MEMS motion sensors. June

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Lorena Burke
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1 MEMS motion sensors June

STMicroelectronics is driving innovation in MEMS (micro electro-mechanical systems) technology.

pedometers, menu browsing, free-fall recognition, personal navigation, or inclination detection.

effectively address high volume applications in several consumer and industrial segments.

of several hundred million accelerometers.

2 STMicroelectronics is driving innovation in MEMS (micro electro-mechanical systems) technology. With several hundred million sensors sold on the market, ST accelerometers and gyroscopes are widely used to enable advanced motion-sensing functions, including portrait/landscape rotation, pedometers, menu browsing, free-fall recognition, personal navigation, or inclination detection. Encompassing the entire supply chain, ST brings its customers a competitive advantage with advanced, reliable and cost-effective solutions, ensuring prompt time-to-volume and time-to-market to effectively address high volume applications in several consumer and industrial segments. Gyroscopes Combining an accelerometer and actuator in a single micro-machined structure, ST s gyroscope family leverages on robust and mature manufacturing processes already used for the production of several hundred million accelerometers. ST s MEMS gyroscopes include a sensing element composed of a single driving mass, kept in continuous oscillating movement and able to react when an angular rate is applied based on the Coriolis principle. Applications Image stabilization in cameras and camcorders Pointing devices for smart user interfaces Gaming Enhanced GPS solutions (dead reckoning algorithm implementation) Motion control in robotics Platform stabilization for industrial machinery Key features Analog output Extended power supply range: 2.7 V to 3.6 V Wide range of full scales available: from 30 /s (Lxx503AL) to 6000 /s (Lxx5150AL) < 10 µa current consumption in power-down mode High resolution: /s / 30 /s full scale Ultra high stability over temperature: 0.08 /s/ C Operating temperature range -40 C +85 C Embedded self test High shock survivability Gyroscopes portfolio LY5150ALH ±1500 /s /±6000 /s LPR5150AL ±1500 /s /±6000 /s LPY5150AL ±1500 /s /±6000 /s Gaming LY550ALH ±500 /s /±2000 /s LPR550AL ±500 /s /±2000 /s LPY550AL ±500 /s /±2000 /s Pointing devices Increasing full scale LY530ALH ±300 /s /±1200 /s LY510ALH ±100 /s /±400 /s LY503ALH ±30 /s /±120 /s LPR530AL ±300 /s /±1200 /s LPR510AL ±100 /s /±400 /s LPR503AL ±30 /s /±120 /s LPY530AL ±300 /s /±1200 /s LPY510AL ±100 /s /±400 /s LPY503AL ±30 /s /±120 /s Car navigation Image stabilization Single axis Dual axis 2

3 Linear accelerometers STMicroelectronics offers a complete portfolio of state-of-the-art 2- and 3-axis analog and digital accelerometers with full scale up to ±8g, high resolution, smart embedded functionalities and advanced power-saving features. Applications Smart user interfaces Remote control Interactive entertainment Sport and health monitoring systems Navigation systems Compass compensation Anti-theft systems Machine control Vibration monitoring systems Motion-activated power-saving systems Analog accelerometers - key features Selectable full scale: /±6g < 0.5 ma current consumption in normal mode < 1 µa current consumption in power-down mode Bandwidth up to 2 khz Resolution better than Hz Ultra high stability over temperature: 0.2 mg/ C Extended operating temperature range: -40 C +85 C Embedded self test High shock survivability: 10,000g for 0.1 ms S1x Analog accelerometers diagram Rout x Vout x R S2x S1y Mux Charge amplifier Demux S/H S/H Rout y Vout y S2y S1z Rout z Vout z S/H S2z Digital accelerometers - key features Digital SPI, I²C interfaces - user selectable Selectable full scale: /±4g/±8g < 0.3 ma current consumption in normal mode < 10 µa current consumption in low-power mode < 1 µa current consumption in power-down mode Resolution better than 1 mg Ultra high stability over temperature: 0.2 mg/ C Extended operating temperature range: -40 C +85 C Embedded self test High shock survivability: 10,000g for 0.1 ms Smart embedded features Two independent fully programmable interrupt signals Embedded free-fall and wake-up functions Click and double click recognition Direction detection Sleep to wake function Embedded high-pass filter R S1x S2x S1y S2y S1z Mux Digital accelerometers diagram Charge amplifier Demux Σ Σ Σ Reconstruction filter Reconstruction filter Reconstruction filter Register array I²C/SPI interface Control logic and interrupt generator CS SCL/SPC SDO SDA/SDIO RDY/INT1 INT2 S2z 3

