path Push in the filter slider to the second click-stop position to place the filter in the optical path. Up to two filter sliders can be combined at your desired way. The NCB filter, however, must be inserted in the nearest slot to the diascopic lamphouse. Removing the filter from the optical path Slide out the filter slider to the first click-stop position to remove the filter from the optical path. Keep this state if the filter is not used. 12

27 3 Operation of Each Part 3.2 Coarse / fine focus knobs The relationship between the focus knob rotation and the stage vertical movement The relationship between the direction of the focus knob rotation and the stage vertical movement is shown in the figure. Turn the focus knobs in the direction indicated by the arrows to lower the stage. Figure-11 Relationship between the focus knob rotation and the stage vertical movement The stage moves 0.1 mm by one full rotation of the fine focus knob. The stage moves 1 μm by one step of the fine focus knob graduations. The stroke (range) of the stage vertical movement is 29 mm. Note: When performing observation with the combination of the 8 8 stage, 8 inch wafer holder, and 0.7 mm thick wafer, the stage vertical movement range is 16.2 mm up and 12.8 mm down from the focal plane. Reference: Never attempt either of the following actions. They will damage the microscope. Rotating the left and right knobs in opposite directions at the same time. Continuing to rotate the coarse focus knob after the stage has reached the limit of its motion Adjusting the torque of the coarse focus knobs The torque of the coarse focus knobs can be adjusted using the torque adjustment ring at the base of the right coarse focus knob. To increase the torque Coarse torque adjustment ring Figure-12 Adjusting the torque of the coarse focus knobs 13

28 3 Operation of Each Part Increasing the torque of the coarse focus knobs To increase the torque, turn the coarse torque adjustment ring counter-clockwise. Reducing the torque of the coarse focus knobs To reduce the torque, turn the coarse torque adjustment ring clockwise, but make sure that the stage does not fall on its own weight when you take your hands off the coarse focus knob Coarse focus stopper ring The coarse focus stopper ring is used to mark the vertical position of the stage, mainly the focal plane. Once the coarse focus stopper ring is clamped at a position, you can easily bring back the stage to that position even after it is lowered greatly for sample exchange. The coarse focus stopper ring is at the base of the left side coarse focus knob. The stage position is marked. Marking the stage position Figure-13 Coarse focus stopper ring Coarse focus stopper ring To mark the stage position, turn the ring clockwise to the limit. When the coarse focus stopper ring is clamped, the stage can no longer be raised up beyond the marked position by the coarse focus knobs. Reference: Do not excessively tighten the coarse focus stopper ring, otherwise the coarse focus stopper ring may become difficult to release. Use only the coarse focus knob to lower or raise the stage for sample exchange. To return the stage to the marked position after sample exchange, raise the stage to the limit using the coarse focus knob. Releasing the mark To release the mark, turn the coarse focus stopper ring counter-clockwise to the limit. 14

29 3 Operation of Each Part 3.3 Eyepiece tube Optical path selection The optical path selection lever can be used to switch the destination of light from the binocular part to the vertical tube. 0% 100% Push IN Pull OUT 100% 0% Figure-14 Optical path selection Tilting function The binocular part of the trinocular tilting eyepiece tube can be swung up and down for finding the best viewing position. Figure-15 Tilting function Vertical tube adapters When mounting a digital camera or TV camera to the vertical tube of the trinocular eyepiece tube, you must first attach the optional LV-TV TV adapter or C-mount adapter. Insert the adapter into the vertical tube and fix it by the clamp screw with the hexagonal screwdriver. Clamp screw Figure-16 Vertical tube adapters 15

30 3 Operation of Each Part 3.4 Diopter adjustment The diopter adjustment compensates for differences in eyesight between your left and right eyes. After the correct adjustment, you will find the observation with both eyes easier and the focus shift is reduced when switched to the different objectives. Be sure to adjust the diopter adjustment rings on both eyepieces. Outer tube edge Diopter adjustment ring Engraved line Figure-17 Diopter adjustment Turn the diopter adjustment rings on both eyepieces to align their engraved lines with the edge of the outer tube of the eyepiece. (This is the standard position for the diopter adjustment.) Focus on the sample with the 10 objective following the steps described in 2.1 Episcopic bright-field microscopy or 2.6 Diascopic bright-field microscopy (for L200ND only). Bring the 50 objective in the optical path and focus on the sample using the focus knobs. (Using the focusing target makes the focusing easier on episcopic illumination. See 3.9 Focusing target.) Bring the 5 or 10 objective in the optical path. Looking through the right eyepiece with your right eye, focus on the sample by turning the diopter adjustment ring on the right eyepiece (not the coarse and fine focus knobs). Look through the left eyepiece with your left eye and focus on the sample with the diopter adjustment ring on the left eyepiece. Repeat steps 3 to 5 until the image keeps its focus even though the objective magnification is changed. 16

