SINGULUS TECHNOLOGIES SINGULUS TECHNOLOGIES AG

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1 SINGULUS TECHNOLOGIES September 2014

2 1851 History Ernst Leybold started his business in Cologne Company building 1860 LEYBOLD HERAEUS Vacuum Technology, Metallurgy and Coating Foundation SINGULUS TECHNOLOGIES Merger LEYBOLD / BALZERS Unicorn Pharmacy was founded 1600 in Hanau W.C. Heraeus took over business in 1851 and started with platinum

3 Milestones of Market Launch VISTARIS PVD Sputter System Foundation SINGULUS Technologies Market Launch EVAPOR Co-Evaporation System Opening CIGS Pilotline (PTIP) IPO Market Launch SINGULAR ICP PECVD System Market Launch CISARIS Selenisation System Market Launch TENUIS Gen II CBD Buffer Layer System Start Optical Disc Business Start Semiconductor Business Start Photovoltaik Business SILEX Gen 2 Market Introduction Crystalline BATCH System FAT SOLARE Crystalline Turn Key Line Start New Business TENUIS Gen 2 Market Introduction CIGS Buffer Layer System

4 Worldwide connected SINGULUS TECHNOLOGIES Installed Equipment Base

5 Product Portfolio & Installed Base Photovoltaic Semiconductor Optical Disc Deposition, Thermal Treatment and Wet Process Applications for Thin Film and Crystalline Installed Capacity * (01/2014) Crystalline Thin Film (CIS/CIGS) * Total 3,6 GW production capacity Ultra High Vacuum Applications and Wet Processing Systems for Semiconductor Installed Base (01/2014) Timaris (Sputter) 21 Rotaris (Sputter) 5 Manual WPS 320 Semi-Auto WPS 48 Fully Autom. WPS 22 Mastering, Molding, Replication for all optical disc formats CD, DVD and Blu-Ray Installed Base (01/2014) Metallizers Skyline CD Spaceline DVD Bluline Blu ray 260

6 Financial Overview 1 st HY in million 1st Half Year st Half Year 2014 Gross Revenue Order Intake Order Backlog (30.06.) EBIT EBITDA EBT Loss for the Period Operating Cash Flow

7 Profit & Loss Statement 1 st HY in million 1 st Half Year st Half Year 2014 Gross Revenue Net Revenue Gross Profit (in % of Net Revenues) 9.8 (20.0%) 5.0 (16.7%) OPEX (Total) R+D Sales & Customer Service GM & A Other Income/Expenses EBIT Loss for the Period EPS basic (in )

8 Cash Flow Development in million 6M M 2014 Cash flow from Operating Activities Cash flow from Investing Activities * Cash flow from Financing Activities Total Cash flow Cash and Cash Equivalents at the Beginning of the Period ** Effect of Exchange Rate Changes Cash and Cash Equivalents at the End of the Period ** * Changes in time deposits with terms longer than 3 months not included ** Includes time deposits with terms longer than 3 months

9 Balance Sheet million Dec June 2014 Liquid Funds Total Current Receivables and other Assets Total Inventories Non Current Assets Total Assets Total Current Liabilities Total Non-Current Liabilities Total Equity Equity and Liabilities

10 Employees Dec June 2014 Δ SINGULUS Group Domestic Abroad

11 Sales Split by Products st Half Year st Half Year 2014 Semiconductor 14.2% Semiconductor 12.0% Solar 18.7% Optical Disc 67.1% Solar 25.9% Optical Disc 62.1%

12 Sales Split by Region st Half Year st Half Year 2014 Africa & Australia 11.4% Africa & Australia 2.7% Europe 25.2% Europe 32.2% Americas 47.3% Americas 39.5% Asia 16.1% Asia 25.6%

13 Solar

14 Overview Solar Product Placement Mono Crystalline Silicon Wafer Amorphous (a-si) Multi Crystalline Thin Film Thin Silicon Film Semiconductor Compound Based Tandem (a-si/c-si) Thin Film (c-si) Thin Film II-VI CIS/CIGS CdTe

15 Annualized PV Manufacturing Capacity GW GW 61 GW 61 GW 68 GW 81 GW 98 GW 119 GW Growth 100 % 75 % 50 % 25 % The uptick in forecasting out to 2017 is now being mirrored by a much more positive rebound in PV equipment spending between 2015 and 2017 The next growth period is expected between 2015 and % 18% 1% 9% 19 % 22% 21% Y/Y Growth Equipment spending c-si & thin-film: US $ M Source: NPD Solarbuzz Q2 2014

