Specification Sheet FPI lab

Transcription

1 Specification Sheet FPI lab Off-line Process Control Max. Sample Size 500 mm x 500 mm High Resolution Local Defect Detection and Coating Thickness Measurement Professional Process Perfection dr.schwab Inspection Technology GmbH Industriestrasse Aichach Germany Tel +49 (0) Fax +49 (0) sales@schwabinspection.com Web

2 FPI lab - dr.schwab's Advanced Solution dr.schwab's FPI lab is an off-line inspection system supplying high resolution, full surface analysis within short time. Camera inspection reveals all kinds of local defects like scratches, flaws or bubbles. dr.schwab's proprietary series of spectrometers allows highspeed and high-resolution layer thickness measurement over a wide thickness range. Both, camera inspection and coating thickness measurement are performed at the same time! By providing exceptionally detailed feedback on the status of the production, the FPI lab supplies maximum support to reach optimum process efficiency! System Highlights Fully variable System The system is designed for inspecting samples up to size 500x500mm. It is fully variable: Beside variable sample size also sample thickness is variable: Variable sample size: from 66 x 17 mm to 500 x 500 mm Variable sample thickness: 0.5 mm to 15 mm, automatic sample height positioning Multi Processor Architecture The system combines several processors working in parallel, which offer unequalled computing performance, allowing far more complex calculations. Combined with dr.schwab's advanced software evaluation methods this results in an extraordinary system efficiency. Advanced Software Solutions Statistic and trend analysis software for process monitoring Parameter sets allow easy adaptation to customer-specific requirements Defect Classification based on Image Processing User friendly Windows XP software, network compatible via standard Ethernet connection Database A database module is delivered with the system for management of all measurement data. It offers fast and easy access to these data. If stored on a network sever, data are accessible at any time. Allows the comparison of different production periods or production lines Data access and evaluation also via external computer (Ethernet) The database module is compatible to MySQL and MS Access dr.schwab Inspection Technology GmbH 2013 Page 2

3 Measurements Camera Inspection 4096 pixel CCD line-scan camera with high resolution optics Inspection in Reflection allows detection of surface defects, as well as defects inside the coating Near Darkfield Channel for detection of local surface unevenness like bumps Coating Thickness Thickness measurement based on dr.schwab high speed, high resolution white light spectrometer covering a wide thickness range Thickness measurement for transparent layers including multi layer stack Thickness evaluation includes of Thickness Variation (Gradient) Evaluates the complete thickness distribution within short time Basic Measurement Arrangement Line-scan camera LED line illumination Spectrometer (Option) Optical fibres Top Illumination Coating at top side LED line illumination Sample Bottom Illumination Using a line illumination at either side of the sample allows inspection by line-scan camera in transmission (transparent samples only) and reflection. Spectrometer measurement is performed in transmission and reflection as well. From the illumination unit, optical fibres lead to the position to be measured and from there to the spectrometer. All components are connected to an electronics rack. An individual plug-in board is used for camera and spectrometer. Via Compact-PCI Bus, the boards are connected to a Windows computer for final evaluation and visualization. This computer also supplies all necessary interfaces for further data exchange. A bigger amount of data can be stored on an external harddisc. dr.schwab Inspection Technology GmbH 2013 Page 3

4 Schematic Drawing Full surface inspection with high resolution is performed by inspecting several tracks: The substrate moves in y-direction to inspect a certain track on the sample. After transferring the camera in x direction to the next position, the next track is analyzed during back-movement of the substrate, etc. y-axis Substrate End Position CCD Scanline Spectrometer Measurement Points Substrate Loading Position x-axis dr.schwab Inspection Technology GmbH 2013 Page 4

5 Local Defect Detection High resolution camera optics plus illumination at the appropriate wavelength guarantee reliable detection of all local defects. Grey Scale Image Defect Map Defect Zoom Position and type of the defects are indicated as symbols in the defect map (middle). The exact defect data (position, size, type and further properties) are given in the defect list. All defects can be visualized by bit maps as it is shown on the right side. Examples for Local Defects: Cracks Inclusion Scratch Precise size determination for all types of surface defects Advanced local defect classification through sophisticated image analysis Near Darkfield analysis for reliable detection of surface bumps dr.schwab Inspection Technology GmbH 2013 Page 5

6 Coating Thickness Measurement To have the ideal instrument for every thickness measurement task, dr.schwab produces a series of highly accurate spectrometers with very high sampling rate, allowing precise layer thickness measurement plus high density of measurement spots. High-speed and high-resolution thickness measurement Unique: even covering ultra-thin layers from 10nm Presentation Modes showing deviating thickness at a glance: Top View: Trace View: 3D View: dr.schwab Inspection Technology GmbH 2013 Page 6

7 Examples for Statistic Data Evaluation Inspection System Yield bars display the percentage of good samples (plus the share of samples with good, high and best quality) within a selectable time period and for the last 100 inspected panels. The bar at right graphically shows, which of the last 100 samples was categorized to which quality step (or failed). Individual defect statistics are available for different time periods Via Database dr.schwab's proprietary database solution allows long-time defect data storage. An individual evaluation software enables a plenty of possibilities, even correlation of inspection results and yield with externally supplied process parameters over selectable time periods: dr.schwab Inspection Technology GmbH 2013 Page 7

8 Specifications General Parameter Sample type Sample Size (x/y) Sample Thickness Mechanical Drives Range or Specification Coated Flat Panel Variable: Min 66 x 19 mm Max: 500 x 500 mm Variable: Min 0.5 mm Max: 15 mm (automatic Sample Height Positioning) Step motor with spindle Camera Inspection (Reflection) Parameter Number of pixels 4096 Sample rate Illumination Near Darkfield Channel Range or Specification 10kHz LED (high-power) (wavelength customer-dependent) yes Coating Thickness Measurement Parameter System Range or Specification White Light Spectrometer with chopper wheel and 10 optical fibres, used bidirectionally, to measure 10 points at a time Total thickness range 50 nm 2µm Spot size 200µm Illumination White Light (halogen bulb 5W) dr.schwab Inspection Technology GmbH 2013 Page 8

9 Local Resolution and Speed (Example) General Sample Size 500 x 500 mm Number of y-tracks 25 y-speed Time per Track Total inspection time 50 mm/s 10+1 s 275 s Camera Inspection (Reflection) Scan Length Camera pixel resolution (x-direction) 20 mm 5 µm y-resolution 5 µm Coating Thickness Spectrometer sample rate Sample rate per point y-resolution X-Resolution (= distance of measurement points) 250 Hz 25 Hz 2 mm 2 mm Further Data Power supply: Wide-range power supply with active power correction, over-voltage and overload protection Input: 90V 264V; 47Hz 63Hz Power consumption: 500 W maximum Ethernet: Gigabit Ethernet Controller with RJ45 connector Communication In- and outputs, connected via optical coupling devices (input voltage: 24V DC) or Profibus dr.schwab Inspection Technology GmbH 2013 Page 9

10 Dimensions and Weight Total Weight: 280 kg (approximately) dr.schwab Inspection Technology GmbH 2013 Page 10