31 3 Operation of Each Part 3.5 Interpupillary distance adjustment Adjust the interpupillary distance to observe a sample with both eyes. Merge the viewfields into one Figure-18 Interpupillary distance adjustment Perform the diopter adjustment and focus on the image with the 10 objective. Adjust the interpupillary distance so that the viewfield for each eye is at the same position on the sample. 3.6 Aperture diaphragm The aperture diaphragm adjusts the numerical aperture (N.A.) of the illumination system, and plays an important part in determining image resolution, contrast and depth of focus Adjusting the size of the aperture diaphragm When adjusting the size of the aperture diaphragm for episcopic illumination, use the episcopic aperture diaphragm control buttons. For diascopic illumination, use the aperture diaphragm lever for diascopic illumination Remove one eyepiece and look into the open sleeve. Inside, you can see the exit pupil of the objective as a bright circle. Adjust the size of the aperture diaphragm image to the appropriate size. Generally, the aperture diaphragm is to be stopped down to 70 to 80% of the objective N.A. Stopping down the aperture diaphragm excessively will lower the image resolution. The aperture should not be smaller than 60% of the objective N.A. The appropriate size of the aperture diaphragm 70 to 80% Exit pupil of the objective Aperture diaphragm lever for diascopic illumination 100% Image of the aperture diaphragm Figure-19 Aperture diaphragm Episcopic aperture diaphragm control buttons 17

32 3 Operation of Each Part If your sample is of low reflectance and observed under episcopic illumination, you may not be able to see the aperture diaphragm image. In this case, replace the sample with of higher reflectance Centering the episcopic aperture diaphragm Tools required: hexagonal screwdriver (2 mm) 2 On normal usage, there is no need to center the episcopic aperture diaphragm since it is already centered at the factory. If you need very precise centering or off-centered diaphragm (such as for diagonal illumination), the position of the aperture diaphragm can be shifted. Center the episcopic aperture diaphragm using two aperture diaphragm centering screw holes at the back of the filter slider on the left side arm Remove the caps of the centering screw holes and insert the hexagonal screwdrivers in the centering screw holes. You can look in the holes to find the centering screw heads. Remove one eyepiece from the microscope and look inside the open sleeve to find the image of the aperture diaphragm. Turn the centering screws to match the two centers of the exit pupil of the objective and the image of the aperture diaphragm in the same manner as adjusting the size of the aperture diaphragm. Image of the aperture diaphragm Exit pupil of the objective Match two centers Figure-20 Centering the episcopic aperture diaphragm Aperture diaphragm centering screw holes For precise centering, using a centering telescope (optional) is recommended with which you can see the exit pupil of the objective much easier. 18

33 3 Operation of Each Part 3.7 Changing the illumination You can change illumination with the selection lever on the arm. To change illumination, push/pull the dark-field/bright-field/fluorescent selection lever for the L200ND or the dark-field/bright-field selection lever for the L200N. Dark-field/bright-field/fluorescent selection lever (for L200ND only) (Dark-field/bright-field selection lever provided for the L200N) Figure-21 Changing the illumination For fluorescent illumination on the L200ND, attach the filter block inside the microscope arm. (See 4.9 Installing the filter block (for fluorescent illumination only).) Table-4 Changing the illumination Lever position Type of illumination FL Fully push in. Fluorescent illumination (for L200ND only) * only when the filter block is attached BF Pull out to the next click-stop position. Bright-field illumination DF Fully pull out. Dark-field illumination 19

