State of the Art Motion Control Solutions for 450mm Wafer Inspection Jason Goerges

Transcription

1 State of the Art Motion Control Solutions for 450mm Wafer Inspection 1 Jason Goerges General Manager ACS Motion Control, Inc.

2 Agenda ACS Introduction 450mm wafer inspection challenges and general motion system structure System/subsystem motion control requirements ACS technologies and solutions to meet specific requirements Complete solution summary 2

3 About ACS Motion Control Founded: 1985 Core competencies Cutting-edge electronics design State of the art digital motor amplifiers Precision analog and digital control circuitry Software engineering RTOS and embedded systems development GUI design and host programming library development Application support engineering Highly trained mechatronics and controls engineers Low level control code to high level application support Dedication to Quality ISO Certified MEOST design and manufacturing procedures CE and UL certification 3

4 Challenges in 450mm wafer production/inspection Larger work envelope, higher speeds and larger masses Equal or better level of precision and accuracy! Extremetech.com 4 Wikipedia.com

5 General Motion System Structure 5 High precision wafer positioning stage Gantry (XX Y) structures preferred over basic XY High resolution laser based encoders or interferometers May require multiple feedbacks with real-time feedback switching Control algorithms become more complex (servo, homing, etc.) Inspection heads Relatively small linear/rotary motors (brushless, brush, or stepper) Digital and Analog I/O Synchronization with motion (camera, laser, etc.) Auxiliary axes and I/Os Transport/handling, alignment, optics focus Safety interlocks, GP digital/analog I/O User interface and high level machine control typically resides on PC

6 Wafer Stage Motion Control Requirements Large Gantry 750 x 750 mm or more travel area Typical Motion Performance Specs High speed >1 m/sec High accuracy <50nm over 450mm Fastest possible Move & Settle to ±1nm window Smooth velocity (error<<1%) Even at very low velocity: 1 to 100 µm/sec Typical Stage Components Air or precision mechanical bearing Linear servomotors High resolution optical and/or laser interferometer encoder *Newport Motion 450mm Air Bearing Stage ( 6

7 Inspection Heads Motion Control Requirements Dynamic Z auto-focus Multiple motor and feedback types, typically low power Camera/Optic triggering based on XY or XYZ position (motion coordination with wafer stage) Focus accuracy of 100nm Automatic, smooth switching to/from focus error sensor (PSD) and position encoder feedback May prefer to mount amplifier and I/O on moving heads to eliminate long expensive motor and feedback cables 7

8 Auxiliary Axes & I/O Motion Control Requirements Multiple motor and feedback types, wide range of power levels Wide range of I/O types, fast response time often required (sub-millisecond) Single network preferred (vs. independent motion network, I/O network, etc.) Cost driven vs. performance driven 8

9 Wafer Stage Subsystem Control Solution MC4U integrated multi-axis drive chassis Includes modular drive, power supply, and control cards (with or without EtherCAT master) Revolutionary NanoPWM drives offer performance as good or better than linear drives Linear drives and standard PWM drives also available MIMO gantry control enabled by 4 axis high speed servo processors 20kHz position, velocity, current sampling & update rate 1 or 2 processors per chassis Advanced ServoBoost algorithm for optimal performance and stability Additional advanced features 2D/3D Error Mapping Profile Shaping Kinematics transformations 9

10 Wafer Stage Control Technology: NanoPWM Drives NanoPWM Drive Technology is a brand new state of the art proprietary PWM motor power stage implementation in select ACS drives, that provides: As good or better performance than precision linear drives Sub-nano jitter Smooth velocity (velocity error<<1%) Higher voltages and higher currents in a much smaller and cost effective package when compared with commercially available linear drives Improved reliability over discrete linear drives 2nm/division (less than +/-1nm jitter) 10

11 Wafer Stage Control Technology: MIMO Gantry 11 MIMO Gantry algorithm key features Nanosecond synchronization of axes MIMO Control with decoupled loops : Loop controlling the longitudinal direction Loop controlling the rotational (yaw) direction Automatic force / encoder scheduling depending on the cross axis location Dynamic compensation for the yaw angle Suitable for both stiff and flexible gantries Advantages over SISO gantry control Higher bandwidth Better stability Minimal crosstalk Easier tuning Improved reliability

