Cleanroom Suitability Assessment of Equipment according to upcoming ISO standards. Frank Buerger, Fraunhofer IPA, October 10 th 2013, Dresden

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1 Cleanroom Suitability Assessment of Equipment according to upcoming ISO standards Frank Buerger, Fraunhofer IPA, October 10 th 2013, Dresden

2 Solar Flat Panel Semiconductor Technology and Cleanliness Trends MARKET TECHNOLOGY RESULTING CLEANROOM REQUIREMENTS Status quo: manufacturing of 300 mm wafers line widths of approx. ~ 20 nm Forecast: manufacturing of 450 mm wafers smaller line widths (approx. ~10 nm) Thin-Film Transistor Liquid Crystal Displays (TFT-LCDs) Organic Light Emitting Diode (OLED) flexible panels Field Emission Displays (FED) Up to 200 mm fabs: ISO Class 4, ballroom-fabs / ISO Class 2 SMIF-fabs 300 mm fabs: room-in-room-concepts: ISO Class 2, FOUP technology, minienvironments: surrounding: ISO Class 5 AMC/ESD-control is highly necessary trend: higher local air cleanliness Requirements similar to semiconductor industry: particles can cause shorts between layers ESD is critical AMC is not that critical sunlight falling on silicon shakes loose electrons and create positive and negative charge more efficiently cells, e.g. thin film technology or alternative contact methods status quo at present: ISO Class 6 to greyrooms more efficient contact methods (e.g. with thousands of tiny metal dots) requires cleanrooms like in chip industry

3 What to take care of? Cleanroom Technology Control Airborne Particles Logistics Concept Avoid Cross-Contamination Personnel Behaviour Avoid Cross-Contamination Equipment & Materials Protect Clean Environment For clarifying Cleanroom Suitability task: focus on EQUIPMENT

4 Typical tool particle specifications Particles per Wafer and Pass (PWP) Equipment overall particle performance on substrates even for vacuum Testing possible for complete equipment Localization of particle sources not possible Airborne particles (ABP) Equipment local particle concentrations mostly on the wafer path Only atmospheric tools with clean air supply No international specification of the particle emission behavior of tools/components without own clean air supply (ex. VDI ) Partikel 0,1 µm Partikel 0,1 µm Messpunkt Messzeit [min] APB Messpunkt 14 Messzeit [min]

5 ISO/TC 209 WG 11 - Assessment of suitability of equipment for cleanrooms New Work Item Proposal accepted and activated by ISO/TC 209 in February 2012 The new standard will provide basic requirements and guidance on suitability of equipments for cleanroom use The scope of WG 11 will be limited to airborne and surface cleanliness for particles and chemicals (including outgassing) Guidance will be provided for the mechanisms, methods, principles for determining the emissions and cleanliness levels This equipment guidance will be linked closely to the cleanliness classes within the ISO-family (ISO ,-8,-9 and -10)

6 Links between contamination of interest and assessment standard Contamination of interest Category Item to be assessed Applicable assessment standard Reference classification standard Designation particle airborne equipment ISO-ACP particle airborne materials xx ISO-ACP particle surface equipment ISO-SCP particle surface materials xx ISO-SCP chemical airborne equipment xx ISO-ACC chemical airborne materials xx ISO-ACC chemical surface equipment xx ISO-SCC chemical surface materials xx ISO-SCC

7 Airborne Particle Cleanliness acc. to and NWIP Particle concentration within air volume of 1 m 3 cleanroom classification (acc. to ) Particle concentration on single point of an equipment, emitted into air volume of 1 m 3 equipment classification (acc. to NWIP-proposal)

8 Particles 0.1 µm per min Particle Emission Test of a Robot System Interpretation of Measurement Values Measurement point 1 Measurement point 2 Measurement point 3 Measurement point 4 ISO CLASS 5?? ISO CLASS Test series ABB Robotics - Robots ; IRB 1600 ; Ax is 4 ; full v elocity ; Ov erv iew measuring points MP17 to MP20 40 ISO CLASS Measuring time [min]

9 Participants by Name and Country

10 Overall Time Line

11 Related Documents Standards & Guidelines Compilation page NFPA 287: Standard Test Methods for Measurement of Flammability of Materials in Cleanrooms Using a Fire Propagation Apparatus (FPA) 2. ISO : Cleanrooms and associated controlled environments - Part 5: Operations 3. ISO : Cleanrooms and associated controlled environments -- Part 7: Separative devices (clean air hoods, gloveboxes, isolators and mini-environments) 4. UNE-ENV 1631: CLEANROOM TECHNOLOGY. DESIGN, CONSTRUCTION AND OPERATION OF CLEANROOMS AND CLEAN AIR DEVICES. 5. ASTM E 1731: Standard Test Method for Gravimetric Determination of Nonvolatile Residue from Cleanroom Gloves 6. ASTM E 2312: Standard Practice for Tests of Cleanroom Materials 7. ASTM E 1549: Standard Specification for ESD Controlled Garments Required in Cleanrooms and Controlled Environments for Spacecraft for Non-Hazardous and Hazardous Operations 8. JIS B : Cleanrooms and associated controlled environments - Part 3: Test methods 9. JIS B : Cleanrooms and associated controlled environments - Biocontamination control - Part 1: General principles and methods 10.VDI 2083, Part 17: Compatibility of materials with required cleanliness class and surface cleanliness 11.VDI 2083, Part 9.2: Verbrauchsmaterialien (german working draft, not finalysed yet) 12.VDI 2083, Part 9.1: Compatibility with required cleanliness and surface cleanliness 13.IEST-RP-CC031: Method for Characterizing Outgassed Organic Compounds from Cleanroom Materials and Components 14.IEST-RP-CC040: Cleaning of Equipment Surfaces in the Cleanroom and Controlled Environments 15.MIL-HDBK-406: Contamination Control Technology: Cleaning Materials for Precision Pre-Cleaning and Use in Cleanrooms and Clean Work Stations 16.MIL-HDBK-407: Contamination Control Technology: Precision Cleaning Methods and Procedures 17.IEST-RP-CC032.1: Flexible Packaging Materials for Use in Cleanrooms and Other Controlled Environments 18.ASTM E : Standard Test Method for Size-Differentiated Counting of Particles and Fibers Released from Cleanroom Wipers Using Optical and Scanning Electron Microscopy 19.ASTM E 2352: Standard Practice for Aerospace Cleanrooms and Associated Controlled Environments-Cleanroom Operations 20.ASTM E 2217: Standard Practice for Design and Construction of Aerospace Cleanrooms and Contamination Controlled Areas Fraunhofer IPA, Department Ultraclean Technology and Micromanufacturing

12 Contact Information Fraunhofer Institute for Manufacturing Engineering and Automation IPA Ultraclean Technology and Micromanufacturing Head of Department Dr. Udo Gommel Phone Key Account Manager Certification Frank Buerger Phone ADDRESS: Nobelstr. 12, Stuttgart, Germany INTERNET: