Precise flatness measurement

Transcription

1 NEW Simple Roughness and flatness in one measurement Reliable Measurement of step heights High Precision Measurements down to the nanometer range Safe Accuracy in deep layers Efficient Semi-automatic series measurement Fast 3D Quality Control and Maximum Performance Precise measurements down to the nanometer range with white-light interferometry

2 NEW NetGAGE3D sensors are highly precise measuring systems for 3D surface measurements. With a resolution down to the nanometer range and their ability to travel along the Z axis, these sensors are particularly suitable for the optical measurement of planarity, step heights and parallelism in small and large surfaces. NetGAGE3D delivers fast and reliable 3D measurement results for industrial quality assurance and 100 % inspection for all industries and materials. Product range Roughness and microstructures Determining surface topology Precise flatness measurement Stand-alone sensor Compact unit with integrated PC Integrated solutions Stand-alone solutions NetGAGE3D-S NetGAGE3D-M NetGAGE3D-L NetGAGE3D plus NetGAGE3D eco Field of View 5 x 5 mm 2 33 x 33 mm 2 55 x 55 mm 2 5 x 5 mm 2 5 x 5 mm 2 Lateral Resolution 5 µm 17 µm 29 µm 5 µm 5 µm Scanrange 50 mm 50 mm 100 mm 50 mm 50 mm Scanspeed 100 µm / s 90 µm / s 90,8 µm / s 100 µm / s 25 µm / s Working Distance mm mm mm 75 mm 30 mm Accuracy (rough) 50 nm 50 nm 80 nm 50 nm 50 nm Accuracy (smooth) 30 nm 30 nm 50 nm 30 nm 30 nm Accuracy (step height50 µm) 500 nm 500 nm 500 nm 500 nm 500 nm Repeatability (step height 50 µm) 100 nm 100 nm 100 nm 100 nm 100 nm Measuring Principle WLI Light Source LED Operating System Windows 7 Professional, 64-bit Interfaces DCOM, C++ xml, E PROMI Languages German, English Measuring parameters Large areas Step heights Roughness Radius Flatness Topography / Flatness Waviness / Coplanarity Step Height / Parallelism Radius / Angle Contact Ratio / Roughness Parallelism Deep holes Advantages Deep holes measureable, no shadowing effects Small and large field ofviews up to 150x150mm 2 High measurement accuracy and non-contact, high-speed scanning with a high data rate

3 Applications & Parameters Automotive industry Measurement of bores Measurement parameters: Depth, cone angle, position Automatic series inspection Measurement parameters: Flatness 3D measurement of complex geometries- Measurement parameters: Flatness, step height Machine tooling Tool inspection Analysis of fractures Determination of precise machine settings for optimum results, e.g. micrograph Measurement parameters: Roughness, waviness, flatness Surface analysis of large seals Measurement parameters: Flatness, step heights, roughness Electronic and glass industry Quality assurance of circuit boards Check for completeness, positioning, coplanarity Wafers and through-silicon vias (TSV) Check for positioning, co-planarity and depth Touchscreens Measurement of the depth and shape of scratches Measurement parameters: Surface roughness and rippling

4 100 % Quality Control in and Stand alone solution Set up and go, robust and quickly ready for use: : NetGAGE3D plus and NetGAGE3D eco The inspection lab on the line : High-precision quality control during production Easy set-up and fast commissioning Long service life thanks to robust construction and enclosure Integrated solution Fully integrated into automated production lines Easy integration into existing environments via software interface Fastest measuring times with individually configurated system Full automated measurement High Speed & accuracy New soft- and hardware features for faster measuring times at best precision capacities High precision down to the nanometer range Improved data efficiency & less data redundancy Perfectly suited for cycle-by-cycle measurements down to the nanometer range Real color 3D images The integrated PC evaluates the 3D surface imagery directly and creates realistic 3D color images. Best visualization Fast IO / NIO results Improved classification of results

5 on Production Lines with NEW Intuitive user interface The user interface allows for direct access to all core functions and enables users to quickly achieve accurate measuring results without the need for expert knowledge. User-friendly setting of measuring parameters Intuitive and rapid input of scan requirements Save positioning points for future measurements Series measurement Semi-automatic measurement of seriesproduced parts in tray layouts saves time and cost. Easily set measuring procedures Semi-automatic scanning of all parts in the tray Clear OK / NOK evaluation Integrated stitching Stitch multiple individual scans into one large measuring range allowing for flexible applications with large components without cutting back on quality. High degree of flexibility in application Measurement of large surfaces down to the nanometer range Easy to use: Automatic stitching of individual scans Clear evaluation Clear reporting for quick identification and classification of weak spots: Output as surface analysis and profile section Evaluation in accordance with ISO standards Time-saving and cost-efficient solution for quality assurance Sustained investment reliability, quick ROI

6 Innovations for Automated Optical 3D-Quality Control Welcome to the World of 3D Inspection! The ISRA VISION AG / 3D-Shape GmbH is one of the world s leading companies when it comes to challenging measuring tasks in 3D. 3D-Shape technology is applied wherever sophisticated and highly precise measurements are an important prerequisite for best production processes and reliable quality assurance: in the electronics and automotive industry, medical technology, toolmaking and form manufacturing as well as optical systems and many more industrial sectors. Leading Technology Always Close To The Customer State-of-the-art hard- and software as well as high-quality components form the basis for highest precision and pace of the 3D-Shape systems. The direct connection to customers everywhere in the world guarantees a timely, customized solution and its implementation in new or existing production environments. As a part of ISRA VISION AG, 3D Shape offers comprehensive customer support via the global service and distribution network of the leading expert in the field of surface inspection. ISRA VISION Germany Tel.: +49 (9131) Fax: +49 (9131) Germany Tel.: +49 (6151) Fax: +49 (6151) Spain Tel.: +34 (93) Fax: +34 (93) Russia Tel.: +7 (499) Fax: +7 (499) P.R. China Tel.: +86 (21) Fax: +86 (21) Japan Tel.: +81 (3) Fax: +81 (3) Italy Tel.: +39 (0464) Fax: +39 (0464) USA Tel.: +1 (248) Fax: +1 (248) Korea Tel.: +82 (31) Fax: +82 (31) Taiwan (R.O.C.) Tel.: +886 (3) Fax: +886 (3) UK Tel.: +44 (1322) Fax: +44 (1322) France Tel.: +33 (0) Fax: +33 (0) Brazil Tel.: +55 (11) Fax: +55 (11) India Tel.: +91 (20) Fax: +49 (6151) Turkey Tel.: +90 (212) Fax: +90 (212) Belgium Tel.: +32 (2) Fax: +32 (2) Iran Tel.: +98 (21) Fax: +98 (21) Optimize your ROI with the technology leader ISRA