Dimension Measurement of Test Disks for RDDSl KEK YWATANABE

Transcription

1 Dimension Measurement of Test Disks for RDDSl KEK YWATANABE

2 n 1. Measurement method ZEISS CMM General view, specification etc. 2. Performance of CMM measurement 3. Measurement procedure of test disks 4. Typical measurement results & comparison to SLAC contour measurement 5. Results 6. Discussion

3 ZEISS UPMC-850 CARAT Measurement volume X axis 850mm, Y axis 1200mm, Z axis 600mm Maximum weight 1500kg Measurement accuracy (VDI / VDE 2617) Every axis Ul 0.5+L / 900 pm = pm /60mm Space u3 0.8+L / 600 pm

4 Probe head Universal probe head Probe(for Universal probe head) Diameter 4 lmm Length 16mm CNC program From alignment to measurement & data output

5 Measurement of reference gauges 1. Block gauge *Industrial standard gauge grade 00 (JIS grade00 6Ot Parallelism ) * CMM agreed within 1 pm in X,Y 2. Reference cylinder (made of copper) * Made by KEK * * KEK CMM agreed with Mitsutoyo within 0.6 pm * Want to compare with SLAC CMM Should be studied once more after maintenance of CMM

6 1. Measurement of Block Gauges 3,pressure 0.2N) Gauges length z X Y 60mm t * t z-z x-x Y-Y 1 1

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8 2. Measurement of Reference Gauges od(61.000/zo c) ID(Z1.996/20 C) Made by KEIK-CMM Mitsutoyo KIZK- CMM Mitsutoyo REFl KEK 20 C 19.8 C 20 C 19sc to.1 ko.1 REF2 REF3 KEK KEK to to ko to

9 Disk measurement method 1. Temperature * Room temperature 20 ct2 c * Disk surface temperature (Before & after CMM all+o5 c) 2. Measurement condition * Probe diameter 4 lmm * Probing pressure 0.2N(variable 0.05N to 1N) * Probing speed lmm/sec(set at almost minimum) 3. Probe calibration * Calibration sphere Ceramics points calibration

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11 n Vacuum chuck Material A15052 Vacuum area 4x46 Pressure -1kg. Disk does not move by proving (Pressure>>Probing Pressure). Top surface is machined by Ultra-precision lathe before each batch. Merit 1. Stability of disk against pressure 2. Less distortion due to fixing 3. Full of experience in turning lathe machining. Demerit 1. The thickness cannot be measured directly 2. Both sides cannot be measured at once

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13 Measurement process of rough machining disk I I I CMM measurement point (rough cut cell! Alignment Measurement. OD. P - 2a * Zb(Z-0.1) * k!l -!s * HOM 0 d. HOM 0 d. d * d. Slit 0 3mm 1.5mm h. Slit 0 3mm 1.5mm h * Slit 0 3mm 1.5mm h. 3mm 1.5mm h. Slit 0 Depth +- * Depth +-. Depth t -. Slit 0 Depth -+ SURFACE CIRCLE CIRCLE CIRCLE 4point 4point 3point 3point ZEROPOINT,TR.SPACE ZEROPOINT ADR PROG23 CIRCLE 4point POINT 4point (Surface of CIRCLE 4point Vacuum Chuck) CIRCLE lpoint POINT 4point POINT lpoint CIRCLE 4point CIRCLE 4point CIRCLE 4point CIRCLE 4point POINT Zpoint POINT Zpoint POINT lpoint POINT Zpoint POINT Zpoint POINT lpoint POINT Ppoint POINT 2point POINT lpoint POINT Spoint POINT Ppoint POINT lpoint POINT +- lpoint POINT i: lpoint POINT t lpoint POINT * lpoint Xaxts -3-

14 - Measurement process of final machining disk Alignment HOM 0 SURFACE CIRCLE CIRCLE CIRCLE lpoint lpoint lpoint 4point ZEROPOINT,TR.SPACE ZEROPOINT SYMMETRY ADR PROG23. OD * P. 2a. 2b(Z-0.1) * Zb(Z-0.3). Depth. Slit 0 Depth. Depth. Slit 0 Depth CIRCLE POINT CIRCLE CIRCLE CIRCLE POINT POINT POINT POINT POINT POINT 4point lpoint lpoint 4point 4point lpoint lpoint 2point 2point Spoint 2point L%lrface of Vacuum Chuck) Xaxis Vccwm cnuch -4.