4 Analog interface accelerometers Part number LGA package (mm - leads) Sensing axes Full scale Supply voltage (typ) (min) (typ) (max) Noise density Current consumption (typ) Power down (x,y,z) (±g) (V) (V) (V) (µg/ Hz) (ma) (µa) LIS244AL 16L x,y LIS244ALH 16L x,y 2/ LIS332AR 16L x,y,z LIS332AX* 16L x,y,z LIS352AR 14L x,y,z LIS352AX* 14L x,y,z LIS302SG 14L x,y,z LIS344AL 16L x,y,z LIS344ALH 16L x,y,z 2/ LIS331AL 16L x,y,z * absolute output Digital interface accelerometers Part number LGA package (mm - leads) Sensing axes Full scale Supply voltage (typ) (min) (typ) (max) Number of bits Current consumption (typ) Power down Low power (x,y,z) (±g) (V) (V) (V) (ma) (µa) (µa) LIS202DL 14L x,y 2/ LIS302DL 14L x,y,z 2/ LIS35DE 14L x,y,z 2/ LIS331DL 16L x,y,z 2/ LIS33DE 16L x,y,z 2/ LIS3LV02DL 4.4 x 7.5 x 1 16L x,y,z 2/ LIS331DLF 16L x,y,z 2/4/ LIS331DLM 16L x,y,z 2/4/ LIS331DLH 16L x,y,z 2/4/

Linear accelerometers portfolio Lower noise/higher performances Higher resolution/performances High performance LIS332AX/ AR 100 µg/ Hz LIS331AL 300 µg/ Hz Cost sensitive LIS33DE LIS331DL LIS331DLF/

LIS302SG 200 µg/ Hz LIS344AL 275 µg/ Hz ±3.5g LIS244AL 220 µg/ Hz Cost sensitive LIS35DE LIS302DL LIS202DL LIS3LV02DL 12-bit ±2/±6g 4.4 x 7.5 x 0.

5 Linear accelerometers portfolio Lower noise/higher performances Higher resolution/performances High performance LIS332AX/ AR 100 µg/ Hz LIS331AL 300 µg/ Hz Cost sensitive LIS33DE LIS331DL LIS331DLF/ M 6/ ±2/±4/±8g LIS331DLH 12-bit ±2/±4/±8g High performance Smaller size Smaller size High performance LIS352AX/ AR 100 µg/ Hz LIS344ALH 50 µg/ Hz ±2/±6g LIS244ALH 50 µg/ Hz ±2/±6g Cost sensitive LIS302SG 200 µg/ Hz LIS344AL 275 µg/ Hz ±3.5g LIS244AL 220 µg/ Hz Cost sensitive LIS35DE LIS302DL LIS202DL LIS3LV02DL 12-bit ±2/±6g 4.4 x 7.5 x 0.9 Analog interface Digital interface (I 2 C/SPI) Accelerometer and gyroscope packages ST pioneered the successful use of LGA packages for MEMS sensors. ST now has the widest manufacturing capability and greatest expertise for the production of sensor-in-plastic LGA packages. 5

6 STMicroelectronics - June Printed in Italy - All rights reserved The STMicroelectronics corporate logo is a registered trademark of the STMicroelectronics group of companies. All other names are the property of their respective owners. Order code: BRMEMS0609 For more information on ST products and solutions, visit

MEMS motion sensors. A complete portfolio of MEMS accelerometers and gyroscopes. October

MEMS motion sensors. A complete portfolio of MEMS accelerometers and gyroscopes. October MEMS motion sensors A complete portfolio of MEMS accelerometers and gyroscopes October 2009 www.st.com/mems The one-stop MEMS supplier STMicroelectronics innovative, reliable and cost-effective MEMS sensors