IDS3010 Ultra Precision Sensor

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1 WITTENSTEIN Group WITTENSTEIN Group (c) 2017, attocube systems AG - Germany. attocube systems and the logo are trademarks of attocube systems AG. Registered and/or otherwise protected in various countries where attocube systems products are sold or distributed. Other brands and names are the property of their respective owners. attocube systems AG Königinstrasse 11a D München Germany Tel.: Fax: info@attocube.com IDS3010 Ultra Precision Sensor Brochure version:

2 IDS3010 Ultra precision optical sensor for industry applications 10 MHz Bandwidth 2 m/s Target Velocity 5 m Working Distance 1 pm Resolution The ultra precise Industrial Displacement Sensor IDS3010 measures positions, movements, and vibrations in real time and with a data aquisition bandwidth of 10 MHz. The laser based technology enables contactless measurements directly at the target. Up to three sensor heads can be connected to the basic unit. The IDS3010 can therefore simultaneously track targets in up to 3 axes at velocities of 2 m/s. At measurement distances of up to 5 meters, the sensor provides a position resolution of m. Its compact size (50 x 55 x 195 mm³), various real time interfaces and an integrated webserver enable the easy integration of the sensor in machine tools and production plants.

3 Applications The IDS3010 is widely applicable : as displacement sensing system for the calibration of axes, in quality assurance applications, and in various machine tools. As a vibrometer, the sensor measures vibrations in a contactless, fast and ultra precise manner. Due to the fiber based design of the system, the base unit can be installed arbitrarily far away from the tiny, noninvasive sensor heads. This allows for measurements even in the most confined or inaccessible spaces. Calibration of Machine Tools Nano precise calibration of axes and complete machines Quick and easy installation, flexible use Displacement Sensor in Quality Assurance Universal measuring and testing device in precision measuring chambers Integration in coordinate measurement machines Measurement technology for ultra precise Pick & Place Applications In-line process control of micro assembly systems Nanometer repeatability increases positioning and assembly accuracy Displacement Sensor in Semiconductor Applications Compatible with extreme temperatures, reactive gases, and vacuum environment Measurements in the most confined or inaccessible spaces Sensing System in Manufacturing Facilities Integrated displacement sensing system with up to three axes Resolver system for high precision servo drives (precise trajectories in CNC technology) Ultra precise real time measurements of guiding and mounting errors such as sidestrokes, radial runouts, pitch, yaw, and roll Shaft Runout measurements Contactless detection of imbalances, out-of-roundnesses (tolerances of form), eccentricities (tolerances of location) For example, on main or grinding spindles, precision bearings, servo motor shafts, or crankshafts Vibrometer Real time vibration measurements of machinery and systems to detect machine damages Lifetime determination of tools, predictive maintenance Real time process analysis and control

4 Sensor Head Overview The IDS3010 can be operated with different sensor heads: ultra compact heads for the most confined spaces or alternative designs where priority is given to easy alignment or to the compatibility with various target materials (glass, aluminum, ceramic, etc.). M12/C7.6 Ø 14 mm, length 43.9 mm Working distance: up to 30 m* Large working distances M15.5/C1.6 Ø 22 mm, length 20.6 mm Working distance: up to 5 m Easy alignment and installation/assembly M12/C1.6 Ø 14 mm, length 17.4 mm Working distance: up to 5 m Standard for various appplications D12/F13 Ø 4 mm, length 11.5 mm Working distance: mm For rough and varied surfaces mm mm D4/F8 Ø 4 mm, length 11.5 mm Working distance: mm Space saving, easy integration 6-10 mm mm Low reflective target High reflective target Only compatible with retroreflector D1.2/F7 Ø 1.2 mm, length 7.5 mm Working distance: mm For miniature applications 5-9 mm mm Working Distance up to 0 mm 20 mm 40 mm 60 mm 90 mm 100 mm 110 mm 4900 mm 5000mm * By using special sensor heads, the IDS can realize measurement distances of up to 30 meters.

5 Measurement Surfaces 100% Webserver The IDS3010 can directly measure on various target materials and technical surfaces (as little as 4% reflectivity). For lower reflectivities, small plane mirrors or retroreflectors can be attached to the target. Copper Steel (polished) With the integrated webserver the sensor can be aligned, initialized, configured and controlled remotely at anytime. Regular firmware updates provide new functionalities and guarantee maximum efficiency for your application. Silicon/Wafer Ceramics INDUSTRY 4.0 Plastic Aluminium (black anodized) Glass 4%