15 Time of measurement * Setting 5 minutes * Edit of program 2h / 1 type * Alignment 1 Rough : 20 minutes / disk and Measurement Final : 10 minutes / disk * Output data 2 minutes

16 Comparison of typical data of #102,#153 Those taken by KEK and SLAC a,b,glgwd all consistent within 2-3 pm except #102B

17 t Y 12 -B E 5: b -.. ;,. --- L1 t I I I I I I I , bm Nom. curve : Act. curve: IL Tolerance y. Dscrptlon: RODS TEST CELL X102 Element : PROFILE-CURV Ser. No. : TEST/003 File No. : x**)c% Department: MET-06Q customer : JUWEN WAN6 Draw. No.: PF E X Y Z Nr. Farm Min. Deviat.: Lower Toler. : Max. Deviat.: 0 a Upper Toler. : Error Magnif.: 30 No. of points: 168 MET Inspection SLAC Department Established 1962

18 :17Ptl SLAURRD-Q NO.409 P.2,21.9-,.m Nom. curve : : Talerance : Dscrptlon; RODS Xst CELL +I53 - ; i ~Elemnt : PRoFILEJUR~ SBr. NO. : T-NO.1 File No. :,?t-wrx ;, oepartment:'hel~ol3q Custolner : JUWCN HAF& Draw. No.: PF-290~2/37-?$ E, ;..., ;k Y-.. z NP. Form e.,..... * Min. Oeviat.: -0.Oi40E1,, ib.644 2, e8 Lower Toler. : Wax. Oeviat.!.Q A,. ise ii5 Upper.Toler. : Error Hagnif.: :. 30 No. of.points: _. ice-. I'...

19 c 4 g w EOZ 1 36~EOZ 1 It 9L-COZ I w-eoz - Z-IOZ I 901~ES1 : 8-Gil I 9G-ES j qz-&!gl e l-es 1 80 i-z0 I V ;-- 35 K ad a a 1q/L-z!?lo z-a l-10 1 t/l-z01 y e9-zgo -1 w-zso - E-Z! ZGO i ~ I ef xi P ?l-100

20 Concentricity of 2a,2b with respect of OD center point of OD, 1....I.._.,-.~*~- P.I^.. _..,,.._....,^,. I_,._ I 6 ceriter point of 2a.I_I..-.^ ^~,._ii.._...~.^...^...i _._ +-)&)&. -O&O6 I-,.o,,:ooo ! i :enter point of 2b(O.l) c b c L---h -o.bos O.o;oS! i.., ""-.. "._.", -. +-j&j& L. ". _.^..^...^

21 A...., l-eoz e6--eoz w-eoz e9--eoz w-eoz ez-xoz 40 l-&g 1 8-E 1 ~~-C!i 1 w-ts 1 qz-ts 1 e 1-a 1 80 l-z0 1 V8-IO 1 a9-zoc VG-101 $ EN-IO1 6 vz-zo 1 z-a L-IO 1 Vl-ZOl q1-zgo e9-i90 w--z90 E-ISO 9 l-zso ~ el! !G- 100 P- 100 qz- 100 L-100

22 (....-_ ~EOZ 1 e6-eoz 9L e9-coz I 9&-EOZ 1 I-EOZ ) qol-&~l - e8-e Gl : T+E!Gl 1 P-8Gl 1 qz-ceil :. l-c~l I aol-zoi j V8-ZOl a9-zol. vci-zol i as-zoc 5 ~ 1 vz-zoc z-a c-z0 1 vl-zol... q/l-zso ~ 9-zso 1 w-z!40 I EC-zso z!iio ef- 100 %- 100 etr- 100 qz- 100 L-100