12 Wafer Stage Control Technology: ServoBoost 12 ServoBoost is a proprietary real time servo algorithm that: Identifies disturbances in real time Analyzes disturbance root cause Compensates for it and attenuates its impact Predicts the disturbances anticipated and prevents development of the resulting servo errors ServoBoost provides: Improved machine performance: Faster settling, better stability, lower jitter, smoother velocity Automatic adaptation to large changes in load and system parameters Automatic compensation of disturbances, resonances, axes interaction, cogging and more Blue low frequency resonances Red resonances are compensated by ServoBoost TM

13 Inspection Heads Subsystem Control Solution UDMLC 2 or 4-axis compact EtherCAT drive module for small motors Designed for remote mounting (2 x3 x4 ) 12 to 48Vdc, 1.25/2.5A, 2.5/5A, 5/10A per axis (dual axis) Uses powerful 4 axis servo processor (same as MC4U) Brush, brushless, stepper, voice coil motors Incremental and absolute digital encoders Digital interface (SPI) for focus sensors Autofocus control algorithm Multiple GP I/Os IOMNT (if additional I/O needed) Up to 32/32 I/O per module 24Vdc, 0.5A per output 13

14 Inspection Head Control Technology: Autofocus Proprietary autofocus algorithm developed for wafer inspection On the fly switching between multiple feedback sources Customizable behavior based on physical interface Maintain focus accuracy while moving (high bandwidth) 14

15 Auxiliary Subsystem Axes & I/O UDMNT/UDMPC/UDMPM 2-axis EtherCAT drive modules for various motor sizes Wide power ranges (100W to 3kW peak) Brush, brushless, stepper, voice coil motors Incremental, absolute digital, SinCos encoders Multiple GP I/Os IOMNT (if additional I/O needed) UDI modules for interfacing to non- EtherCAT drives Step/Dir & +/-10V commands, encoder inputs 15 3 rd Party EtherCAT drives and I/O

16 Complete System Motion and Machine Controllers SPiiPlus EtherCAT Motion and Machine Controller SPiiPlusSC PC based Soft Controller Up to 64 synchronized axes & 1000 s I/Os Up to 5kHz EtherCAT / MPU cycle and profile generation (increasing) Multitasking with 64 threads / programs Flexible programming Real time ACSPL+ IEC PLC Host libraries 16

17 PC Based Control Technology: SPiiPlusSC SPiiPlus EtherCAT Motion and Machine Controller SPiiPlusSC PC based Soft Controller SPiiPlusSC package includes RTOS running SPiiPlus controller EtherCAT Master Stack Virtual Machine for Windows Communication No special HW! Isolated from Windows failures (blue screen) and non-determinism PC Core 1-(N-1) Windows / Host Applications Virtual TCP/IP & Shared RAM PC Core N RTOS / MPU 1, 0.5, 0.2ms Host Computer LAN LAN Standard Ethernet 17

18 A Complete Control Solution for Wafer Inspection SPiiPlusSC PC based Soft Controller (or controller can reside in MC4U) MC4U with NanoPWM Drives 3-8 UDMLC IOMNT 4 32/32 2 UDMXX IOMNT 32/32 Additional optional drives and I/O 18 Wafer Stage Inspection Heads Auxiliary Axes & I/O

19 Summary 19 Highest Performance Commercially Available Solution Advanced algorithms and technologies: NanoPWM, ServoBoost, MIMO Gantry, Autofocus, SPiiPlusSC, etc. Meets challenges of larger loads, higher resolution, and better precision Architecture designed to last Intel Core MPU / Servo Processor architecture Standard Industrial Ethernet Network (EtherCAT) Scalability & Flexibility 64 axes & 1000 s of I/Os Support of 3 rd party devices Short time to market Single development environment for entire system with full simulator Suitable for many other demanding applications Electronic Mfg Pick/Place, Flat Panel Display Inspection, Wide Format Inkjet Printing, SEM, CMM

20 State of the Art Motion Control Solutions for 450mm Wafer Inspection Thank You! Jason Goerges General Manager 6575 City West Pkwy Eden Prairie, MN USA 20