6 Interfaces The IDS3010 is delivered with a standard set of high-speed interfaces for real-time data communication with FPGA-based receivers, CNC controllers or RTOS computers. These interfaces consist of an incremental AquadB, a proprietary serial word (HSSL), and a synthetic analog sin/cos signal. All signals can be outputted as either single-ended (LVTTL) or differential (LVDS). Alternatively, the IDS is available with BiSS-C, an open standard sensor interface optimized for multi-device usage. Interconnectivity with other industrial networks such as Ethernet (TCP/IP), EtherCAT, CanOPEN, Profinet, and Profinet RT can be implemented on request. DAT CLK HSSL (digital; bandwith up to 25 MHz and 8-48 bit resolution): attocube's proprietary serial word protocol provides absolute position information - both in terms of the protocol and the measurement itself. The HSSL interface consists of one data and one clock signal (single ended or differential); position information is packed into one container of user-defineable bit-length, synchronization with the receiver is accomplished using the clock signal. The HSSL protocol is preferential if absolute displacement position data (i.e. sensor-target separation) is required or if incremental position counting is inacceptable. K A B AquadB (digital; bandwith up to 25 MHz; resolution freely assignable): The AquadB interface provides incremental displacement information on target displacement. Position resolution and (maximum) clock rate can be user defined using the IDS web interface. For maximum data bandwidth, the AquadB interface is best used with differential signaling. A B A B Sin/cos (analog; bandwith up to 25 MHz; resolution freely assignable, pm): The sin/cos signal is a digitally synthesized analog signal which provides incremental position information. As with the digital AquadB signal, the increment (i.e. resolution) is user-definable in the system's web interface. For maximum data bandwidth, the sin/ cos signal is best used with differential signaling. BiSS-C Master CLK 0 1 BiSS-C The sensor interface offers synchronous, real-time-capable data transmission. It provides point-to-point topology for data communication with motion controllers and is especially suitable for the easy integration of several IDS sensors to the master clock at multi device facilities such as synchrotrons and spallation sources. BiSS-C signals are routed through the 14 pin GPIO connector (all other real-time interfaces are disabled in this mode). Industrial Interfaces on request Other industrial interfaces can be implemented on request. For detailed information, please contact info@attocube.com EtherCAT (Ethernet for Control Automation Technology) is an open, real-time Ethernet-based fieldbus network originally developed by Beckhoff. The EtherCAT protocol is most typically used for machine control and regulation as well as for multi-channel, synchronous measurement devices. Profinet is a protocol based on industrial Ethernet according to IEEE 802. It connects devices, systems, and cells, facilitating faster, safer, less costly and higher quality manufacturing. Profinet RT is the real-time derivative of Profinet. CANopen is a communication protocol based on CAN (Controller Area Network) which is most typically used for the interconnection of complex, embedded systems used in automation. Apart from communication, the CANopen protocol also provides device specification.

7 Specifications IDS3010 Sensor number of sensor axes 3 working distance mm (depending on sensor head) sensor resolution 1 pm sensor repeatability 2 nm 1) max. target velocity 2 m/s measurement bandwidth 10 MHz signal stability (WD: 77 mm) nm (2σ) Modes of Operation measurement modes displacement, vibrometry remote operation integrated webserver output signal: electronics sin/cos, AquadB, HSSL, field bus systems (opt.) output signal: displacement measurement laser light (IR) output signal: alignment laser laser light (VIS) sensor alignment via integrated webserver or DLLS sensor initialization via integrated webserver or DLLS Interfaces analog interfaces sin/cos (real-time) digital interfaces AquadB, HSSL (real-time) field bus interfaces (optional) Biss-C field bus interfaces (on request) EtherCAT, CANopen, Profinet, Profinet RT Interfaces (BiSS-C) interface bandwidth BiSS-C up to 10 MHz (master clock frequency) external master clock up to 10 MHz clock interferometers axes independent clock input BiSS-C configuration point-to-point number of position bits 32 bit Controller Hardware chassis 50 x 55 x 195 mm³ weight 730 g power supply 12 V DC power consumption 8 W Measurement Laser laser source DFB laser (class 1) laser power 400 µw laser wavelength 1530 nm wavelength stability 50 ppb * at 10 mm working distance in vacuum conditions, +/-1ppm in ambient conditions

8 Specifications Sensor Heads Sensor Heads product name D1.2/F7 D4/F8 D4/F13 M12/C1.6 M15.5/C1.6/FLEX M12/C7.6 Modes of Operation optics type focussing focussing focussing collimating collimating collimating dimensions Ø 1.2 mm, length 7.5 mm Ø 4 mm, length 11.5 mm Ø 4 mm, length 11.5 mm Ø 14 mm, length 17.4 mm Ø 22 mm, length 20.6 mm Ø 14 mm, length 49.2 mm mounting clamped clamped clamped metric M12 x 0.5 metric M15.5 x 0.5 metric M12 x 0.5 spot size 70 7 mm 70 8 mm mm 1.6 mm 1.6 mm 7.6 mm focal length 7 mm 8 mm 13 mm infinity infinity infinity connector none (fiber glued) none (fiber glued) none (fiber glued) FC/PC FC/PC FC/PC working environment /RT /RT, /LT/HV, /UHV, /RAD /RT, /LT/HV, /UHV, /RAD /RT, /LT/HV, /UHV, /RAD /RT, /LT/HV, /UHV, /RAD /RT, /LT/HV, /UHV, /RAD compatible targets glass, silicon wafer, mirror glass, silicon wafer, mirror glass, silicon wafer, mirror glass and mirror glass and mirror retroreflector applications vibration measurements at confined machine spaces vibrations analysis of machines and tools in-situ process monitoring of tools run-out control, detection of imbalances monitoring/error diagnostics of machine components Measurement Specifications target: glass calibration and synchronization of large scale machines linear measurement range 5..9 mm mm mm bis zu 5000 mm bis zu u5000 mm - alignment tolerance ± 0.20 ± 0.35 ± 0.35 ± 0.03 ± target: mirror linear measurement range mm mm mm 100 mm 100 mm - alignment tolerance ± 0.20 ± 0.35 ± 0.35 ± 50 mm ± 30 mm - target: retroreflector linear measurement range bis zu 5000 mm bis zu 5000 mm bis zu 5000 mm alignment tolerance ± 2 ± 2 ± 20 lateral alignment tolerance ± 2 mm Environmental Conditions /RT (ambient conditions): C, 1x10-4 mbar.. 10 bar /HV (high vacuum): C, 1x10-8 mbar.. 10 bar /UHV (ultra high vacuum): C, 1x10-10 mbar.. 10 bar /LT (low temperature): /RAD (radiation hard): mk K (150 C 1x10-4 mbar.. 10 bar C, up to 10 MGy radiation dose Customized Sensor Heads Sensor heads can be customized to specific applications in the length of the connecting fibers, the environmental compatibility, or the lens geometry.