34 3 Operation of Each Part Stage The 8 8 stage can be moved in either the coarse mode for swift and long-ranging movement, or the fine mode for minute movement. To switch between the modes, use the coarse movement ON and OFF switches on the stage coarse movement lever The coarse mode Grip the stage coarse movement lever to press in the coarse movement ON switch at the back side of the lever. The stage is now in the coarse mode and can be moved freely in both X and Y direction. Once the coarse movement ON switch is pressed, the stage stays in the coarse mode. Take hold of the stage coarse movement lever and move the stage (the coarse mode is used at low magnification observation and changing samples). Moving the stage with the stage coarse movement lever without pressing in the coarse movement ON switch will damage the stage. Likewise, pushing or pulling the stage plate without pressing in the coarse movement ON switch will damage the stage. Make sure that the coarse movement ON switch is pressed in for the coarse mode before moving the stage coarse movement lever. When changing samples, lower the stage 5 to 10 mm below the focal plane. Use coarse focus stopper ring for easy adjustment. (See Coarse focus stopper ring.) Press in the coarse movement ON switch Coarse movement ON switch Stage coarse movement lever Figure-22 Coarse mode 20

35 3 Operation of Each Part The fine mode Press down the coarse movement OFF switch at the left side of the stage coarse movement lever. The stage is now in the fine mode. Turn the stage fine movement knobs to move the stage minutely in the X or Y direction. Press down the coarse movement OFF switch Stage fine movement knob for X-axis Coarse movement OFF switch Stage fine movement knob for Y-axis Figure-23 Fine mode 3.9 Focusing target When you are to observe a sample with a polished surface under the episcopic illumination, the use of the focusing target will facilitate the focusing How to use the focusing target Pull out the focusing target lever to put the focusing target in the optical path. Pull out the focusing target lever and look into the eyepieces. You will find dark shadows at 4 corners of the viewfield. When the sample is out of focus, the edges of the shadows are also blurred (see the figure below). Turn the focus knobs and focus on the edges of the shadows until they look focused. After this adjustment, push in the focusing target lever to remove the focusing target from the optical path and find out that the sample is just as well in focus. Out of focus In focus Pull out to put the focusing target in the optical path. Figure-24 Focusing target The edges are blurred. The edges are sharp. 21

36 3 Operation of Each Part 3.10 Motorized nosepiece Use the motorized nosepiece forward/reverse rotation switches to control the rotations of the motorized nosepiece. When using the reverse rotation switch to rotate in the reverse direction, rotating the nosepiece in the direction from the nosepiece socket number 1 towards 6 is prohibited in order to protect the observation target. Press the forward rotation switch while holding down the reverse rotation switch to rotate from the socket number 1 towards 6. Keep the halogen lamp turned off while motorized nosepiece is in motion. When the L200ND microscope is connected with the C-HGFIE Precentered Fiber Illuminator via the RS232C cross cable, the shutter is closed while the motorized nosepiece is in motion Polarizer slider Use together with the analyzer slider for episcopic bright-field simplified polarization microscopy. Use together with the analyzer and the DIC sliders for episcopic DIC microscopy. Empty hole Orientation adjustment screw Polarizer Figure-25 Polarizer slider Attaching the polarizer slider Remove the cap near the indication POLARIZER at the right side of the microscope arm. Insert the polarizer slider with its nameplate facing toward the eyepieces. Slide the slider in and out of the microscope to find two click-stop positions on the slider. 22

37 3 Operation of Each Part Placing/removing the polarizer in/from the optical path Polarizer slider Push in: The polarizer is in the optical path. Placing the polarizer in the optical path Figure-26 Episcopic polarizer Push in the slider to the second click-stop position to place the polarizer in the optical path. Adjust the orientation of the polarizer before using the polarizer slider for the first time. (See Adjusting the orientation of the polarizer.) Removing the polarizer from the optical path Pull out the slider to the first click-stop position to remove the polarizer from the optical path. (The empty hole is now placed in the optical path.) Adjusting the orientation of the polarizer Turning the orientation adjustment screw at the bottom of the slider changes the orientation of the polarizer. Given below is how to rotate the polarizer for the precise crossed Nicols adjustment. Place the polarizer and the analyzer in the optical path. Place a sample with flat and plane surface on the stage and set each part of the microscope for the episcopic simplified polarization microscopy. Remove one eyepiece from the microscope and look inside the open sleeve. You can see the objective's exit pupil as a bright circle. Turn the orientation adjustment screw in either direction until the dark cross appears in the field. This is the crossed Nicols position. Figure-27 Dark cross 23