23 .- s 2.- E -D aj.ḡg i 3N ' z 0 i-l (g #=.- :,..._..._ : mj, ZCJ t-cl,.....i..,....,..x,l.. b 1 1 b.i _.^. ~ EOZ 6-EOZ 9L-CO-G "9401 I qc-coz 1 "I-EOZ qol-e.,l e8-el %-&SC et-t% 1 Iqz-E!Gl,...,...,... l-bg i-z0 c 1 V8-ZO 1 I a9-zo 1 : v!i-zo 1 I as-z0 1 1 vz-zo 1 z-a l-z0 1 v c-zol 4L-150 I w-zcio I ee-zgo q l-z50 a2 8 2? w B 3 ii? d Q Q Q? (wu-4) ui3!sap-amseat (l o-)qz

24 TESTRDDS gl (final) Most data are with larger than design by 4 to 10 microns T A : F f: ii g E gl -x+ gl -Y+ /Ad-Xl & J, Cell No.

25 I..,.,. 40 l C-IL-EOZ e94oz w-coz Z-CO-C 40 1-s 1 e8-fxi 1 qs-cgl "i-65; 1 qz-ce; 1 e C-ES 1 80 l-z0 1 V8-ZO 1 89-zoc. v!ii-io1 : ai?-zoc 2. 1 e9-zcio 9P-zso w-zgo - 91-zso : L-COO 1 %-COO - et qz-100

26 TESTRDDS depth of 3mm slits (final) Slit are with +20um except #102 rough machined disk Those may change due to final machining z $ -3 8 u depl-1 depl-2 A dep2-1 dep2-2 m dep3-1 dep3-2 o dep4-1 A dep Cell No.

27 /._... i I. f 7- T-.l.l.._ EL-&OZ G-EOZ 0 p :.- s : :....i.. i :.,... - C-EOZ... I el-eoz - Ol-ES1-8-ES1 - eg-&!iil - t+c!gl -- ez-ei1 _ - Cl-Z L-Z01 2 I;-ZOl z i - v-z01 >... ;._... L.. (w.u)u%!sap-pamseaw E?l Ol-ZGO ZGO 1 9-ZGO ~~-Z~O ez-zgo ~ ; 1 e6-100 L-COO -!G EC- 100 El-100

28 ( o-.,._...,. -..-,_.- ( 0 j., I_,..,,.-.,.~. 1,... 0.,-._(.,...,,. _ P _ A _- _ _ -..I- _... I

29 TESTRDDS-3mm slit width(rough=final) Scattering is within Z!I 1 Oum for each lot 3.01 z 25 3 s? t slit3-1 W +- slit3-2w -+ slit3-3w slit3-4w t Tt.... ~.:.: Tr ~.2... P*.....m

30 0.04 Position of 3mm slits Within?I 1 Oum Those #102 may be due to training stage in CMM or machining? slit3 ldiff axis w slit3-2diff axis A slit3-3diff axis slit3 4diff axis t cell No.

31 .... _... -!xoz... - "8431 I EL-Z01 2 G-Z01 ; Ol-ISO "8-ZGO "9-ZGO 1 P-ZGO ez-zgo ~ If el- 100 z;- 100 E- 100 j --t C-100

32 Position of 1.5mm slits 0.04 Same as 3mm slit _... _ _. _..^...,,..,.-.,...~..._.: _ z i: 0 8 a= O B 5 gj ii slitl.5-1 diff axis slitl.5-2diff axis A slitl.5-3diff axis slitl.5-4diff axis

33 -2.98 TESTRDDS-3mm slits depth(as of rough machining) Slit are within + 20um except #102 rough machined disk those may change due final machining -3 z Y = *...*...*...*...*... depl-1 depl-2 dep2-1 dep2-2 dep3-1 dep3-2 -t dep4-1 - dep Cell No.

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35 Conclusion 1. We can measure disk using ZEISS at KEK with precision of about 1 pm in diameter, width, depth etc. 2. Precision of thickness measure is bad. About several pm 3. One disk can be measured using the present method in 2-hours programming and O.&hour measurement for rough and final in total

36 Development of the measuring RDDSl fl We need to establish a fixture by Re-designing the chuck to measure thickness Studying of fixture to set disk vertically To precisely measure thickness To measure both sides at once fl Software for 200 different disks Present CMM is Difficult to edit program for each discrete data Very time consuming to program Should we investigate the usage of other machine?