16 Production (MW) Thin-Film Panel Production: Years by Panel Type CIGS CdTe a-si/uc-si Source: NPD Solarbuzz Q2 2014

17 SINGULUS offers the Key Production Steps and is a Key Player in CIGS Technology Selenisation Evaporation Sputtering Wet Chemical Cleaning Buffer Layer Deposition

18 Innovative Equipment Development for CIGS Manufacturing since Systems delivered and installed

19 Vacuum Sputtering for CIGS Modules

20 TENUIS for Deposition of Buffer Layer Patented process know-how for deposition Production capacity 60 MW, with modular concept to increase throughput up to 180 MW and 500 MW Low chemical consumption on the market

21 VITRUM Wet Processing System High availability (uptime > 98 %) Better accessibility Small footprint High market demand

22 PERCEUS - Upgrade Package for PERC Cells First PERC system delivered Further system ready for shipment New PERC results show performance up to 21.2% (confirmed by ISE CalLab)

23 New Production Line for Crystalline Solar Cells

24 SOLARE Integrated Manufacturing Line for Crystalline Cells

25 Semiconductor

26 PVD Cluster Tool Platforms

27 TIMARIS Nano Deposition System Ultra high vacuum: Thinnest Layer: Uniformity: 5*10-9 mbar < 3 Å 0.5 % 1 Over 14 systems ordered in total Excellent prospects for further growth in applications like sensors Modular platform for new applications Ready for 450 mm technology

28 ROTARIS Flexible Multi-Cathode Deposition System Applications: R&D Memory / Head customers All PVD customers Universities TIMARIS spin off for applied applications for 300 mm and 200 mm wafer

29 Wet Process Stations for Semiconductor Manual Wet Process Stations Semi- and Fully Automated Wet Process Stations Quartz tube- and Part-Cleaning Stations Total Metal Free Working Stations Special Customer Specified Units Chemical Supply Systems (pump or pressure systems)

30 Optical Disc

31 - OPTICAL DISC For all disc formats CD DVD Blu-ray as well as 4K Blu-ray Mastering Molding Metalizing Bonding Embossing Lacquering Finishing

32 BLULINE II for Blu-ray Disc Production

33 BLULINE III for Triple Layer Blu-ray with 100 GB Storage Capacity Molding Wet Embossing Sputtering Sputtering Wet Embossing

34 Revenue Revenue Exploitation of Movies Free TV Box Office (abroad) Download Pay TV Blu-ray DVD & Disc Blu-ray Box Office (domestic) Time

35 Blu-ray Output 2013/ Source: Futuresource 07/2014

36

37 Strategy & Vision 2014/ Optical Disc Segment Further volume growth of Blu-ray Disc New game consoles & 4K TV will drive the market High-margin spare part and service business Solar Segment Recovery of demand for production equipment for the PV market by the end of 2014/beginning 2015 expected Innovative portfolio of production equipment for crystalline & thin-film solar cells Semiconductor Segment New machine concepts for nano deposition Good position for coming growth of MRAM as a potential memory technology of the future New Segments Developing innovative products on the basis of the core competencies nano- and vacuum-coating, thermal and wet-chemical process technology Open new market opportunities Strengthen the sustainable development at SINGULUS TECHNOLOGIES

38 Contact Hanauer Landstrasse 103 D Kahl/Main Dr.-Ing. Stefan Rinck, President and CEO Tel: Stefan.Rinck@singulus.de Markus Ehret, CFO Tel: Markus.Ehret@singulus.de Maren Schuster, Head of Investor Relations Tel: Maren.Schuster@singulus.de Forward-Looking Statements This presentation contains forward-looking statements based on current expectations, assumptions and forecasts of the executive board and on currently available information. Various known and unknown risks, unpredictable developments, changes in the economic and political environment and other presently not yet identifiable effects could result in the fact that the actual future results, financial situation or the outlook for the company differ from the estimates given here. We are not obligated to update the forward-looking statements made in this presentation unless there is a legal obligation. Bernhard Krause, Communications Worldwide Tel: Bernhard.Krause@singulus.de

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