38 3 Operation of Each Part 3.12 Analyzer slider Use together with the polarizer slider for episcopic bright-field simplified polarization microscopy. Use together with the polarizer and the DIC sliders for episcopic DIC microscopy. Empty hole Analyzer Figure-28 Analyzer slider Attaching the analyzer slider Remove the cap near the indication ANALYZER at the right side of the microscope arm. Insert the analyzer slider with its nameplate facing up. Slide the slider in and out of the microscope to find two click-stop positions on the slider Placing/removing the analyzer in/from the optical path Analyzer slider Push in: The analyzer is in the optical path. Placing the analyzer in the optical path Figure-29 Analyzer Push in the slider to the second click-stop position to place the analyzer in the optical path. Since the orientation of the analyzer is already adjusted at the factory, you can easily get the crossed Nicols position by just placing the polarizer and the analyzer in the optical path. Removing the analyzer from the optical path Pull out the slider to the first click-stop position to remove the analyzer from the optical path. (The empty hole is now placed in the optical path.) 24

39 3 Operation of Each Part 3.13 DIC slider Use together with the polarizer and analyzer sliders for episcopic DIC microscopy. Prism selection knob Prism movement knob Sliding limit groove Prism position indication (A/B) Figure-30 DIC slider Attaching (removing) the DIC slider Use a hexagonal screwdriver to loosen the DIC slider limit screw on the revolving nosepiece. Insert the DIC slider into the slot on the revolving nosepiece and screw in the DIC slider limit screw. When removing the DIC slider from the revolving nosepiece, first fully loosen the DIC slider limit screw using a hexagonal screwdriver, and then pull out the slider. DIC slider limit screw Figure-31 DIC slider Placing/removing the DIC prism in/from the optical path Push in: The DIC prism is in the optical path. Figure-32 DIC slider 25

40 3 Operation of Each Part Placing the DIC prism in the optical path Push in the slider to the second click-stop position to place the DIC prism in the optical path. Removing the DIC prism from the optical path Pull out the slider to the first click-stop position to remove the DIC prism from the optical path Selecting the DIC prism position According to the objective in use, select either A or B as the position of the DIC prism. The correct position to be used is indicated on the objective barrel after the magnification and the objective N.A. indications. See the objective figure below. The letter A on the barrel indicates that the correct DIC prism position for this objective is A. Thus, when you use this objective, turn the prism selection knob on the DIC slider to match the letter A with the white dot. The correct position for the DIC prism selection knob is indicated here. Figure-33 Selecting the DIC prism position (objective) Setting the interference color Turn the prism movement knob to change the interference colors. Table-5 Selecting the interference color Interference color Dark Gray Sensitive red-violet Effects Observation similar to the dark-field microscopy can be performed. The changes in phase difference are shown as the difference in brightness. This color gives the highest sensitivity in detecting the phase difference. The changes in phase difference are shown as a difference in interference colors. The detection sensitivity is not good as the gray. 26

41 3 Operation of Each Part 3.14 Pinhole slider When using the high magnification objectives, placing the pinhole on the optical path gives deep depth of focus to the image. This is especially effective when viewing contact holes. Pinhole slider adapter Pinhole Flat head screws Pinhole centering screws Figure-34 Pinhole slider Attaching the pinhole slider Remove the cover plate near the indication PINHOLE at the right side of the microscope arm. Attach the pinhole slider adapter instead, using two flat head screws supplied together with the pinhole slider. Insert the pinhole slider to the adapter. Slide the slider in and out of the microscope to find two click-stop positions on the slider. Be sure to center the pinhole before observation Placing/removing the pinhole in/from the optical path Placing the pinhole in the optical path Push in the slider to the second click-stop position to place the pinhole in the optical path. When the pinhole is in the optical path, opening or closing down the aperture diaphragm will have no effect on the image since the pinhole aperture is smaller than the aperture diaphragm stopped down to the limit. Removing the pinhole from the optical path Pull out the slider to the first click-stop position to remove the pinhole from the optical path and to make the aperture diaphragm effective. 27

