Introduction to Contamination Cotitrol and Cleanroom Technology Matts Rarnstorp copyright 0 WXLEY-VCI.? Verlag GmbH, 2000

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1 Introduction to Contamination Cotitrol and Cleanroom Technology Matts Rarnstorp copyright 0 WXLEY-VCI.? Verlag GmbH, 2000 Further reading (1993). HEPA and ULPA Filter, IEST-RP-CC ISBN (1986). LAF-Clean Air Devices, IEST-RP-CC (1993). Garment System Considerations for Cleanrooms and Other Controlled Environments, IEST-RP-CC ISBN (1992). Evaluating Wiping Materials Used in Cleanrooms and Other Controlled Environments, IEST-RP-CC ISBN (1997). Gloves and Finger Cots Used in Cleanrooms and Other Controlled Environments, IEST-RP-CC ISBN (1993). Testing Cleanrooms, IEST-RP-CC ISBN (1992). Testing ULPA Filter, IEST-RP-CC ISBN (1984). Gas-Phase Adsorber Cells, IEST-RP-CC (1998). Compendium of Standards, Practices, Methods and Similar Documents relating to contamination Control, IEST-RD-CC ISBN (1998). A Glossary of Terms and Definitions Relating to Contamination Control, IEST-RD-CC ISBN

2 156 Fwther readinm (1993). Considerations in Cleanroom Design, IEST-RP- CC ISBN (1986). Equipment Calibration & Validation procedures, IEST-RP-CC T. (1999). Cahbration Particle Counters, IEST-RP-CC (1987). Cleanroom Production and Support Equipment, IEST-W-CC T. (1992). The Rate of Decomposition of Nonvolatile Residues in Cleanrooms, IEST-RP-CC ISBN (1992). Cleanroom Housekeeping Operationing and Monitoring Procedures, IEST-RP-CC ISBN (1988). Substrates and Forms for Documentation in Cleanrooms, IEST-RP-CC T. (1993). Testing HEPA and ULPA Filter Media, IEST-RP- CC ISBN (1992). Electrostatic Charge in Cleanrooms and Other Controlled Environments, IEST-RP-CC ISBN (1993). Microorganisms in Cleanrooms, IEST-RP-CC ISBN (1994). Measuring and Reporting Vibrations in Microelectronic Facilities, IEST-RP-CC ISBN X. (1994). Cleanroom Operations, IEST-RP-CC ISBN

3 ( 1999). Personnel Practices and Procedures in Cleanrooms and Controlled Environments, IEST-RP-CC (1999). Minienvironments, IEST-RP-CC Institute of Environniental Sciences and Technologies (1999). Automotive Paint Spray Applications, IEST-RP- CC (1999). Building Code Reference Handbook: A Guide to Alternative Code Compliance Issues in the Semiconductor Industry, IEST-RP-CC : Classification of air cleanliness, IS : Specifications for testing and monitoring to prove continued compliance with IS , IS Cleanrooms and Associated controlled environments-part 4: Design, Test and Start-up, IS : Cleanroom operations, IS : Terms and Definitions, IS : Enhanced Clean Devices, IS : Molecular Contaminations, IS Control-Part 1 : General Principles, IS Control-Part 2: Evaluation and interpretation of biocontamination data, IS Control-Part 3: Measurement of the efficiency of processes of cleaning and/or disinfection of inert surfaces bearing biocontaminated wet soiling or biofdms, IS Ljungquist, B. and Reinmuller, B. (1995). Hazard analysis of airborne contamination in clean rooms-application of a method for limitation of risks. PDA Journal of Pharmaceutical Science and Technology, 49 (5), Further reading. 157

4 158 Further readina W. A. Gould (1994). cgmp-food Plant Sanitation, CTI Publications, Inc. W. Whyte (1991).Cleanroom Design, John Wiley & Sons, Ltd, ISBN A. Lieberman (1992). Contamination Control and Clean-. rooms, Van Nostrand Reinhold, ISBN B. Ljungquist and B. ReinmUer (1992). Clean Room Design-Minimising contamination through Proper Design, Interpharrn Press, Inc., ISBN P. R. Austin (1995). Encyclopaedia of Cleanrooms, Biocleanrooms and Aseptic Areas, Contamination Control Seminars. D. L. Tohver (ed.) (1995). Handbook of Contamination Control in Microelectronics-Principles, Applications and Technology, Noyes Publications, Inc., ISBN M. Ramstorp (1997). contamination Control and Cleanrooms-An Introduction, BioTekPro AB, ISBN (in Swedish). M. Ramstorp (1999). Contamination Control-Filtration and Sterilisation, BioTekPro AB, ISBN (in Swedish). Federal Regulation 21 CFR 820 Good Manufacturing Practice for Medical Devices, General U. S. Government Printing Office, Washington. Verein Deutscher Ingenieure, VDI 2083:l (1991). Clean Room Technology Part 1 : Fundamentals, Definitions, and Determination of Cleanliness Classes. Verein Deutscher Ingenieure, VDI 2083:2 (1996). Clean Room Technology Part 2: Construction, Operations and Maintenance. Verein Deutscher Ingenieure, VDI 2083:3 (1993). Clean Room Technology Part 3 : Measuring Techniques for Clean Air Rooms. Verein Deutscher Ingenieure, VDI 2083:4 (1996). Clean Room Technology Part 4: Surface Cleanliness. Verein Deutscher Ingenieure, VDI (1996). Clean Room Technology Part 5: Thermal Comfort. Verein Deutscher Ingenieure, VDI 2083 :6 (1996). Clean Room Technology Part 6: Personnel at the Clean Work Place.

5 Verein Deutscher Ingenieure, VDI 2083:7 (1996). Clean Room Technology Part 7: Purity of Process Media. Vercin Deutscher Ingenieure, VDI 2083:s (1991). Clean Room technology Part 8: Suitabdity of Products for Cleanrooms. Verein Deutscher Ingenieure, VDI 2083:9 (1991). Clean Room Technology Part 9: Quality, production and Distribution of Superpurity Water. Verein Deutscher Ingenieure, VDI 2083:lO (1998). Clean room Technology Part 10: Media Distribution. Verein Deutscher Ingenieure, VDT 2083 : 11 (under development). Clean Rooni Technology Part 11 : Quality Assurance. British Standard 5295 Part 0: General Introduction, Terms and Definitions for Clean Rooms and Clean Air Devices, BS5295:O. British Standard 5295 Part 1: Specification for Clean Rooms and Clean Air Devices, BS 5295:l. British Standard 5295 Part 2: Methods for Specifying the Design, Construction and Commissioning of Clean Rooms and Clean Air Devices, BS 5295:2. British Standard 5295 Part 3: Guide to Operational procedures and Disciplines Applicable to Clean Rooms and Clean Air devices, BS 5295:3. British Standard 5295 Part 4: Specification for Monitoring Clean Rooms and Clean Air Devices, BS 52 95:4. Schneider,R K. ( 1995). Practical Cleanroom Design, Business News Publishing Company, Troy, MI, USA, ISBN Further reading 159