Distributed Control Solutions for Demanding Motion Applications. Jason Goerges ACS Motion Control, Inc.

Transcription

1 Distributed Control Solutions for Demanding Motion Applications Jason Goerges ACS Motion Control, Inc. 1

2 Requirements of Demanding Motion Applications Motion Performance Standstill jitter of <10nm (latest generation equipment can be <1nm) Move and Settle within few ms (or 0ms) Velocity Regulation of <<1% Event to Motion Synchronization Control of camera/laser/transducer based on multiaxis path Real time processing of I/Os (vacuum on/off for pick/place) Application Examples Wafer Defect Inspection/Metrology, SMT Component Pick/Place, Flat Panel Display Inspection and Digital Inkjet Printing, SEM, CMM

3 Traditional Single Processor Architecture Host communication User programs User interface I/O control Kinematics Profile generation (3 rd ) Position Loop Velocity Loop Real time events Commutation (sinusoidal) Current Loop Power Amplification Controller Main Processor Communication to Host Discrete Cables Amplifier 1 Amplifier 2 Amplifier N 3 Disadvantages Not Scalable Not Distributable Limited Processing Power

4 Traditional Multi-Processor Architecture Host communication User programs User interface I/O control Kinematics Profile generation (3 rd ) Position Loop Velocity Loop Real time events Commutation (sinusoidal) Current Loop 4 Power Amplification Advantages More Processing Power Faster Update Rates Better Performance Embedded Bus Servo Processor Controller Main Processor Servo Processor Communication to Host Discrete Cables Servo Processor Amplifier 1 Amplifier 2 Amplifier N

5 Modern Distributed Multi-Processor Architecture Host communication User programs User interface I/O control Kinematics Profile generation (3 rd ) Real Time Ethernet Network Controller Main Processor Communication to Host Position Loop Velocity Loop Real time events Commutation (sinusoidal) Current Loop 5 Power Amplification Advantages Scalable Distributable *Same synchronization as traditional architecture (DC) Amplifier 1 Amplifier 2 Amplifier N

6 Modern PC Control Based Multi-Processor Architecture Host communication User programs User interface I/O control Kinematics Profile generation (3 rd ) Real Time Ethernet Network Standard LAN HW Core 1 Motion Controller (w RTOS) Host Computer Shared RAM Core 2-N Windows Position Loop Velocity Loop Real time events Commutation (sinusoidal) Current Loop Amplifier 1 Amplifier 2 Amplifier N Power Amplification Advantages Most Powerful Processor Save Cost/Space 6

7 Modern Multi-Processor Architecture w Multi-Axis Drives Host communication User programs User interface I/O control Kinematics Profile generation (3 rd ) Real Time Ethernet Network Controller Main Processor Communication to Host *Can Also Be PC Based Controller Position Loop Velocity Loop Real time events Commutation (sinusoidal) Current Loop Power Amplification Advantages Best Synchronization for coupled axes Cost/space advantage Amplifier 1 Amplifier N x2 or x4 7

8 Performance Advantages w Multi-Axis Drives Control difficulties of large mechanically coupled stages (450mm wafers, panels) Higher inertia and force (lower resolution for standstill control) XX Y axes not independent Limitations of Distributed Control Network sync jitter between nodes induces servo error for high precision coupled system 100ns network 1m/s = 100nm position error! Solution: Multi-Axis Drive Node controlling mechanically coupled axes Use MIMO control to work with decoupled virtual servo loops - superior static and dynamic performance and stability! Multi-Axis servo processor sampling jitter between axes ~= 1ns or less XX Y Gantry systems: control CoM, Yaw, Y 8

9 Maximizing Performance in Modern Drives Advanced processors can run sophisticated control algorithms (vs. Classical PID) ACS ServoBoost TM Improved machine performance: Faster settling, better stability, lower jitter, better constant velocity Automatic: adaptation to load changes, compensation of disturbances/resonances/cogging Advanced PWM power stages offer better performance than comparable linear drives ACS PWMBoost TM (NanoPWM Drives) Highly linear PWM stage Better efficiency, smaller size, more reliable and easier to use than linear drives. Ideal for wafer/panel metrology and inspection 500nm/division With Optimally Tuned PID (+/-2000nm) With ServoBoost (+/-100nm) 2nm/division Step profile using PWMBoost (Less than +/-1nm jitter!) 9

10 Demanding Multi-Axis Control Applications Assembleon iflex AX7 Places up to 70,000 PPH (~19.5 pps) Up to 40 axes and 100s of I/O 10

11 Demanding Multi-Axis Control Applications Hermes Microvision Electron Beam Wafer Inspection Tools escan, ep, explore Series Nanometer level standstill positional XY jitter 11

12 Thank You! Jason Goerges General Manager ACS Motion Control 6575 City West Pkwy Eden Prairie, MN USA