42 3 Operation of Each Part Centering the pinhole Be sure to center the pinhole (match the centers of the pinhole and the optical path) before observation. Remove one eyepiece and while looking into the open sleeve, turn the pinhole centering screws to bring the pinhole image to the center of the exit pupil of the objective. For this adjustment, the use of centering telescope (optional) is recommended since it will facilitate the observation of the exit pupil. Pinhole slider Push in: The pinhole is in the optical path. Pinhole slider adapter Figure-35 Pinhole 3.15 L200ND EPI/DIA simultaneous illumination If you are using the L200ND and wish to turn on the episcopic and diascopic illumination at the same time, use the lamp cable and the TI-PS 100W Power Supply. After connecting the lamp cable to the diascopic lamphouse, connect the other end of the cable to the 12VDC outlet on the TI-PS 100W Power Supply. Connect the power cord to the power supply. This connection shuts the power from the microscope main body to the diascopic lamphouse. Even when the Episcopic/Diascopic Illumination selection switch (on the front) is set to DIA, the diascopic Illumination does not light up. To turn ON and OFF or to adjust the brightness of the diascopic illumination, use the switches on the TI-PS 100W Power Supply. For details on operating the TI-PS 100W Power Supply, refer to the instruction manual supplied with the power supply. 28

43 3 Operation of Each Part Diascopic lamphouse Lamp cable TI-PS 100W Power Supply Power cord Figure-36 Attaching the diascopic lamphouse (for simultaneous illumination) POWER switch Front Rear Rating label Flip the power switch to the I side to turn on the power supply. DC power is output from the 12VDC outlet on the back. Flip the power switch to the side to turn off the power. POWER indicator The equipment is designed for AC power of 100 to 240V AC and 50/60 Hz. Before connecting the power cord, check that the power supply to be used conforms to the voltage and frequency described above. EXTERNAL connector Connect a desired external control device to this connector. Cannot be used for the connection with the L200ND microscope. 12VDC outlet Brightness control knob This knob adjusts the lamp brightness. Connect the lamp cable from the compatible lamphouse to this connector. EXTERNAL ON/OFF switch Set this switch to OFF. AC inlet The AC power supply is connected here. Be sure to use the specified power cord when connecting. Figure-37 TI-PS 100W Power Supply (For details, see the instruction manual supplied with the power supply.) 29

44 4 Assembly 4 Assembly Assemble each part of the microscope referring to the diagram on the next page. WARNING Before assembling the microscope, be sure to read the WARNING and CAUTION at the beginning of this instruction manual and follow the instructions written therein. To avoid electrical shocks and fire, turn off the power switch (flip it to the side) before assembling the microscope. CAUTION The main body of this instrument weighs about 30 kg. To install this instrument on a desk or a table, at least two people are required. Handle the instrument carefully and do not drop it. The equipment can injure the human body or may be damaged when dropped. Take care not to pinch your hands or fingers during assembly. Scratches and fingerprints on the lenses will adversely affect the image. Take care not to get them on the lenses. If lenses and the like are contaminated, e.g., with fingerprints, clean them according to the description in 6.3 Cleaning this equipment. The microscope is a precision optical instrument. Take care when handling them and avoid strong shocks. (Especially on the objectives since they can be adversely affected even by a weak shock.) 4.1 Required tools To assemble this instrument, the following tools are required. (These tools are not supplied with the microscope.) Hexagonal wrench or screwdriver 2 mm 1 3 mm 1 5 mm 1 Phillips screwdriver 1 30

45 4 Assembly 4.2 Installation location This equipment is a precision optical instrument. Using or storing the microscope under unsuitable conditions may damage it or may have an adverse effect on its accuracy. Read the Safety Notes explained in the beginning of this manual and select the location that satisfies the indicated conditions. 31

46 4 Assembly 4.3 System diagram LV-HL50W 12V50W-LL lamp 12V50W lamp C-HGFIE V-T photo adapter LV-LH50PC 12V50W lamphouse TV camera adapter TV camera lens (For 1x relay lens: 1x relay lens N) Direct C-mount adapter LV-TV TV adapter C-mount adapter 0.55x b Ultrawide Trinocular Tilting Eyepiece Tube L2-TT2/L2-TT2A a Trinocular Tube LV-TI ND, NCB, GIF filter Pinhole Polarizer L3N-FIAD (for L200ND) C-HGFIF15/30 RS232C L200N/L200ND * For diascopic illumination, L200ND only USB Setup Tool (SDK, Setup) NIS-Elements DS-L2 PC K CFIUW 10X K CFIUW 10XM Adapter a Analyzer Breath shielding plate DIC slider Ultrafine motion unit USB K CFI 10X K CFI 10XM 8 inch wafer holder DS-U2 b Micrometer eyepiece K CFI 12.5X K CFI 15X 6 inch wafer holder Mask holder (For diascopic illumination, up to 6 inch holder) 8 x 8 stage L stage for MWL860 L stage P for MWL860 Figure-38 System diagram 32

47 4 Assembly 4.4 Attaching the lamphouse and replacing the lamp CAUTION To prevent electrical shock and damage to the microscope, always turn off the power switch (flip it to the side) and unplug the power cord from the outlet before connecting or disconnecting the lamphouse. To prevent burn injury, allow the lamp and the lamphouse to cool down sufficiently (for at least 30 minutes after the lamp is turned off), before replacing the lamp. Use the Nikon LV-LH50PC halogen lamphouse for the lamphouse. Use the Nikon LV-HL50W 12V 50W LONGLIFE halogen lamp or non-nikon 12V 50W SHORTLIFE halogen lamp (model OSRAM HLX 64610, OSRAM HLX 64611, or PHILIPS 7027) for the lamp. If you wish to buy these lamps, please contact your nearest Nikon representative. Do not touch the glass surface of the lamp with bare hands. Fingerprints or grease on the bulb surface will reduce the illumination intensity of the lamp. Wipe clean any fingerprints or grease attached to the surface. Securely attach the lamphouse cover to the lamphouse after replacing the lamp. Never light the lamp with the lamphouse cover removed. When you dispose of the replaced lamp, do not break it up. Instead, dispose of the used lamp as special industrial waste or dispose of it according to the local regulations and rules Attaching the lamphouse Before performing the following procedures, turn off the power switch of the microscope (flip it to the side) and unplug the power cord from the wall outlet Loosen the clamp screw on the upper side of the lamphouse connection port by using the hexagonal screwdriver supplied with the microscope. Attach the episcopic lamphouse to the mount part on the upper-rear (or the diascopic lamphouse to the mount part on the lower-rear) of the microscope, and push the lamphouse into the limit. Additionally, you can attach both the episcopic and diascopic lamphouses to the upper and lower- mount part for the simultaneous illumination. Note that the lamp cable and the TI-PS 100W Power Supply are required for the connection. (See 3.15 L200ND EPI/DIA simultaneous illumination.) Using the hexagonal screwdriver, tighten the clamp screw on the top of the connection port of the lamphouse to secure the lamphouse. Plug the cable coming from the lamphouse into the lamp connector on the rear of the microscope and tighten the ring of the connector to secure the connection. 33

48 4 Assembly 3 For episcopic illumination Figure-39 To remove the lamphouse, reverse the above procedure Replacing the lamp The lamp can be removed without having to detach the lamphouse from the microscope. Before performing the following procedures, turn off the power switch for the microscope (flip it to the side) and unplug the power cord from the wall outlet. And check that the lamp and lamphouse have cooled down sufficiently Loosen the lamphouse cover clamp screw using the hexagonal wrench. Remove the lamphouse cover. Push down the lamp clamp lever and remove the old lamp. With the lamp clamp lever held down, insert the electrodes of a new lamp into the pin holes of the socket. Press the lamp to the limit, and then release the lamp clamp lever to secure the lamp. Be careful not to touch the glass surface with bare hands. When releasing the lamp clamp lever, use care so that the lamp does not tilt. Close the lamphouse cover and secure it by tightening the clamp screw Figure-40 34

49 4 Assembly Attaching the fiber adapter and external light source If the brightness of the specified light source is less than the desired brightness, an external light source can be used to perform the episcopic fluorescent microscopy. The external light source, the C-HGFIE HG Precentered Fiber Illuminator (motorized type), can be attached through the light guide fiber when the optional HG fiber adapter (L3N-FIAD Fiber Guide Adapter for L200ND) is mounted on the light source mount part. The C-HGFIE HG Precentered Fiber Illuminator cannot be attached on the L200N microscope. CAUTION The external light source is not compatible with the diascopic illumination. Never attach the HG Precentered Fiber Illuminator for the diascopic illumination, as this may cause damage to the optical system of the microscope. Be sure to use the C-HGFIE HG Precentered Fiber Illuminator where an external light source is required. If a light source other than those specified is installed onto this microscope, this microscope system will not be considered as a TUV/SEMI approved product. Carefully read the instruction manual for an external light source to use it, and follow their instructions. A light source emits very strong light including ultraviolet light that is harmful to the eyes and skin. Never turn on the power for the light source before completion of assembling and connecting parts. To assemble and connect parts, check that the power supplies for the light source and microscope are turned off and that the power cord is unplugged from the wall outlet. Attaching the compensation filter CAUTION A designated compensation filter comes with the HG fiber adapter. Attach it into the optical path selection block on the arm. The compensation filter is used to compensate the color balance and brightness. If this filter is not used, extremely strong light is radiated for the bright-field microscopy. Be sure to attach the filter Check that the shutter of the illumination is closed and power supplies to the microscope and the light source are turned off. Loosen and remove the dark-field/bright-field/fluorescent selection lever. Remove the lid on the right-side of the arm. Loosen the knob until it is removed together with the lid. 35

50 4 Assembly Dark-field/bright-field/ fluorescent selection lever 2 3 Knob Figure-41 Attach the dark-field/bright-field/fluorescent selection lever to the optical path selection block (for bright-field microscopy), which is installed inside the arm, and pull the lever to the near side. Remove the dark-field/bright-field/fluorescent selection lever and attach it to the compensation filter. Attach the compensation filter to the optical path selection block (for bright-field microscopy) and secure them together with the set-screw. Set-screw Compensation filter Dark-field/bright-field/ fluorescent selection lever Figure-42 Attaching the compensation filter (for L200ND) Remove the dark-field/bright-field/fluorescent selection lever again and retain the lid at its original position. Mount the dark-field/bright-field/fluorescent selection lever. Attaching the fiber adapter Loosen the clamp screw on the fiber adapter by using the hexagonal screwdriver. And then, attach the HG fiber adapter onto the mount part for the episcopic lamphouse. Push in the adapter to the limit position, and then tighten the clamp screw to fix it. Next, insert the light guide fiber tip through the hole of the fiber adapter, and then tighten the clamp screw to fix it by using the hexagonal screwdriver. At last, connect the light guide fiber to the light source. 36

51 4 Assembly Fiber adapter clamp screw Fiber clamp screw Light guide fiber Figure-43 Connecting the microscope and an external light source CAUTION When the microscope is used with an external light source, be sure to attach the C-HGFIE HG Precentered Fiber Illuminator (motorized type). The shutter must be controlled in synchronization with the motorized nosepiece. Connect the microscope and the C-HGFIE by plugging the cable to the HGFIE connector on the rear of the microscope and the RS232C connector on the C-HGFIE. If this communication is not established, a flash of light may be fired at the rotation of the motorized nosepiece. Be sure to connect them. Fiber adapter HGFIE connector RS232C cross cable Light guide fiber RS232C connector Microscpe main body (rear view) C-HGFIE (rear view) Figure-44 Connecting the microscope and the illuminator 37

52 4 Assembly 4.5 Attaching the stage and the holder The stage weighs about 10 kg. CAUTION Use caution not to drop it or get your hands and fingers caught Lower the substage to the limit with the coarse focus knob. Place the stage on the substage and fix it by four M6 screws (supplied together with the substage) using the 5 mm hexagonal wrench. Remove the fixing metals from the stage plate using 3 mm hexagonal wrench. The fixing metals are attached to the stage with four hex socket head cap screws. Place the holder on the stage matching three claws on its bottom with the three claws on the stage. Fix the holder with the clamp screw at the left side of the stage taking care not to lift up the holder by tightening the clamp screw too much. Screw holes for fixing the stage Figure Attaching the eyepiece tube Fully loosen the eyepiece tube clamp screw with the hexagonal screwdriver. Fit the eyepiece tube on to the mount on the top of the microscope arm and tighten the eyepiece tube clamp screw When removing the eyepiece tube Hold the eyepiece tube when loosening the eyepiece tube clamp screw to prevent the eyepiece tube from falling off. 38